air pressure (MPa)Inlet air temperature (C) Note 1)Ambient temperature (C) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG20Compressed air0.3 to 0.85 5 to 55 5 to 55 20250200500.72525251

air pressure (MPa)Inlet air temperature (C) Note 1)Ambient temperature (C) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG5Compressed air0.3 to 0.85 5 to 55 5 to 55 206250120.7252525

air pressure (MPa)Inlet air temperature (C) Note 1)Ambient temperature (C) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG5Compressed air0.3 to 0.85 5 to 55 5 to 55 206250120.7252525

to 50°C; rubber seal -5 to 50°C, Optional IP65 enclosure, VALVE, SOL, VALVE, VQ4000 VALVE, SOL 4/5-PORT, 2D, VQ4000 NO SIZE RATING, 1.17384 lb

temperature (C) Note 1)Ambient temperature (C) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG50ACompressed air0.3 to 1.0 5 to 50 5 to 50 20586500860.72525251 L/min [ANR] {In case

air pressure (MPa)Inlet air temperature (C) Note 1)Ambient temperature (C) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG10Compressed air0.3 to 0.85 5 to 55 5 to 55 20125100250.72525251

to 50°C; rubber seal -5 to 50°C, Optional IP65 enclosure, VALVE, SGL, NON PLUG-IN (DC), VALVE, VQ4000 VALVE, SOL 4/5-PORT, 2D, VQ4000 NO SIZE RATING

Manifold options include control unit, serial interface unit and a coaxial fitting.Fluid: air, Operating pressure range: 0.1MPa 1.0MPa, Effective area mm 2 (Cv): 5.4 13.2 (0.3 0.73), Coil rated voltage: 6, 12, 48VDC; 24, 48, 110, 220VAC, Protection structure: dust proof (protection class 0 based on JIS C0920), Ambient and fluid temperature: -10 to 50 C, VZS3000, VALVE, VZS3000 SOL VALVE

to 50°C; rubber seal -5 to 50°C, Optional IP65 enclosure, VALVE, DBL SOL, PLUG-IN (DC), VALVE, VQ4000 VALVE, SOL 4/5-PORT, 2E, VQ4000 NO SIZE RATING

to 50°C; rubber seal -5 to 50°C, Optional IP65 enclosure, VALVE, DBL SOL, PLUG-IN (DC), VALVE, VQ4000 VALVE, SOL 4/5-PORT, 2E, VQ4000 NO SIZE RATING

bar)]C [dm3/(s?bar)]VQ100010.50.721.0Up to ?50

bar)]C [dm3/(s?bar)]VQ100010.50.721.0Up to ?50

bar)]C [dm3/(s?bar)]VQ100010.50.721.0Up to ?50

to 50°C; rubber seal -5 to 50°C, Optional IP65 enclosure, VALVE, DBL SOL, PLUG-IN (DC), VALVE, VQ4000 VALVE, SOL 4/5-PORT, QE, VQ4000 BASE MNT 3/8

to 50°C; rubber seal -5 to 50°C, Optional IP65 enclosure, VALVE, SGL SOL, PLUG-IN (DC), VALVE, VQ4000 VALVE, SOL 4/5-PORT, QD, VQ4000 BASE MNT 3/8

to 50 C; rubber seal -5 to 50 C, Optional IP65 enclosure, VALVE, SOL, VALVE, VQ4000 VALVE, SOL 4/5-PORT, 2I, VQ4000 NO SIZE RATING, 1.76556 lb

air pressure (MPa)Inlet air temperature (C) Note 1)Ambient temperature (C) Note 1)Outlet air atmospheric pressure dew point (oC)Inlet air flow rate (L/min [ANR]) Note 2)Outlet air flow rate (L/min [ANR])Purge air flow rate (L/min [ANR]) Note 3)Inlet air temperature (oC)Inlet air saturation temperature (oC)Ambient temperature (oC)IDG10Compressed air0.3 to 0.85 5 to 55 5 to 55 20125100250.72525251

to 50°C; rubber seal -5 to 50°C, Optional IP65 enclosure, VALVE, DBL SOL, PLUG-IN (DC), VALVE, VQ4000 VALVE, SOL 4/5-PORT, PE, VQ4000 BASE MNT 1/4, 1.31692 lb

to 50 C; rubber seal -5 to 50 C, Optional IP65 enclosure, VALVE, SOL, VALVE, VQ4000 VALVE, SOL 4/5-PORT, 2D, VQ4000 NO SIZE RATING, 1.14938 lb

bar)]C [dm3/(s?bar)]VQ100010.50.721.0Up to ?50