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Calculate the life in your operating conditions before using the memorizing function and use within this range. 5: Digital filter value is not included. 6: The response time is when the set value is 90% in relation to the step input.

No 0-1Hz 1-3Hz 2-5Hz 3-8Hz 4-10Hz 5-15Hz 6-22Hz 7-33Hz 8-5 6 7 ; < = : 9 8 Generate only plus ion 9-Generate only minus ion 6. Selection and setting of equipment 6-1. Sensing DC mode 1. selection of bar length Select the length applicable to work size base on [2. static charge elimination area of 7-1. static charge elimination characteristics (reference)] 2.

Load Rotary actuator Flexible coupling Bearing Fig.5 -22- 4-3 Flange application See table 6 for L dimension of the body. JIS hexagon socket head bolt is neatly placed in the rotary actuator groove. 4-4 Piping and operating direction Table 6 Size L Bolt 10 13 M 4 15 16 M 4 20 22.5 M 6 30 24.5 M 8 40 28.5 M 8 Fig.6 Fig-7 shows piping ports of the rotary actuator.

Safety Instructions 2-6 2. Application 7 3. Standard Specifications 7 4. How to Order 8 5. Options 9 6. Structural Drawing and Replacement Parts 10 7. Assembly of Optional Parts 11-12 8. Operation and Adjustment 13-14 9. Trouble Shooting 15-16 10. How to Replace the Components 17-24 10-1. Diaphragm Assembly Replacement 17 10-2.

Terminal No. 2 4 6 8 10 12 14 16 18 20 Output No. 1 3 5 7 9 11 13 15 24 V Type +COM EX510-S102 Terminal No. 1 3 5 7 9 11 13 15 17 19 Output No. 0 2 4 6 8 10 12 14 0 V Type + + + + + + + + -COM Terminal No. 2 4 6 8 10 12 14 16 18 20 Output No. 1 3 5 7 9 11 13 15 0 V Type + + + + + + + + -COM : Only a flat cable type manifold (P kit) can be connected to EX510-S 02 .

LECSB(Pulse input) , LECSB-T(Pulse input / Positioning) (2) Driver (3) Motor cable (5) Lock cable DC24V (4) Encoder cable Host controller, etc (1) Electric actuator (6) I/O connector 4 - LECSC , LECSC-T(CC-Link) (2) Driver (3) Motor cable (5) Lock cable DC24V (4) Encoder cable Host controller, etc (1) Electric actuator (6) I/O connector LECSS ( SSCNET III ) , LECSS-T ( SSCNET III / H ) (

5 6 5 8 36 28 18 54 36 18 12.5 140 48 8 1/ 4 30.5 6 5 6 5 8 47 17 62 30 22 16.5 170 51 10 -X 1113 ML1C Series Stroke Adjustment Unit EA EB EC ED EF EY S T EH EI TT h i Part no.

Applicable bore size (mm) 32, 40 11 60 22 6.5 12 YB-05 50, 63 120 15.8 14 M8 x 1.25 8 25 7 17 6 11 YU-03 50, 63 19.8 18 M10 x 1.5 10 40 7 17 6 13 YU-05 14 75 28 8.5 16 YB-08 80 230 M16 x 2 80 24.8 23 13 90 9 22 8 20 YU-08 18 90 36 10.5 18 YB-10 100 455 M20 x 2.5 100 29.8 28 14 160 11 26 10 26 YU-10 18 For details on each auto switch, refer to pages starting with 5.3-2 of "Best Pneumatics

I1 = 0.03 x (0.02 + 0.01)/12 = 1.25 x 10-kgm I2 = 0.006 x (0.005 + 0.005)/12 + 0.006 x 0.007 = 0.32 x 10-kgm I = 1.25 x 10+ 0.32 x 10-6 I1 = m x (a + b)/12 I2 = m x (a + b)/12 + m x H I = I1 + I2 Inertial moment = 1.57 x 10-kgm Kinetic energy 6 1/2 x I x Allowable energy = 2 /t (: Terminal angular velocity) : Rotation angle (rad) 1/2 x 1.57 x 10-6 x (2 x ( /2)/0.2) Confirm that the load's

Note 2) For AS121FP AS-FPG/Stainless steel 304 AQ Release button color: Light blue Flow Rate and Effective Area ASV AS121FP-M5 4 AS221FP-01 AS421FP-04 AS221FP-02 AS321FP-03 Model AK 4 6 4 6 8 6 8 10 10 12 Tubing O.D.

3 7 12 1 MHKL2-16l Closed 1 1 3 8 13 Open MHKL2-20l Closed Open 1 6 11 MHKL2-25l Closed 1 6 11 Note) There is no protrusion if no values are entered in the table. 2.4-16 Series MHK2 Made to Order Order Made Contact SMC for the details on dimensions, specifications, and delivery.

Note 2) For AS121FP AS-FPG/Stainless steel (SUS304) Release button color: Light blue Flow Rate and Effective Area AS121FP-M5 4 AS221FP-01 AS421FP-04 AS221FP-02 AS321FP-03 Model 4 6 4 6 8 6 8 10 10 12 Tubing O.D.

For manifold type 30, 31 Large flow type (Cv: 0.012) 1 SY1 3 A 5 L M3 : Body ported Large flow type (Cv: 0.012) 5 SY1 4 A M 1 : Base mounted 3 port Rated voltage Port size 5 6 V S R 24 VDC 12 VDC 6 VDC 5 VDC 3 VDC Nil: Without sub-plate M3: With sub-plate Sub-plate type For manifold type S41 Large flow type (With gasket and screws) Electrical entry Manual override 24 V, 12 V, 6 V, 5 V, 3

Flow Rate SOL. 17 17 stations For obtaining the flow rate, refer to page 4-1-6.

Note 2) Cable (7) external: 6 to 8 mm Note 3) Crimped terminal like roundshape or Y shape cannot be used. 3. Assembly 1) Passing cable gland (4), washer (5), rubber seal (6), housing (2) in this order through cable (7) and connect to terminal block (3) and then set the terminal block (3) to the housing (2).

(mm) Mounting screw L2 H2 D W1 H1 P L1 W2 W3 Model (Nominal x Length) 6 3.25 72.5 4.5 5.5 6 6.5 6.5 10 5 7.5 8 12 12 8 10 11 12 12 17 21 23 25 25 6 4 2.2 2.8 2.8 3.2 3.2 2 x 6 2.6 x 8 2.6 x 8 3 x 8 3 x 8 TM-04 TM-06 TM-08 TM-10 TM-12 7.5 9.5 91.5 5.5 77.5 6 7.5 77.5 6 15 9 93 12.5 6.5 4.5 16.3 8.8 14.3 7.5 12 12 10 8 9.8 How to Use 2.

Valve model VCW2 VCW20-12-01A 1/8, 1/4 34 40 25 30 12.8 12.8 5 4.5 6 13 VCW30-12-02A 1/4, 3/8 42 52 30 40 19 19 6 5.5 7 19 VCW3 VCW30-12-04A Note 1) 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-02A 1/4, 3/8 42 52 30 40 23 23 6 5.5 7 19 VCW4 VCW30-12-04A Note 1) 1/2 48 56 36 44 23 23 6 5.5 7 23 VCW40-12-06A 3/4 56 65 44 53 28.2 28.2 6 5.5 7 26 2 mounting screws (for mounting bracket) are included