CYV

low particulate generating vacuum grease. p r Non-contact construction a w t i o o n L There is no particulate generation due to friction, since the construction does not allow contact between the cylinder tube's exterior surface and the slide table's internal surface. a t e l u g c Reduced initial particulate generation 3 e i t n r a e p r a w t i o o n L No contact Cleaned, assembled,

HRX-OM-X084

Model number Serial number Type and quantity of refrigerant How to read the serial number y R 001 April 2020 W R 001 Year Symbol Remarks Month Symbol Remarks Serial no. 4 R Repeated from O to Z in alphabetical order, with O for January and Z for December 2020 y 2021 Z 5 S Repeat ed from A to Zin alphab etical order 2022 A 6 T Fig 1-1 Position of product label HRR Series 1.4 Product Label

MRQ

MSQ Backlash 2 or less For detailed explanation of effective output, refer to the description on p.1.5-5.

q"s

*sure dlsplay Accuracy J3% (lull span) Minimum unit [ i l P a : 0 . 0 1 . k a f / c m ' : 0 . 0 1 , b a r : 0 . 0 1 .

IDX-OM-W017

OLR PTC OLR PE CM PE CM PE FM1 PRS PE FM1 PRS P P PE FM2 PE FM2 FM2DFA6E/8E IDFA6E/8EFM2 IDFA15E1 N L C R GFCI For Option R CM FM1 FM2 N L PE OLR TB PTC PTC ILS ILS PRS TB PE EDV C02 For Option V C11 OLR PTC GFCI EDV PE CM C01 C11 PE FM PRS P 6-4 IDFA Series 6 4 IDX-OM-W017 6 6-5 IDFA3E IDFA4E15E1 2 6-5 IDFA Series 6 5 IDX-OM-W017 7 A A 7 1 7 2 A 7 3 7 4 IDFA3E IDFA4E

ZQ-OM01301

ZQ-OM01301-A Revision history A P.22 Change of the spare part numbers for the solenoid valve P.24 Change of the spare part numbers for the V port fitting P.25 Change of the spare part numbers for the Washer assembly P.27 P.28 Added items to 8.

Rotary Table/Rack & Pinion Style Series MSQ

9 e r Component Parts Note Anodized Anodized Chromated No.

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

Connection threads R/NPT Model Applicable tubing O.D.

Electric Rotary Table

3 1 / 0 180 L 0 E T 2 R 3 3 / a 0 0 5 , bl 1) e e ot o N p er e g at n in ra g The figures show the origin position for each actuator.

Wireless System

Cap p. 17 Digital Input/Output Unit p. 7 tMarker p. 18 Analog Input Unit p. 8 y Communication Cable with Connector/ Communication Connector p. 18 Analog Output Unit p. 8 Analog Input/Output Unit p. 8 uPower Supply Cable with M12 Connector (A-coded) p. 19 End Plate (D side) p. 8 uPower Supply Cable with M12 Connector (B-coded) p. 20 End Plate (U side) p. 8 iPower Supply

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

Cushion adjustment screw 4-J GA Air release GA V V Width across flats G Width across flats G MM MM R (max.) d W W D d E E D M MA a a M MA F NA NA F K A A K C H + Stroke S + Stroke H B ZZ + 2 strokes (mm) Bore size (mm) A a B C d E F G GA J K M MA MM NA P R S T V W H ZZ D 0 -0.018 0 -0.021 0 -0.021 0 -0.021 0 -0.025 0 -0.025 0 -0.025 0 -0.062 0 -0.062 0 -0.074 0 -0.074 0 -0.074 0 -0.074 0

VQ20/30

VX B 1 2 1 2 VX3 A VXA B NL R VN R LED B NL: Neon light R: Resistor LED: Light emitting diode R: Resistor LVC Caution LVA Valve Mounting After confirming the gasket is correctly placed under the valve, tighten the mounting screws with the appropriate torque (0.2 to 0.23 Nm).

I

Model Exhaust Piping/Port location Port size Applicable P R 1 A,B P It A,B Valve NWsF5-20Common Side /Base Side/Base fop/ Valve %NPrF I %flPlf LNPIF %NPIF NVFSO20 DXT 156-20-1TA EXH relocation spacer NVV5F5-20 156-19-14 NW5F5-20 " Spacer is used when it is nscessary to exhaust from certain valves individually.

Filter for Cleaning Solvent Quick Change Filter Series FQ1

JIS B2401-1A-P85 NBR I.D. 84.6 x 5.7 O-ring r JIS B2401-4D-P85 FPM JIS B2401-1A-P11 NBR u !

MNB

CL1 MLGC Taper ring Steel ball CNG P MNB f CNA R R CNS CLS CLQ MLGP RLQ MLU ML1C Manual override for unlocking Even if the air supply is blocked or exhausted, lock release is possible. The fail safe mechanism locks again when the manual override is released.

MNB

CL1 MLGC Taper ring Steel ball CNG P MNB Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com f CNA R R CNS CLS CLQ MLGP RLQ MLU ML1C Manual override for unlocking Even if the air supply is blocked or exhausted, lock release is possible.

AC Servo Motor Driver (CC-Link Type)

The voltage (across P-N or P+-N-) of the main circuit converter is displayed. 0 to 900 V -74- 6. CC-Link setting CC-Link function of the driver. Wiring and PLC setting must to satisfy the specifications.

AC Servo Motor Driver (CC-Link Type)

The voltage (across P-N or P+-N-) of the main circuit converter is displayed. 0 to 900 V -79- 6. CC-Link setting CC-Link function of the driver. Wiring and PLC setting must to satisfy the specifications.

NCRAI seies

P 2 Specifications(NCRAl).P 3 Torque DiagramMeight CharvRotation Range. P 4 Shaft Load/Operational Instructions (NCRAI ) . P 5 Construction/ParlsList.-.P 6 Single Rod End/Dimensaons . .P 7 Double Rod End/Dimensions.-...P 8 Series:NCRAI How To Order Adluatable cuahlon C Both end cushion Not available on NCRA1BW30 Fotation .

IDX-OM-W032

Q R IDFA22E R1 290 775 623 134 405 698 93 13 314 85 600 340 IDFA37E R1-1/2 855 680 IDFA55E R2 470 855 800 (128) (273) (868) (110) 13 500 75 700 526 (110) 519 IDFA75E 900 (968) IDFA Series 6-3 6 2 IDX-OM-W032 6 6-4 IDFA22E, 37E GFCI R GFGI For Option R L N PE TB ILS V For Option V EVD EDV CM OLR PE C01 C11 PE FM PRS P IDFA55E, 75E GFCI R L N PE CM FM () MC C01 CM C11 FM1 PRS PRS1