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Flow direction Right Down With element service indicator AMP220 Rc NPT AMP320 AMP420 G 2 Exhaust Cleaner for Clean Rooms Series AMP How to Order AMP 2 0 2 03 Optional specifications Body size None Flow direction RightDown With element service indicator Nil R T 2 3 4 1/4 standard 3/8 standard 1/2 standard Element construction Accessories (optional) Nil None 2 2 stage B With bracket

Move the piston to the stroke end of the side that will be filled with oil, and perform steps q through r in the same sequence as described above. MK/MK2 Environment UAvoid use near fire. UDon't use in the clean room. RSQ/RSG Mounting RSH UInstall the converter vertically. UInstall the converter at a position that is higher than the cylinder.

How to Order IR 2 0 0 02 R 0 Pressure gauge mounting Precision regulator Body size R Note) Pressure gauge mounted on reverse side Type of setting Note) The standard mounting position of the pressure gauge is on the front, when viewing the regulator with the SUP side to the left and the OUT side to the right. 1 2 3 IR1000 IR2000 IR3000 Basic type (handle) Air operated type (series IR2000/3000

As a result, the vacuum pressure valve t which is linked to the diaphragm r opens, VAC and OUT are connected, and the set pressure becomes negative. This negative pressure feeds back to the control circuit i via the pressure sensor u.

1 0 1 01 Set pressure Gauge port orientation Nil: Standard 0.005 to 0.2MPa 0 OUT IN 1 0.01 to 0.4MPa Knob Gauge port R: R specifications Gauge port JIS symbol Port size Piping port size M5 x 0.8 Rc 1/8 Symbol M5 01 OUT IN Gauge port positions are indicated with the knob on the top side.

How To Order 25 R 100 Y7BAL MGPM Splash proof 2 color Solid state auto switch Cylinder stroke (mm) Refer to catalog N346 for standard stroke. Bore Size 12 12mm 16 16mm 20 20mm 25 25mm 32 32mm 40 40mm 50 50mm 63 63mm 80 80mm 100 100mm Water resistant R Seals NBR (Nitric Rubber) V Seals FKM (Fluoro Rubber) *This option is available for many other SMC cylinder series.

Elbow Type (Metal Body) Flow rate and effective area AS220M-02 Model AS120M AS220M-01 R 1/4 Cylinder side Tubing side M5 x 0.8 10-32UNF NPT1/8 NPT1/4 R 1/8 Port size Rc 1/4 Rc 1/8 l/min (ANR) (CFM) Flow rate 38 (1.33) 7 (0.25) 12 (0.42) Controlled flow 0.6 (0.03) 0.1 (0.006) 0.2 (0.01) Effective area mm (cv) l/min (ANR) (CFM) 420 (14.7) Flow rate 105 (3.7) 280 (9.8) Free flow 6.5 (0.36) 1.6

lock plate Slider cover assembly Diaphragm plate assembly Diaphragm ring Aluminum alloy Aluminum alloy Special brake lining Stainless steel Stainless steel Stainless steel Carbon steel Carbon steel Hard anodized Hard anodized Cam follower cap Tube cover Brake shoe Joint ring Air coupler 2 Brake disc Manual rod 1 Manual rod 2 Brake spring Air tube Cable Tube guide assembly Guide rod q w e r

Dimensions Double clevis type/MQMLD 6, 10, 16 (integrated type) +0.030 0 CDH9 Z + Stroke R Clevis pin (CDd9 ) S + Stroke -0.030 -0.060 U H BB NB CX +0.1 0 GB T-bracket Refer to page 18 for details.

Flow direction Right Down With element service indicator AMP220 Rc NPT AMP320 AMP420 G Features 1 Exhaust Cleaner for Clean Rooms Series AMP How to Order AMP 2 0 2 03 Optional specifications Body size None Flow direction RightDown With element service indicator Nil R T 2 3 4 1/4 standard 3/8 standard 1/2 standard Element construction Accessories (optional) Nil None 2 2 stage B With

1 0 1 01 Set pressure Gauge port orientation Nil: Standard 0.005 to 0.2MPa 0 OUT IN 1 0.01 to 0.4MPa Knob Gauge port R: R specifications Gauge port JIS symbol Port size Piping port size M5 x 0.8 Rc 1/8 Symbol M5 01 OUT IN Gauge port positions are indicated with the knob on the top side.

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com d n i n i W g c e t i r o i d n e p a t e p i P Leakage Voltage It must be noted that when connecting C-R element parallel to switching element, leakage current flows through C-R element and the leak voltage increases. 2 thread to be left exposed Clamping

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com d n i n i W g c e t i r o i d n e p a t e p i P Leakage Voltage It must be noted that when connecting C-R element parallel to switching element, leakage current flows through C-R element and the leak voltage increases. 2 thread to be left exposed Clamping

Description AXT336-1A-1 01 02 01 02 01 02 02 03 02 03 02 03 02 03 Manifold block assembly AXT336-1A-2 AXT336-1A-3 AXT336-2A-1AXT336-2A-2AXT336-3A-1AXT336-3A-2q End plate (U side) assembly w End plate (D side) assembly e Terminal assembly Junction cover assembly Tie-rod r t y Replacement Parts No. u Description Material Carbon steel NBR NBR Part no.

For R and U, DC voltage is only available. W: With connector cable Note) Power saving circuit is only available in the "Z" type. Note) When placing an order for body ported solenoid valve as a single unit, mounting screw for manifold and gasket are not attached. Order them separately, if necessary. (For details, refer to page 173.) 108

Step Motor (Servo/24 VDC) Electric Actuator/Low Profile Slider Type Basic Type LEMB Series LEMB25, 32 Caution E-MY16 E-MY25 LEM25 LEM32 LEM series E-MY series How to Order 25 LEMB 300 T S q w e r t y !1 u 1 i 1 !

This valve retains the reset position (Flow path: A R) at the time of shipment. However, it may alter to the set position during transporatation or due to vibration when mounting the valve. Therefore, confirm the home position either manually or with power supply prior to use. 4.

Rotary Actuated Air Gripper/2-Finger Type Series MHR2/MDHR2 Size: 10, 15, 20, 30 How to Order MHR 2 10 R Without auto switch With auto switch (Built-in magnet) MDHR 2 10 R M9N S Made to Order Refer to page 492 for details.

Example) AW30K-03BE-1N-B B AW 30 03 BE K q w e r t y q Body size 20 30 40 60 Symbol Description w With backflow function Nil Without backflow function K Note 1) With backflow function + e Pipe thread type Nil Rc N Note 2) NPT F Note 3) G + 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 r Port size 10 1 + a Mounting Nil Without mounting option B Note 5) With bracket H With set nut (for panel mount

3 o r !4 u Component Parts Component Parts Note No. Description Note No.