AP500

pressure (MPa) Delivery pressure (psig) A 25 0.17 m1.12 (m28.4) 20 0.14 45 15 0.10 10 0.07 1.00 (25.4) 2 x 10-32 UNF depth 0.25 (6.3) (Mounting hole) 5 0.03 0 0.00 0 10 20 30 40 50 60 70 80 Flow Rate (slpm, N2) A Connections AP501A Input pressure : 2 psig (14 kPa) inch (mm) FV4 MV4 TW4 760 0 2.78 (70.6) 700 -8 2.12 (53.8) Delivery pressure (mmHg abs) Derivery pressure (kPa) 600 -21 500 -35 400

AS

How to Order Made to Order 2 F 06 A 200 AS Lubricant: Vaseline -X12 Example) AS2002F-04A-X12 Made to Order Body size Grease-free (Seal: Fluorine-coated) + Restrictor (Without check valve) -X21 100 M5 standard 200 1/8 standard 205 1/4 standard 300 3/8 standard 400 1/2 standard Push-lock type Example) AS2002F-04A-X21 Not particle-free Applicable tubing O.D.1 Metric size Inch size 23 3.22 01

ASD

Metric size Inch size With One-touch fitting 04 06 08 10 12 01 03 05 07 09 11 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" Thread type Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT AS N ASP Bore size ASN M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 M5 U10/32 01 02 03 04 AQ ASV AK ASS Needle Valve/Flow Characteristics (Inlet Pressure: 0.5 MPa) ASR ASD230F ASD330F ASD430F ASF 100 200 400 Flow

ASP

3/8 standard 1/2 standard 07 09 11 13 1/4" 5/16" 3/8" 1/2" 6 8 10 12 Universal Port size Pilot port M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/4 G 1/8 G 1/8 G 1/4 10-32 UNF NPT 1/8 NPT 1/8 NPT 1/4 Cylinder side R 1/8 R 1/4 R 3/8 R 1/2 R 1/4 R 3/8 R 1/2 NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 Symbol 01 02 03 04 F02 F03 F04 N01 N02 N03 N04 With One-touch fitting Needle Valve/Flow Characteristics ASP330F ASP430F 400

AS_FS Inline

Made to Order How to Order 2 1 F 06 200 AS S Lubricant: Vaseline -X12 Example) AS2002FS-04-X12 Made to Order Body size Grease-free (Seal: Fluorine-coated) + Restrictor (Without check valve) -X21 100 M5 standard 200 1/8 standard 205 1/4 standard 300 3/8 standard 400 1/2 standard Applicable tubing O.D.1 Example) AS2002FS-04-X21 Not particle-free Metric size Inch size 23 3.22 04 4 06 6 08 8

Speed Controller with One-touch Fittings In-line Type/Panel Mount Type AS  1F-3 Series

How to Order 1 F 06 3 200 AS Flow Direction Symbols on Body Hexagon lock nut Round lock nut J Nil Lock nut option Body size Indication symbol Panel mount type Symbol 100 200 205 300 400 M5 standard 1/8 standard 1/4 standard 3/8 standard 1/2 standard Made to Order Refer to page 622 for details. Applicable tubing O.D.

P

Speed Controller/In-line Type AS2000-N02-X800/AS3000-N03-X800/AS4000-N04-X800 P .G. information Point to Group Specialized Product Flow Characteristics AS3000-N03-X800 AS4000-N04-X800 AS2000-N02-X800 300 800 Flow rate L/min (ANR) Flow rate L/min (ANR) Flow rate L/min (ANR) 1500 250 600 200 1000 150 400 100 500 200 50 0 0 1 2 3 4 5 6 7 9 8 10 0 0 1 2 3 4 5 6 7 9 8 0 0 1 2 3 4 5 6 7 8 Number

Hydraulic Cylinder

Hydraulic Fluid Compatibility Standard strokes (mm) Long stroke Bore size (mm) 20 25 32 40 Hydraulic fluid Compatibility 25 to 300 25 to 400 Compatible Compatible Compatible Standard mineral hydraulic fluid W/O hydraulic fluids O/W hydraulic fluids Water/Glycol hydraulic fluids Phosphate hydraulic fluids 25 to 500 800 Standard strokes above have a minimal delivery time.

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

Vacuum Suction Type (Reference values) Specifications Suction flow rate L/min (ANR) Bore size (mm) 12/16/20/25 Size 5 12/16/20/25 Item Proof pressure 1.5 MPa Maximum operating pressure 1.0 MPa Minimum operating pressure 12, 16: 0.07 MPa, 20, 25: 0.05 MPa Without auto switch : 10C to 70C Ambient and fluid temperature With auto switch : 10C to 60C (No freezing) Cushion None Piston speed 30 to 400

Cylinder with Lock Double Acting, Single Rod Series CNG ø20, ø25, ø32, ø40

pressure 0.20 MPa or more 0.20 MPa or less 0.15 MPa or less Lock starting pressure ML1C 0.2 to 1.0 MPa 0.25 to 1.0 MPa Operating pressure range DBoth directions Locking direction Minimum Stroke for Auto Switch Mounting Standard Stroke -X 20No. of auto switches mounted 2 Max. manufacturable stroke (mm) Bore size (mm) 20 25 32 40 Standard stroke (mm)(1) Model Long stroke (mm) 1 201 to 350 301 to 400

Material: Super PFA High Purity Fluoropolymer Tubing TL/TIL Series

Fluoropolymer Fittings LQ series 0.5 0.19 0.09 0.04 2.0 400 290 0.7 0.26 0.12 0.05 2.8 220 160 1.0 0.43 0.20 0.08 4.6 95 60 1.0 0.62 0.28 0.12 6.7 60 30 1.0 0.73 0.34 0.14 7.9 35 20 20C 100C 200C 260C 1.0 0.62 0.28 0.12 6.7 25 20 1.0 0.92 0.42 0.17 9.9 10 6 1.0 0.59 0.27 0.11 6.4 20 12 0.6 0.24 0.11 0.05 2.6 220 160 0.7 0.27 0.12 0.05 2.9 130 110 0.9 0.33 0.15 0.06 3.6 100 65 1.0 0.43 0.20

HAW

pipe must have a minimum pipe bore of 10 mm, and a maximum length of 5 m (when installing an optional auto drain). 180C Inlet air temperature Correction factor Air flow (l/min (ANR)) Cooling water (l/min) Model 70C 41.5 43 45.5 37 43 49.5 37 43 45.5 37 42 43.5 50C 38.5 40 42 36 40 45.5 36 40 42.5 36 40 41 100C 37.5 47 51 38 44.5 48 35.5 36 36.5 33.5 36 38 33.5 36 36.5 33.5 35 36 200 300 400

MY1B

Bore size (mm) Maximum manufacturable stroke (mm) Standard stroke (mm) Symbol Specifications 10, 16 3000 100, 200, 300, 400, 500, 600, 700 800, 900, 1000, 1200, 1400, 1600 1800, 2000 XB11 Long stroke type 20, 25, 32, 40 50, 63, 80, 100 XC67 NBR rubber lining in dust seal band 5000 X168 Helical insert thread specifications Strokes are manufacturable in 1 mm increments, up to the maximum stroke

AS

With One-touch fitting Port size U01 Uni 1/8 U02 Uni 1/4 U03 Uni 3/8 U04 Uni 1/2 Needle Valve/Flow Rate Characteristics AS2201F-U02, AS2211F-U02 AS2301F-U02, AS2311F-U02 AS2201F-U01, AS2211F-U01 AS2301F-U01, AS2311F-U01 300 600 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 06, 07, 08, 09, 10 500 08, 09, 10, 11 Flow rate L/min (ANR) Flow rate L/min (ANR) 03, 04 06, 07 200 400 01, 23 300

Mechanically Jointed Rodless Cylinder with Protective Cover Slide Bearing Guide Type, Cam Follower Guide Type MY1  W Series ø 16, ø 20, ø 25, ø 32, ø 40, ø 50, ø 63

Cylinder stroke (mm) Port thread type Maximum manufacturable stroke (mm) Bore size (mm) Bore size 16, 20 Symbol Type M thread Rc NPT G Standard stroke (mm) Nil 25, 32, 40, 50, 63 100, 200, 300, 400, 500, 600, 700 800, 900, 1000, 1200, 1400, 1600 1800, 2000 3000 TN TF 16, 20, 25, 32 40, 50, 63 Piping The stroke can be manufactured up to the maximum stroke from 1 mm stroke in 1 mm increments

Electric Actuator/High Rigidity Slider Type Ball Screw Drive Series LEJS AC Servo Motor ( 100/200 W )

Example) S2S2: Standard cable (2 m) + Driver (LECSS2) S2 : Standard cable (2 m) Nil : Without cable and driver Applicable Stroke Table 4 )Standard DProduced upon receipt of order Stroke (mm) Model 200 400 300 500 600 700 800 900 1000 1200 1500 LEJS40 LEJS63 ) ) ) D D ) ) ) ) D D D D ) ) D ) D D D 4: Strokes other than those shown above are produced as special order (1 mm increments).

Booster Relay Series IL100

Specications Flow-rate Characteristics Supply pressure Max. 1.0 MPa Input pressure Max. 0.7 MPa 0.7 Supply pressure: 0.7 MPa Output pressure Max. 0.7 MPa 0.6 Pressure ratio 1 : 1 Air consumption 3 L/min (ANR) or less (OUT = 0.5 MPa) 0.5 Output pressure MPa Linearity Within 1% Hysteresis Within 1% 0.4 Ambient and uid temperature 5 to 60C Port size 1/4, 3/8 0.3 Weight 0.56 kg 0.2 0.1 0 0 200 400

Cylinder with Turntable ø63, ø80, ø100 Series MGT

The in-line electrical entry type cannot be mounted. 451 Series MGT Specifications Bore size (mm) 63 80 100 Action Double acting Fluid Air Proof pressure 1.5 MPa Maximum operating pressure 1.0 MPa Minimum operating pressure 0.1 MPa Ambient & fluid temperatures 10 to 60C (No freezing) Piston speed 50 to 400 mm/s Cushion Rubber bumper on both ends Lubrication Non-lube +1.5 0 mm Stroke length

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40

Mass (g) Standard stroke (mm) End lock additional mass Model D25 52 138 186 350 487 918 1,420 5 36 10 40 15 44 20 48 30 56 50 157 222 400 547 1,000 1,533 75 175 258 450 608 1,083 1,645 100 194 294 500 669 1,165 1,758 125 549 729 1,247 1,870 150 599 790 1,330 1,983 175 649 851 1,412 2,095 200 699 912 1,495 2,208 MTS8 MTS12 MTS16 MTS20 MTS25 MTS32 MTS40 29 34 42 55 90 133 -X Bore size (

Clean Air Filter SFD Series

See Specific Product Precautions. 0.2 GD 0 0 10 20 30 40 50 Operating temperature (C) Port size Model Rated flow (L/min (ANR)) Note 1) Weight 60 80 100 100 100 100 300 400 500 500 35 g 35 g 35 g 35 g 60 g 150 g 190 g 190 g 190 g 260 g 4 (One-touch fittings) 6 (One-touch fittings) 8 (One-touch fittings) Rc, NPT, G 1/4 Rc, NPT, G 1/4 Rc, NPT, G 1/4 8 (One-touch fittings) 10 (One-touch fittings