Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com E depth EK Q + Stroke Z + Stroke A G Stroke adjustment screw Note 3) (inner cover) Plug Plug [P (port e)] [P (port c)] A A LW Plug Operating direction P (port a) P (port b) Auto switch mounting groove [P (port g)] 0.5 Note 2) 0.5 Note 2) Left Right Plug [P

1 High Purity Chemical Valve Compact Type Series LVD VC
Space saving, compact type is available. Space saving, compact type is available. VDW Compact type is introduced as a new series to complement VQ Body: New PFA Body: New PFA Body: New PFA conventio

VX3 Threaded M5 x 0.8 VXA Fluid temperature (C) 0 to 100 Ambient temperature (C) 0 to 60 VN Weight (kg) 0.09 0.15 0.36 0.17 LVC Construction LVA Standard type N.C. type N.O. type Double acting type LVH LVD LVQ PB PB PB q q q LQ PA PA PA e e e LVN TI/ TIL A B A B A B A B A B PA r w PAX PB With flow rate adjustment t PB PA Description Material Parts list No.

Transfer

MY-SA 2 x G F E 2 x H A B C D Side support B MY-SB 2 x J A B C D A 61 70 87 B 75 84 105 C D E F G H J Part no.

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

P/A as a contact protection box may be necessary.

Digital Gap Checker

Caution Caution indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury. Warning Warning indicates a hazard with a medium level of risk which, if not avoided, could result in death or serious injury. Danger Danger indicates a hazard with a high level of risk which, if not avoided, will result in death or serious injury. Warning 1.

HRX-OM-Q033

in the selected temperature unit (C or F).

HRX-OM-T004

range. 03Data field of a command is not normal.

HRX-OM-R028

in the selected temperature unit (C or F).

EX510-GMJ1.eng

COM A COM A is receiving data: Lights up COM A is having no data to receive: Goes off COM B COM B is receiving data: Lights up COM B is having no data to receive: Goes off A. For dual power supply use B.

Digital Gap Checker

Caution Caution indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury. Warning Warning indicates a hazard with a medium level of risk which, if not avoided, could result in death or serious injury. Danger Danger indicates a hazard with a high level of risk which, if not avoided, will result in death or serious injury. Warning 1.

Compact Cylinder with Solenoid Valve/

CQM CVQM C B Tap mounting A Through-hole mounting (mm) C B A Bore size 32 9.5 59 49.5 40 10 57 67 12 71 83 50 13 97 84 63 Features 1 Compact Cylinder with Solenoid Valve/ Guide Rod Type 32, 40, 50, 63 Series CVQM How to Order CVQM 32 30 M9BW 5 M Port thread type 32 40 Bore size 32 40 50 63 M5 x 0.8 Nil 32 mm 40 mm 50 mm 63 mm Rc G NPT 50 63 F N Piping Nil P Standard Axial Cylinder stroke

Rotary Cylinder Series MRQ Size: 32, 40 1

C + D = 3.5 + 24.3 = 27.8 l/min B C CRQ2 Rotary motion parts MSQ A D Linear motion parts MRQ 0 1 2 DOperating time (S) 2011-10-7 8 Rotary Cylinder Series MRQ Size: 32, 40 How to Order SO MRQ B S 32 50 C A J79W Number of auto switches Mounting style F: Flange on the rod side B: Basic style Rotation 0 1 2 Linear motion Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco,

MRQ

CRBU CRA1 Model: MRQBS32-50CA-A73 Operating pressure: 0.5MPa Calculate the amount of air requirement for A, B, C and D respectively.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

port} (A) 2 N.C.

ISA2

Leakage voltage Take special precautions if a resistor is used in parallel with the switching element or a C-R element (for surge voltage protection) is used for protection of the switching element. The valve may fail to turn off due to leakage current flowing through the resistor or C-R element. PF2 IF Data Switching element OFF Caution R C Leakage voltage Power supply 1.

Rodless Cylinder for Vacuum Series CYV ø15, ø32

Note 3) A particulate generation test has been conducted in a vacuum environment of 10-Pa. a t e l u g c 2 Stainless steel linear guide & low particulate generation vacuum grease e i t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e 1 i t n r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

6 M/O knob Zinc die cast Alloy steel MGP Using a pair of internal C-clip pliers, remove snap ring A. By pulling out !7 M/O bolt M/O spring Black zinc chromated the piston rod while covering the rod cover port with your finger, packing !8 Zinc chromated Steel wire MGQ retainer A and rod seal C will come out. Stopper ring !

CXWM/CXWL

A B C D E F A B C D E F G H Pressure port Pressure port Right Left Left Right Left Right Right Left Left Right Right Left Left Right Operating direction Operating direction There are 9 possible reciprocating piping methods. There are 16 possible reciprocating piping methods.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

9 Installation: Bumper A Urethane @0 Thoroughly apply grease on the rod seal and install rod seal C, packing MY1 Bumper B Urethane @1 retainer B, and snap ring A, in that order.

VP300/500/700

Standard Base mounted Universal External pilot Flow Characteristics/Weight Flow characteristics (1) Port size Valve model Weight (kg) Series 2 1 (A P) 1 2 (P A) 3 2 (R A) 2 3 (A R) C [dm3/(sbar)] 3.3 4.0 2.9/2.9 3.1/2.9 6.6 9.1 6.5/7.0 7.9/8.1 12 15 12/12 15/14 Cv 0.86 0.99 0.74/0.76 0.79/0.83 1.6 2.4 1.7/1.8 1.8/1.9 2.9 3.8 2.9/3.1 3.5/3.3 C [dm3/(sbar)] 3.4 3.7 3.3/3.6 4.1/4.1