3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

Locking type (Tool required) VQZ DIN terminal (YZ) (Except VQZ100) VQZ300 DIN terminal (Y) VZ Except VQZ100 ) ( VS 2.4 3.0 VFN Except VQZ100 ) ( 4-14-1 Body Ported 2 Series VQZ100/200/300 Precautions Be sure to read before handling. For Safety Instructions and Solenoid Valve Precautions, refer to page 4-18-2.

Compact Cylinder

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Flat washer 4 pcs. 2 x 4-OA 20 2 x 4-RA (RB) K L B + Stroke M A + Stroke E 25 Width across flats K M: Rod end male thread H D Hexagon width across flats B1 Rod end nut H1 C X L Rod End Male Thread (mm) Bore size (mm) B1 C D H H1 K L X 20 25 13 14 10

Electrostatic Sensor Monitor

Example 1) When hysteresis is set (Set value (n1H) is set to 0.1[kV]) Hysteresis (H1) can not be set to mode than 0.1[kV]. Example 2) When set value is set (Hysteresis (H1) is not to 0.1[kV]) Set value (n1H) can not be set to less than 0.1[kV]. -21No.SFOD-OMO0004-B [F 2] Operation of OUT2 Set output method of OUT2. Display color depends on OUT1 output, and is not set with this function.

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I lube OUlslde dia. od Inch size H1 (Width across flats) H2 (Widlh across lIats) , _ l4'. W~igh L2 L..3, ~L ~ "A1 '" , 'A2 oM II'. I '-1 'N . ,." " H1 H2 01 02 03 l1 M odel ~ T1 T2 ' ~ f . 9 4 ' 3 ~9 . 2~q .. ~ " 6 8" 41,-'1; " W }?'.." 48.7' 42.6, 10.9 46.4 2B,2 " . . '118:'7 ~7 .3 .70~ .2M ..

30

80.2 1/8" 5/32" 1/4" 5/16" 3/8" 17.46 14.29 7/16-20UNF H2 17.46 14.29 7/16-20UNF H1 T 17.46 17.46 1/2-20UNF 22.23 22.23 5/8-18UNF 22.23 22.23 3/4-16UNF Connection thread 23.5 58.3 18.5 1/2" 23.81 25.4 7/8-14UNF L2 M Note) Value of FEP tube.

Plate Cylinder

B1 MM (mm) d H1 B1 C1 D1 Part no.

Table of Contents

VFS3320-D/DZ/Y/YZ VFS3420-D/DZ/Y/YZ VFS3520-D/DZ/Y/YZ Lead wire O.D.

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Rod End Male Thread Rod end male thread 2 Auto switch D-A9/F9 Bore size (mm) H1 C1 X H1 L1 63 80 100 M18 x 1.5 26 28.5 33.5 M22 x 1.5 32.5 35.5 43.5 Basic style (Through-hole) M26 x 1.5 32.5 35.5 43.5 C1 V X Rod end nut L1 (Piping tube O.D.) 2-P1 Built-in One-touch Fittings Bore size (mm) Z1 Z1 P1 V W1 63 16 8 56.5 95 W1 Basic Style Auto switch shown above is D-A73 type and D-A80 type.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

Slotted) : Non-locking push style (Flush) VP 4 1 (P) 3 (R) VQ VQZ Body style 2 Body ported Electrical entry VZ G: Grommet (DC Specification) L: L plug connecor with lead wire M: M plug connecor with lead wire MO: M plug terminal without connector LO: L plug terminal without connector VS Function Symbol Specification DC AC (1.0W) (3) Standard (1) High pressure (Metal seal only) (1.0W) K YZ

S Couplers

H2 H1 H1 H2 13 26 M L1 L1 M L3 When connected Min. hole size Min. hole size Applicable hose I.D./O.D. 5/8 6/9 6.5/10 8/12 8.5/12.5 11/16 Applicable hose I.D.

MQQ

Bore size (mm) L1 C1 H1 X 10 23.5 10.5 M5 x 0.8 15.5 16 26.5 11.5 M6 x 1.0 16.5 C1 20 28.5 13.5 M8 x 1.25 18.5 Rod end thread adapter X 25 34.5 16.5 M10 x 1.25 22.5 L1 28 40.5 22.5 M14 x 1.5 28.5 For details about the rod end thread adapter and rod end nut, refer to page 10-5-16. 10-5-14 14 Compact Low Friction Cylinder Metal Seal Series MQQ Foot style: MQQLL 10, 16, 20 Bore size (mm)

Antibacterial Filter (5μm) Antibacterial Filter (0.1μm) Odor Removal Filter Bacteria Removal Filter

Selection Warning (1) NFS-H1 grade grease is used where lubrication is required. (2) Do not select a model exceeding specification ranges and carefully consider the purpose of use, required specifications, and operating conditions, such as fluid, pressure, flow rate, nominal filtration rating, and environment. (3) The product is not certified under the High Pressure Gas Safety law, so for

Series KC Self-seal Fittings

T Attach thread Weight (g) H1 (Hex.) H2 (Hex.) A1 M A2 D L Part No.

SI Unit for Vacuum Manifold

Hysteresis H2 10988 10P2-P1 10P2-P1 100 Setpoint P1 11989 H1+1P2-H2 H1+1P2-H2 600 Hysteresis H1 10988 10P1-1 10P1-1 50 Setpoint P3 312000 H3+12000 H3+11000 40 Hysteresis H3 101999 10P3-1 10P3-1 10 Caution The Pressure parameters should be set so that each value meets the above conditions. The condition of P3 differs depending on the Pressure range parameter. -20No.EX-OMY0014-A 4.1.6.

Low Friction Cylinders Series MQ

H1 (mm) Bore size (mm) L1 C1 H1 X 10 23.5 10.5 15.5 M5 x 0.8 16 26.5 11.5 16.5 M6 x 1.0 C1 20 28.5 13.5 18.5 M8 x 1.25 Rod end thread adapter X 25 34.5 16.5 M10 x 1.25 22.5 L1 30 40.5 22.5 M14 x 1.5 28.5 40 40.5 22.5 M14 x 1.5 28.5 Refer to page 1180 for details regarding the rod end thread adapter and the rod end nut. 1178 Compact Low Friction Cylinder Metal Seal Series MQQ (mm) Foot type

Compact Cylinder with Air Cushion

B + Stroke L K 2 x 4-M6 x 1.0 effective depth 10 A + Stroke M W Rod end male threads H1 Rod end nut C1 X L1 Rod end male threads mm Bore size (mm) C1 X H1 L1 20 25 18.5 12 14 M8 x 1.25 22.5 15 17.5 M10 x 1.25 Standard type mm A B C D E E1 E2 F H K L M Q W Bore size (mm) 20 25 Stroke range (mm) 15 to 50 36.5 32 7 10 36 18 21 15.5 M5 x 0.8 8 4.5 25.5 21 39 15 to 50 41.5 36.5 12 12 40 20 23.5

Pin Cylinders Series CJP2/CJP

CM2 Applicable Auto Switches: D-A9, D-A9V B (When detecting at retracted stroke end position) (mm) Bore size A (When detecting at extended stroke end position) 5 st CG1 H1 H2 H3 10 st 15 st 20 st 25 st 30 st 35 st 40 st 4 MB 6 11 16 21 26 1 6 13 10 20 10 11 16 21 26 31 36 41 1 6 16 9.5 19 MB1 16 11 16 21 26 31 36 41 1 6 18 12 24 CA2 Applicable Auto Switches: D-M9, D-M9V, D-M9W, D-M9WV B

VP4

Product Profile: ISO Standard Solenoid Valve: Size 1, 2 Rubber Seal Series VP7-6/7-8 Solenoid valve conforming to ISO standard Size (1)/VP7-6 Size (2)/VP7-8 (Rubber seal) Single solenoid (FG-S) Double solenoid (FG-D) Reverse pressure (YZ-S) Reverse pressure (YZ-D) 2 position 3 position Closed center (FHG-D) Exhaust center (FJG-D) Double pilot check (FPG-D) Pressure center (FLG-D) Courtesy

MQQ

Bore size (mm) L1 C1 H1 X 10 23.5 10.5 M5 x 0.8 15.5 16 26.5 11.5 M6 x 1.0 16.5 C1 20 28.5 13.5 M8 x 1.25 18.5 Rod end thread adapter X 25 34.5 16.5 M10 x 1.25 22.5 L1 28 40.5 22.5 M14 x 1.5 28.5 For details about the rod end thread adapter and rod end nut, refer to page 10-5-16. 10-5-14 14 Compact Low Friction Cylinder Metal Seal Series MQQ Foot style: MQQLL 10, 16, 20 Bore size (mm)

Series VS

position A06T Side 3/4 For VSR/S8-8, 8-10 Number of Solenoid FHG 3-position, Closed center FJG 3-position, Exhaust center A10T Side 1 For VSR/S8-10 B02T Bottom 1/4For VSR/S8-6 B03T Bottom 3/8For VSR/S8-8 B04T Bottom 1/2For VSR/S8-10 S Single D Double FIG 3-position, Pressure center YHZ 3-position, Dual Closed center YIZ 3-position, Dual Pressure center * * YJZ 3-position, Dual Exhaust center YZ