VZA2000

VZA2221-M5 VZA2321-M5 VZA2421-M5 VZA2141-1-01 VZA2141-2-01 VZA2241-1-01 VZA2241-2-01 VZA2341-1-01 VZA2341-2-01 VZA2441-1-01 VZA2441-2-01 Single Double Closed center Exhaust center 0.60 0.60 0.56 0.60 0.43 0.43 0.15 0.20 0.15 0.15 0.13 0.15 0.59 0.59 0.59 0.59 0.30 0.30 0.22 0.22 0.15 0.15 0.14 0.14 Body ported Base mounted (With sub-plate) 2 position Body side M5 x 0.8 3 position M5 x 0.8

PA3000/5000/PAX1000

0.7 Female mounting threads Thread depth 6 Silencer (AN120-M5) Option (PB1011 built-in solenoid valve type only) AIR SUP (pilot air supply port) Rc 1/8 FLUID IN Rc 1/8 9 11 22 13 SUP IN 11 18.5 32 EXH Foot bracket Option 45 AIR EXH (pilot air exhaust port) 2-M4 x 0.7 Female mounting threads Thread depth 6 M5 x 0.8 Thread depth 10 The PB1013 air operated type has a plug. 20 Related Products

Precision Cylinder Series MTS

section 6 4.5 2-M5 x 0.8 (port size) 5.5H7 +0.012 0 10h7 0 0.015 16 0.2 4-M5 x 0.8, effective length 8 24 0.2 4-4.5 through 2 x 4-7.5, counter bore depth 4.5 (opposite side also) 14 15 4 28 0.2 28 0.2 38 36 26 53.5 102.5 + Stroke 18 25 M5 x 0.8 120.5 + Stroke 16 0.2 22 24 0.2 4-M5 x 0.8, effective length 8 Rod end male threads 10h7 0 0.015 Width across flats 8 M6 x 1 M6 x 1.0 9.8 11.5 10

Plug-in Unit

Part no. 1.5 m AXT100-MC26-015 AXT100-DS25-015 3 m 3 m AXT100-MC26-030 AXT100-DS25-030 5 m 5 m AXT100-MC26-050 AXT100-DS25-050 When a commercially available connector is required, use a 25 pin female connector conforming to MIL-C24308. L L (60) 44 8 16 14 25 1 13 47.04 50 " 10 Multi-core vinyl cable 0.3 mm2 x 25C Terminal no. Socket side Plug terminal no.

Support Guide/11-LEFG Series

Workpiece fixed Model Screw size Max. tightening torque [Nm] L (Max. screw-in depth) [mm] LEFl16 M4 x 0.7 1.5 6 LEFl25 M5 x 0.8 3.0 8 LEFl32 M6 x 1 5.2 9 LEFS40 M8 x 1.25 12.5 13 L To prevent the workpiece retaining screws from touching the body, use screws that are 0.5 mm or shorter than the maximum screw-in depth.

ZSE1/ISE1

NPTF 1/8 Connector type (Lead wire: 0.6 m) T1 C Connector type (Lead wire: 3 m) CL Note) Single mounting style: M5 x 0.8 (female) threaded.

Smooth Vent Valve

mount 40 Holding screw for main air supply (M2.5) 16 Main air suppy flow adjustment screw Initial air supply flow adjustment nut 11 Holding screw for initial air supply (M5) 82.5 9 MODEL M port M5 x 0.8 PRESS. 0.2MPa~10Pa 0.4~0.7MPa OPERATING PRESS IN Main air supply valve port TEMP. 5~60C S port M5 x 0.8 Initial air supply valve port MADE IN JAPAN (32) M S 52 (Body dimension) 65.8 (XVD2-

ZSP1

x 0.8 0XY: M6 x 1 Vacuum supply port 0X: M5 x 0.8 0XY: M6 x 1 58 51 50 PV 6.5 10.2 8 10 17.8 11 5.5 2-3.3 Mounting hole Connector type: ZSP10X C Adjusting needle ADJ Pressure sensor Vacuum supply port 20 08 Adsorption nozzle port 7 48.3 Lead wire length 600 (3000) Adsorption nozzle port 0X: M5 x 0.8 0XY: M6 x 1 Vacuum supply port 0X: M5 x 0.8 0XY: M6 x 1 59.5 50 PV 6.5 10.2 8 5.5 17.8 11

3 Port Air Operated Valve Series SYJA300 1

M3 x 0.5 18 0.9 M3 x 0.5 39 (Without subplate 18) Base mounted (with sub-plate) 0.089 M5 x 0.8 0.36 0.31 0.089 0.36 0.31 N.O.

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

W U 67 X (mm) Grommet Conduit DIN terminal Electrical entry Mounting dimensions Bracket mounting Port size P Model Orifice size A B C D E F H Conduit terminal J M4 M5 M5 M5 M5 K M Q R 50 60 63 66 70 Q 40 R Q 58 R S 46 Q 95 R S 62 T U 46 56 56 W X 11 13 13 Y Normally closed Normally open VX212 VX222 VX232 VX210 VX220 VX220 VX230 VX230 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 1/4, 3/8 1/4, 3/8

25

4.5 Mounting hole Manual override pin PAF 66 16 PA PB Foot (Option) 3 2 x M4 x 0.7 Female mounting threads Thread depth 6 12 Silencer: AN120-M5 (Option) 8 AIR SUP Rc, NPT, G 1/8 16 Lead wire length: Approx. 570 mm FLUID IN Rc, NPT, G 1/8 8 18 12 11 11 AIR EXH M5 x 0.8 Thread depth 8 Air Operated PB1013A 18 1.5 10 Mount with this surface up FLUID OUT Rc, NPT, G 1/8 76 64 52 37 7.5 20 2 x M4

Short Stroke Electric Actuator Series LX

) L2 a = 2000 200 a = 3000 100 Mer m 3 0 1 2 Transfer load m (kg) a = 1000 a 2000 a = 2000 Mey L3 (mm) a = 3000 m 1000 L3 3 0 2 1 Transfer load m (kg) Refer to page 304 for deflection data. 210 5 Phase Stepper Motor/Without Motor Brake Series LXF Dimensions/LXFH5BC Scale: 35% (5) 2-M2.5 x 0.45 depth 2 5 Stroke + 113 10.5 2.5 2-M4 x 0.7 thread depth 9 31 G 28 58 5H9 +0.030 0 depth 5 (5.5)

Speed Controller: Standard Type In-line Type AS Series

Valve Spring Seal NBR, Stainless steel 9 10 11 14143 14144 14147 Stainless steel NBR 652 AS Series Speed Controller: Standard Type In-line Type Dimensions: AS1000-M3 Dimensions: AS1000-M5 2 x 3.1 35 (Max. 41) 19 (Max. 21) AS-F 2 x 2.1 TMH ASD 27.5 Note 1) Male M5 x 0.8 Female M5 x 0.8 M3 x 0.5 M3 x 0.5 AS AS Reference dimensions Reference dimensions Note 1) Dimension for AS1000-M5-N AS-FE

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

0.5 M6 x 1 M3 x 0.5 M10 x 1 M4 x 0.7 M10 x 1 M4 x 0.7 M20 x 1.5 M5 x 0.8 M26 x 1.5 M6 x 1 M26 x 1.5 M6 x 1 M32 x 2 0.007 0.037 M8 x 1.25 M8 x 1.25 M8 x 1.25 M10 x 1.5 P (Piping port) W X Y ZZ Model Mounting Nut/Included in the package (2 pcs).

CU

x 0.8 M5 x 0.8 Rc 1/8 Bore size (mm) NN T S Z K KA L MM P Q R Standard strokes 20 25 32 M5 x 0.8 with depth 8 M5 x 0.8 with depth 8 M6 x 1.0 with depth 9 9.3 with depth 8 9.3 with depth 9 11 with depth 11.5 53 51.5 56 72 74.5 83 30 38 48 5 6 7 5 6 8 M6 x 1.0 M8 x 1.25 M10 x 1.25 5.5 5.5 6.6 16 20 24 13 23.5 29 20, 30, 40, 50, 60, 70, 80, 90, 100 4 Series CU Auto Switch Proper Mounting Positions

Series CE1

M8 X 1.25 10 8 28 25.5 Q R T* V Y N O P Bore (mm) 12 20 5.5 47 7 53.5 22 7 M4 X 0.7 M5 X 0.8 50 15 62.5 36 5 M6 X 1 M5 X 0.8 * Refer to p.4.4-8 regarding the rod end nut which is included. * Dimensions for auto switch model D-F79W. 4.4-10 Stroke Reading Cylinder Series CE1 Foot CE1L Bore size Stroke MK/MK2 RSQ/RSG RSH CE1 Front flange CE2 CE1F Bore size Stroke ML2B ML1C REA REC RHC MTS Rear

Series SYJA300 3 Port Air Operated Valve

M3 X 0.5 Body ported 0.9 (0.05) 18 There are no copper parts that come in contact with the media; suitable for copper free applications SYJA322-M3 N.O. M3 X 0.5 SYJA314-M5 N.C. 39 (Without sub-plate 18) Base mounted (With sub-plate) M5 X 0.8 1.8 (0.1) SYJA324-M5 N.O.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type AS-FG Series

AS121FG-M5-23 AS121FG-U10/32-01 9.6 7 22.2 12.7 17.3 25.8 12.3 28.6 22.1 3.2 M5 x 0.8 25 8 8.4 1/8" 8.4 12.3 17.3 22.1 12.7 AS121FG-M5-04 AS121FG-U10/32-03 12.7 17.3 12.3 22.1 4 9.3 5/32" 9.3 10-32 UNF 22.2 9.6 8 7 M5 x 0.8 22.2 28.6 25.8 28.6 25 25.8 8 25 7 9.6 AS121FG-M5-06 AS121FG-U10/32-05 21.3 26.1 13.5 18.1 11.7 22.9 6 11.6 3/16" 11.4 16.5 11.7 AS221FG-01-23 AS121FG-U10/32-07 14.2 18.3

ZPT/ZPX

M12 x 1.75 -B16 M16 x 1.5 ZPT80HB-B8 M8 x 1.25 -B10 M10 x 1.5 27.5 80 83 58.4 85.1 37 48.5 -B12 M12 x 1.75 -B16 M16 x 1.5 13-11-87 6 Series ZPT ZPT HB-A16 (Male thread) 100 125 100 125 ZPT HB-B (Female thread) M16 x 1.5 Hexagon width across flats 22 Rc 1/8 6 6 Hexagon width across flats 24 70 25 70 Width across flats 60 4-M5 x 0.8 G 4-M5 x 0.8 11 11 G Width across flats 60 F F E E Y Y Courtesy

AKH/AKB Series

Effective area (mm) Weight g A M5, UNF10-32> H L M Model (Width across flats) AKH04-M5 AKH04-01S AKH06-M5 AKH06-01S AKH06-02S AKH08-01S AKH08-02S AKH08-03S AKH10-02S AKH10-03S AKH10-04S AKH12-03S AKH12-04S 8 10 M5 x 0.8 1/8 M5 x 0.8 1/8 1/4 1/8 1/4 3/8 1/4 3/8 1/2 3/8 1/2 24.3 24.6 25.8 26.9 30 31.7 21.2 20.6 22.2 22.9 24 27.7 36 35.5 48.3 40.8 41.3 54 46.5 5 10 Applicable tubing 2.8