90.5 Model K L M N S T XLAV-16-2 17.2 10.2 3.6 3.6 M5 M5 XLAV-25-2 21.4 10.2 3.6 3.6 M5 M5 XLAV-40-2 33.9 10.2 3.6 3.6 M5 M5 XLAV-50-2 38.2 10.2 3.6 3.6 M5 M5 XLAV-63-2 43.8 12 4 2 Rc1/8 M5 XLAV-80-2 59.8 12 4 2 Rc1/8 M5 11 XL-OMV0016 6.
-100.0~100.0 kPa T 2 X NPN2 Y PNP2 R NPN2+1 T PNP2+1 A1 A S NPN2+1 V PNP2+1 1: A2 B M SI3 P psi2 2 3 kPaMpa B D + M5 M5 1 01 R1/8 N01 NPT1/8 C4H 4mm J (2m) C6H 6mm N7H 1/4 inch C4L 4mm C6L 6mm N7L 1/4 inch -8No.PS-OMU0002CN-D / A ZS-46-A1 38L(2 ) B ZS-46-A2 38L(2 ) ZS-46-B + ZS-46-D ZS-46-5L 5 2m ZS-27-01 R1/8 ZS-46-N1 NPT1/8 ZS-46-N2 4mm ZS-46-C4H 6mm ZS-46-C6H 1/4 inch
x 0.8 thread depth 4 (Piping port) OUT IN Steel balls 8-28-25 25 Series CXSJ Dimensions: 15 to 32 Standard Piping U Q R T ZZ + Stroke Stroke J K SS + Stroke 1 D B M L Z I 1 G 0.2 (G) H A E F (Through) N ( I ) (L) (Z) (G) C NN A B ZZ C D E M F G H I J K L N NN Q R U 2-M5 x 0.8 thread depth 4 2-M5 x 0.8 thread depth 4 2-M5 x 0.8 thread depth 4 2-Rc 1/8 thread depth 5 SS T Bore size (mm) 2
Z) (G) C NN A B ZZ C D E M F G H I J K L N NN Q R U 2-M5 x 0.8 thread depth 4 2-M5 x 0.8 thread depth 4 2-M5 x 0.8 thread depth 4 2-Rc 1/8 thread depth 5 SS T Bore size (mm) 2 x 2-4.3 through 2 x 2-8 counterbore with depth 4.3 2 x 2-5.5 through 2 x 2-9.5 counterbore with depth 5.3 2 x 2-6.5 through 2 x 2-11 counterbore with depth 6.3 2 x 2-6.5 through 2 x 2-11 counterbore with depth 6.3 2
Pressure Momentary change Set-value P-1 H-1 t (ms) t (ms) Time
87 95 70 80.5 XLFV-80-2 90 257 117 114 110 83 90.5 Model K L M N S T XLFV-16-2 17.2 10.2 3.6 3.6 M5 M5 XLFV-25-2 21.4 10.2 3.6 3.6 M5 M5 XLFV-40-2 33.9 10.2 3.6 3.6 M5 M5 XLFV-50-2 35.3 12 4 2 Rc1/8 M5 XLFV-63-2 43.8 12 4 2 Rc1/8 M5 XLFV-80-2 59.8 12 4 2 Rc1/8 M5 11 XL-OMV0019 6.
(mm) P = Operating pressure [MPa] T 0425 T 0604 TU 0805 T 0806 1/8B T 1075 TU 1208 T 1209 1/4B TS 1612 3/8B T 1613 1/2B 3/4B 1B 4.9 4 2.5 l = Length of piping [mm] 12.6 6 4 a = Internal cross section of piping [mm ] 19.6 8 5 QC = Air consumption required for one reciprocation of rotary actuator [l (ANR)] 28.3 8 6 33.2 6.5 44.2 10 7.5 50.3 12 8 63.6 12 9 66.5 9.2 113 12 16 127 12.7 133
Body size 10 20 30 40 50 60 AV Thread type AU Metric thread (M5) Rc NPT G Nil AF N F AL20 Port size AR Body size Symbol Port size M5 1/8 1/4 3/8 1/2 3/4 1 10 20 30 40 50 60 (2) IR M5 01 02 03 04 06 10 Accessory When more than one specification is required, indicate in alphanumeric order. Note 2) For M5 and NPT thread types.
Grease pack part no.: GR-S-010 (10 g) Individual -X 527 Series CXT Dimensions: 12 to 25 S + Stroke X + Stroke H 4 x LD through, counterbore B depth C 4 x MM HP Depth M Back side 4 x J depth JK HG HA T PA T (N) d d NN RW RW PW QW PB GP E W Y Z 2 x M5 x 0.8 2 x RB G G HT U (NA) (Option) A L HN (Max.)
Display/Set pressure range 10.0 to -105.0 kPa -105.0 to 105.0 kPa -0.105 to 1.050 MPa Display/Min. setting unit 0.1 kPa 0.001 MPa Proof pressure 500 kPa 1.5 MPa Power supply Power supply voltage 12 to 24 VDC10%, ripple max. 10% (p-p) spec.
2 u r e q w No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !
Set pressure max. 0.5MPa 3 P P Approx. 133 Set pressure max. 0.9MPa 5 P P Connection Rc(PT) 1/4 02 P P eL-bracket rT-bracket Connection Rc(PT) 3/8 03 P P Connection Rc(PT) 1/2 04 P Bracket B p p Accessories 178 Bracket C p p Connection NPT1/4 N02 p p qAF3000 wAFM3000 eITV2000 Connection NPT3/8 N03 p p Connection NPT1/2 N04 p Connection G(PF) 1/4 F02 p p REGULATOR Connection G(PF) 3/8 F03
Cushion needle Q + Stroke PG MY1B P P (MY1HG) MY1H MY1H (Hexagon socket head taper plug) 1 (Hexagon socket head taper plug) QQ SS RR YH MY1B PP QQ RR SS A B H NE NH NF MY1M P P (MY1HG) P (Port) P (Port) PP (Hexagon socket head taper plug) (Hexagon socket head taper plug) G G MY1C TTT UU UU TT A N Z + Stroke MY1H P MY1 HT P (Port) (Hexagon socket head taper plug) MY1 W MY2C P P (Port) (Hexagon
S T V W X Y ZZ LD 20 25 121 5.5 40 55 M8 x 1.25 17 15 1/8 81 9.5 4.5 6.5 20 9 151 7 25 28 121 5.5 40 55 M10 x 1.25 17 15 1/8 81 11 3.5 5.5 20 9 156 7 32 30 133 6 45 60 M14 x 1.5 18 15 1/8 87 13 3 4 23 9 172 7 40 35 158 6 55 75 M16 x 1.5 22 21 1/4 108 16 5 0 25 11 198 9 6 Series CHN Dimensions Front flange type: CHNF Width across flats B2 Rc P Rc P GA2 Cushion valve GB1 NN GB2 T V Rc P MM
kPa 100.0 to 100 kPa Symbol Calibration certificate Nil K p Piping specifications Option 2 M5 female thread/Side ported Piping port None Nil M5 Panel mount adapter + Front protective cover M5 female thread/Rear ported D Note 3) M5R Piping port R1/8/Side ported 01 DIN rail adapter Note 5) R1/8 Piping adapter R Note 4) NPT1/8/Side ported N01 Note 3) Not available for piping specifications
FHG Number of solenoids 1 (P) 5 (R1) 3 (R2) Sealing type (A) 4 (B) 2 S D Single Nil R Metal seal Double FJG Rubber seal 1 (P) 5 (R1) 3 (R2) Rated coil voltage (A) 4 (B) 2 Option 3 4 24 VDC FIG 12 VDC Nil Z None 1 (P) 5 (R1) 3 (R2) Voltage other than above (50 VDC or less) Light/Surge voltage suppressor 9 A02 VS1 01 Sub-plate Thread type Size Rc Nil F T 01 02 Size 01 G Size 02 NPTF Port size
Process Pump (Diaphragm Pump) PB Series Compact, large capacity diaphragm pump, suitable for transferring and collecting a wide range of fluids Compact, large capacity diaphragm pump, suitable for transferring and collecting a wide range of fluids o t p m s l a i PA z P e Built-in solenoid valve only RoHS Smaller, lighter, 25% reduction in volume Smaller, lighter, 25% reduction in volume
rev) n [Type of Motor: S6,S7,S8] Absolute 18bit encoder (Resolution: 262144 p/rev) Encoder [Type of Motor: T6,T7,T8] [With LECSB-T/LECSS-T] Absolute 22bit encoder (Resolution: 4194304 p/rev) [With LECSC-T] Absolute 18bit encoder (Resolution: 262144 p/rev) Type Note 5) No excitation operating type unit Lock spec Holding force [N] 78 131 255 131 197 385 220 330 660 Power consumption [W] at
x 0.8 1 (SUP) port 2-M5 x 0.8 3 (EXH) port L2 L1 3 10.5 7 SYJ P = 7.2 4.3 8 21.5 4.3 4.0 VK 11.9 3 1 3 1 18.9 VZ 24 22 5 150 (Lead wire AWG#26) 22 VT 2-3.4 Mounting hole 6.4 VP VG VP n U side 1 2 3 4 5 D side S070 VQ (21.5) (10.5) 21.5 2 2 VKF 3.9 P = 7.2 11 VQZ n-M3 x 0.5 2 (OUT) port VZ VS VFN Dimensions Formulas: L1 = n x 7.2 + 8.8, L2 = n x 7.2 + 14.8, n: Stations (maximum 20 stations
P P P K K K K C C C C U U U U O O O O S S S S H H H H L L L L to to to to Possible to change to the optional mounting angles.