MB1

This may cause damage to the machinery. ) m m ( e z i s e r o B e v l a v n o i h s u C s t a l f s s o r c a h t d i W h c n e r w n o g a x e H 0 5 , 0 5 , 2 3 7 4 2 1 C 0 1 2 3 B M 5 . 2 5 . 2 y e k h c n e r w n o g a x e H 0 0 1 , 0 8 , 3 6 0 5 2 1 C 0 1 3 6 B M 4 4 y e k h c n e r w n o g a x e H Mounting & Piping 2. Be certain to activate the air cushion at the stroke end.

Cylinder with Lock

Axial foot: MWBLm-UT-m Flange: MWBFm-UT-m 4 x FD LY LH FY FB 4 x LD LT FT FE FX FZ Y LA LB X X Y LZ LX [mm] [mm] Model LA LB LD LH LT LX LY LZ X Y 32 137 119 7 30 3.2 32 68.5 50 22 9 40 159 137 9 33 3.2 38 75.5 55 24 11 50 170 148 9 40 3.2 46 89 70 27 11 63 188 160 12 48 3.6 56 100.5 80 27 14 80 218 190 12 55 4.5 72 119.5 100 30 14 100 244 212 14 65 4.5 89 138.5 120 32 16 Model FB FD FE

Compact 5-Port Solenoid Valve

n1 + 9 x n2 + a + b x n3 L2 = 6.5 x n1 + 9 x n2 + 43.4 M = {(L1 + c) / 12.5} + 1 Decimal fractions are truncated.

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Indicator/Pilot port direction XMA Rear flange surface XYA Symbol Nil A F J K M Rear flange surface Indicator Without indicator Pilot port direction Indicator Without indicator Pilot port direction Symbol Nil A F G J K L M Right flange surface Left flange surface Right flange surface Left flange surface Rear flange side Rear flange side Left flange surface Right flange surface Left flange

Environment

4 mm) LEJ Vent hole Note 3) V EV J LEL M PA LEM M U D LEY K Note 2) 4 x O1 thread depth R L S M Y 4 x O1 thread depth R M EH PC A + Stroke B + Stroke LES LEPY LEPS XA H9 depth XA 6 x MO thread depth MR LER Section XX details MH LEH LEY -X5 LEY -X5 MA ML + Stroke MC MD Section XX XB 11LEFS XA XA H9 (MB) 11LEJS 25A[mm] LEC Size Stroke range [mm] A B C D EH EV H J K L M O1 R PA PB V LEC S 25

Table of Contents

Load factor: ((Load weight x 9.8)/Theoretical force) x 100% Conditions Body ported Series CJ2 Series CM2 Series MB, CA1 T0425 x 1 m Tube bore x Length VQ0149-C4 Speed controller AS2001F-04 AN103-X233 Silencer Tube bore x Length T0604 x 1 m 30 41 VQ11 -C6 Speed controller AS3001F-06 Silencer AN103-X233 T0806 x 1 m Tube bore x Length VQ2149-C8 Speed controller AS3001F-08 Silencer AN200-KM8

Series IDG

(H) (J) F E (K) L IDG30V, 50V IDG30HV, 50HV IDG30LV, 50LV, 60LV, 75LV, 100LV IDG60SV, 75SV, 100SV A B C (G) D IN OUT M (H) E (J) F Drain discharge With differential pressure type auto drain With float type auto drain With drain guide (Q) (N) (P) N.O.: Black N.C.: Gray Thread size: 1/4 Applicable tube O.D.: 10 (NPT threads: 3/8 inch) Width across flats 17 M5 x 0.8 With auto drain Differential

15

Dimensions: Motor Top Mounting LEYG25, 32 Motor flange Y2 Motor Rod operating range Note 1) (Stroke + 4 mm) 4 x NA Section XX1 4 x OA through thread depth NB H M EV S Q U GA J Y (EB) EA M C EH T EB X 0.5 XA H9 depth XA EC ED B + Stroke Y1 L + Stroke 4 x OA thread depth OB XA H9 DB X Section XX1 (2:1) Bottom hole G through Note 2) depth XA 2 x NA thread depth NC (R2) XAH9 DA P XB (0.5) K Section

Compressed Air Preparation Filter

Activated carbon filter Bracket B Bracket A Mounting screws Bracket mounting view Accessories Sold Separately/ International Standard Specific Product Precautions 22 AMK Series Dimensions AMK20 AMK30 AMK40 S N T J D M S N T U D J M U 2 x P 2 x P Q R Q R (Port size) (Port size) G B V C V C B IN OUT IN OUT Maintenance space A Maintenance space A E G AMK50 AMK60 D M J N T S U 2 x P R (Port size

Pneumatic Transfer System Series MF

Applicable cylinder D G F H L I C E J K M N Part No.

Series VQ Base Mounted Metal Seal/Rubber Seal

Characteristic Cable length (L) Multicore vinyl cable 0.3mm2 X 25C Conductor resistance /km, 20C Voltage limit V, 1min, AC 65 or less 1.5m 3m 5m AXT100-DS25-015 Cable 25 core X 24AWG AXT100-DS25-030 10 1000 AXT100-DS25-050 Insulation resistance M/km, 20C 5 or more For other commercial connectors, use a 25-pin female connector made in conformity with MIL-C-24308.

CG5-S

(mm) Stroke range A Bore size (mm) NA MM AL B1 B2 BM BZ C D E1 F1 GA GB H H1 I J K KA M 20 29 to 350 M8 x 1.25 18 15.5 13 7 M4 x 0.7 9 16.5 8 15 3 18 12 35 5 31 M4 x 0.7 depth 7 5 6 3 25 29 to 400 M10 x 1.25 22 19.5 17 8 M5 x 0.8 9.5 18.5 10 17 3 18 12 40 6 33 M5 x 0.8 depth 8 5.5 8 3.5 32 35.5 to 450 M10 x 1.25 22 19.5 17 8 M5 x 0.8 9.5 20 12 19 3 18 12 40 6 38 M5 x 0.8 depth 8 5.5 10 3.5

Compact Cylinder

0.7 7 16 M4 x 0.7 7 Auto switch Minimum lead wire bending radius 10 H thread effective depth C 4 x N through Q F 2 x M3 x 0.5 (Port size) I D M E Z L B + Stroke K A + Stroke M G J W 16 Minimum lead wire bending radius 10 Auto switch Q F 4 x N through H thread effective depth C 2 x M3 x 0.5 (Port size) I D M E Z L B + Stroke K A + Stroke M G J W Standard [mm] Bore size Stroke range Without

Integrated Controller

FV M FZ FX FT FX FZ 4 x FD FT 4 x FD The head flange type is not available for the EQY32.

SFOD-OMT0009CN

() 7.1 XX X 512 2048 X 0 1 0 1 X 1 () X 1 INP ON INP ON() X 1 () X 1 () X 1 X 14 1 4 [] (1) 1 12 23 24 3 1 2 3 4 (2) 1 12 13 14 1 14 X 14 4 1 2 1++ X 2+ 1) 48 No.SFOD-OMT0009CN-B 7.2 XX X -= ID 1) +[ mm] XX (+) 1) -[ mm] XX (-) 1) [ mm/s] [mm/s] HOLDRESET 1) 1) INP [ mm] XX [ mm] 0mm M (0mm) 100mm 1) XX M (100mm) (+) (-) 1) XX 1 1) 49 No.SFOD-OMT0009CN-B

MRHQ

energy of the load + attachments (2 pcs.) is no more than the allowable value. 1/2 x IR x 2 < Allowable energy (J) = 2/t (: Angular speed at the end) : Rotation angle (rad) 1/2 x 0.05 x (2 x (3.14/2)/0.2)2 = 0.0062 0.0062 J < Allowable energy OK Refer to Moment of Inertia Calculation and Allowable Kinetic Energy on page 12-11-12. t: Rotation time (s) 12-11-6 7 Rotary Gripper Series MRHQ

CHKD/CHKG

(M) -125 (M) -150 (M) -175 (M) -5 (M) -10 (M) -15 (M) -20 (M) -25 (M) -30 (M) -35 (M) -40 (M) -45 (M) -50 (M) -75 (M) -100 (M) -125 (M) -150 (M) -175 (M) CQ-M10 x 80L x 85L x 90L x 95L x 100L x 105L x 110L x 115L x 120L x 125L x 150L x 175L x 200L x 225L x 250L CQ-M12 x 85L x 90L x 95L x 100L x 105L x 110L x 115L x 120L x 125L x 130L x 155L x 180L x 205L x 230L x 255L CQ-M14 x 100L x 105L

Modular Type Filter Regulator Series AW

75 75 B 108 160 201 239 242 E 28 40 57 73 73 P 30 44 46 54 56 K 0 5 3.5 1.5 1.2 M 25 30 41 50 50 N 28 34 40 54 54 Q 4.5 5.4 6.5 8.5 8.5 H 26 63 66 76 76 G 25 40 55 80 80 Y 14 19 21 21 U 2 2.3 2.3 2.3 2.3 T 40 55 53 70 70 Z 6 7 7 7 W 18.5 28.5 38.5 42.5 42.5 B 125 177 242 278 278 V 18 30 31 35.5 37 J 27 30.5 38.5 38.5 S 6.5 15.4 8 10.5 10.5 AW10 AW20 AW30 AW40 AW40-06 M5 x 0.8 1/8, 1/4

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

Stroke + G mm) T Z LEF V EV J H thread depth C LEJ LEL U M M LEM D 4 x O1 thread depth R Y L B + Stroke A + Stroke LEY K Note 2) M EH M S 4 x O1 thread depth R LES XA H9 depth XA 6 x MO thread depth MR LEPY LEPS Note 1) Range within which the rod can move.

JXCx-OMT0001CN

() Max step data Num 512 2048 X 0 1: Activated axis 0 1 X 1) Pushing force () X 1) INP ON Trigger level INP ON() X 1) () X Pushing speed 1) () X Moving force 1) X Axis name 14 14 [] (1)1 :12 :23 :24 :3 1 2 3 4 (2)1 :12 :13 :14 :1 ORIG order 1 4 X 4 4 Adapter file version 1: 2:+ Para protect 1 2 X 1 -48No.JXC-OMT0001CN-C 9.2 XX X () Controller ID 1) [mm] XX Stroke(+) 1)