HAW

IDFB ID IDG Pressure drop = = (0.7 + 0.1013) x P P1 + 0.1013 0.8013 x 0.0065 0.3 + 0.1013 = 0.013 MPa AMG AFF Construction AM HAW2/7 HAW22 to 110 Air inlet Air outlet AMD q w e u r i t Air outlet Air inlet AMH Cooling water outlet Cooling water outlet AME Cooling water inlet Cooling water inlet AMF SF SFD Drain y y LLB Note) Chart shows HAW22 to 75.

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

fitting dimension Y W Plate thickness ARP20(K), ARP30(K) : Max. 3.5 ARP40(K) : Max. 5 OUT IN 1021 1021 Z Pressure Gauge Option Digital pressure switch (Electrical entry: Wiring top entry) Digital pressure switch (Electrical entry: Wiring bottom entry) Option Round type pressure gauge J J J H Dimensions Center of piping H Center of piping H Center of piping Standard specifications Model P1

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

Valve r opens through the stem, and the outlet pressure is released to the inlet side (Figure 2). 707 Series ARP20/30/40 Dimensions 2 x P1 (Port size) A Pressure gauge (Option) Q C OUT IN K V P2 (Pressure gauge port size) B R Bleed port F S U D N Bracket (Option) J M T Panel fitting dimension Y W Plate thickness ARP20(K), ARP30(K): Max. 3.5 ARP40(K): Max. 5 OUT IN Z Pressure Gauge Option

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

Valve r opens through the stem, and the outlet pressure is released to the inlet side (Figure 2). 765 ARP20/30/40 Series Dimensions 2 x P1 (Port size) A Pressure gauge (Option) Q C OUT IN K V P2 (Pressure gauge port size) B R Bleed port F S U D N Bracket (Option) J M T Panel fitting dimension Y W Plate thickness ARP20(K), ARP30(K): Max. 3.5 ARP40(K): Max. 5 OUT IN Z Pressure Gauge Option

Direct Operated Precision Regulator/Modular Style (For Special Applications) - ARP20 to - ARP40 Direct Operated Precision Regulator with Backflow Function/Modular Style (For Special Applications) - ARP20K to - ARP40K 10 20 21 10 20 21 10 20 21 10 20 21

K), ARP30(K): Max. 3.5 ARP40(K): Max. 5 OUT IN Z Pressure Gauge Option Digital pressure switch (Electrical entry: Wiring top entry) Digital pressure switch (Electrical entry: Wiring bottom entry) Square embedded type pressure gauge Option Round type pressure gauge J J J J H Dimensions Center of piping H H Center of piping H Center of piping Center of piping Standard specifications Model P1

AR Series Modular Type Regulator

Assembly of a piston and a seal (KSYP-13). 454 Regulator AR10-A to AR40-A Series Dimensions AR10-A to AR40-06-A 2 x P1 (Port size) J A AC-A AF-A B C AF-A OUT IN H AR-A AR-A V AL-A Q AW-A (Pressure gauge port size) Pressure gauge (Option) 2 x P2 AC-B R S AF-A F AF-A U D Bracket (Option) AR -A -B N J M T AL-A AW -A -B Panel fitting dimensions AW Y AG W E AV IN OUT AF Z Plate thickness AR10-

CJ2X/CUX/CQSX/CQ2X/CM2X

As a guide, when W + P0a > P0A, adjust P1, so that it could be W + P1a = P0A. (1) The speed is controlled with meter-out control. When the meterin controller is used in conjunction with the meter-out controller, lurching is reduced. () (2) Installing a regulator with check valve at position (b) can decrease lurching during descent, and actuation delay during ascent.

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

fitting dimension Y W Plate thickness ARP20(K), ARP30(K) : Max. 3.5 ARP40(K) : Max. 5 OUT IN 1021 1021 Z Pressure Gauge Option Digital pressure switch (Electrical entry: Wiring top entry) Digital pressure switch (Electrical entry: Wiring bottom entry) Option Round type pressure gauge J J J H Dimensions Center of piping H Center of piping H Center of piping Standard specifications Model P1

Compact Cylinder with Solenoid Valve/

Example) Lead wire length 2000 mm Electrical entry When ordering cylinder with valve CVQM32-30-M9B-5MOZ SY100-30-4A-20 M-type plug connector with lead wire (Lead wire length 300 mm) M MO M-type plug connector without connector 5 Series CVQM Dimensions 32 to 63 EXH 2 x P2 F SUP P1 S S Q 2 x HB through Manual button 2 x HA through V W 2 x 2 x OA effective length RA KA 2 x N through Y EB (KB

0.4

Flow rate characteristics: C Max. operating frequency 0.8 MPa 0.15 MPa 5 to 50C 0.60 dm3/(sbar) 180 c.p.m SZ SUP side pressure (P1) To CYL port VVQ1000-FPG-02 1 set VQ1000-FPG-C6M5-D 2 pcs.

5 Port Pilot Operated Solenoid Valve Metal Seal, Plug-in/Non Plug-in Series VZS3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

Plug-in type Non plug-in type VVZS3000-22A-1 VVZS3000-22A-2 VFN G L M KZ D Cylinder side pressure Check valve Applicable valve model VZS3450-FZ VZS34504(A) 2(B) 3(R2) 5(R1) 3(R2) 5(R1) 3(R2) 5(R1) 210 Ncm3/ min or less Solenoid one side energized 1(P) 210 Ncm3/ min or less Leakage 0.5 MPa Solenoid both sides energized 1(P) Piston SUP side pressure P1 SUP side pressure P1 (MPa) 0 Operating

XLAQ/XLDQ

P1 70W XGT Kalrez Q1 R1 R2 R3 S1 T1 4079 SS592 SS630 SSE38 1232-70 3310-75 To order something else Nil (standard), list the symbols starting with X, followed by each symbol for "body surface treatment", "seal material" and then changed parts at last. CYV Chemraz Example) XLAQ-25-M9NA-XAN1A VMQ FKM for Plasma ULTIC ARMOR U1 UA4640 Produced by Mitsubishi Cable Industries, Ltd.

Vacuum Unit

Pmax Vacuum pressure P1 1. If the ejectors suction port is closed and sealed tight, the suction flow becomes 0, and the vacuum pressure increases to the max. (Pmax). 2. If the suction port is opened gradually and air is allowed to flow (the air leaks), the suction flow increases, and the vacuum pressure decreases. (The condition of P1 and Q1) 3.

Vacuum Pad

At this time, read vacuum pressure P1, obtain the suction flow rate from the flow-rate characteristics graph for the ejector that is being used, and render this amount as the leakage of the workpiece.

ZP

At this time, read vacuum pressure P1, obtain the suction flow rate from the flow-rate characteristics graph for the ejector that is being used, and render this amount as the leakage of the workpiece.

ZU

Pmax P1 Vacuum pressure Qmax Q1 Suction flow rate 13-6-4

HAA

Mounting frame (Option: Refer to page 11, Accessories.) 12 Air Cooled Aftercooler Series HAA Flow Characteristics Air pressure 0.7 MPa (Example) To get pressure drop at 0.3 MPa of air pressure, 2000 l/min (ANR) of air flow, and model HAA22, use P = 0.0007 MPa at 0.7 MPa from the table and convert P1 to 0.3 MPa.

Clean Regulator/Fluororesin Type

Set pressure Inlet pressure P1: 0.5 MPa Outlet pressure P2: 0.1 MPa Fluid: Water Model: SRF30 0.5 Inlet pressure 0.45 Piping Caution 0.4 Pressure (MPa) 0.35 0.3 1. Connecting tubes with special tools. Refer to the pamphlet: High-Purity Fluoropolymer Fittings Hyper Fittings/LQ1,2 Series Work Procedure Instructions (M-E05-1) for tube connection and special tools. 2.

Air Cooled Aftercooler Series HAA 1

Flow Characteristics Air pressure 0.7 MPa (Example) To get pressure drop at 0.3 MPa of air pressure, 2000 l/min (ANR) of air flow, and model HAA22, use P = 0.0007 MPa from the table and convert P1 to 0.3 MPa.

Series HAW Water Cooled Aftercooler 1

Thermometer Air outlet Air inlet Outside tube Pressure drop (MPa) Cooling water outlet Cover Cooling water inlet Drain separator (Housing) Water chamber cover Stop valve Flower fin tube assembly Drain Air flow rate (m3/min (ANR)) (Example) To get pressure drop at 0.3 MPa of air pressure, 5 m3 /min (ANR) of air flow and model HAW75-20, use 0.0065 MPa at 0.7 MPa from the table and convert P1