SMC Corporation of America
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Sonic conductance C: 1 to 18 [dm3/(sbar)] Connection method M thread, R (NPT) thread type One-touch fitting connection type New New New New model Series AN CAT.NAS13-9A Page Silencer Variation M3 M5 1/8 1/4 3/8 1/2 3/4 1 1 1/4 1 1/2 2 New New New Compact Resin Type/Male Thread Series AN05 to 40 Page 2 Compact, Lightweight Noise reduction: 30 dB(A) Newly added port size New New New Compact

4 !2 y r i q !9 !8 @2 @0 @3 @5 @8 @7 o u !7 t CY3R15, 20 CY3R15 Parts list No. Description No.

Width across flats B1 GA GB Bore size A AL B1 H H1 MM ZZ 2-Rc P H1 20 14 12.7 11.0 25.4 4.0 1/4-28 108.4 M BM 25 14 12.7 12.6 28.4 4.8 5/16-24 111.4 (E1) 32 21 19 17.3 41.4 6.4 7/16-20 126.4 D I 40 19 16.6 17.3 41.4 6.4 7/16-20 134.4 MM BZ B2 AL A 50 22.4 19.8 18.8 52.6 7.9 1/2-20 161.6 K KA 63 22.4 19.8 18.8 52.6 7.9 1/2-20 161.6 (F1) Plug bolt (4 pcs. included) C 80 8-J 0.1 S + Stroke

Refer to the page 58 for details. 4.5 5 5 Circuit Diagram Power supply terminal block PCW-EC16Z00 PCW-EC16Z01 20 18 16 14 12 10 8 6 4 2 Input/output connector (CS0) 0 1 2 3 4 5 6 7 19 17 15 13 11 9 7 5 3 1 Green Red F E D C B A 9 8 9 8 7 6 5 4 3 2 1 0 F E D C B A 4 3 2 1 CN1 4 3 2 1 CN2 4 3 2 1 CN3 4 3 2 1 CN4 4 3 2 1 CN5 4 3 2 1 CN6 4 3 2 1 CN7 4 3 2 1 CN8 4 3 2 1 CN9 4 3 2 1 CNA 4 3 2 1

SMC CORPORATION Contents Chapter 1: Read Before Use 38 Chapter 2: Product Summary 2-1. System Configuration 910 2-2. How to Order 11 2-2-1. MONOSASHI-KUN with BRAKE 11 2-2-2. Options 12 Chapter 3: Selection Flow Chart to Confirm Utility 1314 Chapter 4: Specifications 4-1. Cylinder Specifications 15 4-2. Sensor Specifications 15 4-3.

rise (C) 45 or less For Safety Instructions and Solenoid Valve Precautions, refer to pages 4-18-2 to 4-18-6.

/N.O. 1/8 to 1/2 6 to 12 2, 3, 4, 5, 7, 8, 10 IN OUT IN OUT 2, 3, 4, 5, 7 N.C./ N.O. 3/8 1/8 1/4 1/8 1/4 3/8 Pilot Operated Series VXD Zero Differential Pressure Series VXZ Series VXS Steam Steam Air Air Oil Oil Water Water Heated water Air Air Oil Oil Water Water Heated water Heated water High temperature oil High temperature oil Heated water High temperature oil High temperature oil Can

washer 2 22 Cushion pad 2 21 Piston packing 4 20 End cover gasket 1 19 Cover gasket 2 18 Packing 1 17 Retainer 2 16 Bearing 2 15 Cross recessed No.0 screw 1 14 Cross recessed No.0 screw 4 13 Hexagon socket head screw 8 12 Adjust bolt 2 11 Small hexagon nut 2 10 Magnet 2 Including magnet built-in type 9 Wear ring 4 8 Packing retainer 2 7 Bearing retainer 1 6 Shaft 1 5 Piston 2 4 End cover

A-C ON Orange P A P A Orange OFF A R B-C ON (Reset) A R Green 4-12-4 5 Series VQ100 Precautions Be sure to read before handling. For Safety Instructions and Solenoid Valve Precautions, refer to page 4-18-2. How to Use Circular Connector How to Connect/Disconnect DIN Rail (For plug-in manifold: For VV3Q11) Caution Caution Removal 1.

A-C ON Orange P A P A Orange OFF A R B-C ON (Reset) A R Green 4-12-4 5 Series VQ100 Precautions Be sure to read before handling. For Safety Instructions and Solenoid Valve Precautions, refer to page 4-18-2. How to Use Circular Connector How to Connect/Disconnect DIN Rail (For plug-in manifold: For VV3Q11) Caution Caution Removal 1.

Note 3) Weight without sub-plate 1.12-35 VQZ1000/2000/3000 Base Mounted Construction: VQZ1000/2000/3000 Metal seal Rubber seal 4 3 2 1 4 3 2 1 2 position single 2 position single (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 4 3 2 1 4 3 2 1 2 position double 2 position double (B) 2 (A) 4 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 4 3 2 1 4 3 2 1 (1) 3 position closed

(A) 2 (A) 2 2(A) 2(A) 3(R) (P)1 3(R) (P)1 i i 3 (R) 1 (P) 3 (R) 1 (P) u u Component Parts Replacement Parts Description Body Piston plate End cover Piston Spool valve assembly Spool spring No. No. 1 2 3 4 5 6 Description Note White White White Note Part no.

Modular Style Regulator with Built-in Pressure Gauge Series ARG Regulator with Built-in Pressure Gauge Series ARG Accessory Port size Model ARG20 1/8, 1/4 ARG30 1/4, 3/8 ARG40 1/4, 3/8, 1/2 Bracket Pages 20 to 23 Set nut for changing the mounting angle of pressure gauges Regulator with Built-in Pressure Gauge with Back Flow Mechanism Series ARGK ARG20K 1/8, 1/4 ARG30K 1/4, 3/8 ARG40K 1/4,

Capable Built-In Magnet 2 Pieces S 1 Piece n n Pieces M O U N T I N G See NCJ2 Accessories Section A P P L I C A B L E A U T O S W I T C H B Basic L Axial Foot F Rod Side Flange S T D S T R O K E/H U N D R E D T H S O F A N I N C H B O R E S I Z E 6 (1/4) 050, 100, 150, 200 10 (3/8) 050. 100. 150, 200 16 (5/8) 050, 100, 150, 200 6 (1/4) 10 (3/8) 16 (5/8) T E C H N I C A L SPECIFICATIONS

2 B 2 B B 2 B 2 B 2 BUS IN 56.6 8.7 3/5 E 3/5 E A 4 A 4 A 4 PWR A 4 A 4 (For DIN rail mounting) 11.8 7.5 Note 1) These figures show the SS5Y5-M12SQA-05D.

2 Port for Steam Dimensions (mm) 1in = 25.4mm Grommet: G Conduit: C Q Approx. 300 F D Approx. 280 D Q F C G (PF) 1/2 C R R E E B A H 2-P Port size 2-P A B H 2-M Port size 2-M Thread depth N L L K K Conduit terminal: T F (Q) 34 25 U R C G (PF) 1/2 E B A H D 2-P Port size (S) 2-M L K N.C.

) 2 (B) IP65 enclosure compliant kit (Circular connector) 10 5 6 7 8 9 3 4 1 2 1 (P) 1 (P) 1 (P) Features 2 26 pins 5 6 7 8 9 10 1 2 3 4 Series VS 8-4 S R VS 8-2 S R 1 Base Mounted: Variations Series Metal seal Rubber seal Metal seal Rubber seal VSR8-4 VSR8-2 VSS8-4 VSS8-2 Sonic conductance C [dm3/(sbar)] 4.2 4.2 3.4 3.2 2.2 2.1 1.7 1.6 Single/Double 4/2 5/3 A/B EA/EB 3-position (Closed

16 11 3/8 13 1/2 B O D Y S I Z E 1 M5 2 1/8, 1/4 Standard 3 3/8 Standard 4 1/2 Standard T H R E A D P O R T S I Z E M5 ...M5 U01 ..1/8 U02 ..1/4 U03 ..3/8 U04 ..1/2 U32 ..10-32UNF 01 ... 1/8 02 ... 1/4 03 ... 3/8 04 ... 1/2 W I T H O N E-T O U C H F I T T I N G S T Y P E 2 Elbow 3 Universal C O N T R O L M E T H O D 0 Meter Out 1 Meter In Courtesy of Steven Engineering, Inc. !

C 20m Vcc B-4 12 GND A-4 13 A B-5 7 A A-5 6 B B-6 9 B A-6 8 3 14.2 2 1 (5.5) 14 B1 A1 5 6 17.7 2 1 18 A6 B6 (6.3) 15 16 11 30.7 44 - 113 [5m ] A B-1 2 A A-1 1 L B B-2 6 B A-2 5 1 1.5m COM-A/COM B-3 3 3 3m COM-B/ A-3 4 5 5m Shield Vcc B-4 12 GND A-4 13 A B-5 7 A A-5 6 B B-6 9 B A-6 8 3 S 4 B-1 5 A-1 1 B-3 2 A-3 (8) 14.2 B1 A1 17.7 2 1 14 18

industrial robots -Safety JIS B 8370: JIS B 8361: JIS B 9960-1: 1 ) JIS B 8433: *2) (1) (2) (3) 1. 2. 3. (4) 1. 2. 3. 4. 3 No.SFOD-OMT0011CN-A JXC*3 Series/ 1. / *3) (1)1 1.5 (2) (3) 3) 1 1 4 No.SFOD-OMT0011CN-A 2. 4 , 2.1 4 (16 ) 2.2 1) Windows 7 (32bit / 64bit) Microsoft .NET Framework 2.0 Windows 8.1 (32bit / 64bit) Microsoft .NET Framework 3.5 OS 50MB USB 1)