Air Cylinder

2 !7 !8 @2 !4 !5 CJ1 CJP CJ2 !9 @ B @ C JCM @1 @0 CM2 CM2 Rod section CM3 CG1 Boss-cut Integrated clevis CG3 JMB Spring extend !7 !2 !3 !8 @ A !5 !6 @2 q i u e o r y !0 !1 MB MB1 CA2 CS1 CS2 @ B @ C !9 @1 t @0 Rod section Boss-cut Integrated clevis Component Parts No.

•

Width aCl oss lIals (M6:8, MS: 1 2) . k=~ ~2.5 Wtdlh aCI06S flats ("'"'6 .6., M8: (2) 0 ;] ~ ru Width across lials: G Wi dth across Ilats I )Y!gt1!.<)Gf S flats 1 " ,1 1 5 ' C ~ ~! ~ ;C !_8_ (mm) , A , 8 ' .. ---.t! R at type Flat with rib , I Mqde~ . > Il. 9, Y .C Rat type (mm) y . H :M6)$1 . ..Ii:M8'Xl . i ,8 0 MOOsl M E F I . , 1 .F!a, >C I E F I G. r '.e G lit"'" lb.

Table of Contents

Stopper ring Block C MSU CRJ Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CRA1 Stopper ring Block D Block D Block C CRQ2 Counterclockwise Counterclockwise 2-2> 2> MSQ The maximum rotation range of the shaft with single flat in Fig. 2-2 is 195, from

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Stopper ring Block C MSU CRJ CRA1 Stopper ring Block D Block D Block C CRQ2 Counterclockwise Counterclockwise 2-2> 2> MSQ The maximum rotation range of the shaft with single flat in Fig. 2-2 is 195, from end of rotation q to end of rotation w.

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

Stopper ring Block C MSU CRJ Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CRA1 Stopper ring Block D Block D Block C CRQ2 Counterclockwise Counterclockwise 2-2> 2> MSQ The maximum rotation range of the shaft with single flat in Fig. 2-2 is 195, from

NCA1

KK NCM 1/32 R NCA 0.001 0 EA MM BA TD UV E AA B D-X A C FA G TT J LF + Stroke ZB + Stroke R WF TL TM TL E 20Data TD0.001 0 ZB TL TM TT UM UV WF A Y AA LF B P BA XI C D DD E EA EE FA G MM J R KK Bore size (in) 200 (2") 1 5 1/8 1 3 1.18 5 2.56 1 3/8 1 1/8 2.09 2.6 3 5/8 1 1/2 2.40 1 1/8 3.29 1/2 7/8 5/16-24 2 1/2 0.3 3/8 3/8 1 1.26 1.06 1.84 3/4-16 250 (2.5") 1 5 1/4 1 3 1/2 1 1.18 5 1/2 3

NCA1

1/2 3/4 0 1 1/4 4 1/2 1/4 3/8-24 4 1/2 2 1 1/4 1/2 5/8 4.7 1 1/2 1 5/8 7 7/8 1-14 1 3/8 Oversized Rod-Rod Side Flange Style: NCA1F (XB5) P + Stroke Y C 2-EE (NPTF) 4-FB (Hole) AA D across flats KK B MM EA BA E R A W F G J 4-DD TF LF + Stroke WF ZB + Stroke UF Bore size (in) MM KK A AA B BA C D DD E EA EE F FB G J R TF UF W WF LF Y P ZB 200 (2") 1 3/4-16 1 1/8 2.6 1 1/2 1 1/8 1/2 7/8 5/16

IDU/IDF

Features 2 Model Selection 1 Obtain the correction factor for the temperature from data A or B and the correction factor for the air pressure from data C. Temperature Data A or B = Series IDU: Data A IDF1D to 240D: Data B-1 IDF 370B: Data B-2 Air pressure Data C = Series IDU and Series IDF: Data C 2 Calculate corrected air flow by using A or B and C.

NCA1

2.76 1 3/8 2.34 4.64 2.72 9.38 400 (4) 1 3/4-16 1 1/8 4.7 1 1/2 1/2 7/8 3/8-24 4 1/2 0 1/2 1.57 27/64 3.32 1 3/8 2.34 4.64 2.72 9.38 (in) Bore (in) b c d SN NT ND TN 150 (1.5) 1 1/2 1.25 1.80 2 1/4 1/4-20 9/32 5/8 200 (2) 1 21/32 1.64 2.19 2 1/4 5/16-18 7/16 7/8 250 (2.5) 1 21/32 1.64 2.19 2 3/8 3/8-16 19/32 1 1/4 325 (3.25) 2 9/32 2.48 3.37 2 5/8 1/2-13 5/8 1 1/2 400 (4) 2 9/32 2.48 3.37

2 Phase Stepper Motor/Without Motor Brake Series LXP

Refer to page 100 for part numbers. 291 Made to Order Series LXF/LXP/LXS Short Stroke Type Low Particulate Generation Specification With Motor Brake/Without Motor Brake How to Order LXFH 5 B 1 C 25 GD X60 Low Profile Slide Table Type LXPB 2 B 1 B C 50 F9N X60 Guide Rod Type LXSH 2 B 1 B C 50 F9N X60 High Rigidity Slide Table Type Motor type Low particulate generation specification 2 phase

Table of Contents

(mm) Thread Weight g Applicable tubing A B C D E F H Model 3 2 1 M3 x 0.5 M5 x 0.8 M-3AU-2 M-5AU-2 4.5 7 9 10 3 4 5 7.7 0.9 0.7 1.5 4 2 x 1 .2 4 Thread Component Parts E D Material Brass Brass No. 1 2 3 Description Sleeve Barb fitting Gasket Note Electroless nickel plated Electroless nickel plated F K NBR, Stainless steel M B C A H Width across flats H Barb elbow: M-3ALU-2, M-5ALHU-2 D Applicable

CJ2

Stroke Rod end nut Applicable bore (mm) 6 10 16 Z + 2 x Stroke B C d H Part no.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

6 e u @4 @0 @1 @2 w !4 !2 !0!1 !3 !

Vacuum

Standard specifications C o Fear pressure gauge mounting R C) C c Connectron NPT 1/8 N01 C) Connection NPT 1/4 NM C o Connection NPT 3/8 NM C Note) Bfekels are shippedwiih thepack' ase (unassehbred) Port size Size ADolicable model Oplions Connection NPT 1/2 N04 Connection G 1/8 F01 o Connection G 1/4 FO2 a I a a 3ts a 1/2 a Connection G 3/8 F03 Connection G 1/2 F04 Accessory (Optional) Part

Vacuum

Standard specifications C o Fear pressure gauge mounting R C) C c Connectron NPT 1/8 N01 C) Connection NPT 1/4 NM C o Connection NPT 3/8 NM C Note) Bfekels are shippedwiih thepack' ase (unassehbred) Port size Size ADolicable model Oplions Connection NPT 1/2 N04 Connection G 1/8 F01 o Connection G 1/4 FO2 a I a a 3ts a 1/2 a Connection G 3/8 F03 Connection G 1/2 F04 Accessory (Optional) Part

High Vacuum Angle Valve, XL Series

Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

Note 2) ( ): Denotes without sub-plate. 10-SV3000 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Weight (g) Note 2) Flow rate characteristics Note 1) Port Valve model Actuation type M12 waterproof connector (Cable length 300 mm) size C[dm 3/(sbar)] b Cv C[dm 3/(sbar)] b Cv Single 250 (121) 4.1 0.41 1.1 4.1 0.29 1.0 2 position Double 253 (124) 10-SV300--02 Closed center 3.0 0.43 0.80 2.6 0.41 0.72

High Vacuum Angle Valve

Inrush Current Flow Time (Reference) 200 V Current 100 V 0 5 15 10 20 25 30 Time [Second] 2 Mounting position of the heater Heater symbol XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 H4 (100C) (a) (a) (b), (c) (a), (b), (c) H5 (120C) (a) (b), (c) (b), (c) (a), (b), (c) (b), (c) (b) (a) (c) Heater (Option) 17 Aluminum High Vacuum Angle Valve: With Heat-resistant Auto Switch XLm Series Made to

0.4

Note 2) Metal seal only Note 3) When -COM. is specified for the SI unit, select and mount the valve of negative common. Note 4) Dual 3-port type is not applicable. 2 2-position double (Rubber) 4-position dual 3-port valve (C) 2(B) 4(A) 2(B) (A)4 Note) C C: Locking type (Manual) (R1)5 1 (P) 3(R2) 1(P) 5(R1) 3(R2) N.C. N.O.

MHZ

O B A MHC (mm) (mm) H 2.4 2.9 3.4 4.5 5.5 6.6 9 B 5 5.7 7 9 12 14 17 MM A 2.5 3 4 5 6 7 9 C 2 2 2.5 4 5 6 7 B 5 5.7 7 9 12 14 17 A 2.5 3 4 5 6 7 9 Model MHZ2-6 1 MHZ2-10 Model MHT MHZ2-62 MHZ2-10 M2 x 0.4 M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 1 N1 1 N1 1 N1 2 N2 2 N2 2 N2 2 N2 MHY MHZ2-16 MHZ2-16 MHZ2-20 MHZ2-20 MHW MHZ2-25 MHZ2-25 1 N1 MHZ2-32 1 MHZ2-32 2 MRHQ