Cylinder with Turntable Series MGT ø63, ø80, ø100 1

weight m(kg) Larger than 75st Load weight m(kg) 40 50 100 Larger than 50st 50st 25st 30 25, 50st 20 50 40 10 30 5 4 3 2 20 1 10 20 30 40 50 100 200 300 1 2 3 4 5 10 20 304050 100 200 300400 Eccentric distance l (mm) 10 400 Eccentric distance l (mm) Allowable side load F(N) 1 N: Approx. 0. 102 kgf F Stroke (mm) Bore size (mm) Model 25 50 75 100 125 150 175 200 MGTM 140 151 162 176 193 212

I/O Configurator (NFC version)

Detailed information of units 40 3.4.1. Information tab 40 3.4.2. Details of I/O monitor tab 49 4. Setting Function 56 4.1. Edit TAG 56 4.2. Software Control 56 4.3. Forced output 58 4.3.1. Forced output conditions 58 4.3.2. Forced output procedure 59 4.3.3. Forced output release procedure 62 4.4. Export Settings 63 4.5. Import Settings 65 4.6. Reading of the initial value 66 4.7.

I/O Configurator (NFC version)

Detailed information of units 40 3.4.1. Information tab 40 3.4.2. Details of I/O monitor tab 49 4. Setting Function 56 4.1. Edit TAG 56 4.2. Software Control 56 4.3. Forced output 58 4.3.1. Forced output conditions 58 4.3.2. Forced output procedure 59 4.3.3. Forced output release procedure 62 4.4. Export Settings 63 4.5. Import Settings 65 4.6. Reading of the initial value 66 4.7.

I/O Configurator (NFC version)

Detailed information of units 40 3.4.1. Information tab 40 3.4.2. Details of I/O monitor tab 49 4. Setting Function 56 4.1. Edit TAG 56 4.2. Software Control 56 4.3. Forced output 58 4.3.1. Forced output conditions 58 4.3.2. Forced output procedure 59 4.3.3. Forced output release procedure 62 4.4. Export Settings 63 4.5. Import Settings 65 4.6. Reading of the initial value 66 4.7.

FQ1

Model symbol (In-line filters) Element size 250mm 5 10 20 40 74 105 EM100-005 EM100-010 EM100-020 EM100-040 EM100-074 EM100-105 M005 M010 M020 M040 M074 M105 Bore size 65 x 250mm 04 06 10 Rc 1/2 Rc 3/4 Rc 1 5 10 20 40 74 105 EM200-005 x 4 EM200-010 x 4 EM200-020 x 4 EM200-040 x 4 EM200-074 x 4 EM200-105 x 4 M005 M010 M020 M040 M074 M105 Housing O-ring material N V NBR FPM 65 x 125mm Element

® SEMI Thermo-chiller Series HRW Fluorinated Fluid Type

Facility water system Electrical system Facility water temperature +27F (15C) Circulating fluid temperature Conditions 50 to 95F (10 to 35C) Facility water temperature 7.9 gpm (30 L/min) 1.1 gpm (4 L/min) 10.6 gpm (40 L/min) 10.6 gpm (40 L/min) Circulating fluid rated flow 5.3 gpm (20 L/min) 2.6 gpm (10 L/min) 10.6 gpm (40 L/min) 6.6 gpm (25 L/min) Facility water required flow rate Temperature

Filter for Cleaning Solvent Quick Change Filter Series FQ1

Model symbol (In-line filters) Element size 250mm 5 10 20 40 74 105 EM100-005 EM100-010 EM100-020 EM100-040 EM100-074 EM100-105 M005 M010 M020 M040 M074 M105 Bore size 65 x 250mm 04 06 10 Rc 1/2 Rc 3/4 Rc 1 5 10 20 40 74 105 EM200-005 x 4 EM200-010 x 4 EM200-020 x 4 EM200-040 x 4 EM200-074 x 4 EM200-105 x 4 M005 M010 M020 M040 M074 M105 Housing O-ring material N V NBR FPM 65 x 125mm Element

FQ1

Model symbol (In-line filters) Element size 250mm 5 10 20 40 74 105 EM100-005 EM100-010 EM100-020 EM100-040 EM100-074 EM100-105 M005 M010 M020 M040 M074 M105 Bore size 65 x 250mm 04 06 10 Rc 1/2 Rc 3/4 Rc 1 5 10 20 40 74 105 EM200-005 x 4 EM200-010 x 4 EM200-020 x 4 EM200-040 x 4 EM200-074 x 4 EM200-105 x 4 M005 M010 M020 M040 M074 M105 Housing O-ring material N V NBR FPM 65 x 125mm Element

Refrigerated Air Dryer

Symbol Nil 10 mm AM Coating color White 1 Weight lbs (kg) 40 (18) 55 (25) 57 (26) 64 (29) 73 (33) 110 (50) AMD Compliant standards UL, CSA Note 1) ANR is under the conditions of 68F (20C) at atmospheric pressure and relative humidity of 65%. Note 2) Air flow capacity for each outlet air pressure dew point is indicated.

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

36 40 58 22 20 82 65 102 11-/22-MXP16-30 28 70 119 50 42 56 70 29 30 108 75 128 837 Air Slide Table MXP/MXPJ6 1122Made to Order Specific Product Precautions Anti-corrosive guide unit -X42 Be sure to read this before handling.

E,R.L.

:llv thn alphabtic:lly (Ex.: 27N.40(40/,m), 2N R Body g Port orl.d.--64, r NNFT Construction./Parts List Main Parts Parts List 1 1074-58 1 1 1 1r 1 636 NC4otr r 1185 l t l Series NAF Air Filter Float Type Flow Characteristics NAF5OOO N.O tvpe/ NAD44 With no pressure inside the bo!

No more element replacement!

Low Maintenance Filter Low Maintenance Filter Series FN1/FN4 Series FN1/FN4 New Series FN4 FN4 Series FN1 FN1 Series FN4 Series FN1 Series FN4 FN4 Series FN1 FN1 Flow rate max. 250 l/min max. 80 l/min max. 40 l/min Series FN4 with four elements is added!

Compact Guide Cylinder

40 6.6 6 42 93 32 59.5 37.5 10 12 138 154 34 50 9 9 48 112 40 66 44 10 12 146 162 40 60 9 9 54 120 50 72 44 12 16 178 198 46 65 11 10 64 148 63 77 49 12 16 192 212 58 75 11 10 78 162 80 96.5 56.5 16 24 238 262 54 90 13.5 16 91.5 202 100 116 66 19 31 280 308 62 100 15.5 22 111.5 240 Caution Do not use this cylinder as a stopper.

Vacuum Gripper

-45 2.2 3.5 6.0 9.0 14 22 36 -40 2.0 3.1 5.3 8.0 12 19 32 -10No.

PROFIBUS DP Compatible Fieldbus System

UL (CSA) Weight 20 g 40 g 55 g (for M8 connector socket) EX9-AWES (2 pcs.) EX9-AWES (8 pcs.)

CJP2-OM0002K

45 18.0 10.5 21.0 16 5 10 15 20 25 30 35 40 45 20.0 13.0 26.0 * The above numbers are references for the mounting positions of those auto switches that detect a stroke end.

5.0 MPa Pilot Operated 2/3 Port Solenoid Valve & Check Valve Series VCH

Model Pilot operated, diaphragm poppet Air, Insert gas Valve construction Fluid Orifice VCH42 ON response 50 17.5 22 dm3/(sbar) (110 mm2) 0.11 5.8 16 17 dm3/(sbar) (85 mm2) 0.08 4.5 Flow characteristics 40 C value (Effective area) b Cv Response time [ms] Valve specification Coil specification VCH41 ON response 30 5.0 MPa 0.5 to 5.0 MPa 5 to 80C 5 to 80C Brass Polyurethane elastomer Drip proof

CKZ2N

(pounds) Load capacity (N) 63 300 12.0 280 11.0 260 Distance from pivot point (inches) Distance from pivot point (mm) 10.0 240 9.0 220 30 45 60 75 90 105 120 135 200 8.0 180 7.0 160 6.0 140 5.0 120 100 0 5 10 15 20 25 30 35 40 45 50 55 60 65 70 75 80 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 4.00 Load capacity (N) Load capacity (pounds) 80 400 17.0 380 16.0 Distance from pivot point (

OMS0020

65 41 A 97 61 a 2 2 STX 34 22 " 66 42 B 98 62 b 3 3 ETX 35 23 # 67 43 C 99 63 c 4 4 EOT 36 24 $ 68 44 D 100 64 d 5 5 ENQ 37 25 % 69 45 E 101 65 e 6 6 ACK 38 26 & 70 46 F 102 66 f 7 7 BEL 39 27 ' 71 47 G 103 67 g 8 8 BS 40 28 ( 72 48 H 104 68 h 9 9 HT 41 29 ) 73 49 I 105 69 i 10 0A LF 42 2A * 74 4A J 106 6A j 11 0B VT 43 2B + 75 4B K 107 6B k 12 0C FF 44 2C , 76 4C L 108 6C l 13 0D CR 45 2D

Servo Motor Controller (24 VDC)

Keep the input signal combination for 15 ms (30 ms if possible) or longer.(2) Refer to Positioning (P.40) 49 - The actuator goes out the stroke limit specified by the basic parameters, Stroke (+) and Stroke (-) if it performs the requested operation.