MTS

Width across flats 3.5 23 9 4.5 4.5 6.5 3.5 2-M3 x 0.5 (Port size) 2-M3 x 0.5 (Port size for axial piping type MTS8-P) 9 2-M3 x 0.5, effective length 5 0.2 5 +0.035 +0.025 4 16 0.2 22 12 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 41 + Stroke M2.5 x 0.45 12 53

PS-OMH0005CN

DC12~24V DC12~24V DC(+) DC(-) 8 / / 9 () 10 / 5m / 11 20~30 20 "-M" (kPaMPa) SI kPa,MPa ( ) "-M" 12 13 -33No.PS-OMH0005CN-D No. 14 15 () () ( ) ( ) / 16 ON ON OFF PSE530 PSE530 OFF -34No.PS-OMH0005CN-D OUT1 OUT2 80mA 5 F.S.(2.5F.S.) 2 -35No.PS-OMH0005CN-D PSE20 1 01 MPa 0-101 kPa 0101 kPa -101101 kPa -0.11 MPa 10-101 kPa -10101 kPa -101101 kPa 0.1 kPa 0.1 kPa 0.1 kPa

4-channel Flow Monitor ( compatible)

[March 2023] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2023 SMC Corporation All Rights Reserved No.PF-OMA1011-A

MRQB-OM0002

1 16 4 1 1 15 2 13 3. 3. 3. 3. 3-1. ,,,2 2 3-2. 2 2 2 32 40 VF3000 VZ3000 AS2000 6/4 14 4. 4. 4. 4. 4-1. , ,, ,4.1 , ,4.1 ,,, 4.1 4.1 [N] 5 10 15 20 25 30 40 50 75 100 32 14 13 13 13 13 13 12 11 10 9 40 23 22 22 21 21 21 19 18 16 15 , , , 4.24.34.2, 15 4.2 4.2 [N] [MPa] [mm 2] 0.15 0.2 0.3 0.4 0.5 0.6 0.7 [mm] OUT 804 121 161 241 322 402 482 536 32 12.2 IN 675 101

JXCx-OMT0001CN

) . 24 3.9 EtherNet/IP . 25 (1) . 25 (2) PLC . 25 (3) LED . 25 3.10 PLC . 25 4. . 26 4.1. . 26 4.2 EtherNet/IP . 27 4.3. . 28 4.4. . 30 -1No.JXC-OMT0001CN-C 1 . 30 2DIN . 30 4.5 . 31 (1) . 31 (2) . 32 (3) . 33 5. . 34 5.1 (IP ) . 34 5.2 PLC () . 35 TM . 36 TMEtherNet/IP 5.3 RSLogix5000 6. . 38 6.1 . 38 (1):C PWR . 38 (2):M PWR . 38 (3) : CI . 39 6.2 . 40 (1) . 40 (2) . 41

Step Motor Driver （ Pulse input type ）

Therefore, + / of input terminal is not indicated in the table above 41 - Differential input connection Command pulse input configuration Pulse Input termi LECPA and Option set Forward rotation (CW) Reverse rotation (CCW) Direction nal 1 High High PP+ Low High PPLow Low 0 High High NP+ Low High NPLow Low High PP+ Low Low High High PPLow 1 High NP+ Low Low High High NPLow CW and CCW High High

LEC-OM034xx

The address is shown. (099) The treble is shown about the transmission rate of controller IF Node address setting ADDRESS B RATE Node address X10 X1 0 or 8 0 0 0 0 : 9 1 : 8 1 : 98 9 9 99 1 or 9 0 0 100 0 : 2 1 : 5 101 : 125 Do not set B RATE to the value of "Unused" Node address becomes 125 when a setup of a node address is set as a larger value than 125.

IDX-OM-W016

or more COMPRESSED AIR OUTLET Rc1 COMPRESSED THERMOMETER EVAPORATION AUTO DRAIN AIR INLET Rc1 872 396 TARMINAL BLOCK VENTILATION VENTILATION 578 43 2702 15 101 3801 258 4x 13 DRAIN TUBE (O.D.10,LENGTH:0.8m) GROMMET ELECTRICAL ENTRY( 17) 6-4 Electrical Circuit IDFA3E / 4E / 6E / 8E IDFA11E GFGI For Option R GFGI For Option R L N PE L N PE TB TB ILS ILS For Option V EVD For Option V EVD

JXCx-OMT0002

Power supply connector . 38 6.1 Connector specifications . 38 (1) Main control power supply connector: C PWR . 38 (2) Motor drive power connector: M PWR . 38 (3) Motor control power supply connector: CI . 39 6.2 Wiring . 40 (1) Wiring of the power supply connector. 40 (2) Wiring of the stop switch . 41 7. EtherNet/IP communication connector . 43 8.

Digital Pressure Switch

[April 2022] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2008-2022 SMC Corporation All Rights Reserved No.PS-OMM0003-J

ML1C

Applicable bore Shock absorber model ML1-A25H ML1-A32H ML1-A40H ML1C25 ML1C32 ML1C40 101 90 25 20 11 72 67.3 12 31 39.5 Max. 16.5 4.5 3 RB1412 120 107 30 25 16 93 73.2 15 38 49 Max. 20 5.5 6 RB2015 147 129 30 31 16 105.5 73.2 15 40.5 54.5 Max. 25 5.5 6 Side Support Side support A 2 x G E E F 2 x H A B Side support B 2 x J A B (mm) A B C D E F G H J Part no.

ML1

Cylinder EA Absorber model EB EC ED EF EY S T EH EI h i TT REA ML1-A25H ML1-A32H ML1-A40H ML1C25 ML1C32 ML1C40 101 90 25 20 11 72 67.3 12 31 39.5 4.5 3 MAX. 16.5 RB1412 120 107 30 25 16 93 73.2 15 38 49 5.5 6 MAX. 20 REC RB2015 147 129 30 31 16 105.5 73.2 15 40.5 54.5 5.5 6 MAX. 25 RHC Side Support MTS CC Side support A Side support B (mm) H G F J E Cylinder D Part No.

Table of Contents

Series SZ3000 5 Port Solenoid Valve Serial Transmission Type. 52 53 54 55 56 57 57 59 60 60 61 62 63 64 65 66 67 67 69 70 70 71 72 73 74 75 76 77 77 79 80 80 81 82 83 84 85 87 89 91 97 97 98 100 101 101 102 103 104 105 106 106 107 111 111 114 121 125 130 130 132 134 137 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside

VXR21/22/23

(112) 119 (136) 126 (143) 18 32.5 36.5 43.5 46.5 52 36 36 42 53 39 41 20 30 35 35 23 39 47 48 48 92 95 95 59 62 62 1 2 3 4 21 40 45 45 23 25.5 41.5 VXR2260-10 VXR2270-12 26.5 51.5 67.5 57.5 23 25.5 41.5 1 4 1 2 62 97 64 50 93 (103) 44.5 93 (103) 28 101 (111) 93 (103) 60 25.5 40 132 142 (157) 54.5 60 72 VXR2380-14 1 VXR2382-14 30 62 97 64 50 98 (108) 44.5 98 (108) 28 106 (116) 98 (108) 69

Compact

43 46 16 39 42 44 46 49 51 20 67 70 75 79 83 88 92 97 101 105 25 103 110 116 123 130 137 143 150 157 164 Accuracy End deflection (Y direction)*1 0.02 mm End deflection (X direction)*1 0.02 mm Non-rotating accuracy*1 0.05 *1 The values show the end deflection or play of the product without load in the extended condition.

Rotary Actuator

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 http://www.smcworld.com 2012 SMC Corporation All Rights Reserved 1st printing QT printing QT 8100SZ Printed in Japan. D-DN Specifications are subject to change without prior notice and any obligation on the part of the manufacturer.

OMR0032

For details of the COM port checking and setting methods refer to the LATC Configurator Configuration Software Installation Manual". 101 - Check that the LATCA controller, communication cable, USB cable, and PC are connected correctly. For example, communication cannot be established if the connector has been damaged.

Vacuum Gripper

B: Add caution and troubleshooting, apply for UKCA 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2022 SMC Corporation All Rights Reserved -30No. TQ1230001-OM106-B

Vacuum Gripper

A: Add caution and troubleshooting, apply for UKCA 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2022 SMC Corporation All Rights Reserved -31No. TQ1230001-OM105-A

Vacuum Gripper

D: Add caution and troubleshooting, apply for UKCA 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2022 SMC Corporation All Rights Reserved -36No. TQ1230001-OM101-D