VCA

ported: L1 = n x 41 + 79, L2 = n x 41 + 90 n (stations) IN port direction Model Dimension 9 348 359 384 395 404 415 448 459 7 278 289 314 325 322 333 366 377 8 313 324 349 360 363 374 407 418 10 383 394 419 430 445 456 489 500 6 243 254 279 290 281 292 325 336 3 138 149 174 185 158 169 202 213 4 173 184 209 220 199 210 243 254 5 208 219 244 255 240 251 284 295 2 103 114 139 150 117 128 161

VKF300

18 37 67.5 59 Max .10 71.5 Pg.7 Manual override (non-locking) 4Rc(PT) 1/8 (ports P, R) 18 25 31 53.5 Approx. 300 (lead wire length) Light (DZ type only) 4Rc(PT) 1/8 (ports P, R) 75.5 83 Manual override (non-locking) nRc(PT) 1/8 (port A) Applicable cord O.D. 4 to 6.5 A A P = 19 20 L: Dimension table n: Stations n L L1 L2 1 38 28 2 57 47 3 76 66 4 95 85 5 114 104 6 133 123 7 152 142 8 171 161

2/3 Port Valve

F G M N P Q R S T U 3 8 1 2 3 4 1 VND20D-10A VND20D-15A VND30D-20A VND40D-25A 63 42 28 14 73.5 81.5 4 52 26 4.5 24.3 2.3 25 34 56 80 90 50 60 35 40 17.5 20 85 101 93 109 5 6 62 72 31 36 5.5 6.5 28.3 33.3 2.3 2.3 30 35 43 49 61.5 74 4.2-40 VND 32A, 40A, 50A Port size Model Main port Rc(PT) Pilot port Rc(PT) A B C D E F G H J 1 8 1 4 1 4 105 120 140 77 96 113 53 60 74 26.5 30 37 121.5 138 161

VQ

P E 29 14 7 32 40.1 49.8 300 Round head screw M1.7 X 14 2-3.5 Mounting hole Manual override 15.5 P=10 300 n 5 4 3 2 1 U side D side 46.5 35.2 19.4 15.5 A A 9.5 16.7 P=10 n-M5 A port Dimensions Equation: L1=10n+21 L2=10n+7 n: Station (Max. 20 stations) n L L1 L2 1 31 17 2 41 27 3 51 37 4 61 47 5 71 57 6 81 67 7 91 77 8 101 87 9 111 97 10 121 107 11 131 117 12 141 127 13 151 137 14 161

ZP

4.7 10.1 13 15 18.5 27.5 8.7 19 7.5 ZPT16B-6-A10 16 18 20 29 9.9 21 8.5 Dimensions by Stroke Dimensions by Stroke C D E Model 10 13 16 ZPTB 6-4-A8 19 15 48 Model G E F F E F E ZPTB10-4-A8 24 81 ZPTB10-6-A10 36.5 40.5 78.5 23 74.5 39 77 ZPTB15-4-A8 29 43 86 ZPTB20-6-A10 46.5 50.5 116.5 112.5 49 115 ZPTB25-4-A8 39 96 51 ZPTB30-6-A10 56.5 60.5 126.5 122.5 59 125 ZPTB40-6-A10 66.5 158.5 69 161

ZPT/ZPX

EPR 40 50 63 80 100 125 40 161 1 0 +1 +10 39 160 2 0 +1 +19 89 158 3 0 +2 +37 56 156 6 0 +2 +61 55 396 12 1 +4 +121 155 347 22 3 +7 +228 121 345 120 580 118 531 116 529 How to Order A14 HB N 40 ZPX Vacuum entry/Mounting thread diameter Pad diameter (mm) 40 40 40, 50 63, 80 100, 125 50 50 A14 M14 x 1 63 63 A16 M16 x 1.5 80 80 B8 M 8 x 1.25 100 100 B10 M10 x 1.5 125 125 B12 M12

Air Pilot Operated

PB 0103 1 5 Gasket Subplate Buna N AXT 33112-2 18 Screws Pilot Cover (4) AXT 334.1G1 B o E G H K il N 127) 0.63 (161 1.42 {36) 0,91 123) 0.al (15.5) 1.24 (32) 6.10 (155) 2.4e (63) (62) 2.O5 <52) ?.o1 (51) l2B 1.06 1 7 Hold Down 8olls {8.32 x 1 9'61(2) NXT 333,17.5 Mi(tne ln Parenlhess NVSA45l4 DETAIL REF. 0EscRrPTtol{ MATERIAL PAB' NO. 1 Body Alum.

pa

LVQ LQ LVN TI/ TIL PA PAX PB Circuit example (1) 3 port solenoid valve Process pump PAX112 Regulator Ball valve Air filter AIR SUP FLUID OUT FLUID IN Air supply AIR EXH Strainer Silencer Throttle Transfer fluid 17-5-161 Series PAX Dimensions 4-M8 (M6 hexagon socket head screw can be inserted) 10.5 105 7.5 Mounting hole detail 69 Reset button 100 125 23 RESET (175) AIR SUP (Pilot air supply

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

Contact (Surface treatment) M12: CuZn (Au plating (Ni underplating)) RJ45: CuSn (Au plating (Ni underplating)) CuZn (Au plating (Ni underplating)) CuSn (Au plating (Ni underplating)) Connector material TPU (UL94 HB) PA66 (UL94 V0) Material of sheath (Sheath color) PUR (Blue (RAL 5021 equivalent)) PVC (Green (RAL 6018 equivalent)) Weight 1 m: Approx. 70 g 2 m: Approx. 116 g 3 m: Approx. 161

Title not found

Rod Dia 60 PSI 70 PSI 80 PSI 90 PSI 100 PSI 110 PSI 120 PSI 1-1/2 None 1.77 106 124 142 159 177 195 230 5/8 1.46 88 102 117 132 146 161 190 1 0.99 59 69 79 89 98 108 128 2 None 3.14 188 220 251 283 314 345 377 5/8 2.83 170 198 227 255 283 312 340 1 2.35 141 165 188 212 235 259 283 2-1/2 None 4.91 295 344 393 442 491 540 589 5/8 4.60 276 322 368 414 460 506 552 1 4.12 247 289 330 371 412 454

MU

(mm) Size direction Fluid Air 0.2 0.3 0.4 0.5 0.6 0.7 Proof pressure 1.05MPa OUT 491 98 147 196 246 295 344 25 12 Max. operating pressure 0.7MPa IN 378 76 113 151 189 227 265 Min. operating pressure 0.05MPa OUT 804 161 241 322 402 482 563 32 14 Ambient and fluid temperature 10 to 60C IN 650 130 195 260 325 390 455 Lubrication Not required (Non-lube) OUT 1257 251 377 503 629 754 880 40 16

MXQ

(N) Bore size (mm) Rod size (mm) Piston area (mm2) Operating direction Operating pressure (MPa) 0.2 0.3 0.4 0.5 0.6 0.7 11 17 23 29 34 40 OUT 57 6 3 8 13 17 21 25 29 42 OUT IN 20 30 40 51 61 71 101 8 4 15 23 30 38 45 53 75 OUT IN 45 68 90 113 136 158 226 12 6 34 51 68 85 102 119 IN 170 80 121 161 201 241 281 OUT 402 16 8 60 91 121 151 181 211 IN 302 OUT 628 126 188 251 314 377 440 20 10 IN

17

D-X Technical Data 1189 A MY1B Series Weight Theoretical Output Unit: N Operating pressure (MPa) Unit: kg Side support weight (per set) Bore size (mm) Piston area (mm2) Stroke adjustment unit weight (per unit) Additional weight per 50 mm of stroke 0.2 0.3 0.4 0.5 0.6 0.7 0.8 Basic weight Bore size (mm) 25 32 40 490 98 147 196 245 294 343 392 A unit weight L unit weight H unit weight 804 161

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

MY1H Series Theoretical Output Weight Unit: kg Unit: N Additional weight per each 50 mm of stroke Piston area (mm2) Operating pressure (MPa) Bore size (mm) Side support bracket weight (per set) Stroke adjustment unit weight (per unit) Bore size (mm) Basic weight 0.8 0.7 0.6 0.5 0.4 0.3 0.2 A unit weight L unit weight H unit weight 25 490 98 147 196 245 294 343 392 A/B type weight 32 804 161

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

For details, refer to the Made to Order Specifications on page 8-31-1. 8-12-15 16 Series MY1W Theoretical Output (N) Operating pressure (MPa) Bore size (mm) Piston area (mm2) 0.2 0.3 0.4 0.5 0.6 0.7 0.8 200 40 60 80 100 120 140 160 16 314 62 94 125 157 188 219 251 20 490 98 147 196 245 294 343 392 25 804 161 241 322 402 483 563 643 32 1256 251 377 502 628 754 879 1005 40 1962 392 588 784

MY1

(mm) 0.2 0.3 0.4 0.5 0.6 0.7 0.8 Additional weight per each 50 mm of stroke Additional weight per each 50 mm of stroke 16 200 40 60 80 100 120 140 160 Weight of moving parts Weight of moving parts A unit weight Basic weight Basic weight L unit weight Type A and B 20 314 62 94 125 157 188 219 251 16 25 490 98 147 196 245 294 343 392 0.03 1.25 0.54 0.04 1.25 0.57 0.16 0.16 0.01 20 32 804 161

Valve Single Unit

Light/Surge voltage suppressor (5.5) 75.3 67.6 (Both sides) Rc 1/4 EXH port Rc 1/4 SUP port 67.6 50.5 P E 18.5 18.5 9.5 9.5 58.2 60 1 1 26 L plug connector (L) M plug connector (M) 115.6 (Single, Double) 128.1 (Single, Double) 128.6 (3 position) 141.1 (3 position) 16.7 (Lead wire length) 300 300 (Lead wire length) 33.4 Stations n n: Stations (n1 + n2) 3 85 65 4 104 84 5 123 103 6 142 122 7 161

Title not found

Rod Dia 60 PSI 70 PSI 80 PSI 90 PSI 100 PSI 110 PSI 120 PSI 1-1/2 None 1.77 106 124 142 159 177 195 230 5/8 1.46 88 102 117 132 146 161 190 1 0.99 59 69 79 89 98 108 128 2 None 3.14 188 220 251 283 314 345 377 5/8 2.83 170 198 227 255 283 312 340 1 2.35 141 165 188 212 235 259 283 2-1/2 None 4.91 295 344 393 442 491 540 589 5/8 4.60 276 322 368 414 460 506 552 1 4.12 247 289 330 371 412 454

5 Port Air Operated Valve

2B 2B 2B 2B 2B 47 47 141 110 125 68 28 (62.5) 4A 4A 4A 4A 4A 1/2 [1 (P), 3/5 (R) port] 1/4, 3/8 [4 (A), 2 (B) port] 4 x 9 (For mounting) 65 (Pitch) P=33 1/8 (Pilot port: Upward) Breathing hole (Station n) (Station 1) 1/8 [Pilot port: Lateral (-P)] 78.5 56 35 2.5 Dimensions n: Stations 11 12 15 14 13 2 3 n L 10 9 8 7 6 5 4 592 L1 L2 163 196 229 262 295 328 361 394 427 460 493 526 559 128 161

Clean Room Rodless Cylinder Series CYP ø15, ø32

M5 x 0.8 Rc 1/8 Weight (kg) Standard stroke (mm) Model 700 600 500 450 400 350 300 250 200 150 100 CYP15 3.2 2.8 2.5 2.4 2.2 2.0 1.9 1.7 1.6 1.4 1.2 CYP32 9.1 8.3 7.5 7.1 6.7 6.3 5.9 5.5 5.0 4.6 4.2 Magnetic Holding Force Magnetic holding force (N) Bore size (mm) 15 59 32 268 Theoretical Output (N) Piston area (mm) Operating pressure (MPa) Bore size (mm) 0.2 0.3 0.1 15 35 53 18 176 32 80 161