VQ5000

R2 R1 18.5 P 41 41 41 41 27.5 27.5 Rc 1/8 PE port Rc 1/8 external pilot port 5-Rc 1/2 5-Rc 1/2 (P), 4(A), 2(B), 5(R1), 3(R2) port Numbers inside ( ) are for metal seal 3 position type 1(P), 4(A), 2(B), 5(R1), 3(R2) port 2-6-6 7 Base Mounted Series VQ5000 Plug-in/Plug Lead: Single Unit Plug Lead Type Grommet 2 position single: VQ5150 1-G H 194.5 121.3 73.2 194.5 121.3 73.2 53 59.5 59.5 27.5

Electric Actuator/Slider Type

Weight [g] Auto switch model D-M9N(V) D-M9P(V) D-M9B(V) 0.5 8 8 7 Precautions Caution 1 14 14 13 Lead wire length (m) 3 41 41 38 Fix the auto switch with the existing screw installed on the auto switch body.

Modular Type Lubricators Series AL

Body Size 21 31, 41 Description Metal Bowl Metal Bowl With Sight Glass Residual Pressure Relief Valve Symbol Nil V NPT Threads Applicable Model Combo All All Description Without Valve With Downstream Valve Port Size Symbol 02 03 04 Applicable Body Size 21 31 41 Port Size 1/4 3/8 1/2 Accessories Symbol Nil C D Applicable Body Size All 31, 41 31, 41 Description None Float Auto Drain (N.C.)

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

32 25 16 12.5 20 M16 x 1.5 16 M5 x 0.8 M6 x 1.0 76 60 41 32 25 16 12.5 20 M20 x 1.5 16 l M5 x 0.8 M6 x 1.0 90 70 50 40 31.5 20 16 20 M24 x 1.5 20 C B series rod M6 x 1.0 M8 x 1.25 145 115 75 60 E 40 30 20 24 M30 x 1.5 31.5 dH10 L L M6 x 1.0 M8 x 1.25 145 115 75 60 40 30 20 24 M39 x 1.5 31.5 M8 x 1.25 M10 x 1.5 185 145 95 80 50 40 25 26 M48 x 1.5 40 H+0.4 +0.1 D M5 x 0.8 M6 x 1.0 76 60 41

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

41 44 41 41.5 41 41 41 41 41 50 41 52 43 49 83.5 93.5 46.5 43 80 49.5 49 52.5 49 50 49 49.5 49 49.5 49 58 49 58.5 51.5 57.5 92 102 53.5 51 100 56.5 56 61 56 58.5 56 56.5 55.5 57.5 55.5 66 56 66 58.5 68 102.5 112.5 61.5 57.5 Auto switch model D-F5l D-J59 D-F5lW D-J59W D-F5BA D-F59F D-F5NT D-A3lC D-G39C D-K39C D-A44C Bore size Hs Ht Hs Hw Hs Hw 40 38 31.5 73 69 81 69 50 42 35.5 78.5 77 86.5

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

CRBU2 T Single round shaft Double shaft (Long shaft without key and with our chamfers) J CRB1 K Double round shaft MSU CRJ CRA1 Dimensions (mm) J (Double shaft/Long shaft without key & with four chamfers) CRQ2 T (Single round shaft) K (Double round shaft) Shaft type MSQ MRQ DConfiguration 20M 20 22 25 30 UU 118 139 167 202 D (g6) 15 17 20 25 D (g6) 15 17 20 25 H 36 41 50 60 H 36 41 50 60

Rotary Actuator

Applicable shaft types: S, W CRB1 Y2 = X = X = Y = X = MSU CRJ CRA1 CRA1 CRQ2 Y = Y1 = Y1 = Y2 = [mm] [mm] MSQ [mm] Size Y1 Y2 W Y 30 3 to 8 15 to 25 50 1 to 20 18.5 to 36 63 1 to 22 21 to 41 80 1 to 25 25 to 50 100 1 to 30 32.5 to 60 Size X Y1 Y2 W Y W Y 30 15 to 25 3 to 8 15 to 25 50 18.5 to 36 1 to 20 18.5 to 36 63 21 to 41 1 to 22 21 to 41 80 25 to 50 1 to 25 25 to 50 100 32.5 to 60 1

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

60 H 36 41 50 60 H 36 41 50 60 UU 134 158 192 232 N 15 17 20 25 D (g6) 15 17 20 25 Size 50 63 80 100 Refer to pages 11-7-11 to 11-7-12 for other specifications. 11-7-5 6 Series CRA1 Shaft Variations (Size 30) Shaft Type: S, X, Y, Z Mounting Shaft type 30 Rotating angle C RA1 Refer to How to Order on pages 11-7-2 to 11-7-13.

Modular F.R.L. Units

57.2 35 7 14 4 41 AC30-B 1/4, 3/8 1/8 167.4 115.1 38.1 30 55.1 80 29.4 3.5 41 57.2 35 7 14 4 41 AC40-B 1/4, 3/8, 1/2 1/8 220.4 147.1 39.8 38.4 72.6 110 33.8 3.5 50 75.2 40 9 18 5 48 AC40-06-B 3/4 1/8 235.4 149.1 37.8 38.4 77.6 110 33.8 3 50 80.2 40 9 18 5 48 AC50-B 3/4, 1 1/8 282.4 220.1 41.2 93.1 110 43.3 3.2 70 96.2 50 11 20 6 60 AC55-B 1 1/8 292.4 234.1 44.7 98.1 110 43.3 3.2 70

Modular Design with Uniform Body Style

Thread type/NPT: 3/8" One-touch fitting Barb fitting applicable tubing: T0604 1/4 1/4 1/4 Width across flats 17 Width across flats 17 Width across flats 17 Standard specifications Bracket mount P1 P2 P3 A B C E F G J K M N Q1 Q2 R S U V1 V2 AC20-V-D 1/8, 1/4 1/8 1/8 169.6 87.6 48.5 41.6 60 21 2 30 43.2 24 33 5.5 11.5 3.5 29 38 AC30-V-D 1/4, 3/8 1/8 1/4 224.6 115.4 55 30 55.1 80 26.5 3.5 41

F

Applicable Thread Model H D1 D2 L1 L2 A M Minimum Weight Tube OD UNF (Hex) Hole (g) (Inch) NPT Diameter 1/8 1/8 KQW01-34S 11.11 9.6 10 17.5 37 38 15.5 2.5 19 1/8 1/4 KQW01-35S 14.29 9.6 10 17.5 43 42 15.5 2.5 41 5/32 1/8 KQW03-34S 11.11 10.4 10 18 37.5 38.5 16 3 19 5/32 1/4 KQW03-35S 14.29 10.4 10 18 48.5 42.5 16 3 41 3/16 1/8 KQW05-34S 11.11 11.4 10 19.5 38 40 16.5 3.5 41 3/16 1/4 KQW05-

High Vacuum Angle Valve

Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.

V

Y P E 41 S I D E P O R T E D M A N I F O L D.

CNA

63 41 41 41 42.5 46.5 53 44 11 11 11 10 9 48.5 80 48.5 48.5 49.5 51 55 60 52 RLQ 56 100 56 56 58.5 59 63 67 59 15 18 14 16 14 17 13 14 13 14 MLU 6.5 6.5 5.5 7 8 ML1C 5 5 5 3.5 3.5 D4.5 4.5 4.5 4 4 -X 7 6.5 6.5 6 5 2011 10 10 9 9 4.5 4 4.5 4 4 Data Since this is a guideline including hysteresis, not meant to be guaranteed.

CNA

63 41 41 41 42.5 46.5 53 44 11 11 11 10 9 48.5 80 48.5 48.5 49.5 51 55 60 52 RLQ 56 100 56 56 58.5 59 63 67 59 15 18 14 16 14 17 13 14 13 14 MLU 6.5 6.5 5.5 7 8 ML1C 5 5 5 3.5 3.5 D4.5 4.5 4.5 4 4 -X 7 6.5 6.5 6 5 2011 10 10 9 9 4.5 4 4.5 4 4 Data Since this is a guideline including hysteresis, not meant to be guaranteed.

A

Y54-04 1/2 72 62 40 62 Y52-03 3/8 14 24 41 Y61-03 3/8 15 30 50.5 Y61-04 1/2 15 30 50.5 Courtesy of Steven Engineering, Inc. !

VHK

VR D E F G J K C 18 1(P) 2(A) 4 4 VHK-04F-04F VHK-06F-04F VHK-06F-06F VHK-08F-06F VHK-08F-08F VHK-10F-08F VHK-10F-10F VHK-12F-10F VHK-12F-12F 31.5 21.8 17.5 3 port valve 41 3.5 1 27 22 26 47.6 23.8 23.8 16.5 15.8 15.8 11 3.4 1.2 15 VHK-B1A 44.5 14.5 16.5 VH 18 6 4 6 41 48 48.6 24.3 23.7 16.5 3.5 16.8 15.8 11 5.1 1.2 15 16 VHK-B1A 44.5 14.5 1 27 22 16.5 26 24.3 16.8 7.2 18 8 6 8 41 50.5 52.4

KJ

19 41 41 19 20 42 69 30 47 74 69 76 147 72 78 149 11.11 14.29 11.11 14.29 11.11 14.29 11.11 14.29 17.46 12.7 14.29 17.46 9.6 10 17.5 15.5 1 8 43 37.5 43.5 38 44 40.5 46.5 48.5 43.5 49.5 51.5 56 58 64.5 58 60 66.5 10.4 10 16 3 18 5 32 11.4 10 16.5 3.5 19.5 3 16 K 1 4 4.6 17 13.2 10 20.5 M H 5 16 6 18.5 15.2 12 23.5 D Connection thread (with seal) 17.46 3 8 7 21 17.9 17 25.5 MS 22.23 Courtesy

KR

17 12 57.4 22 45.4 17 28.5 20.9 1 2 KGY12-04 37 57.5 22 68 3 8 KGY16-03 26.5 38 20.9 34 25 81 (81) 113 (113) 65.5 112 16 22 1 2 KGY16-04 41 67 116 Reference dimensions after R thread installation.

LVQ

T) View Z (mm) Dimensions A B C D M N T U V Model LVQ20-S-2 LVQ30-S-2 LVQ40-S-2 LVQ50-S-2 LVQ60-S-2 25.5 46 31.5 58 7 15 35.3 10.6 7 23.5 47 29.5 59 7 15 36.9 16.5 10 23.5 47 29.5 59 7 20 37.9 22 35 70 41 82 7 20 64 25 17 35 70 41 82 7 20 66 32 17-5-69 8 Series LVQ Dimensions With flow rate adjustment & by-pass High back pressure spec. with flow rate adjustment & by-pass N.C. valve M N