PVC piping type , Applicable fluid:  deionized water, chemical, etc. , Flow rate range:  10 to 100 L/min , Remote type, DIGITAL FLOW SWITCH FOR WATER (IO-LINK), DIGITAL FLOW SWITCH, WATER, PF3W, F19, 151 lb

PVC piping type, Applicable fluid:  deionized water, chemical, etc., Flow rate range:  10 to 100 L/min, Integrated type, 3-Color Digital Flow Siwtch for Water, DIGITAL FLOW SWITCH, WATER, PF3W, F19, 151 lb

PVC piping type, Applicable fluid:  deionized water, chemical, etc., Flow rate range:  10 to 100 L/min, Integrated type, 3-Color Digital Flow Siwtch for Water, DIGITAL FLOW SWITCH, WATER, PF3W, F19, 151 lb

The VM series offers a wide variety of actuator styles and flow capacity up to 1.0 Cv.Actuator replacements for VM100, VM200, VM400 and VM800, Roller levers, plungers, toggle levers, rod levers, push buttons and twist selectors, 2/3 PORT MECHANICAL VAVLE, MECHANICAL VALVE, I98, 151 lb

LG1H

20 25 30 1000 1000 930 740 600 500 Model Note LG1H202PC-500-F LG1H202PC-600-F LG1H202PC-700-F LG1H202PC-800-F LG1H202PC-900-F LG1H202PC-1000-F 700 700 600 600 500 500 500 500 500 500 500 500 500 500 500 500 500 500 Power supply: 100/110(V)AC 10% Compatible controller: LC1-12HC1Power supply: 200/220(V)AC 10% Compatible controller: LC1-12HC2Consult SMC if outside of the above conditions. 151

02-cxs-e

:GR-S-010 (10 g) 151

Manifold Regulator ARM1000/2000 Series

IR IRV VEX SRH (Pitch) IN (Individual IN) IN (Common IN) SRP SRF Symbol Model Dimensions ITV C 34 43 D 21 28 E 18 27 F 56 70 G 16 20 H 9 11.5 J 18 24 K 19 28 M 52 66 P 9 11.5 Q 11.5 16.5 R 4.8 4.8 A 4.5 4.5 B 25 34.5 ARM1000 ARM2000 IC ITVH Dimensions by the Number of Stations Manifold stations (n) ITVX Model Symbol 1 36 27 48 39 2 55 46 76 67 3 74 65 104 95 4 93 84 132 123 5 112 103 160 151

[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

213 198 5 259 244 6 305 290 7 351 336 8 397 382 9 443 428 10 489 474 L L1 L2 With mounting adaptor: VV317-02-1-02-A 4 x 7 mounting hole Manual override (Non-locking) (Station 1) (Station n) VV061 VV100 DIN terminal facing upward 141.6 V100 S070 VQD n x 1/4 4 x 3/8 VQD-V Applicable cable O.D. 6 to 12 VK VT VT L Dimension n: Stations Stations Formula L1 = 46 x n + 89 L2 = 46 x n + 59 2 181 151

7

terminal D M U T 68.5 (74.5) V U T 60.5 (66.5) 74.5 (82.5) 107.5 (113.5) 29 5 C VXD2 64.5 52.5 27 30 71 20 4.5 17 51 32.5 38.5 35 3/4 82.5 (90.5) 42 126.5 (134.5) 6 D VXD2 29.5 67 55 1 33 35 95 22 4.5 20 59.5 45.5 49.5 Model Mounting bracket dimensions Port size P a b d e f 3/4 1 50.5 55.5 77.5 85.5 74 81 51 58 45.5 49.5 VXD2 VXD2 5 C 6 D ( ): Denotes the Normally Open (N.O.) dimensions. 151

Manifold Specifications

hole U side (n) (2) (1) Stations D side 300 (Lead wire length) 2-C4,C6 1 A B 9.5 27.3 (Port size: One-touch fitting type) Plug connector (K) Plug connector (L) 3 position 142 Double 132 Single 88.5 3 position: 157.5 Double: 147.5 Single 104 300 (Lead wire length) 300 (Lead wire length) With light/surge voltage suppressor: Type LZ DIN terminal (D) Plug connector (M) 3 position: 161 Double 151

AFF

14 14 16 20 M 5.5 6 6 7 7 9 9 9 11 N 35 O 54 66 66 80 80 88 88 102 136 P 70 84 84 100 100 110 110 130 180 Q 26 28 28 34 34 50 50 60 76 R 4.5 5 5 5 5 9 9 10 12 S 1.6 2.0 2.0 2.3 2.3 3.2 3.2 4.5 4.5 T U 37 37 37 37 37 37 37 37 37 AM AFF2B 1 8 1 4 3 8 166 187 187 218 218 241 241 277 334 24 27 27 32 32 37 37 39 55 159 172 178 204 210 225 232 259 311 13 13 16 16 19 19 22 22 32 100 113 119 145 151

AMD

20 17 22 19 25 21 30 40 K 5 8 8 8 8 10 10 10 15 L 9 12 12 14 14 14 14 16 20 M 5.5 6 6 7 7 9 9 9 11 N 35 O 54 66 66 80 80 88 88 102 136 P 70 84 84 100 100 110 110 130 180 Q 26 28 28 34 34 50 50 60 76 R 4.5 5 5 5 5 9 9 10 12 S 1.6 2.0 2.0 2.3 2.3 3.2 3.2 4.5 4.5 T U 37 37 37 37 37 37 37 37 37 AMD150 1 8 1 4 3 8 159 172 178 204 210 225 232 259 311 13 13 16 16 19 19 22 22 32 100 113 119 145 151

Water Separator Series AMG Please refer to page 14-20-62 for specific product precautions. 1

66 80 80 90 90 100 150 J 15 20 17 22 19 25 21 30 40 K 5 8 8 8 8 10 10 10 15 L 9 12 12 14 14 14 14 16 20 N 35 40 40 50 50 55 55 65 85 O 54 66 66 80 80 88 88 102 136 P 70 84 84 100 100 110 110 130 180 Q 26 28 28 34 34 50 50 60 76 R 4.5 5 5 5 5 9 9 10 12 S 1.6 2.0 2.0 2.3 2.3 3.2 3.2 4.5 4.5 5.5 6 6 7 7 9 9 9 11 159 172 178 204 210 225 232 259 311 13 13 16 16 19 19 22 22 32 100 113 119 145 151

AMH

14 14 14 14 16 20 M 5.5 6 6 7 7 9 9 9 11 N 35 O 54 66 66 80 80 88 88 102 136 P 70 84 84 100 100 110 110 130 180 Q 26 28 28 34 34 50 50 60 76 R 4.5 5 5 5 5 9 9 10 12 S 1.6 2 2 2.3 2.3 3.2 3.2 4.5 4.5 T U 37 37 37 37 37 37 37 37 37 AMH150 1 8 1 4 3 8 166 187 187 218 218 241 241 277 334 24 27 27 32 32 37 37 39 55 159 172 178 204 210 225 232 259 311 13 13 16 16 19 19 22 22 32 100 113 119 145 151

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

Y + Stroke X Bearing type Mounting style Bore size Stroke 20-MGG Y X Bore size (mm) Q 86(94) 32 39 25 Copper-free 96(105) 40 46 29 Specifications 109(121) 50 57 31 20, 25, 32, 40, 50, 63, 80, 100 Bore size (mm) 112(124) 63 56 34 Action Double acting 137(151) 80 68 46 Fluid Air 138(152) 100 68 47 Maximum operating pressure 1.0 MPa ( ): Denotes the dimensions for long stroke.

Cylinder (Tube) Inner Diameter(φ): 50, Stroke(mm): 151, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Operating Pressure(MPa): -, Cushion: Air cushion, Operating Pressure(MPa): 0.05 to 1.0, Specification: Built-in magnet, Port thread type: Rc, Auto

Cylinder (Tube) Inner Diameter(φ): 50, Stroke(mm): 151, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Operating Pressure(MPa): -, Cushion: Air cushion, Operating Pressure(MPa): 0.05 to 1.0, Specification: Built-in magnet, Port thread type: Rc, Auto

[Please refer to the following pages of the catalog]P.144 MXSP.145 MXQ P.146 Reversible Type MXQRP.147 MXF P.148 MXWP.149 MXP ø6P.150 MXP ø8 to 16P.151 MXY

Cylinder (Tube) Inner Diameter(φ): 50, Stroke(mm): 151, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Operating Pressure(MPa): -, Cushion: Air cushion, Operating Pressure(MPa): 0.05 to 1.0, Specification: Built-in magnet, Port thread type: Rc, Auto

Cylinder (Tube) Inner Diameter(φ): 50, Stroke(mm): 151, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Standard, Additional Function: Standard, Environment, Applications: Standard, Operating Pressure(MPa): -, Cushion: Air cushion, Operating Pressure(MPa): 0.05 to 1.0, Specification: Built-in magnet, Port thread type: Rc, Auto