Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

(n 2) (n = 2, 3, 4, 5) D-M9mV 5 5 10 + 10 (n 2) (n = 4, 6) Note 4) D-A9mV 5 10 10 + 15 (n 2) (n = 4, 6) Note 4) D-M9m D-A9m 10 10 15 + 15 (n 2) (n = 4, 6) Note 4) D-M9mWV D-M9mAV 10 15 15 + 15 (n 2) (n = 4, 6) Note 4) D-M9mW 15 15 20 + 15 (n 2) (n = 4, 6) Note 4) D-M9mA 15 20 20 + 15 (n 2) (n = 4, 6) Note 4) D-A7m/A80 D-A7mH/A80H D-A73C/A80C 5 10 15 + 10

ZP3

B C D E Y q Pad dia.

MXH Series Compact Slide

End Detection A 22 D-A9 D-F9 D-F9 W B W 20 (22) A D-A9 V D-F9 V D-F9 WV W B Dimension inside ( ) is for model D-A9 V.

Aluminum High Vacuum Angle Valve

XLS-16XLS16-20-G, C, T, D XLS-16-P XLS16-20-PG XLS-25XLS25-20-G, C, T, D XLS-25-P XLS25-20-PG Description Construction No. w y r e-1 e-2 Coil assembly Core assembly Armature assembly O-ring O-ring XLS25-30-1 XLS25-30-2 AS568-018V AS568-030V XLS16-30-1 XLS16-30-2 AS568-018V AS568-025V 465 b

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

MY1CW16/20 MY1MW16/20 B A Reed Switch Solid State Switch D-A90(V), D-A93(V), D-A96(V) (mm) D-M9N(V), D-M9P(V), D-M9B(V) D-F9NW(V), D-F9PW(V), D-F9BW(V) 16 20 Mounting position Mounting position 16 20 A A B B Operating range Note) Operating range Note) Solid State Switch Reed Switch 24 Series MY1W Mounting of Auto Switch & Installation of Lead Wire Cover (50, 63) Caution Be sure to install

70astamb1

D-Y7P/Y7PV 6.5 6.5 6 7 7 8 15 25 D-Y7P/Y7PV 1 D-Y7W/Y7WV 6.5 6.5 6 7 7 8 2 (Different sides, Same side) Solid state switch D-Y7W/Y7WV 20 25 1 5 5 5 5 6 D-Y7BAL 5 2 (Different sides, Same side) 20 30 1 D-Y7BAL Center trunnion is not included.

mb1

sides, Same side) 20 30 1 D-Y7BAL Center trunnion is not included.

Profile Design ISO/VDMA Air Cylinder Series CP95

e Order No. b d f l1 c a 32 M10x1.25 GKM10-20 10 40 10 52 20 20 40 M12x1.25 GKM12-24 12 48 12 62 24 24 50/63 M16x1.5 GKM16-32 16 64 16 83 32 32 80/100 M20x1.5 GKM20-40 20 80 20 105 40 40 Rod end nut (standard equipment) 30 d D C H B Bore size (mm) Order No.

5 Port Solenoid Valve SY Series

(4.9) (For mounting) 23.2 (Light/surge voltage suppressor) (40.2) 12.7 40.4 (36.7) 28.1 [35.1] + 20.5 15 0.8 (20) 1.6 For manifold gasket positioning 22.2 die-cast hole (P, EA, EB port) 1/8 27.2 L plug connector: L M plug connector: M DIN terminal (D): M8 connector (W0): SY5 20-L(-F2) 3 4 5 SY5 20-M(-F2) 3 4 5 SY5 20-D(-F2) 3 4 5 SY5 20-W0(-F2) 3 4 5 C4, N3 C6, N7 C8, N9 C4, N3 C6, N7 C8

Compact

0.05 ST 5, 10ST 15, 20 ST 5, 10 ST 15, 20 0.00 0 20 40 60 0.00 0 20 40 60 0.00 0 20 40 60 Load [N] Load [N] Load [N] ST = Stroke 14 MXZ Series Auto Switch Mounting Minimum Stroke for Auto Switch Mounting [mm] Auto switch model Mounting D-M9mV D-M9mWV D-M9mAV D-M9m D-M9mW D-M9mA (1) Bottom mounting 5 10*2 15*1 15*1 (2) When mounting an auto switch into the groove from the top*3 15 15 30

CY1F

(mm) Bore size D-A9, D-A9V D-F9, D-F9V D-F9W D-F9WV (mm) 10 15 25 5 10 Minimum stroke for auto switch mounting (2pcs.) (mm) D-A90V D-A96V D-A93V 22 Bore size D-F9V D-F9WV D-F9 D-F9W D-A90 D-A96 D-A93 (mm) 32 20 Mounting patternq, w 32 35 Mounting patterne 20 12 Auto Switch Mounting As shown below, there are 3 ways to mount the auto switch according to 3 types of electrical entries.

CL

ML1C 25 Bore size (mm) Auto switch model D20 20 25 32 40 32 20 D-B5/B64 D-G5/K5 BA-01 BA-02 BA-32 BA-04 25 20 -X 10 D-C7/C80 D-H7 BMA2-020 BMA2-025 BMA2-032 BMA2-040 20Mounting screws set made of stainless steel The following set of mounting screws made of stainless steel is also available. Use it in accordance with the operating environment.

Copper-free Actuators

Pin Cylinder Series C(D)JP 1.2-2 20-CJP Double acting SCJPl 1.2-8 20-CJP Single acting Large bore size cylinder Series C(D)S1 Standard SC51l 1.10-2 20-CS1N Fine lock cylinder Series C(D)L RB Standard SCLAl 3.1-33 20-CLA J Cylinder with lock Series C(D)NA D SCNAl Standard 20-C(D)NA 3.3-1 -X End lock cylinder Series C(D)B 20Standard 20-CBM2 SCBM2l 3.4-4 Standard 20-CBA1 SCBA1l 3.4-12 Plate

EXxx-OMN0027CN

1 -57No.EX-OMN0027CN-D (Range) (Lwr_Lmt) (Upr_Lmt) -10..10 V -10.50+10.45 V -10.45+10.50 V -5..5 V -5.25+5.22 V -5.22+5.25 V -20..20 mA -21.00+20.90mA -20.90+21.00mA 0..10 V 0.00+10.45 V +0.05+10.50 V 0..5 V 0.00+5.22 V +0.03+5.25 V 1..5 V +0.75+5.22 V +0.78+5.25 V 0..20 mA 0.00+20.90mA +0.10+21.00mA 4..20 mA +3.00+20.90mA +3.10+21.00mA -58No.EX-OMN0027CN-D (1) No.

LVQ

LVQ20 C A B D (Max.

CRQ2

M ab BA BA BB D (AU)Max.

XL

Auto switch: (for main exhaust valve) Heater: 23 Series XLD, XLDV High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm (b) XLD/Air operated type E C D E Fn (KF flange) Fd (K flange) (a) C E (c) B A G H J K Heater (optional) A (mm) H Fd G 26 41 52 70 83 Fn 40 55 75 87 114 D 1 2 2 3 3 C 48 66 79 100 117 B 123 170 183 217 256 A 50 65 70 88 90 E J 16 20 20 20 20 K 6.5 14 16.5 18.5 26.5 Model XLD

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

Technical Data 1219 MY1H Series Auto Switch Mounting Auto Switch Proper Mounting Position Auto Switch Proper Mounting Position (mm) D-M9 D-M9V D-M9W D-M9WV D-M9AL D-M9AV Auto switch model D-A9 D-A9V A A Bore size A A 25 32 40 81 85 112.5 116.5 133.5 137.5 Note) Adjust the auto switch after confirming the operating conditions in the actual setting.

Intrinsically Safe Valve

53-SS5Y5-20-05 1 set (Type 20, 5 station manifold base part no.)

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

P=20 19.5 1 23 9 Station D side 50 29.5 Cover diameter 1.4 75.5 300 3.8 Cross sectional area 0.2mm2 (Lead wire length) 64 62 11.5 29.5 34 The broken line indicate DIN rail mounted type [-D].