Type: 21 (Common SUP/Individual EXH), Stations: 16, Bracket: None, Thread: 00T (NPTF)
Series: VQZ2000, Stations: 16 Stations, Option: None, Thread: 00T, Q: -
Series: VQZ1000, Stations: 16 Stations, Option: None, Thread: 00T, Q: -
Series: VQZ1000, Stations: 16 Stations, Option: DIN Rail Mount w/o DIN Rail, Thread: 00T, Q: -
Series: VQZ3000, Stations: 16 Stations, Option: None, Thread: 00T, Q: -
Stations: 10 Stations, Manifold Type: FD0 (D-sub Connector 25 Pin w/o Cable), Option: None, One-touch Fitting: 00T (N9 5/16" One-touch Fitting)
Piping: 21R (Body Ported), Stations: 16 Stations, A, B Port: 00T (NPTF)
SI Unit Output Polarity: Negative Common, Stations: 8 Stations, Options: None, 1P, 3R Port Size: 00T (1 (P), 3 (R) Port, One-touch Fittings for ø5/16")
Manifold Type: 20 (Body Ported, Bar Manifold, Individual Wiring), Valve Stations: 16 Stations, A, B Port: 00T (NPTF)
Stations: 9 Stations, Option: NS (Name Plate, Silencer), One-touch Fitting: 00T (N9 5/16" One-touch Fitting)
2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2 The process and suction status can then be compared. 8 Diagnosis (flow rate) 0: OFF 1: ON 14 Fixed output 0: OFF 1: ON 15 Diagnosis (error) 0: OFF 1: ON 16 to 31 Measured flow rate value Signed 16 bit Bit offset 31 30 29 28 27 26 25 24 23 22 21 20 19 18 17 16 Item Measured flow rate value (PD) Bit offset 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Item Error Fixed Reservation Flow rate Reservation
Do not use valves in atmospheres of corrosive gases, chemicals, salt water, water, or where there is direct contact with any of these. 2. Do not use in explosive atmospheres. 3. Do not use in locations subject to vibration or impact. 4. Do not use in locations where radiated heat will be received from nearby heat sources. 5.
DO Without air cushion (mm) B Bore size (mm) No.
Housing assembly Body Caution M5 hexagon socket head cap screw q M6 special screw (Do not disassemble.) Caution M6 special screw (Do not disassemble.) M5 hexagon socket head cap screw w Fig.1 Caution 1. Before disassembling, be sure to shut off the pressure supply, and then release the residual pressure. 2. After assembly, confirm that there is no fluid leakage.
Pages increased from 6 to 16. August, 1998 1-16-4 Shimbashi, Minato-ku, Tokyo 105-0004 JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. Printed in Japan. 1st printing October, 1998 D-SMC.L.A. P-84.5 (YG)
Do not release the OUT side piping port of the product to the atmosphere without connecting piping.
Do not apply pressure to this hole. Attach tubing to the vent hole and place the end of the tubing so it is not exposed to dust or water. For the rod end male thread, refer to page 247.
, 20, 25 180 Angular Gripper Cam Style How to Order MHY 2 16 2 D F9NL S Number of fingers Number of auto switches 2 2 2 fingers 1 S Bore size Auto switch 10 10mm 16 16mm Without auto switch 20 20mm Refer to the table below for the applicable auto switches. 25 25mm Finger option : Standard tap mounting 2: Opening/closing direction through hole Action D Double acting Applicable Auto Switches
I-B DA DB DL lou number II:, Imm) IDe OX D E DO (>"UN 'u, O S DH Z DDH9-: 32 164 10"" 36 18' 12 ' 45 202 ". . . , 46 31 21 18 5 38 26 51 6.5 6.6 11 7 41 28 54 6.5 6.6 11 9 ' 50 32 65 7.5 9 15 11 52 35 24 22 5.5 65 45 33 30 6 50 222 16' '" 52 40 67 7.5 9 15 11 66 50 86 10 11 16 12.5 ' 75 50 37 35 6.5 95 60 47 40 6,5 63 250 16 ' ." 76 60 96 10 11 18 1 3 5 71 70 20 114 70 55 50 7.5 ~, Rotating
Assembly / Disassembly procedure 12 4.1 With vertical auto switch unit 12 Size 10, 15 12 Size 20, 30 13 Size 40 14 4.2 With angle adjustment unit 15 4.3 With vertical auto switch unit and angle adjustment unit 16 Size 10, 15 16 Size 20, 30 17 Size 40 18 5.