Vacuum Module Series ZX

(or M6) 1 4.7 AMJ 20 5 AMV Pitch = 21 22.5 Vacuum port (V) M5 (or M6) AEP HEP Related Equipment + 79 65.1 10.7 8.5 V V V V Pitch = 21 Vacuum Port (V) M5 (or M6) 4.2 22.5 Vacuum Port (V) M5 (or M6) Vacuum Port (V) M5 (or M6) 897 Series ZX Vacuum port (V) Vacuum port (V) Ejector System Manifold: Type K1 Common EXH port (EXH.)

ZX

Individual air supply port PV Individual air supply port PV Adapter D Adapter D M5 (or M6) Pitch = 21 Individual air supply port (PV port) M5 (or M6) Individual air supply port (PV port) Pitch = 21 M5 x 0.8 (or M6) Vacuum pad connection port (V port) (or M6) Vacuum pad connection port (V port) M5 x 0.8 M5 x 0.8 (or M6) Adsorption nozzle piping port 13-2-35 35 Series ZX Vacuum pad connection

Air Cylinder

x 0.8 18 15.5 34 13 14 8 35 5 26 M4 x 0.7 5 6 4 6 20 45 (53) 3 32 44 3 M8 x 1.25 25 Up to 300 301 to 1500 12 10 (12) 1/8 12.5 10 (12.5) M5 x 0.8 22 19.5 38.5 17 16.5 10 40 6 31 M5 x 0.8 5.5 8 4 6 22 45 (53) 3 36 49 3.5 M10 x 1.25 32 Up to 300 301 to 1500 12 10 (12) 1/8 10.5 10 (10.5) 1/8 22 19.5 45 17 20 12 40 6 38 M5 x 0.8 5.5 10 4 7 25 45 (53) 3 44 58 3.5 M10 x 1.25 40 Up to 300 301 to

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

Electrical entry Port size P S Plug-in conduit terminal Plug lead 02 03 Rc 1/4 Rc 3/8 Porting specifications Note 1) For bottom ported port size is RC 1/4 only. Note 2) For thread standard, refer to page 2-5-39. Enclosure Nil B Side ported Bottom ported(1) Note) Dust-protected Dusttight /Low jetproof type Note) It is not necessary for plug lead type.

Regulator AR30 to 60

-10AS G46-2-02 G36-2-01 G46-2-02 G46-2-02 G46-2-02 0.2MPa Note 3) GC3-2AS GC3-2AS GC3-2AS GC3-2AS GC3-2AS Note 1) Assembly includes a bracket and set nuts.

ZSE80/ISE80

For positive pressure 80 ISE 02 N M For vacuum/ compound pressure M 80 ZSE 02 N Option 3 Rated pressure range Operating Note) manual (Booklet) (CD-ROM) Operating Note) manual 80 80F Calibration certificate Calibration certificate 0 to 101 kPa 100 to 100 kPa Symbol Symbol (Booklet) (CD-ROM) K T R Nil Piping Y W R1/4 (M5 female threaded) Rear ported 02 Note) All texts in both English

PSE57  Series Pressure Sensor for General Fluids

PSE570/573/574-01 PSE570/573/574-02 PSE575/576/577-02 Port size R1/8 M5 x 0.8 R1/4 M5 x 0.8 R1/4 M5 x 0.8 Piping port: C3604 + Nickel plating Pressure sensor: Al2O3 (Alumina 96%) Square ring: FKM Piping port: C3604 + Nickel plating Pressure sensor: Al2O3 (Alumina 96%) O-ring: FKM + Grease Materials of parts in contact with uid Without lead wire and M12 connector 88 g 95 g 103 g Weight With

AS

Port size With One-touch fitting 01 M5 M5 R 1/8 R 1/4 R 3/8 R 1/2 02 03 04 Needle Valve/Flow Rate Characteristics Note) The flow rate characteristics are representative values.

AS-FG

Port size N M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 M5 U10/32 01 02 03 04 Needle Valve/Flow Characteristics AS121FG AS131FG AS221FG-01 AS231FG-01 AS221FG-02 AS231FG-02 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 07, 08, 09, 10, 11 05, 06, 07, 08, 09, 10 Flow rate (/min (ANR)) Flow rate (/min (ANR)) Flow rate (/min (ANR)) Effective area (mm2) Effective area (mm2) Effective

ZQ-OM01301

(Recommended tightening torque: 0.4 to 0.5 Nm) 2) When piping fittings, etc. are connected to the air pressure supply (P) port (M5) for the single unit type, secure the part provided with the port, tighten it by hand, then additionally tighten by approximately one sixth to one fourth of a turn using an appropriate tool.

Dedicated Controller Series LC1 Uniaxial Type

T-nuts (weight 10.0g) Dedicated communication cable (IBM PC/AT compatible computer) M Model LC1-1-RC M Model 17.5 LC1-1-N3 M3 x 0.5 Cable length 02 2m 04 4m 03 3m 05 5m LC1-1-N5 M5 x 0.8 18 7.5 PC Controller T-brackets Model LC1-1-L5 (weight 16.0g) Model LC1-1-L3 (weight 15.5g) Cable length: 2 to 5m M5 M3 17.5 17.5 11 Dedicated communication cable (D-Sub) (for NEC PC-98 Series) Model LC1-

Compact Vacuum Unit

(Refer to Manifold on page 17.) 12 12 stations Common Release Pressure (PD) Port Size Note) Common Supply (PV) Port Size 01 01N 01F M5 Without PD port (PV = PD) M5 x 0.8 (PV PD) Rc1/8 NPT1/8 G1/8 M5 x 0.8 Nil M5 Note) Refer to on page 1 for the combinations of supply valve and release valve selectable.

1

x 0.8 depth 7.5 M5 x 0.8 depth 6 Width across flats 8 length 3.5 M10 x 1.25 27 25 8 6.5 M5 x 0.8 32 17.5 15 17 20 10 18 0 0.1 2 24 6 M5 x 0.8 depth 8 M5 x 0.8 depth 6 Width across flats 8 length 3.5 M10 x 1.25 34.5 32 12 6.5 M5 x 0.8 40 23.5 20.5 22 24 14 24 0 0.1 2 30 8 M6 x 1 depth 10 M6 x 1 depth 7 Width across flats 12 length 3.5 M14 x 1.5 42.5 40 13 6.5 M8 x 1.25 [mm] [mm] Port Thread

CL

x 0.8 pressurized locking port Pneumatic locking and spring and pneumatic locking Piping port M5 x 0.8 Manual unlocking cam M5 x 0.8 unlocking port Unlocked when pressurized 71 46 6 Head cover port in axial direction (R) M5 x 0.8 Rod side cylinder port 31 Lock nut M14 x 1.0 M5 x 0.8 Head side cylinder port 5 5 32 34 48.5 6.5 M6 x 1.0 6 20 18 Width across flats 10 18 9.5 11.5 65 39 20 14

CL

Double Acting, Single Rod Rod Side Flange Style (F) E D P CLJ2F1619 16 2 8 Silencer 12 25.5 Spring lock CL Piping port M5 x 0.8 CL1 Head cover port in axial direction (R) MLGC Manual unlocking cam M5 x 0.8 pressurized locking port Pneumatic locking and spring and pneumatic locking 71 46 6 M5 x 0.8 unlocking port Unlocked when pressurized CNG 31 M5 x 0.8 Rod side cylinder port Lock nut MNB

AN

Model Model Model Port size R(PT) Effective area (mm2) Weight (g) Dimensions (mm) Weight Effective area Port size Model Dimensions (mm) R(PT) (mm2) (g) AN200-02 35 17 63 22 19 25 84 25 22 35 92 30 27 165 107 46 36 225 132 50 41 490 200 74 55 580 233 74 60 820 263 86 70 A B D A B D 1 4 1 4 AN202-02 35 16 64 22 19 33 84 28 24 47 95 34 24 AN300-03 60 3 8 AN302-03 60 3 8 AN402-04 90 1 2 AN400

Round Type Low Pressure Hydraulic Cylinder Series CH
M

M5 Y-type double knuckle joint Bracket pin Material: Carbon steel 20: Y-02 25: Y-03 Material: Rolled steel 32: Y-04A 40: Y-04B Material: Cast iron 2-D drill through RR1 C1 Chamfer RR1 C NDH10 NDH10 MM C1 Chamfer A B E1 E1 NX NZ NZ NX U1 A1 A1 U1 L1 L1 Part no.

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

: External pilot port 9 D side U side Stations 1 2 3 4 5 6 7 8 n C8: 3(R) port Lead wire length: L0, 600 mm L1, 1500 mm L2, 3000 mm C8: 1 (P) port 9 For top ported 4 4 4 4 4 4 4 4 R 3 60 37 26 (49.5) 2 1 2 2 2 2 2 2 2 P 29.5 13 7.5 P = 11.5 44 29.5 2n-C3, C4, C6, M5 (4(A), 2(B) port) C3: One-touch fitting for 3.2 C4: One-touch fitting for 4 C6: One-touch fitting for 6 M5: M5 thread Formula

Auto Switch Guide

Auto switch CEP1 CE1 Auto switch mounting screw M5 x 0.8 x 16 l 1.

Speed Controller with Pilot Check Valve with One-touch Fitting Series ASP 1

Metric size Inch size Model Port size Pilot port 6 8 10 12 1/4" 5/16" 3/8" 1/2" ASP330F-01 ASP430F-02 ASP530F-03 ASP630F-04 ASP430F-F02 ASP530F-F03 ASP630F-F04 ASP330F-N01 ASP430F-N02 ASP530F-N03 ASP630F-N04 R 1/8 M5 x 0.8 R 1/4 Rc 1/8 R 3/8 Rc 1/8 R 1/2 Rc 1/4 R 1/4 G 1/8 R 3/8 G 1/8 R 1/2 G 1/4 NPT 1/8 10-32 UNF NPT 1/4 NPT 1/8 NPT 3/8 NPT 1/8 AS NPT 1/2 NPT 1/4 Note