Modular F.R.L. Unit

New Old Model Reduction (mm) Old New AC1000 AC10 4 Improved visibility for lubricant drip with graduation for lubricant control AC2000 AC20 14 AC2500 AC25 14 AC3000 AC30 14 Graduation AC4000 AC40 18 AC4000-06 AC40-06 18 AC5000 AC50 18 AC5500 AC55 18 5 4 6 7 3 SMC 8 2 Spacer with bracket AC6000 AC60 18 9 1 Embedded pressure gauge is a standard feature.

High Vacuum Angle Valve, XL Series

Through the movement of piston S (11), the valve S (18) is removed from the valve S seal assembly [1]-(14), and initial exhaust takes place through the passage S(17).

Clean One-touch Fittings For Driving Air Piping KPQ/KPG Series

18.5 16 1/8 1/4 7 12 H Connection threads 8 22 12 5 M5 x 0.8 (R) 6 18.5 10 10 12 14 18.5 19 25.5 23.5 30.5 25.5 26.5 25 7 14 14 13 24 23 23 46 1/8 1/4 1/8 1/4 1/4 3/8 3/8 1/2 (R) Applicable tubing 8 20.5 26 18 14 10 23 41 29 17 M L A 19 22 H 12 24 58 46 Connection threads Reference dimension for R threads after installation Male Elbow: KPQL, KPGL Applicable tubing (M5) Effective area

CP95

37 35 40 50 50 15 9 11 12 80 18 16 66 86 18 47 40 50 60 63 15 11 12.5 14 100 18 20 11 76 96 20 55 13.5 50 60 70 71 15 19 Mounting style (CR): Head side clevis with ball joint A B C D EN ER F E L M N P H Bore size (mm) 0.2 max 0.2 H7 0.1 max H11 H13 H13 0.5 0.5 32 22 10 14 15 30 5 32.5 10.5 6.6 45 10.5 5.5 40 38 12 25 12 16 18 35 5 6.6 55 11 5.5 50 46.5 15 27 16 21 20 40 5 51 9 65 15 6.5

Water Separator Series AMG Please refer to page 14-20-62 for specific product precautions. 1

Refer to page 14-20-4 for flow rate and page 14-20-4 for the max. flow line graph.

Special Specifications:

-20-9 Mist Separator 14-20-16 Micro Mist Separator 14-20-22 Odor Removal Filter 14-20-42 Note: Some models have different heights depending on the port size.

CP95

37 35 40 50 50 15 9 11 12 80 18 16 66 86 18 47 40 50 60 63 15 11 12.5 14 100 18 20 11 76 96 20 55 13.5 50 60 70 71 15 19 Mounting style (CR): Head side clevis with ball joint A B C D EN ER F E L M N P H Bore size (mm) 0.2 max 0.2 H7 0.1 max H11 H13 H13 0.5 0.5 32 22 10 14 15 30 5 32.5 10.5 6.6 45 10.5 5.5 40 38 12 25 12 16 18 35 5 6.6 55 11 5.5 50 46.5 15 27 16 21 20 40 5 51 9 65 15 6.5

HRX-OM-W038

AL31 Contact input signal 1 detection(Refer toTable 5.16-14) Operation: When this alarm signal is output, user can choose to stop/continue operation, or not to detect this alarm. "Operation continue" is default setting.

HRX-OM-O021

AL31 Contact input signal 1 detection(Refer toTable 5.16-14) Operation: When this alarm signal is output, user can choose to stop/continue operation, or not to detect this alarm. "Operation continue" is default setting.

HRX-OM-R005

AL31 Contact input signal 1 detection(Refer toTable 5.16-14) Operation: When this alarm signal is output, user can choose to stop/continue operation, or not to detect this alarm. "Operation continue" is default setting.

HRX-OM-T004

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 3 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 4 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Low level in tank 1 High circulating fluid discharge temp. 2 Circulating fluid discharge temp. rise 3 Circulating fluid discharge

HRX-OM-W069

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 CH1 abnormal low tank fluid level 1 CH1 low tank fluid level 2 CH2 Abnormal low tank fluid level 3 CH2 low tank fluid level 4 Reservation 5 Fan failure Alarm flag 1 6 Reservation 7 Reservation 8 CH1 abnormal rise of circulating fluid temperature 9

HRX-OM-X010

POWER ON 1 2 3 Figure 5-14 Control Setting screen3-1 Table 5-11 Control Setting screen3-1 No.

High performance type Step Motor Controller (Servo/24 VDC)

(1) Confirmation of the package content 14 (2) Installation 14 (3) Wiring and connection 14 (4) Power ON alarm (error) 15 (5) Operation pattern setting 15 (6) Trial run 15 3.

JXCx-OMT0005CN

(P.64) * 7 PLC DeviceNet LED LED PWR ALM MS NS DeviceNet (()) LED 8.LED (P.31) (JXC)LEDNSPLC PLC 20.P.80 PLC 10 - 8() ()() () 9 10.P.33 PLC 14.P.53 11 - 3 3.1.

Microspeed Cylinder

to 158F) With auto switch: 10 to 60C (14 to 140F) Without auto switch: 10 to 70C (14 to 158F) With auto switch: 10 to 60C (14 to 140F) 1 to 200mm/s (0.04 to 7.9in/s) Ambient and fluid temperature Ambient and fluid temperature Piston speed Piston rod diameter Piston speed Piston rod diameter 1 to 200mm/s (0.04 to 7.9in/s) 0.5 to 200mm/s (0.02 to 7.9in/s) 16 M8 x 1.25 M14 x 1.5 JIS class 2

Table of Contents

Polarity Flat ribbon cable connector SOL.A SOL.B 20 18 () () (+) (+) 1 station 19 17 15 13 11 9 10 12 14 16 18 20 2 stations SOL.A SOL.B () () (+) (+) 16 14 Flat Ribbon Cable Connector Assembly (Option) SOL.A SOL.B 12 10 () () (+) (+) 3 stations Note Assembly part no.

Low Friction Cylinders Series MQ

CX L FT FX B + Stroke (mm) FZ FX A + Stroke Bore size (mm) Stroke range (mm) FZ MQ A B CL CD CT CU 10 10 to 40 61.5 90.5 84.5 5 4 10 Double clevis type: MQQLD RHC 16 10 to 60 70.5 107.5 98.5 8 5 12 20 10 to 60 79 119 109 10 5 14 RZQ CU CD hole H10 Shaft d9 Cap bolt 25 10 to 50,75,100 84.5 126.5 116.5 10 5 14 30 10 to 50,75,100 104 148 138 10 6 14 40 10 to 50,75,100 104 158 144 14 7 20 DBore

VCC

Indication of A B C D E F G T VCKH1209-02F VCKH1008-02F VCKH1075-02F VCKH0806-02F VCKH0604-02F 12/9 13 38.5 10 19 17 18.5 9 to 12 Nm 10/8 11 38 9 17 17 18.5 6 to 9 Nm 1075 11 38 9 17 17 18.5 6 to 9 Nm 8/6 9 36.5 8 14 14 16 4 to 9 Nm 6/4 7 36.5 8 12 14 15 3 to 8 Nm VCKK 40 swivel elbow 40 B A 10 Approx. F D Width across flats 14 Tightening torque: Tighten within 10 1 Nm. Approx.

1.1

Insulating Material for DI (Deionized Water) Filter P.14 Specific Product Precautions P.15 to 17 Safety Instructions Back cover Front matter 1 Series HRGC Model Selection Guide to Model Selection 1.