Industrial Filters

) 5, 10, 20, 40 74, 105 EM100 All types of gases/liquids, High-temperature fluids P.42 5, 10, 20, 40 74, 105 EM500 Stainless steel 316 21 Filter Selection by Main Application FGD/FGE/FGG type FGD type FGE type FGG type Applications and Applicable Element : Recommended : Can be used : Cannot be used Applicable filter model F G D C F G D E F G D T F G D F F G E S F G E L F G E T F G G S F G

Slider Type/Ball Bushing Bearing

1 o q u r y e @6 @5 @3 @7 CY1L10 to 40 @2#9 @0$0 t !9 #5$2 #8 !2 !0 !6!7@4 @1 !8 !4 !5 $0 @8 #7 #6 $1 F G Area G (10) Enlarged view F 10, 15 w u i o !1 #2 q !3 r y e @6 @5 @3 $1 #0 @7 #1 10 Component Parts Note No. Description Material No.

Power Valve: Economy Valve Series VEX5

Load proportion is ((load weight x 9.8)/theoretical force) x 100% Conditions of Speed Chart System A B C D E F G Solenoid valve Speed controller AS420-04 AS500-06 AS600-10 AS600-10 AS800-12 AS900-14 AS900-20 Tubing diameter x Length SGP15A x 1 m SGP20A x 1 m SGP25A x 1 m SGP25A x 1 m SGP32A x 1 m SGP40A x 1 m SGP50A x 1 m Silencer AN40-04 AN500-06 AN600-10 AN600-10 AN700-12 AN800-14 AN900

CYV

Note 3) A particulate generation test has been conducted in a vacuum environment of 10-Pa. a t e l u g c 2 Stainless steel linear guide & low particulate generation vacuum grease e i t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e 1 i t n r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and

JA/JAH/JB/JS

If it is forcefully disassembled, it could lead to damage. 10-19-12 13 Floating Joint: Stainless Steel Type Series JS Construction 10, 16 20 to 63 q u t y r e w y q t e w r RE A B REC CX Component Parts Component Parts CY No. Description Material Note No.

JA/JAH/JB/JS

If it is forcefully disassembled, it could lead to damage. 10-19-12 13 Floating Joint: Stainless Steel Type Series JS Construction 10, 16 20 to 63 q u t y r e w y q t e w r RE A B REC CX Component Parts Component Parts CY No. Description Material Note No.

80

Give adequate confirmation, and then determine a model, just because the compatibility list shows the general case. 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 10 102 10-12 10-11 10-10 10-9 10-8 10-7 10-6 10-5 10-4 10-3 10-2 10-1 1 101 102 103 104 105 106 107 108 109 Pa Vacuum piping direction: if the system uses a vacuum pump, we ask that you install the vacuum pump

ASR

AS 0 0.1 0.15 0.2 0.25 0.3 Return stroke pressure (MPa) ASP ASN v v w w a a o o l l v v l l F F e e AQ ASV u u r r e e s s v v s s a a e e l l v v r r P P e e AK ASS ASR ASF Working stroke Working stroke Return stroke Return stroke Pressure valve Flow valve 15-16-1 2 Cuts air consumption by operating the return stroke at a reduced pressure.

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

L A + Stroke M0.2 E (mm) Bore size (mm) Stroke range (mm) Note) F A H B C D E OA I J K L M N OB Q RA W Y RB 10 10 to 40 69.5 M3 x 0.5 61.5 6 6( 5.8) 29 9 M4 x 0.7 38 5 8 20 3.5 6.5 39.5 7 5 4 16 10 to 60 80.5 M4 x 0.7 70.5 8 8( 7.8) 36 11.5 M6 x 1.0 47 7 10 25.5 5.4 9 48.5 10 5 7 20 10 to 60 89 M5 x 0.8 79 10 10( 9.8) 40 12 M6 x 1.0 52 8 10 28 5.4 9 55 10 6 7 25 10 to 50, 75, 100 96.5

Air Cylinder: Standard/Non-rotating Rod Double Acting/Single Acting, Single Rod/Double Rod Series NCM ø3/4", ø7/8", ø1 1/16", ø1 1/4", ø1 1/2", ø2" 1

4 6-14-10 11 Series NCM Construction: Single Acting, Spring Return t y q !1 !2 e r !0 w o CJ1 CJP CJ2 CM2 CG1 !

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

High Rigidity and High Precision Slider Type LEKFS Series LEKFS25, 32, 40 How to Order w y e r t u i q LEKFS 32 E A 300 R1 CD17T q Size w Motor mounting position e Motor type r Lead [mm] 25 32 40 Nil In-line R Right side parallel L Left side parallel Symbol LEKFS25 LEKFS32 LEKFS40 H 20 24 30 A 12 16 20 B 6 8 10 E Battery-less absolute (Step motor 24 VDC) y Motor option t Stroke*1 u Actuator

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

Stroke H G T S (Shock absorber stroke) E SD TT EY EA EC Stroke adjusting unit h Shock absorber FA W Applicable cylinder MY2H25 MY2H40 SD 17.7 EA 8.5 13 EC 9 13.5 EY 36 56.5 FA 56.4 67.8 h 6 6 S 67.3 73.2 T 12 15 TT 7.1 (MAX 18.6) 10 (MAX 26) W 25.8 38 E 17.5 25 Shock absorber model RB1412 RB2015 8-13-19 20 Series MY2 Side Support Side support MYC-SA G 2-H C B A F E D Courtesy of Steven

Basic Type/Direct Mount Type

Q N F I NA F N CC 0.1 + CY3B6 to 15 CY3B50, 63 (mm) B 17 25 35 36 46 60 70 86 100 0.007 0.043 30 32 CC 32 38 D 7.6 12 16.6 21.6 26.4 33.6 41.6 52.4 65.4 E 4 1.5 2 2 2 2 3 8 8 F 8 9 10 13 13 16 16 2 2 G 5 5 5.5 7.5 7.5 8 11 14 14 H 13.5 12.5 13 20 20.5 22 29 33 33 I 28 34 40 50 58 72 J 4.5 4.5 6 6 8 8 10 12 12 K 5 4 11 8 10 15 16 25 26 N 9.5 11 11 18 18.5 20 26 25 25 Q NN S 62 63 83 106 111

SZ3000

One-touch fitting Refer to One-touch fitting part number information on page 38. 9 Clip SX3000-115-1 10 10 Cassette Type Manifold Series SZ3000 Manifold Exploded View 60P manifold (plug-in, flat cable type) q w U side t r u e D side y No. Parts list Part No.

Solid State Auto Switches

(Red Green Red) D-M5NW D-M5PW D-M5BW Auto switch model Wiring type 3-wire 2-wire Output type PNP NPN Applicable load IC circuit, Relay, PLC 24 VDC Relay, PLC Power supply voltage 5, 12, 24 VDC (4.5 to 28 VDC) Current consumption 10 mA or less Load voltage 28 VDC or less 24 VDC (10 to 28 VDC) Load current 40 mA or less 1.5 V or less (0.8 V or less at 10 mA load current) 5 to 40 mA 80

Lightweight and Compact

[C] 5 10 15 20 25 30 35 Circulating fluid temperature [C] HRS090-W-20/40 (50 Hz) HRS090-W-20/40 (60 Hz) 14 12 12 10 Facility water temperature 32C Facility water temperature 32C Cooling capacity [kW] Cooling capacity [kW] 10 8 8 6 Facility water temperature 40C Facility water temperature 40C 6 4 4 2 2 0 0 5 10 15 20 25 30 35 Circulating fluid temperature [C] 5 10 15 20 25 30 35 Circulating

Profile Design ISO/VDMA Air Cylinder Series CP95

EN ER F G E L M N P H R (mm) 0.2 maxi JS15H7 -0.1 maxi H11 H13 H13 0.5 0.5 0.5 32 32.5 10.5 22 10 14 15 30 10 6.6 45 10.5 5.5 5 40 38 12 25 12 16 18 35 10 6.6 55 11 5.5 5 50 46.5 15 27 16 21 20 40 10 9 65 15 6.5 5 51 19 63 56.5 15 32 16 21 23 45 12 9 75 15 6.5 5 80 72 18 36 20 25 27 45 14 11 95 18 10 5 100 89 18 41 20 25 30 55 16 11 115 18 10 5 1.8-11 Series CP95 Dimensions mounting

51

Switch bracket Auto switch b Switch holder d Auto switch mounting screw c Auto switch mounting band D-X Technical Data 375 CG3 Series Operating Range (mm) Auto switch model Bore size 20 25 32 40 50 63 80 100 D-M9(V) D-M9W(V) D-M9A(V) 4.5 5.0 4.5 5.5 5.0 5.5 D-A9 7 6 8 8 8 9 D-C7/C80 D-C73C/C80C D-B5/B64 D-B59W D-H7/H7W D-H7NF/H7BA 9 8 10 10 10 11 8 10 9 10 10 11 11 11 13 13 14 14 14

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

The set value can be copied to up to 10 switches simultaneously.

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

Enable Generates an error. 1 Unit Disable Does not generate an error. -10..10 V -5..5 V -20..20 mA 0..10 V 2 Analogue input range Sets the analogue input device range. Selects the analogue input range. -10..10 V Channel 0..5 V 1..5 V 0..20 mA 4..20 mA Offset binary Offset binary.