Stability of suction position,

Formula examples with beams (Reference) L a b L a b L L L/2 L/2 L/2 L/2 Load/Shape conditions P P P P A C RA RB B A C RA RB B C A E D B RA RB RC RA=Pb/L RB=Pa/L W=P Formula (Reactive force: R, Total load: W) RA=RC=5Pb/16 RB=11P/8 RA=RB=P/2 W=P Mounting Position The basic mounting method is a horizontal lift.

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Vacuum

, f l e 5 0 l 2 3 5 Fressure characteristics Flow characteristics Suppypress!

ZP

1 1000 V = D 2 x L x (L) For the conductance, the equivalent conductance can be found in 8.

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

ZSE20B(F)/ISE20B ZSE20B(F)-L/ISE20B-L ZSE20A(F)/ISE20A ZSE20(F)/ISE20 Function Details Made to Order ZSE20C(F) ISE20C(H) Option 2 A1 30 Bracket A (Rear ported) (Part no.: ZS-46-A1) 20 25 1.5 2.5 20 45 30 34.6 2 30 19 5.2 14.7 9.6 5.2 A3 Bracket C (Bottom ported) (Part no.: ZS-46-E) 50 1.5 47.7 17 12 40 4 x 4.5 6 30 30 20 20 60.5 2 15.7 1.5 30 ZSE20C(F)/ISE20C(H) Series Dimensions Panel mount

Modular F.R.L. Units

1 2 1 L L AF40-A AF20-A How to Order AF10-A AF A 30 q 03 e BD Option/Semi-standard: Select one each for a to f.

Vacuum

, f l e 5 0 l 2 3 5 Fressure characteristics Flow characteristics Suppypress!

Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

suppressor) Bracket 2 x 3.2 equivalent (For mounting) (18.5) 28 [35] + (18.5) 22.1 13.5 12.6 15 (11.5) 0.5 10 R P R 14 M3 x 0.5 (P, R port) L plug connector (L): 10-SYJ3 23-L-M3 (-F) M8 connector (WO): 10-SYJ3 23-WO-M3 (-F) 3 4 5 M plug connector (M): 10-SYJ3 23-M-M3 (-F) 3 4 5 3 4 5 Approx. 300 (Lead wire length) 28 [35] 12.6 M8 x 1 32.5 15 39.1 [46.1] Approx. 300 (Lead wire length) 50.1

Made to Order

Through-hole/Both ends tapped (Standard): MK2TB MK2T-XC89 Lube-retainer Coil scraper 2 x P Cylinder port M A C G thread length H L N C A KA I KK 2 x J 4 x J K D 0.07 0.15 4 x F counterbore C S T AB AA MM KB Q R 2 x E through 2 x FF counterbore (mm) MM KB KK FF AB AA I N M L K J H G F E D C A KA Bore size 32 40 50 63 0.07 0.15 14 50 9 depth 11 9 depth 7 M10 x 1.5 8 4 46 45 34 6 M6 x 1.0 21

CV/MVGQ

Without auto switch L 16 60 5 L CVJ5 L 5 L J79W 16 60 CDVJ5 With auto switch Number of auto switches Rod extended/retracted when energized Built-in magnet 2 pcs. 1 pc. n pcs.

CV/MVGQ

Without auto switch L 16 60 5 L CVJ5 L 5 L J79W 16 60 CDVJ5 With auto switch Number of auto switches Rod extended/retracted when energized Built-in magnet 2 pcs. 1 pc. n pcs.

42

(For F, L, S, T kit) VVQ4000 2A 1 Thread type Electrical entry VVQ4000 3A 1 Thread type Electrical entry Nil Rc N NPT T NPTF F G Nil Rc N NPT T NPTF F G L F , L, S, T kit F Note 1) F kit (Connector location on U side) C C kit (Plug lead type) L F, L, S, T kit F Note 1) F kit (Connector location on D side) C C kit (Plug lead type) SV SYJ Option Option Nil Standard W Note 2) IP65 enclosure

5 Port Solenoid Valve Series SY3000/5000/7000/9000

suppressor) VQ 40.4 (4.9) 10.5 VQ4 (40.2) (36.7) 12.7 28.1 [35.1] + 20.5 23 SY5120-01(-F ) G H 1 2 VQ5 32.3 VQC (A, B port) 1/8 0.8 1.6 16.2 VQZ (20) 15 EA P EB 28.1 [35.1] SQ 32.5 For manifold gasket positioning 2 x 2.2 die-cast hole (P, EA, EB port) 1/8 27.2 20.5 23 VFS VFR L plug connector (L): SY5120-L(-F ) 1 2 C4, N3 C6, N7 C8, N9 M plug connector (M): SY5120-M(-F ) DIN terminal (D,

SMC Basic Pneumatics

J F 2 + 1 . 0 1 3 ) . A p k v = 27.94.4@2 + l-013) . Ap 222. l@2 + r-013) .

TABLE OF CONTENTS

O 5/32 P 3/16 U 7/32 R 1/4 A 9/32 S 5/16 T 3/8 V 5/64 B 1/2 C 5/8 D 1 E 1 1/2 Y 3/4 F 2 W 3 D No Option Ports T Metering (1/32 1/8 orif.)

%silltr

J F 2 + 1 . 0 1 3 ) . A p k v = 27.94.4@2 + l-013) . Ap 222. l@2 + r-013) .

Modular F.R.L. Unit

5000 10 Flow rate L/min (ANR) Flow rate L/min (ANR) Orange mark AR30 Rc 3/8 AR60 Rc 1 0.6 0.6 0.5 0.5 2.

High Purity Fluoropolymer

E W Y H M L 11.5 18.5 LQ1H1A-F LQ1H2A-F LQ1H2B-F LQ1H2C-F LQ1H2D-F LQ1H2E-F LQ1H2F-F LQ1H3A-F LQ1H3B-F LQ1H3C-F LQ1H3D-F LQ1H4A-F LQ1H4B-F LQ1H4C-F LQ1H4D-F LQ1H5A-F LQ1H5B-F LQ1H5C-F LQ1H5D-F LQ1H6A-F LQ1H6B-F LQ1H6C-F LQ1H6D-F 1/8" 1/4" 3/16" 1/8" 1/4" 3/16" 1/8" 3/8" 1/4" 3/8" 1/4" 1/2" 3/8" 1/2" 3/8" 3/4" 1/2" 3/4" 1/2" 1" 3/4" 1" 3/4" 10 10 1/8" 26.5 18.5 1/8" 35 16.5 14 15 14 21.5

Series VQ Base Mounted Metal Seal/Rubber Seal

(Including the mounted valves. ) 1.10-148 Manifold optionsSV5Q11OP, #1 to #3 VQ 1000/2000 Plug-in Unit Base Mounted EXH block base assembly VVQ1000-19A-(C3, C4, C6, M5) F P L Manifold block ass'y Electrical entry F1 F2 F3 P1 P2 P3 L0 For F kit (2 to 12 stations)/Double wiring For F kit (13 to 24 stations)/Double wiring For F kit (2 to 24 stations)/Single wiring For P, G, T, S kit (2 to 12

AC

Y50 SAC4006, #12 14 AC4000-06 to AC4040-06 Y50 Y60 SAC5000, #12 AMR AC5000, AC5500, AC6000 15 Y60 AC5020, AC5520, AC6020 AWM L Bracket/ Interface with L Bracket AWD ITV VBA VE VY G AL Interface with L bracket L bracket L bracket Interface with L bracket A B C D E F G R L Applicable model L bracket, Interface with L bracket Model 20 12 4.5 B110L 3 Y10L 25 5 8 2.25 27 AC1000 to AC1020 Interface