Series: 350 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Tape winding, Orifice: 4 [350 (3 Port) ø4], Port Size: 01 [1/8 (6A)], Thread: NPT, Material: Stainless Steel Body, NBR Seal Class B Coil, Option: -, CE Compliance: -

Series: 350 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Tape winding, Orifice: 4 [350 (3 Port) ø4], Port Size: 02 [1/4 (8A)], Thread: Rc, Material: Stainless Steel Body, NBR Seal Class B Coil, Option: -, CE Compliance: -

Series: 350 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Tape winding, Orifice: 4 [350 (3 Port) ø4], Port Size: 02 [1/4 (8A)], Thread: G, Material: Stainless Steel Body, NBR Seal Class B Coil, Option: -, CE Compliance: -

Series: 350 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 4 [350 (3 Port) ø4], Port Size: 01 [1/8 (6A)], Thread: N (NPT), Material: G (Stainless Steel Body, NBR Seal Class B Coil)

Series: 350 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 4 [350 (3 Port) ø4], Port Size: 02 [1/4 (8A)], Thread: Rc, Material: G (Stainless Steel Body, NBR Seal Class B Coil)

Series: 350 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 4 [350 (3 Port) ø4], Port Size: 02 [1/4 (8A)], Thread: F (G), Material: G (Stainless Steel Body, NBR Seal Class B Coil)

Series: 350 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 4 [350 (3 Port) ø4], Port Size: 02 [1/4 (8A)], Thread: N (NPT), Material: G (Stainless Steel Body, NBR Seal Class B Coil)

Lightweight and Compact

Circulating fluid outlet, Circulating fluid return port Rc1 NPT1 or G1 Drain port Rc1/4 NPT1/4 or G1/4 (It is not necessary to purchase this when pipe thread type F or N is selected in How to Order since it is included in the product.) HRS HRS 090 HRS 090 Part no.

MK

0.8 6.5 14h9 29 38 With arm/MKl -llN 12 16 M R Q P O N S Model MKB12-llN MKB16-llN 18.5 M3 X 0.5 4 20 29 8 8 21.5 M4 X 0.7 5 25 36 11 11 20, 25 Both ends tapped/MKA U S R K L Oh9 Q F E C B Model MKB20 MKB20 A 0 0.052 0 0.052 0.15 0.15 4 31 62 72.5 24.5 48 36 46.8 36 13.5 0.15 0.15 7.5 20 5 32 63 73.5 27.5 53.8 40 52 40 16 8 23 Note 1) Above figure is for D-A73, A80.

MXQ

4 NN-M4 x 0.7 thread depth 8 B A 7 7 6.5 6.5 3.2 3.2 A 12.5 5.7 12.5 5.7 B H (NN 1) x H G Section AA Section BB (mm) Model F 25 25 26 32 46 50 N 4 4 6 6 6 6 G 7 14 8 8 31 H 25 28 31 29 30 NN 2 2 3 3 4 4 GA 13 14 29 39 37 61 HA 19 28 27 31 58 60 I 11 10 12 14 13 12 J 17 28 40 52 78 105 K 23.5 33.5 43.5 53.5 63.5 88.5 KA 82.5 112.5 NA 4 4 4 4 8 8 M 46 56 70 84 109 135 Z 45.5 55.5 69.5 83.5

KPQ/KPG

KPQ/KPG Series Clean One-touch Fittings How to Order KP H 06 KP P 08 Q 01 KQ2 Applicable fitting size Clean One-touch fittings Made to Order KQB2 04 06 08 10 12 4 6 8 10 12 Specifications X53 With pipe tape Grease-free Symbol Q G KS KX Specifications (metal part materials) Brass (electroless nickel plated) Stainless steel 304 Rubber material: EPDM (Fluorine-coated) X193 Note 1) Gasket: M-

CQS

Bore (mm) Stroke range (mm) A 25.5 25.5 29 32.5 I OB K Q L RA M RB N T C OA D E F H B 22 22 24.5 27.5 A 30.5 30.5 39 42.5 B 27 27 34.5 37.5 5 to 30 5 to 30 5 to 50 5 to 50 12 16 20 25 M3 X 0.5 M4 X 0.7 M5 X 0.8 M6 X 1.0 M4 X 0.7 M4 X 0.7 M6 X 1.0 M6 X 1.0 32 38 47 52 6.5 6.5 9 9 5 6 8 10 7.5 7.5 9 11 3.5 3.5 4.5 5 7 7 10 10 15.5 20 25.5 28 4 4 7 7 3.5 3.5 5.4 5.4 0.5 0.5 1 1 6 8 7 12 6 8

53

Circulating fluid outlet, Circulating fluid return port Rc1 NPT1 or G1 Drain port Rc1/4 NPT1/4 or G1/4 (It is not necessary to purchase this when pipe thread type F or N is selected in How to Order since it is included in the product.) Part no. Contents Applicable model HRS-EP022 NPT thread conversion fitting set HRSH090-W-l HRS-EP023 G thread conversion fitting set Part no.

C95

L8 VD VA WA WB WH ZZ ZY L2 L9 22 24 32 32 40 40 30 35 40 45 45 55 12 16 20 20 25 30 G 1/8 G 1/4 G 1/4 G 3/8 G 3/8 G 1/2 13 14 15.5 16.5 19 19 M6 x 1 M6 x 1 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 6 6.5 8 8 10 10 M10 x 1.25 M12 x 1.25 M16 x 1.5 M16 x 1.5 M20 x 1.5 M20 x 1.5 10 13 16 16 21 21 27 27 31.5 31.5 38 38 16 16 16 16 16 16 94 105 106 121 128 138 4 4 6 6 8 8 4 4 4 4 4 4 4 4 5 9 11.5

JA/JAH/JB/JS

ExampleRod end nut for JS40 CV MVGQ CC RB J D-X 20Data 10-19-13 14 Series JS Dimensions JS10, 16 Center of sphere M M U D J U F B G H C E P Use the precision spanner for clock 4 mm in the case of mounting male thread of JS10.

JA/JAH/JB/JS

A R JS20, 32, 40, 63 Center of sphere M M U U D J F H B E G P R A Max. thread depth P Model Center of sphere R Allowable eccentricity U Max. operating tension and compression force (N) (mm) M A B C D E F G H J JS10-4-070 JS16-5-080 0.5 0.5 0.5 0.5 0.75 1 4.7 5.8 7.3 8.5 11.6 14.3 M4 x 0.7 M5 x 0.8 26 34.5 8.5 12 15.5 17.5 18.5 23 9.5 13.5 12 16 21 24 31 41 1.5 2 4.5 5 5 7 4 6 7 8 11 14 4

3

Through-hole/Both ends tapped common (Basic) S T R Q H (Rod size) AE (Rc, NPT, G) (2 locations) (Port size) E effective thread depth F Yh9 Z X 5.5 (The dimension on the opposite side is the same.) I (4 locations) 0.1 0.2 D G W AC (4 locations) (The dimension on the opposite side is the same.) A AA C J L L J K (4 locations) Flat washer With 4 pcs.

Profile Design ISO/VDMA Air Cylinder Series CP95

0.3 F (front) 0.4 0.5 0.6 0.7 0.8 0.9 1 *) *) *) *) *) *) 0.2 G (rear) 0.3 1160 1360 0.4 940 1160 1350 0.5 1080 830 1020 1190 0.6 770 980 750 920 1080 0.7 700 900 680 850 990 0.8 650 830 630 780 910 0.9 610 790 590 740 860 1 *) 580 740 560 690 810 L F (front) F (rear) L 0.2 0.3 F (front) 0 .4 0.5 0.6 0.7 0.8 0.9 1 *) *) *) *) *) *) G (rear) 0.2 0.3 0.4 0.5 0.6 1010 1380 0.7 1020

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Decimal display Hexadecimal display 10 A 11 b 12 c 13 d 14 E 15 F Note 4) Applicable to non-magnetizing lock 583 LECP2 Series Controller Details e r No. Display Description Details t q PWR Power supply LED Power supply ON/Servo ON : Green turns on. Power supply ON/Servo OFF: Green flashes. q y w w ALM Alarm LED With alarm : Red turns on.

1

40 24.5 1/4 32 35 52.5 28 69.5 57.5 104.5 73.5 XSA3-32V 56 XSA3-43S 64.5 31 3/8 XSA3-43V 67 82.5 72 58.5 66 72 64 66 5 Normal Close High Vacuum Solenoid Valve XSA Series Dimensions: (Rc, NPT) Female Thread Grommet: G Female thread type D 300 G F C H E P Fitting size 2 1 Q B 2 x M5 thread depth M A Q Grommet: GS Flat terminal: F Conduit: C 11 G F 300 G F 280 G F Terminal part Flat terminal