VQ4000

port (21) (21) 5-Rc 1/4, 3/8 1(P), 4(A), 2(B), 5(R1), 3(R2) port 31 31 ( ): Rc 3/8 3 position double check: VQ465 0 1 2 position double: VQ425 3 position closed center: VQ435 3 position exhaust center: VQ445 3 position pressure center: VQ455 0 1 0 1 0 10 1 G H G H G H G H 178.5 105.5 73 42.5 50 Indicator light 164.5 178.5 11 (12.5) 4(A) port 11 (12.5) 2(B) port 59 73 42.5 105.5 Indicator

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

Manual override 3 position closed center (A) 4 (B) 2 Non-locking push style (Flush) : B: Locking style (Slotted) 3 5 (R1) 1 (P) 3 (R2) 3 position exhaust center (A) 4 (B) 2 4 1 (P) 3 (R2) 5 (R1) Electrical entry 3 position pressure center (A) 4 (B) 2 G: Grommet (DC spec.)

Vacuum Pad: Ball Joint Type

Specifications Weight (g) Pad dia.

HRX-OM-S004

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-15 Connection of RS-232C HRS Series 3.3Installation 3-27 HRX-OM-S004 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

HRX-OM-W032

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Fig. 3-13 Connection of RS-232C HRS Series 3.3 Installation 3-25 HRX-OM-W032 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly. Incorrect piping might cause leakage of supplied or drained fluid and wet surrounding area and facility.

Series: 250 [3 Port COM (Single Unit)], Voltage: 24VDC, Electrical Entry: Grommet / Tape winding, Orifice: 1 [250 (3 Port) ø1], Port Size: 01 [1/8 (6A)], Thread: Rc, Material: Stainless Steel Body, NBR Seal Class B Coil, Option: -, CE Compliance: -

Series: 250 [3 Port COM (Single Unit)], Voltage: 5 (24VDC), Electrical Entry: G (Grommet / Tape winding), Orifice: 1 [250 (3 Port) ø1], Port Size: 01 [1/8 (6A)], Thread: Rc, Material: G (Stainless Steel Body, NBR Seal Class B Coil)

Table of Contents

How to Order Manifold VV5Q1 3 08 S 1 N P Option None DIN rail mounting style Special wiring specifications (Except double wiring) With name plate Built-in silencer, direct exhaust (U side only) Nil D K N S Cable (Length) Series VQ1000 Manifold Without cable With cable (1.5 m) With cable (3 m) With cable (5 m) 0 1 2 3 (2) Plug-in unit/Flip 3 Stations 01 1 station When two or more symbols are

Table of Contents

3/8 GB GC GA 6H7 depth 10 6H7 depth 10 PB 2-Rc, NPT, G 3/8 Q (Plug) PA + Stroke 10 S FB FA C + Stroke J JA JB K B + Stroke E A + Stroke G For the intermediate strokes, refer to Manufacture of Intermediate Stroke on page 8-19-26.

REA/REB

3 !2 y r @4 !4 !5 @9 #2 !8 @8 t u !0 e w #1 #3 !1 @0 i !7 @3 @1 @7 @2 @6 @5 #0 REAL10 Parts list Parts list Note No. Description No.

PSxx-OMU0002CN

5/32 inch () PBTCB156PPSO HNBR C3604( ) POMSUS304NBRC3604 SUS304NBR 24 g 34 g 36 g 27 g 28 g 29 g 30 g 30 g 36 g +39 g 0.15mm 2(AWG26) 1.0 mm (5 ) 3.5 -77No.PS-OMU0002CN-D M5 42.6 7 M50.8 3.5 01/N01 A 01 R1/8 10 N01 NPT1/8 12 C4HC6HN7H 2.5 A B C4H 15.6 8 C6H 16.5 10 N7H 16 10.3 C4LC6LN7L C A B C D C4L 15.2 17.5 4 8.2 C6L 15.2 18.3 4 10.4 N7L 20.9 20.6 6 11.1 -78No.PS-OMU0002CN-D

Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

3 !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 Kit no.

LEC-OM07605CN

(3) (a) EMC HF3010A-UN [:mm] 4-5.5 7 3-M4 3-M4 M4 32 2 110 4 85 2 IN (41) 258 4 65 4 273 2 288 4 300 5 HF3030A-UNHF3040A-UN [:mm] 6-K 3-L 3-L G 1 D 2 E 1 F 2 M J 2 C 1 C 1 H 2 B 2 A 5 [mm] A B C D E F G H J K L M HF3030A-UN 260 210 85 155 140 125 44 140 70 R3.25 8 M5 M4 HF3040A-UN 11 30 11.

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

fitting 3/8" One-touch fitting 10-SV2000 10-SV2000 3/8" One-touch fitting 12 One-touch fitting 10-SV3000 10-SV3000 3/8" One-touch fitting 12 One-touch fitting 10-SV4000 NPT 3/8 10-SV4000 Rc 3/8 NPTF 3/8 G 3/8 For mixed specifications (M), indicate separately on the manifold specification sheet.

Fieldbus System

2 D side U side Station 1 3/4: 3/4" female thread (Rc, G, NPT/NPTF) 3/4 [3(R) port] 1/2: 1/2" female thread (Rc, G, NPT/NPTF) 1/2 [1(P) port] 56.6 30 101.2 15.7 8 95.5 B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 77.3 11.5 72 43.5 42.7 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 20.6 21.5 11.5 1/8: 1/8" female thread (Rc, G, NPT/NPTF) 1/8 (External pilot port) 27 31 1/8: 1/8" female thread (Rc, G, NPT/NPTF) 1/8 (

SYJA3000

60) SYJA5240-01 3 position closed center 3.4 (0.19) SYJA5340-01 M5 X 0.8 1/8 104 (70) 3 position exhaust center 4.5 (0.25) [2.7 (0.15)] SYJA5440-01 PA,B: 5.3 (0.29) [3.1 (0.17)] A,BR1,R2: 4.0 (0.22) 3 position pressure center SYJA5540-01 Note1) [ ] for normal position.

PSxx-OML0002CN

AC1000 V 1 50 M (DC500 V ) 2F.S.(25 ) 3 3.52 m 4 0.15 mm 2(AWG26) 1.0 mm CEUL/CSARoHS 1 2 3 -56No.PS-OML0002CN-G 01 N01 C4H C6H N7H C4L C6L N7L R1/8 M50.8 NPT1/8 M50.8 4 mm 5/32 inch 6 mm 1/4 inch 4 mm 5/32 inch 6 mm 1/4 inch C3602 () ) O HNBR PBTPOMSUS304C3604() O HNBR/NBR (3 2 m) 81 g 70 g 71 g 73 g 75 g 73 g 75 g (4 2 m) 85 g 74 g 75 g 77 g 79 g 77 g 79 g 43 g 32 g 33 g 35

VZA200/400

VZA412 01 P VZA414 01 1P Thread type Nil Rc NPTF, NPT G T F VV3ZA2 031 01 50 VZA200 01 S Thread type Thread type Nil Nil Rc NPTF, NPT G Rc NPTF, NPT G T F T F 5-5-3 4 Series VZA200/400 Dimensions Body ported: VZA42-P-01 Pilot port 2-3.4 Mounting hole M5 x 0.8 2-3.4 mounting hole Courtesy of Steven Engineering, Inc.-230

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

VQZ (A) 2 (A) 2 VZ 3 (R) 1 (P) 3 (R) 1 (P) VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts No.

3 Port Air Operated Valve

type VPA300 VPA500 VPA700 Nil F N T Rc G NPT NPTF VPA4 SYJA VZA Port size Stations 02 Symbol Port size Applicable series 1/4 3/8 1/2 VTA 02 03 04 VPA300 VPA500 VPA700 2 stations VGA 20 20 stations VPA VPA VPA3 VV3PA 3 3 42 04 02 Type 42/Individual exhaust Series 3 5 7 Thread type VPA300 VPA500 VPA700 Nil F N T Rc G NPT NPTF Port size Stations 02 Symbol Port size Applicable series 1/4 3