Body Size: 40, Back Flow: w/o Backflow, Thread: Rc, Port Size: 02 (1/4), Options: BE (B+E), Set Pressure: 1 (0.02 to 0.2 MPa Setting), Bowl: Polycarbonate Bowl, Bowl Guard: None, Drain Port: w/Drain Cock, Exhaust Mechanism: Relieving Type, Flow Direction: Flow Direction: Left to Right, Drain Cock w/Barb Fitting: W (Drain Cock w/Barb Fitting), Pressure Units: Product: MPa, °C; Pressure Gauge
Body Size: 40, Back Flow: w/o Backflow, Thread: Rc, Port Size: 02 (1/4), Options: E (Square Embedded Type Pressure Gauge, w/Limit Indicator), Set Pressure: 1 (0.02 to 0.2 MPa Setting), Bowl: Polycarbonate Bowl, Bowl Guard: None, Drain Port: w/Drain Cock, Exhaust Mechanism: Relieving Type, Flow Direction: Flow Direction: Left to Right, Drain Cock w/Barb Fitting: W (Drain Cock w/Barb Fitting
Series: 250 [3 Port COM (Single Unit)], Voltage: 1 (100VAC 50/60HZ), Electrical Entry: W (Grommet / Molded), Orifice: 1 [250 (3 Port) ø1], Port Size: M5 Thread
Body Size: 40, Back Flow: w/o Backflow, Thread: Rc, Port Size: 1/4, Options: Square Embedded Type Pressure Gauge, w/Limit Indicator, Set Pressure: 0.02 to 0.2 MPa Setting, Bowl: Polycarbonate Bowl, Bowl Guard: None, Drain Port: w/Drain Cock, Exhaust Mechanism: Relieving Type, Flow Direction: Flow Direction: Left to Right, Drain Cock w/Barb Fitting: Drain Cock w/Barb Fitting, Pressure Units
Body Size: 30, Back Flow: w/Backflow, Thread: Rc, Port Size: 1/4, Options: w/o Mounting Option, Set Pressure: 0.02 to 0.2 MPa Setting, Bowl: Polycarbonate Bowl, Bowl Guard: None, Drain Port: w/Drain Cock, Exhaust Mechanism: Relieving Type, Flow Direction: Flow Direction: Left to Right, Drain Cock w/Barb Fitting: Drain Cock w/Barb Fitting, Pressure Units: Product: MPa, °C; Pressure Gauge:
Body Size: 30, Back Flow: w/Backflow, Thread: Rc, Port Size: 1/4, Options: w/Bracket, Set Pressure: 0.02 to 0.2 MPa Setting, Bowl: Polycarbonate Bowl, Bowl Guard: None, Drain Port: w/Drain Cock, Exhaust Mechanism: Relieving Type, Flow Direction: Flow Direction: Left to Right, Drain Cock w/Barb Fitting: Drain Cock w/Barb Fitting, Pressure Units: Product: MPa, °C; Pressure Gauge: MPa, Made
Body Size: 40, Back Flow: w/o Backflow, Thread: Rc, Port Size: 1/4, Options: B+E, Set Pressure: 0.02 to 0.2 MPa Setting, Bowl: Polycarbonate Bowl, Bowl Guard: None, Drain Port: w/Drain Cock, Exhaust Mechanism: Relieving Type, Flow Direction: Flow Direction: Left to Right, Drain Cock w/Barb Fitting: Drain Cock w/Barb Fitting, Pressure Units: Product: MPa, °C; Pressure Gauge: MPa, Made to
Magnet: Built-in, Mounting: Front Flange, Style: Lube, Bore Size: 50mm, Port Thread: -, Stroke: 75mm, Option: w/o Rod Boot, Cushion: Both Sides, Auto Switch: A53L--Reed, DC Volt >5<24, LED, 3M, Lead Wire or Prewired Connector: -, Number: 2 pcs. (Or None in the Case of No Switch), Valve Voltage: 100VAC 50/60HZ, Solenoid Style: 2 Position Double, Valve Type: -, Cylinder Rod Motion: -
Body Size: 30, Back Flow: K (w/Backflow), Thread: Rc, Port Size: 02 (1/4), Options: B (w/Bracket), Set Pressure: 1 (0.02 to 0.2 MPa Setting), Bowl: Polycarbonate Bowl, Bowl Guard: None, Drain Port: w/Drain Cock, Exhaust Mechanism: Relieving Type, Flow Direction: Flow Direction: Left to Right, Drain Cock w/Barb Fitting: W (Drain Cock w/Barb Fitting), Pressure Units: Product: MPa, °C; Pressure
Body Size: 30, Back Flow: K (w/Backflow), Thread: Rc, Port Size: 02 (1/4), Options: w/o Mounting Option, Set Pressure: 1 (0.02 to 0.2 MPa Setting), Bowl: Polycarbonate Bowl, Bowl Guard: None, Drain Port: w/Drain Cock, Exhaust Mechanism: Relieving Type, Flow Direction: Flow Direction: Left to Right, Drain Cock w/Barb Fitting: W (Drain Cock w/Barb Fitting), Pressure Units: Product: MPa, °C
Table of Contents 4@1w!3 @5 !1!9 i @0 @4 !0 y @3 !2 !0 r o @2 e !
2 RXn7 RYn8 RXn8 RYn9 RXn9 RYnA 1 RXnA RYnB 2 RXnB RYnC 3 RXnC RYnD 4 RXnD RYnE 5 RXnE RYnF RX(n1)F RY(n1)F RX(n+2)0 RY(n+2)0 RX(n+2)1 RY(n+2)1 RX(n+2)2 1 RY(n+2)2 RX(n+2)3 2 RY(n+2)3 6 RX(n+2)4 3 RY(n+2)4 7 RX(n+2)5 4 RY(n+2)5 8 RX(n+2)6 5 RY(n+2)6 RX(n+2)7 6 RY(n+2)7 RX(n+2)8 7 RY(n+2)8 RX(n+2)9 8 RY(n+2)9 RX(n+2)A RY(n+2)A RY(n+2)B RX(n+3)9 RY(n2)C 1 RX(n+3)A RY(n2
OO 3.24 5 . 1 2 8.01 Techn Vacuum System Specification (continued) 2.
OO 3.24 5 . 1 2 8.01 Technic Vacuum System Specification (continued) 2.
4@1w!3 @5 !1!9 i @0 @4 !0 y @3 !2 !0 r o @2 e !
7 Assy ZQ 1EP2-A 27 - No.ZQ-OM01401-B 8. 8.1 1) 2 2 22 3 0.028~0.032Nm) * 2 1Assy 2 Assy 2Assy () 3Assy 0.25~0.31Nm) 2 Assy () 28 - No.ZQ-OM01401-B 8.2. 1) 2 3) 0.12~0.18Nm) 8.3 1)2 2)2 : 0.054~0.080Nm 2 29 - No.ZQ-OM01401-B 8.4 1)(V)2 2) 2 : 0.11~0.13Nm 3)(V) 2 8.5 1)8.4 Ass'y Ass'y (V) 2)Ass'y 3)8.4 Ass'y 30 - No.ZQ-OM01401-B 8.6 1 2 32 4 5kPa ( ) 5 6)
A G i 2 x P Port size G A 2 x P Port size b B Conduit DIN terminal D F Q S Cable 6 to 12 G1/2 F Q 280 D G1/2 45 (42) (44) 31.5 Built-in full-wave rectifier type R C C R E J J E 2 x M depth 5 H 2 x M depth 5 B B1 H G A G A B B1 2 x P Port size 2 x P Port size Bracket mounting hole a1 (VXS23, 25) a a1 (VXS24, 26) 6.5 10.5 Dimensions (mm) Model Port size P A B B1 C D E F G H J M Bracket mounting
OFF 1 SV1.00 SETON OFFSETUP(2) -1 RESET SVRE ONRESET SVON ON 2 SETUP 48 - 12.2 code 12 12 0 1-048 B RESET -+ W 1W 2 W 12 0 1-049 PARA B RESET 1-050 B RESET No.
W W 1 1 W W 2 2 1 1 11 11 12 12 1 32 - 73 () 12 1. CW [CW] 2. CCW [CCW] 12 1. [] 2.