Series S070 is a super compact direct acting 2/3 port solenoid valve that meets the miniaturization needs of analyzers and semiconductor manufacturing equipment. S070 is extremely lightweight (5g for valve single unit type) and operation noise is 38dB(A) or less. It is easy to increase or decrease the number of stations (stacking base).
VSA4 4 T Symbol EA, EB Side Side A, B Side P F 0 Side Side 2 Option 1 9 Bottom Others Manifold type Type V N Type E E Symbol Type Stations A and B port sizes are same as port sizes in standard body size.
Order Made 2 With IN-OUT Flange 1 With Pressure Differential Gauge (GD40-2-01) A pressure differential gauge can be installed in the body to check the life of the filter element. It allows for easier piping and compact size. For easier flange piping.
2 Sizes 10 to 25: MHZ 2 Sizes 32 & 40: MHZ 2 .,rr,"""^ J Number of fingers Action Bas c iype End boss side porled' End boss arialonelouch ftlin91 " End boss axal M5 porlr j S nsle-acling on y Throug F a t 'D S actori, basic and N type nnges only " basrcancr N lype iingers onry ' [ , l t o 2 c o n p " l b l p o l 0 l o o 2 5 n r b o r F n / ' o J I I a o a a a a a a a a a a a a a a a a a
[F 2] Setting of OUT2 is completed 1: Selected item becomes valid after pressing the SET button. 2: After enabling the setting by pressing the SET button, it is possible to return to the measurement mode by keeping pressing the SET button for 2 seconds or longer. -41No.PF-OMA1011-A [F 3] Digital filter setting The Digital filter can be selected to filter the flow measurement.
:l 3/86 female thread Maintenance l--I space ~ Drain H I I Dimensions with mounting bracket Model Port size A B C D E F G I J 1 K 1 L 1 MI N I 01 P I 01 RI s B AMH850 11 /2 , 2 460.5 42 348 220 57.5 220 10 463.51 180 I 30 I 15 I 24 I 13 1120 1184 1 220 1110 1 18 I 6 6 SeriesAMH Made to Order Specifications ICD With Differential Pressure Gauge (GD40-2-01) I@ With IN-OUT Flange For ease of
JIS Symbol 15-9-43 2 Series AS-FG How to Order AS 1 0 3 2 F G 01 06 Body size 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Option Type Nil S None With seal 2 3 Elbow Universal M5 and U10/32 are not available with seal. Control type Applicable tubing O.D.
P (Piping port) G E G NN ( I ) D X NA R Mounting nut N W K N F S + Stroke F ZZ + Stroke H B E G Mounting nut NN NA F N 12CY3B15 (mm) L 57 66 70 80 92 J 6 6 8 8 10 K 11 8 10 15 16 I 12 15 18 23 G 5.5 7.5 7.5 8 11 H 13 20 20.5 22 29 F 10 13 13 16 16 E 2 2 2 2 3 NN M10 x 1 M20 x 1.5 M26 x 1.5 M26 x 1.5 M32 x 2 D 16.6 21.6 26.4 33.6 41.6 MM M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 B 35 36 46
C6 :One-touch fitting 6 VVQZ200-10A-5 2.10-33 VQZ100/200/300 Base Mounted Dimensions: VQZ100 VV3QZ15C Station Port size (35) 27 (11) Grommet(G) C6: One-touch fitting for 6 C4: One-touch fitting for 4 C3: One-touch fitting for 3.2 n-C3,C4,C6,M5 (5.5) 20 (7.5) 2-4.5 Mounting holes (4.5) 11.7 M5: M5 thread DIN rail clamp screw U side n Maual override 5.5 A 2 A 2 5 A 2 A 2 A 2 A 2 4 P=10.5 (L4
rcstricl lhe senmg oj 0 2MPa or riore t\45 a l/8 a a a a a 3/8 a a a 1/2 a 3t4 a a a a Note 2) For M5 and NPT thread lypes Accessories Wrlh o?
Metric Long stroke Standard stroke Without auto switch With auto switch A Long stroke L1 24 25.5 28.5 32.5 Long stroke (mm) Standard stroke (mm) Standard C Bore (mm) Bore (mm) With/Without auto switch A C1 H1 X Inch L1 14 15.5 18.5 22.5 B 22 22 F 5 5 5.5 5.5 L 3.5 3.5 4.5 5 A B 32 32 41 44 F 7.5 7.5 9 11 L B 17 17 F 5 5 5.5 5.5 L 3.5 3.5 4.5 5 Metric 6 8 7 12 12 16 20 25 12 16 20 25 9 10
ON H OFF Blue 50msec PFA7H-(-M) 28 29 B C D E F G H I J A Model Brown PFA703H PFA706H PFA712H 55 160 40 92 67 55 Rc 1, NPT 1, G 1 36 M5 x 0.8 8 OUT1 80mA Load Black 65 180 45 104 79 65 Rc 1 1/2, NPT 1 1/2, G 1 1/2 46 M6 x 1 9 ON OFF 75 220 55 114 89 75 Rc 2, NPT 2, G 2 56 M6 x 1 9 50msec PFA7H-(-M) 68 69 Analog output 1 to 5VDC 4 to 20mADC 5 20 Analog output [mA] Analog output [V] 1 4 Min
2 2 -37No.PS-OMU0008CN-D [F 3] <> [F 3] [F 3] 190 2(283437) -38No.PS-OMU0008CN-D [F 4] <> [F 4] [F 4] (40) -39No.PS-OMU0008CN-D () OUT1 [AP1 REdY] (OUT1[AP1 REdY] 1 [AP2 REdY]) OUT1 OUT1 OUT1 [AP1 RUn] ([AP1 RUn] 1 [AP2 REdY]) OUT2 P_1 H_1(n_1 H_1)[AP2 REdY] (OUT2[AP2 REdY] 1) OUT2 OUT2OUT1OUT2 [AP2 RUn] ([AP2 RUn] 1) P_2 H_2 (n_2 H_2 ) OUT1 P_1=A-(A-B)/4 n_1=B+
This is not applicable to the V type since it is equipped with a relief type regulator, 100 Note 2) This is not applicable in case of thread type symbols N and F, because barrel nipples are used for equipment connections.
OYTOT MSA 1010.02 Yes '/f t2) Yes MBA 10't r.02 11 Yes 't"et t ' l Z YE MAA 4210.02 t6 Y5 v." 11) v.' t2\ t " t2:l t ' l a STATX)flS 2 3 a 5 6 7 I t t0 -1 nm) 5 .
(With mounting screw) For VKF334: VKF300-S-01 For VKF332: VKF300-13A-2 For VKF333: VKF300-11A-2 For VKF334: VKF300-11A-1 i 3 4 For VKF33 : VKF300-6A-1 2 sets per unit required Bushing assembly o Resin 4-13-5 6 Series VKF300 Dimensions: Single Type M5 01 DIN terminal: VKF332-DM5 01 Body ported Grommet: VKF332-G17 Rc 1/8, M5 x 0.8 2(A) port Manual override (Non-locking) A A 18.5 20.5 300
Maintenance detection signal ON OFF Output Requirement for maintenance detected ON OFF Input External switch signal 1, 2 455 IZN10 Series Dimensions 06 07 06 07 Energy saving static neutralization nozzle/IZN10-01 High flow rate nozzle/IZN10-02 20 Note 1) (110) 16 100 5 5 46 A 3.4 18.5 11 6 5 6 A 8 7 (Tap for ground wiring) M3 x 0.5 depth 4 40 25 12 A 93.6 A-A (mm) A Model 01 02 01 02 IZN1006
Note 2) They are not applicable in case the thread type is N or F.
ASN AQ ASV AK How to Order VCHC F S 1 0 03 06 3 2 AS ASR ASQ Hexagon lock nut Round lock nut J Nil Lock nut option Speed controller Option None Electroless nickel plated Nil N Body size 1 2 3 4 M5 standard 01, 02 standard 03 standard 04 standard Tube size Note) With seal 04 06 08 10 12 4 6 8 10 12 Made to Order Refer to page 612 for details.
AS-T (Hexagon width across flats) ASP ASN AQ ASV AK VCHC ASS Metric Size Inch Size ASR ASQ Model d T Weight (g) H D1 D2 L1 L2 L3 L5 (1) A (2) Model d T Weight (g) H D1 D2 L1 L2 L3 L5 (1) A (2) D3 L4 Max.