Compact Cylinder/Guide Rod Type Series CQM

T EB EA M KA (KB) 2 x 2 x OA V (RB) Note) 2 x 2 x RA L M Flat washer 4 pcs W B + Stroke EB A + Stroke EA 20, 25 (mm) Without auto switch A With auto switch HA Stroke range (mm) Bore size (mm) EA EB F OA HB IA IB A B B 12 16 20 25 +0.2 0 3 26.5 17 31.5 22 25 24 5 M3 x 0.5 M4 x 0.7 32 31.5 5 to 30 +0.2 0 3 5 to 30 26.5 17 31.5 22 29 28 5 M3 x 0.5 M4 x 0.7 38 37 +0.2 0 5 to 50 4 32 19.5 42

VS 8-2/VS 8-4

(T) (F) (T) VV802-P-01 (Size 18 mm) 18 9 1/8" VV801-P-03 (Size 26 mm) By mounting individual SUP spacers on a manifold block, it is possible to provide individual SUP ports for each valve. 22.5 11 Size 18 mm 1(P) 4(A) 129.5 61 2(B) 1(P') 19 26 13 3/8" 3(R2) 5(R1) Circuit diagram 28.6 14.3 Size 26 mm 112 Individual EXH spacer 49 12.5 (F) (T) (F) (T) VV802-R-01 (Size 18 mm) 18 9 1/8" VV801

RSQ

QA Tubing O.D. 6 J QB Q F Built-in One-touch Fittings Stroke 13 20 Stroke 8 Applicable tubing O.D.

F/ISE

Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Special fitting types are used in semiconductor production equipment (metal gasket seal fittings) Leak rate: 1 x 10 -10Pa. m3/s ZSE/ ISE60(F)-A2 ZSE/ ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (metal gasket seal fittings) Variations

ISO Standards Air Cylinder: Standard Double Acting with End of Stroke Cushioning ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Series CP96

h11 (Shaft) f H9 (Hole) a (Max.) c (Min.) e b d l1 Part no.

Series 11-MXJ Air Slide Table

Air Grippers Modular F.

F

/2 (N)AS4200-04 M3 M3x0.5 M5 M5x0.8 01 18 02 14 03 38 04 12 Courtesy of Steven Engineering, Inc. !

ISO Cylinder ISO Standard (15552) C96 Series ø32, ø40, ø50, ø63, ø80, ø100, ø125 Lightweight 17% Up C85 An adjustable position trunnion has been added. to C85W Weight reduced C85-S/T C85K * Compared with the previous C96 series (ø40, 100 mm stroke) C

Flange (F, G) [mm] Bore size [mm] Part no.

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

Nil R Internal pilot External pilot M3: M3 x 0.5 (SJ2000 only) M5: M5 x 0.8 (SJ3000 only) Back pressure check valve External pilot spec. is not applicable for 4 position dual 3 port valves. None Built-in Nil K Back pressure check valve is not applicable for 3 position valve.

Manifold Specifications

Round head combination screw Round head combination screw ( ) M3 x 47 With spring washer ( ) M3 x 31 With spring washer Adapter plate assembly DXT201-3-1A Round head combination screw ( ) M3 x 31 With spring washer Gasket Individual EXH spacer Applicable base VV5Z5-20 VV5Z5-21 VV5Z5-21P (EXH port) 2-Rc 1/8 Gasket Gasket Round head combination screw Applicable base VV5Z5-20 VV5Z5-21 ( ) M3

MQQ

Y Q Depth of counter bore RB I 4-N through M 0.2 D E K B + Stroke L M 0.2 A + Stroke E 25, 28 H effective thread depth C 2-Rc 1/8 2 x 4-OA effective depth RA Y Q F 2 x 4-OB Depth of counter bore RB E J I 4-N through M 0.2 D W B + Stroke K L M 0.2 A + Stroke E (mm) Bore size (mm) Stroke range (mm) A B F H C D E Y OA I J K L M N OB Q RA W RB 10 to 40 M3 x 0.5 M4 x 0.7 69.5 61.5 6 6 29 9 38

MLGP

Hexagon socket head cap screw (M3 x 0.5 x 16l) 2 pcs.

MLGP

Hexagon socket head cap screw (M3 x 0.5 x 16l) 2 pcs.

VK300

) 258-9200-www.stevenengineering.com Nil Rc G NPT NPTF Option F N T Option Part No.

pa

N T, F, N are options.

VK300

F Thread type Rc G NPT NPTF Nil F N T Option Part No. Description Part no.

Bernoulli Gripper

Dimensions [mm] Model A B C D E F G H J K L M N P Q R S T U V W Weight [g]*1 Outer body dia.

VQZ1000/2000/3000

G M3 x 0.5 (VQZ2000) M5 x 0.8 (VQZ3000) Note 1) 3(R2), 5(R1) port of VQZ2000 is only G 1/16.

ZSE30/ISE30

Note) Fixed unit: For vacuum/Low pressure: kPA For positive pressure: MPa Lead wire with connector Lead wire length: 2 m With mounting screws (M3 x 5L: 2 pcs.) With M3 x 8L (2 pcs.)

Angle Seat Valve

VXB215C F(H).