High Vacuum Angle Valve, XL Series

Table 1: Model, Fitting size, Orifice Solenoid valve model (fitting size) Orifice symbol (diameter) 1 (2) 4 (6) 3 (4.5) 2 (3) XSA1 XSA2 XSA3 2(1/4) 2(1/4) 2(1/4) 3(3/8) Table 3: Spacer part nos. Table 2: Voltage, Electrical entry, Electrical options Electrical entry D, T Model Part No.

EXxx-OMN0029CN

101h0Ah 09 264h83h 031 -73No.EX-OMN0029CN-D (Class78h)[DeviceNet TM2] Instance Attribute Access Name Type Value () BOOL 0= 1= 64h Get/Set / // () BOOL 0= 1= 65h Get/Set SI / 66h Get/Set / BOOL 0= 1= 67h Get/Set / BOOL 0= 1= 68h Get/Set / BOOL 0= 1= BOOL 0= 1= SI / 69h Get/Set 0=0.1 ms 1=1 ms 2=10 ms 3=20 ms 01h0Ah 6Ah Get/Set / USINT 1 0=1 ms 1=15 ms 2=100 ms 3=200 ms 6Bh Get/Set

LEF-OM006xx

LEC / (LEC ) () ID 1 164 1 IO 1: 64 1 S 0 +23) +2 10 -23) -2 -10 / 3000 3000 LEFS 0.5 LEFB 1 LEFS 0.5 LEFB 1 4) 0.00 CCW:-10+[] 9 CW-9+10-[] 1: /1:+2: SW 2 /1:2 W 1 0.00 W 2 0.00 0.00 1 2 (1-052) 2mm 3 CCW CW (+2 4) P29 -27- LEC / (LEC ) () 1) 2:CCW 1CW 2CCW 1 LEF 100 LEF16A 150 LEF25A 250 LEFS 200 LEFB 200 LEFS 30 LEFB 60 1000 LEFS 30 LEFB 60 0 1

IIIIIIIIII

1/16" ID B85 = NYLON 1/8" ID P80 = POLYSULFONE 1/16 ID P85 = POLYSULFONE 1/8 ID 2 5 15 30 60 100 Units supplied with 1/16" nylon barb standard Vacuum versions available: contact factory Ex F-4400-2-B85 = 2 PSI adjusting range, with 1/8" barb Back to Top .

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

Connection thread size (R, NPT, G) Proper tightening torque [Nm] 1/16, 1/8 3 to 5 1/4 8 to 12 3/8 15 to 20 1/2 20 to 25 Body size Maximum allowable torque [Nm] M5 0.05 1/8 0.07 1/4 0.16 3/8 0.2 1/2 0.4 2. Insufficient tightening may cause seal failure, or loosen the threads. 3.

Line Filter Rated Pressure: 3.5, 7, 14, 21 MPa FH34/44/54/64 Series

2 3/4 1 1 1/4 1 1/2 3/8 1/2 3/4 1 1 1/4 1 1/2 3/8 1/2 3/4 1 1 1/4 1 1/2 3/8 1/2 3/4 1 1 1/4 1 1/2 5 213 57 275 156 80 50 1.8 96 105 2 x M8 x 1.25 19 0 236 61 340 175 60 65 2.5 120 136 2 x M10 x 1.5 15 0 1 0 1 32 (1 1/4B) 32 36 46 16 20 25 32 36 46 60 70 16 20 25 32 36 46 16 20 25 32 36 46 17 20 20 12 12 17 17 20 20 27 27 12 12 17 17 20 20 22 22 22 22 30 30 56 65 73 36 40 48 56 65

JXCx-OMT0034CN

N.C. 1 N.C. 2 1 1 1 1 SD+ 3 2 2 2 2 SD4 3 3 3 3 N.C. 5 4 4 4 4 N.C. 6 N.C. 7 1 2 3 4 1 2 3 4 N.C. 8 CN4 CN4 No. No.

LFE-OMY0008

OFF [F98] 56 OFF [F99] 57 OFF 30 [F10](41 ) OUT2 (20L/min ) OFF OFF OFF OFF 27 No.LFE*-OMY0008 [F 1] OUT1 OUT1 1. 1. 1. 1.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

VQZ (A) 2 (A) 2 VZ 3 (R) 1 (P) 3 (R) 1 (P) VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts No.

LJ1H

B A C D 27 28 Standard Motor 100W Series LJ1H10 High Rigidity Direct Acting Guide Motor Output Rolled Ball Screw 12mm/8mm lead Vertical Mount How to Order Stroke LJ1H102 NH 1 K F 2 Cable entry direction Top entry Power supply voltage Cable entry direction Cable length Left entry 1 2 100VAC (50/60Hz) 200VAC (50/60Hz) Actuator cable Axial Right Left Top Bottom Brake cable Left Axial Axial Axial

Angle Seat Valve /

M5, 1/8, 3.2 to 6 1, 1.6, 2.3, 3.2 N.C.

Environment

1 Controller/Driver type*1 !

I

Repetition Accuracy + 1%F.S.

0.5

in 1 m increments from 1 m to 20 m.

EX500-GPR1A.eng

Consider this key position when selecting sensor. 4 3 1 1 2 3 Input "1" (n+1) 0 Input "0" (n) side Input "1" (n+1) side 1 1 3 3 Input "0" (n) 2 4 key 4 2 M12 Block Sensor connector "0" Sensor connector "1" key 4 3 1 2 1 30 31 Input block up to 8 can be connected ( 16 points ). Input numbers are 0 15 from Input unit side.

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

pilot Type SS3YJ5-41-M5 SYJ54 1/8 Type SS3YJ5-41-01 Type SS3YJ5-41-C4 Type SS3YJ5-41-C6 C6 1/8 M5 x 0.8 1/8 M5 x 0.8 1/8 1/8 Body ported for external pilot SYJ52R Type SS3YJ5-21R Type SS3YJ5-40R-M5 Type SS3YJ5-40R-01 1/8 1/8 1/8 1/8 1/8 Base mounted for external pilot Type SS3YJ5-41R-M5 M5 x 0.8 1/8 SYJ54R Type SS3YJ5-41R-01 Type SS3YJ5-41R-C4 C4 C6 Type SS3YJ5-41R-C6 Note) Value at manifold

Title not found

3/8 5 AF4000 1/4, 3/8, 1/2 Float style auto drain AF4000-06 3/4 Pressure differential auto-drain 3/4, 1 AF5000 AF6000 1 Mist Separator Series AFM AFM2000 1/8, 1/4 Bracket AFM3000 1/4, 3/8 0.3 Float style auto drain AFM4000 1/4, 3/8, 1/2 Pressure differential auto-drain AFM4000-06 3/4 Micro Mist Separator Series AFD AFD2000 1/8, 1/4 Bracket AFD3000 1/4, 3/8 0.01 Float style auto drain AFD4000

PFxx-OMJ0005CN

1 310 -1 310 -1 310 -1 ft ft ft ft 310 -1 0.1 ft 310 -1 1 ft 310 -1 1 ft 310 -1 / 0.1 ft 0.1 1 1 1 310 -1/pulse 310 -1/pulse 310 -1/pulse 310 -1/pulse ft ft ft ft 0.927= -23No.PF-OMJ0005CN-I [F 1] OUT1 OUT1 <> [F 1] [oU1] [1ot] () -24No.PF-OMJ0005CN-I 21 [P_1] [P1L][P1H] [P1.1][P1.2]([P1.1]3[P1.2]3) Pn [H_1] [CoL] ON OFF ON OFF [F 1] OUT1 -25No.PF-OMJ0005CN-I H_1(H_2) H1(H2) H1(H2

60

SUP. 3 1 2 3 1 2 3 1 2 E Padlock mounting position D C SUP J 2 2 x K A T IN OUT AA 3 L 2 x P1 (Port size) B V BB U Built-in silencer (Option) M (Width across flats) 3 N P2 (Port size) Q EXH Y Bracket (Option) R S X W Dimensions (mm) Standard specifications Model P1 P2 A B C D E F G H I J K L M 1/8, 1/4 1/4, 3/8 1/8 1/4 3/8 1/2 1/2 66.4 80.3 104.9 110.4 134.3 22.3 29.4 38.5 42 53 40 53 70

DOC1020530

Command bit setting of Controlword Bit 3 Bit 1 Command Transition No. Bit 7 Bit 2 Bit 0 Enable Enable Fault Reset Quick Stop Switch On Operation Voltage Shutdown 0 1 1 0 (2)/(6)/(8) Switch On 0 0 1 1 1 (3) Disable Voltage 0 0 (7)/(9)/(10)/(1 2) Quick Stop 0 0 1 (7)/(10)/(11) Disable Operation 0 0 1 1 1 (5) Enable Operation 0 1 1 1 1 (4)/(16) Fault Reset 0 1 (Note) (15) Note.