KA

M6 x 1 9 5 6 18 3.5 3.5 8 8 KAL06-M6 16.5 Connection thread 17 1 8 KAL06-U01 3 8 KAL06-U03 24 23 21.5 20 14 12.8 10 6 23.5 1 4 KAL06-U02 10 11.4 11.4 15 Applicable tubing 24.5 23 17 12 1 8 1 4 KAL08-U01 KAL08-U02 25.5 26 22.5 24.5 11 16 14 12 15.2 8 23 14.9 18.5 14.9 3 8 KAL08-U03 17 25.5 27 24 1 8 KAL10-U01 29.5 27 26.5 25 25 21 24 14.9 14.9 1 4 3 8 KAL10-U02 KAL10

Rubber seal 5 Port Solenoid Valve Series SYJ7000

0.49 0.51 0.54 0.50 0.50 0.59 0.55 0.52 0.53 1/8 1/8 1/8 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/8 C6 C8 1/8 C6 C8 1/8 1/8 C6 C8 Type SS5YJ7-20 Body ported SYJ72 for internal pilot Type SS5YJ7-21 Type SS5YJ7-40 Base mounted Type SS5YJ7-41 SYJ74 for internal pilot Type SS5YJ7-42-C6 Type SS5YJ7-42-C8 Note) Value at manifold base mounted, 2 position single operating How to Order Manifold (Example) Instruct

Electric Rotary Table

Connector C Actuator side (8) (Terminal no.) 1 2 5 6 (14) (18) A1 B1 (13.5) (17.7) (17.7) Cable length (L) [m] 1 3 5 8 A B C 1 2 1.5 3 5 8 A6 B6 (30.7) Connector A 15 16 (14.7) Connector D L (11) (10) 8 A B C LE-CP/Cable length: 8 m, 10 m, 15 m, 20 m ( Produced upon receipt of order) Controller side 10 (14.2) Connector C (Terminal no.) 1 2 5 6 (5.5) (6.3) 15 Actuator side (14) (18) (Terminal

SFOD-OMT0009CN

4 / 3 2 (SETUP)1 512 2048 I/O 1 4 USB , 7 No.SFOD-OMT0009CN-B 2.2 J X C *3 I/O 1) I/O 1 1.5m 2 1.5m DIN 7 NPN 3 3m 8 PNP 4 3m DIN 4 5 5m 6 5m DIN 7 8 DIN 1)I/O (1.5m~5m) I/O 2 LEY Series LEYG Series LEF Series LES/LESH Series 2) LER Series LEPY/LEPS Series 2 3 LEH Series 2) 360 8 No.SFOD-OMT0009CN-B 2.3 1) PLC I/O 2) :JXC-C2-* DC24V 1) I/O ENC : LE-CP-*

Vacuum Unit Ejector / Vacuum Pump System

Size Ejector System Vacuum Pump System Port Metric Inch Metric Inch PV 6 1/4 6 1/4 V 6, 8 1/4, 5/16 6, 8 1/4, 5/16 EXH (Port exhaust) 8 5/16 PE EXH Common Port open to atmosphere Note 1) PS 4 5/32 PD Note 2) M3 M3 : Not applicable Note 1) Piping for PE port is available as an option (M3). Refer to page 11. Note 2) A model with PD port (M3) is available as an option. Refer to page 11.

PSE530/200

Terminal DC (+) 4 3 2 1 IN (1 to 5 V) DC () N.C. Power supply/Output connector (8P) Power supply/Output connection cable (Included) Pin no. 8 Yellow : Auto shift input PIN no.

Environment

B With lock Nil Without cable S Standard cable*2 R Robotic cable (Flexible cable)*3 Nil Without cable 1 1.5 3 3 5 5 8 8* A 10* B 15* C 20* LEPY LEPS LER *1 The standard cable should be used on fixed parts.

Compact and Lightweight

Model 6 Rc1/8 6 ZH05DA ZH07DA 1/4" NPT1/8 1/4" ZH05DA ZH07DA One-touch One-touch EXH. SUP. 8 Rc1/8 8 ZH10DA 1/4" NPT1/8 5/16" ZH10DA 8 Rc1/4 10 ZH13DA 5/16" NPT1/4 3/8" ZH13DA 8 Rc3/8 10 ZH15DA 5/16" NPT3/8 3/8" ZH15DA 10 Rc3/8 12 ZH18DA 3/8" NPT3/8 1/2" ZH18DA 10 Rc1/2 12 ZH20DA 3/8" NPT1/2 1/2" ZH20DA Screw-in Oval release button is only available with 6. VAC. Screw-in connection SUP.

Series AK1000

3/8 inch compression 1/2 inch compression 4 6 8 4T 6T 8T Bonnet port (NPT 1/8 inch) 6) Panel mounting hole: dia. 1.56 inch (39.6 mm).

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

5 IS ISG Air tube M5 x 0.8 ZSM Part-C The dimensions of part C are common to all PSE56 models. 24 PSE56-C01 PSE56-A2 A 24 B B PSE56-B2 (mm) Model A A 8.2 12 9.2 12.2 15.5 9.5 B R 1/8 R 1/4 NPT 1/8 NPT 1/4 Rc 1/8 URJ 1/4 TSJ 1/4 24 B PSE56-01 PSE56-02 PSE56-N01 PSE56-N02 PSE56-C01 PSE56-A2 PSE56-B2 ZS-31-X H D (mm) Model 1 E D 20 20 29 29 E 9 9 13 13 F R 1/8 NPT 1/8 R 1/4 NPT 1/4 G Rc 1/

Environment

8 o !0 @8 !9 @1 @2 !3 !7 q r e i u @0 !6 !5 !4 !1 !2 y w t In-line motor type: LEY63D @7 @8 @5 @6 When rod end male thread selected @9 @9 #0 @4 Component Parts No. Description Material Note 1 Body Aluminum alloy Anodized No.

Series H, DL, L, LL Self-align Fittings

A L1 L2 M 1 8 4 L04-01 33 10 21.8 30.9 15 3.5 32.7 10 14 10 1 4 1 8 L04-02 L06-01 40 36 14 10 34.9 30.9 34.7 33.8 1 4 3 8 1 8 6 L06-02 L06-03 L08-01 43 55 46 14 17 12 34.9 36.9 31.9 16 9 21.8 35.8 37.5 36 12 10 14 1 4 3 8 1 4 8 L08-02 L08-03 L10-02 52 61 68 14 17 14 16 19 23.3 35.9 37.9 36.9 38 39.7 40.7 14 12 17 3 8 1 2 1 4 3 8 1 2 Reference dimensions after R(PT) thread installation. 10

Fieldbus system PROFIBUS DP compatible SI unit

System diag.2 7 6 5 4 3 2 1 0 Byte 8 Bit No.

Fluoropolymer Tubing Variations

8" x 0.086" 1/8" TILMB01 1/8" x 1/16" 1/8" TILM05 3/16" x 1/8" 3/16" 4.75 1/8" 3.15 TILM07 1/4" x 5/32" 1/4" 6.35 5/32" 3.95 TILM11 3/8" x 1/4" 3/8" 9.53 1/4" 6.33 TILM13 1/2" x 3/8" 1/2" 12.7 3/8" 9.5 TILM19 3/4" x 5/8" 3/4" 19.05 5/8" 15.85 TILM25 1" x 7/8" 1" 25.4 7/8" 22.2 TILM32 11/4" x 11/10" 11/4" 31.75 11/10" 27.95 KQB2 O.D. 3.18 1/16" 1.58 0.086" 2.18 KS KX I.D.

JXCx-OMY0008

S Standard cable Orange 9 B A-6 Black 8 3 Actuator side Controller side (14.2) (2) 2 1 (8) (1) B1 A1 (14) (18) (17.7) 6 5 (3) 2 1 A6 B6 15 16 L (11) (30.7) 14.2 Actuator cable [8 to 20m] (1) (2) LE-CPSignal name Terminal number Cable color Terminal number A B-1 Brown 2 Cable length (L) A A-1 Red 1 B B-2 Orange 6 8 8m B A-2 Yellow 5 COM-A/COM B-3 Green 3 A 10m COM-B/ A-3 Blue 4 (3) B 15m

Air Pilot Operated Series NVSA

PC 0roGl 1 1 8 Typ "N" w/Operator & (4) Screws \2:) Alum. O.C. PC 0101.1 1 1 C Typ "8" Wo OpeEtor w/{4) Screws Alum. D.C.PC 0110,1t 1 1 D Type "A" W/opelator & (4) Scrws Alum. D.C. P C 0 1 1 1 . r l O.Flnq ' Op6ralol Buna N 13 Recessd Non.Locking Operator PB 0103 1 4 Screws .

Air Pilot Operated

PC 0roGl 1 1 8 Typ "N" w/Operator & (4) Screws \2:) Alum. O.C. PC 0101.1 1 1 C Typ "8" Wo OpeEtor w/{4) Screws Alum. D.C.PC 0110,1t 1 1 D Type "A" W/opelator & (4) Scrws Alum. D.C. P C 0 1 1 1 . r l O.Flnq ' Op6ralol Buna N 13 Recessd Non.Locking Operator PB 0103 1 4 Screws .

Electric Actuator

/8 words) Up to 42 (when 1 station is occupied by 1 driver), Up to 32 (when 2 stations are occupied by 1 driver), when there are only remote device stations.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

3.5 M10 x 1.5 15 M6 x 1 M10 x 1 M5 x 0.8 37 117 10 12 60 25 54 20.5 4H9 4.5 M6 x 1 10 43 36 4H9 4.5 24 4H9 4.5 M10 x 1.5 15 M6 x 1 M10 x 1 Rc 1/8 40 127 11.5 14 65 25 57 23 4H9 4.5 M6 x 1 10 48 39 4H9 4.5 28 4H9 4.5 M12 x 1.75 18 M8 x 1.25 M14 x 1.5 Rc 1/8 46 152 14.5 15 75 31.4 66 26.5 5H9 5.5 M8 x 1.25 12 55 45 5H9 5.5 33 5H9 5.5 11-9-21 22 Series MSQ Dimensions: Size 70, 100, 200 Basic

SMC Pneumatic Clean Series

8 8 15 15 15 83 82 85.5 54 55 M4 x 0.7 M10 x 1.0 M5 x 0.8 M12 x 1.0 With air cushion type is not available for 21/ 22CJ2.