42

(A) 4 (B) 2 VQ4151 VQ4150 VP4 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VQ 1/2 VQ 4/5 VQ 4/5 VQC 1/2 VQC 4/5 VQZ (A) 4 (B) 2 (A) 4 (B) 2 VQ4250 VQ4251 SQ VFS 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) VFR VQ7 (A) 4 (B) 2 (A) 4 (B) 2 VQ4351 VQ4350 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 (A) 4 (B) 2 VQ4451 VQ4450 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) (A) 4 (B) 2 (A) 4 (B) 2 VQ4551

5 Port Solenoid Valve

VQZ n 6 5 4 3 2 D side U side Stations 1 1/8" PE. port SQ 3/4" 1(P), 5(R1), 3(R2) port 1/2" 3(R) port VFS 2 x M12 M5 x 0.8 Ground screw 4 x M8 VFR 117 B B 2 B 2 B 2 B 2 2 B B 2 2 0 0 BUS 19 3 1 69 55.5 53.7 1 60 12 X 51 1 2 VQ7 PWR 3 A 4 A 4 A 4 A 4 A 4 A 4 A 4 22 17 15.5 34 2 x M12 M3 69.5 34.5 1/2" 1(P) port 48 3/8", 1/2" 4(A), 2(B) port 68.5 1/8" External pilot port Note) The dimensions

5 Port Air Operated Valve Series SYA3000/5000/7000 1

-1 2.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

1021-VQ2400 1021-VQ2301 1021-VQ2401 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r 1021-VQ2500 1021-VQ2501 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Component Parts Component Parts No.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

1021-VQ2400 1021-VQ2301 1021-VQ2401 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) r r 1021-VQ2500 1021-VQ2501 (B) 2 (A) 4 (B) 2 (A) 4 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Component Parts Component Parts No.

VQ5000

Series Nil CD1 Note 1) 5 VQ5000 Cylinder port size 3/8 NPTF 1/2 NPTF Bottom ported 1/2 NPTF Rc3/8 Rc1/2 Bottom ported Rc1/2 Mixed sizes Note) CD2 Note 1) 03T 04T BT 03 04 B CM Manifold type CU1 Note 1) 1 Plug-in unit CU2 Note 1) SB SD Note 1) Stations SU Note 1) 1 1 station D U D U Note 1) Combination of [C ] and [S ] is not possible.

Valve Single Unit

ADDRESS 4632 4632 4632 1 1 1 9 9 9 PW LRUN ON POWER ALARM COMM Name of terminal block, LED Note Cable wiring 2 2 2 1 ON 8 8 8 O N 3 3 3 7 7 7 4632 4 4 4 6 6 6 SD RD LERR. 5 5 5 POWER SEND x 10 x 1 1 2 3 4 5 6 7 8 OFF DG 24 V 0 V D G D G 0 V 24 V 24 V 0 V A B SG FG 0 V 24 V 24 V 0 V +24V 24G DA DB FG Description LED ON for SI unit power supply input Description LED Description LED POWER COMM

Valve Single Unit

ADDRESS 4632 4632 4632 1 1 1 9 9 9 PW LRUN ON POWER ALARM COMM Name of terminal block, LED Note Cable wiring 2 2 2 1 ON 8 8 8 O N 3 3 3 7 7 7 4632 4 4 4 6 6 6 SD RD LERR. 5 5 5 POWER SEND x 10 x 1 1 2 3 4 5 6 7 8 OFF DG 24 V 0 V D G D G 0 V 24 V 24 V 0 V A B SG FG 0 V 24 V 24 V 0 V +24V 24G DA DB FG Description LED ON for SI unit power supply input Description LED Description LED POWER COMM

SFOD-OMT0009CN

[] 14096 X (1) ()1 ()1 11 800 1 (2) ()1 ()2 1600 1 (3) ()2 ()1 400 1 ()1 ()1 0 1 4097 4096 1 2 1 [] 1 LEY16C-300 2.5mm 1/1 2 LEY16B-300 5mm 25/50 3 LEY16A-300 10mm 25/100 14096 X 12 1 800 2.5mm 2 3 =1 /2 3 =2.5mm/5mm (2.5mm/10mm) =25/50 (25/100) 1) 50 No.SFOD-OMT0009CN-B 7.3 XX X 1CW X 1 2 2CCW 1 XX 1 2 2 1) XX 1) XX 1) XX 0 XX 02 1a 2b 21 1)

HRX-OM-Y098

1-5 1.7 Waste Disposal . 1-5 1.7.1 Disposal of refrigerant and compressor oil . 1-5 1.7.2 Disposal of product . 1-5 1.7.3 Battery . 1-6 1.8 Safety Data SheetSDS . 1-6 Chapter 2 Name and Function of Parts . 2-1 2.1 Model Number of Product . 2-1 2.2 Name and Function of Parts . 2-2 2.2.1 HRL-A-20 (Air cooled type) . 2-2 2.3 Function of Parts . 2-4 Chapter 3 Transport and Setting Up . 3-1 3.1

Title not found

/4 1-1/4 1-1/2 1-1/2 2 2 2 2-1/2 25 180 1-1/4 1-1/2 1-1/2 1-1/2 2 2 2 2-1/2 2-1/2 30 240 1-1/4 1-1/2 1-1/2 2 2 2 2-1/2 2-1/2 3 40 300 1-1/2 2 2 2 2 2-1/2 2-1/2 3 3 50 360 1-1/2 2 2 2 2-1/2 2-1/2 2-1/2 3 3 60 450 2 2 2 2-1/2 2-1/2 3 3 3 3-1/2 75 600 2 2-1/2 2-1/2 2-1/2 3 3 3 3-1/2 4 100 750 2 2-1/2 2-1/2 3 3 3 3-1/2 3-1/2 4 125 Pneumatic Pressure Loss Figures in the table below are approximate

Title not found

/4 1-1/4 1-1/2 1-1/2 2 2 2 2-1/2 25 180 1-1/4 1-1/2 1-1/2 1-1/2 2 2 2 2-1/2 2-1/2 30 240 1-1/4 1-1/2 1-1/2 2 2 2 2-1/2 2-1/2 3 40 300 1-1/2 2 2 2 2 2-1/2 2-1/2 3 3 50 360 1-1/2 2 2 2 2-1/2 2-1/2 2-1/2 3 3 60 450 2 2 2 2-1/2 2-1/2 3 3 3 3-1/2 75 600 2 2-1/2 2-1/2 2-1/2 3 3 3 3-1/2 4 100 750 2 2-1/2 2-1/2 3 3 3 3-1/2 3-1/2 4 125 Pneumatic Pressure Loss Figures in the table below are approximate

SFOD-OMT0010

[Setting example] (1) Axis 1: 1, Axis 2: 2, Axis 3: 2, Axis 4:3 The order of returning starts from Axis 1, then Axis 2 and 3, and then Axis 4. ORIG order 1 to 4 X (2) Axis 1: 1, Axis 2: 1, Axis 3: 1, Axis 4:1 Four axes return simultaneously. Caution Simultaneous return to origin of 4 axes is not synchronous. Adapter file version Fixed value This is a fixed value for this controller.

HRX-OM-R016

Instructions for Use . 1-5 1.5.2 Personal Protective Equipment . 1-6 1.6 Emergency Measures. 1-7 1.7 Waste disposal . 1-8 1.7.1 Disposal of refrigerant and compressor oil. 1-8 1.7.2 Disposal of product . 1-8 1.8 Material Safety Data Sheet (MSDS) . 1-8 Chapter 2 Name and Function of Parts . 2-1 2.1 Part number of product . 2-1 2.2 Name and Function of Parts . 2-2 2.3 Function of Parts . 2

Air Fittings Fitting Series For Special Environment

. 1 ) 5 . 5 3 ( 6 1 . 1 ) 5 . 9 2 ( 1 9 . 0 ) 3 2 ( 8 2 . 0 ) 7 ( 4 / 1 S 5 3 1 1 H R K 1 1 / 6 1 ) 6 4 . 7 1 ( 0 8 . 0 ) 3 . 0 2 ( 5 . 2 3 8 / 3 S 6 3 1 1 H R K 2 2 . 1 ) 1 3 ( 6 9 . 0 ) 5 . 4 2 ( 5 . 0 3 8 / 3 2 / 1 S 7 3 1 1 H R K 7/8 ) 3 2 . 2 2 ( 4 1 . 1 ) 9 2 ( 3 8 . 0 ) 1 2 ( 5 . 7 4 5 3 . 0 ) 9 ( 4 4 . 1 ) 5 . 6 3 ( 0 2 . 1 ) 5 . 0 3 ( 4 9 . 0 ) 4 2 ( 4 / 1 S 5 3 3 1 H R K 7/8 )

DOC1001322

-5 1.7 Waste Disposal . 1-5 1.7.1 Disposal of refrigerant and compressor oil . 1-5 1.7.2 Disposal of product . 1-5 1.7.3 Battery . 1-6 1.8 Safety Data SheetSDS . 1-6 Chapter 2 Name and Function of Parts . 2-1 2.1 Model Number of Product . 2-1 2.2 Name and Function of Parts . 2-2 2.2.1 HRS400-A-46(Air cooled type) . 2-2 2.3 Function of Parts . 2-4 Chapter 3 Transport and Setting Up . 3-1 3.1

JXCx-OMT0005CN

Instance Attribute Access Size Name Byte Semantics of Value 0-1 2byte *1 *2 2-3 2byte *1 *2 4-7 4byte *1 *2 8-9 2byte *1 *2 10-11 2byte *1 *2 12-13 2byte *1 *2 1 100 Get/Set 32 No.0 14-15 2byte *1 *2 16-17 2byte *1 *2 18-19 2byte *1 *2 20-23 14byte *1 *2 24-27 24byte *1 *2 28-31 4byte *1 *2 64 100 Get/Set 32 No.63 0-1 2byte *1 *2 28-31 4byte *1 *2 *1 *2 21(P.85 19 - 2IO Class 68h

Step Motor Controller (Servo / 24 VDC)

A B-1 Brown 2 Cable length (L) A A-1 Red 1 B B-2 Orange 6 1 1.5m B A-2 Yellow 5 COM-A/COM B-3 Green 3 3 3m COM-B/ A-3 Blue 4 5 5m Shield Cable color Terminal no.

JXCx-OMY0008

Alarm was generated in order of (1) -> (5) 6030h (1) 0-7 Alarm 1 6030h (2) 0-7 Alarm 2 Alarm 1 (Latest) (1) (2) (3) (4) (5) 6030h Alarm 2 0 (1) (2) (3) (4) (3) 0-7 Alarm 3 Alarm 3 0 0 (1) (2) (3) Alarm 4 0 0 0 (1) (2) (1) to (5) in the table indicate the alarm codes which are generated. 6030h Refer to 15.2.

5 Port Air Operated Valve

0.76 (A)4 2(B) 1 (P) (EA)5 3(EB) 2 position double VFA1000 VFA3000 (B)2 4(A) 5(EA) 1 (P) (EB)3 Body ported Base mounted VFA3000 VFA5000 1/8 1/4 4.0 P.1498 2(B) (A)4 (EA)5 1 (P) 3(EB) Upward 3 position closed center 2(B) (A)4 VFA5000 (EA)5 1 (P) 3(EB) 3 position exhaust center 2(B) (A)4 1/4 3/8 8.8 (EA)5 1 (P) 3(EB) 3 position pressure center 2(B) (A)4 Lateral (EA)5 1 (P) 3(EB) VFA3000 2