High Vacuum Angle Valve

50 121 48 27 12 40 26 44 21 XLG-40-2 65 171 66 39 11 55 41 67 29 XLG-50-2 70 181 79 31 11 75 52 76 29 9 XLG-63-2 88 206 100 39 11 87 95 70 77 33 9 XLG-80-2 90 244 117 46 11 114 110 83 104 39 9 *1 The E dimension applies when the heater option is included.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

76.8 18.8 1/4 17 24.2 53.5 48.5 47.5 42.5 8 15 29.4 38.3 17.9 80.3 20.9 10 18 31.9 41.4 19 93.6 23 8 15 31.1 41.7 21.2 117.0 20.9 3/8 19 26.5 58.7 53.7 52.7 47.7 10 18 33.6 44.2 21.2 124.9 23 12 20.8 35.4 46.3 21.8 137.8 24.8 1/2 24 30 65.9 58.4 54.3 46.8 12 20.8 37.6 50.5 25.8 186.8 24.8 Note) Reference thread dimensions after installation. 4

CRQ2

, 20, 30, 40 10, 15 10, 15 20, 30, 40 Chart 5.

C85

8 8 11.5(13) 15(17) 15(17) 10.5 10.2 22 33.5 ( ): In the case of air cushion.

CXS

Y7BAL is not compatible with sizes 10, 15, and 20.

Metal Seal/Rubber Seal Series VQ Body Ported

Types with 15 pin are also available. For details, refer to page 2-4-68.

ZP

4.5 40.5 18.5 24.5 50.5 3.3 17 38 43 3 12 3.8 25 3 41.5 25 13 15 20 1.8 ZPT50 50 53 7.5 19.5 25.5 51.5 12.5 16 18 17.5 38.5 43.5 3.5 1.2 Deep Deep H: M6 x 1 H: M8 x 1 Y B C F G C F G D E Model A H: M5 x 0.8 H: M6 x 1 Y Model A B E F E F C D ZPT40D 40 43 29 35.5 3 25 61 4.5 15 51 17 ZPT10D 16 18 16 20 42 25 47 7 21 ZPT16D 10 12 15 20 41 25 46 6 20 13-11-4 Series ZPT Vacuum Pad: Vertical Vacuum

HRX-OM-W002

(CN6) 20 34 21 21 12 10 15 16 17 18 19 13 15 10 16 17 24 11 14 9 8 6 3 9 3 3 7 5 2 2 5 2 5 4 4 4 1 1 1 1 1 1 21 21 11 9 8 6 3 9 3 3 22 23 25 26 27 28 23 7 5 2 2 5 2 5 35 36 20 12 10 15 16 17 18 19 13 15 10 16 17 4 4 4 34 24 14 2B 1B 2A 3A 1A 3B Main Board PCB2 2/2 1/2 23 22 25 26 27 22 37 38 39 40 32 20 20 21 10 12 13 15 16 15 16 18 24 24 11 14 3 9 8 6 2 7 7 2 5 (CN8) 4 4 1 1 1 5 1 21 11

Programless Controller Series LECP1

Note 3) 10 to 15 in decimal number are displayed as follows in the 7-segment LED. Decimal display 10 11 12 13 14 15 Hexadecimal display A b c d E F Note 4) Applicable to non-magnetizing lock. 41 Programless Controller Series LECP1 Details ofThe Controller Servo Motor (24 VDC)/Step Motor (Servo/24 VDC) Specific Product Precautions Model Selection e r Details No.

Tie-rod Type Hydraulic Cylinder

(same surface) (n = 4, 8, 12, 16 )Note 2) (n = 4, 8, 12, 16 )Note 2) (n = 4, 8, 12, 16 )Note 2) (n = 2, 4, 6, 8 )Note 1) 1 pc. 100 100 110 120 15 1 or 2 pcs. (different surfaces/same surface) 120 120 130 140 D-F5W, J59W D-F5BA D-F59F D-F5NT 15 140 + 55 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 15 + 55 (n 2) 2 120 + 55 120 + 55 130 + 55 "n" pcs.

MHZ

11 7 52.8 0.016 0.043 MHZ2-16E 16f8 20 10 15 58.7 D2 0.020 0.053 MHZ2-20E 20f8 22 12 19 70.5 0.020 0.053 D1 MHZ2-25E 25f8 15 25 24 82.9 Other dimensions and specifications correspond to the standard.

MHZ

11 7 52.8 0.016 0.043 MHZ2-16E 16f8 20 15 10 58.7 D2 0.020 0.053 MHZ2-20E 20f8 12 22 19 70.5 0.020 0.053 D1 MHZ2-25E 25f8 15 25 24 82.9 Other dimensions and specifications correspond to the standard.

ITV

9 u 12 NBR O-ring 13 NBR Seal q Resin 14 Bowl assembly @2 Silicone rubber y 15 Resin Sub-plate OUT SUP 16 NBR Seal !

0.55

15 to 102 (0.1 to 0.7) 22 to 102 (0.15 to 0.7) 22 to 145 (0.15 to 1.0) 15 tp 145 (0.1 to 1.0) 22 to 145 (0.15 to 1.0) 22 to 102 (0.15 to 0.7) 15 to 102 (0.1 to 0.7) 22 to 102 (0.15 to 0.7) 22 to 145 (0.15 to 1.0) 15 to 145 (0.1 to 1.0) 22 to 145 (0.15 to 1.0) Single Double Single Double Single Double 20 12 23 15 20 12 30 23 15 33 30 15 50 33 18 53 45 12 48 15 45 12 55 48 15 58 55 15 75 58

CY1F

Bore size (mm) 10 15 25 10 15 25 Auto switch Nil Without auto switch Refer to the table below for auto switch model numbers.

Slider Type Ball Screw Drive/11-LEFS Series

10 5 0 15 10 5 20 25 30 0 15 10 5 20 Vertical L7 Work load [kg] Work load [kg] Work load [kg] Work load [kg] 1500 1500 1500 1500 1000 1000 1000 1000 L8 [mm] L8 [mm] L8 [mm] L8 [mm] Z 500 500 500 500 Mep m 0 0 0 0 0 2 1 3 4 5 0 15 10 5 0 15 10 5 20 0 15 10 5 20 25 30 L8 Work load [kg] Work load [kg] Work load [kg] Work load [kg] Calculation of Guide Load Factor Mounting orientation 1.

Vacuum Unit

(Refer to pages 15 and 16.) MExhaust Noise 2 A model with PD port is available as an option. (Refer to pages 9, 10, and 15.) When vacuum ejector generates vacuum, noise can be heard from the exhaust port when the standard supply pressure is close to the pressure that generates peak vacuum pressure making vacuum pressure unstable.

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

Table (3) Guide block L3 L3 End face L3 (mm) 19 15 15 15 15 15 Model MXP10-10B MXP10-20B MXP12-15B MXP12-25B MXP16-20B MXP16-30B Tightening torque (Nm) Model MXP10 MXP12 MXP16 1.67 8-8-5 5 Series MXP Model Selection Model Selection Step Formula/Data Selection Example Operating Conditions 1 Enumerate the operating conditions considering the mounting position and workpiece configuration.

JXCx-OMT0030CN

JXC-OMT0030CN GWProfibus / LEC-GPR1 1 . 4 2 . 6 21 . 6 22 . 6 23 . 7 24 () . 8 1 . 8 2 . 8 3LEC . 8 4 . 8 5 . 8 6 . 9 7 . 9 3 . 10 31 . 10 32 . 12 33 . 13 1LECGPR1 . 13 2DIN LECGPR1D . 13 34 . 14 1 . 14 2 . 14 4 . 15 41 ADDRESS,B RATE . 15 42 CN2SW . 16 43 LEC . 17 44 SIEMENS PLC S7 . 19 5 . 21 51 CN4: . 21 52 CN3: . 21 53 CN1:CONT . 21 54 CN2:PC/TB . 22 1 - 6CN . 23 61 . 23

Series CE1

19 41 46 43.5 4.4-16