Compact and Lightweight

ZH20DA-10-12-12 112.2 62.2 Metric ZH05DA-07-07-07 11.15 11.15 11.15 1/4" 1/4" 1/4" 13.3 13.3 13.3 51.8 34.9 19.4 18.4 11 14 6 3.2 5.5 20 17 4.2 3.2 28 9.6 ZH07DA-07-07-07 55 ZH10DA-07-07-09 13.2 5/16" 14.2 61.7 ZH13DA-09-11-11 13.2 15.45 15.45 5/16" 3/8" 3/8" 14.2 15.6 15.6 71.8 43.9 22.4 24.4 17 20 9 4.3 7.8 27 22 4.2 35 12 ZH15DA-09-11-11 83.6 51.4 ZH18DA-11-13-13 15.45 19.3 19.3 3/8" 1

SY

SS5Y5 20 Top ported (type 20) SS5Y5 Side ported (type 41, 42) Base type Stations A/B port size 01 Rc 1/8 Type 41 02 2 stations 41 Type 41 02 Rc 1/4 Type 42 42 Type 42 ... ... 20 20 stations C6 6 One-touch fitting Type 41, 42 C8 8 One-touch fitting Type 41, 42 2 Valve Type Note) SY320-is for type 20 manifolds. SY340is for type 41 and 42 manifolds. SY340Ris for type 42 manifolds.

Hydraulic

37.5 34.5 25.5 38.5 40 33 35.5 26.5 36 32 28.5 29.5 31 24 27 80 46 42.5 39.5 29.5 43.5 45 38 40.5 30.5 41 36 32.5 33.5 35 28 31 100 50 46.5 43.5 31.5 47.5 49 42 44.5 32.5 45 38 34.5 35.5 37 30 33 41 Compact Hydraulic Cylinder Double Acting/Double Rod: 3.5MPa Series CHQWB B 32 to 100 D-A9 D-F9 D-F9W A B Approx.

Made to Order

series GB Stroke B Stroke A (mm) Bore size GB Q S ZZ 40 29 53 168 230 50 33 59 180 249 63 33 61 196 268 80 41 73 232 320 100 41 79 252 341 Q S + Stroke (A + B) ZZ + Stroke (A + B) CNA2 series Stroke A Stroke B GE (mm) Bore size GE S ZZ 40 29 237 299 50 33 258 327 63 33 280 352 80 41 334 422 100 41 372 461 ZZ + Stroke (A + B) S + Stroke (A + B) -X -X 1789 Made to Order Common Specifications

CL

20 25 32 40 0 1/8 1/8 1/8 1/8 1/8 1/8 1/8 1/8 to 400 to 450 to 450 to 500 0 26 20 57.5 69 69 76 73.5 0.033 64.5 83.5 0.033 0 0.033 0 0.033 26 64.5 70 83.5 100.5 90.5 32 Boss cut (mm) MM Bore 20 25 32 40 N 15 15 15 NA 24 30 S 127 137 139 167 Bore ZZ 168 182 184 217 H1 5 6 6 8 K 5 5.5 5.5 7 PL 20 24 24 24 PW 38 41 41 41 I 28 H 41 45 45 50 PH 19.5 24 24 24 ZZ 181 195 197 233 P Z 37 41 41 45

1

43.5 [17.5] 29.5 (41.5) 26.5 (38.5) 33.5 (45.5) 41 [15] 48 [22] 29 (41) 42 48 44.5 47.5 43.5 44 [18] Data R 63 48 43.5 [17.5] 29.5 (41.5) 26.5 (38.5) 33.5 (45.5) 41 [15] 48 [22] 29 (41) 49 55 51.5 54.5 50.5 44 [18] Y + Stroke [ ]: Denotes the locations for CDG1R. ( ): Denotes the value of long strokes.

Smooth Cylinder/Low Speed Cylinder

41 41 44 41 41 49 49 83.5 93.5 46.5 47 85.5 91 93.5 91 41 41 43 43 41 41 52 43 50 49.5 49 49 52.5 49 49.5 56 57.5 92 102 53.5 53.5 94 107 102 107 49 49 51 51 49.5 49 58.5 51.5 58.5 56.5 56 56 61 56 56.5 65 68 102.5 112.5 61.5 61 104 121 112 121 55.5 56 57.5 57.5 57.5 55.5 66 58.5 Note 2) D-A9/A9V types cannot be mounted on 50. 1224 Auto Switch Mounting Series CA2Y Minimum Auto Switch Mounting

CV/MVGQ

85 85.5 41 93 91 93.5 91 41 80 59 55.5 50 54 50 51 48.5 93.5 94 48.5 101.5 107 102 107 49.5 100 69.5 63 57.5 62 57.5 59 56 104 104 56 112 121 112 121 58.5 Operating Range Auto switch model Bore size (mm) 40 50 63 80 100 8 7 9 9.5 10.5 Other than the models listed in How to Order, the following auto switches are applicable.

CV/MVGQ

41 93 91 93.5 91 41 80 59 55.5 50 54 50 51 93.5 94 48.5 48.5 101.5 107 102 107 49.5 100 69.5 63 57.5 62 57.5 59 104 104 56 56 112 121 112 121 58.5 Operating Range Auto switch model Bore size (mm) 40 50 63 80 100 8 7 9 9.5 10.5 Other than the models listed in How to Order, the following auto switches are applicable.

EXxx-OMS0026CN

1 byte (2)(EX600-DYB)1 byte (5)SI (EX600-SEN3)4 byte Diagnostic mode 0 (LSB-MSB) 1 Lo byte DYB(1) 07 Byte0 AXA 0 Byte1 Hi byte DYB(2) 07 (0) Byte2 AXA 1 Lo byte 07 (0) Byte3 Hi byte 815 SEN3(5) Byte4 DXB(3) 07 1623 Byte5 07 2431 DXD(4) Byte6 815 Byte7 Padding 8 byte 6 byte Diagnostic mode 0 (MSB-LSB) 1 Hi byte DYB(1) 07 Byte0 AXA 0 Byte1 Lo byte DYB(2) 07 (0) Byte2 AXA 1 Hi byte 07

CM2

8 75 60 4 7 18 13 37 34 8 62 15.5 13 26 30 5 8 28 5 M8 x 1.25 15 24 M20 x 1.5 1/8 116 20 0 0.033 25 45 8 75 60 4 7 22 13 41 40 10 62 19.5 17 32 37 6 8 33.5 5.5 M10 x 1.25 15 30 M26 x 1.5 120 1/8 26 0 0.033 32 45 8 75 60 4 7 22 13 41 40 12 64 19.5 17 32 37 6 8 37.5 5.5 M10 x 1.25 15 34.5 M26 x 1.5 122 1/8 26 0 0.039 40 50 11 82 36 66 5 7 24 16 45 52 14 88 21 22 41 47.3 8 10 46.5 7 M14

CL

66 22 16 52 14 7 21 47.3 82 4 Up to 500 24 76 90.5 8 70 100.5 11 Boss-cut Bore (mm) PH GL H2 H1 K I NA N S PW ZZ Z PG P NN MM ZZ PL H GR GQ Bore (mm) 20 168 1/8 1/8 1/8 1/4 20 24 15 20 22 5 37 28 181 8 4 6 M20 x 1.5 38 4 5 127 41 M8 x 1.25 19.5 25 182 25 30 24 15 27 5.5 41 33.5 195 7 8 M26 x 1.5 41 9 7 6 137 45 M10 x 1.25 24 32 184 32 34.5 24 15 27 5.5 41 37.5 8 197 7 M26 x 1.5 41 9 7 6

CL

66 22 16 52 14 7 21 47.3 82 4 Up to 500 24 76 90.5 8 70 100.5 11 Boss-cut Bore (mm) PH GL H2 H1 K I NA N S PW ZZ Z PG P NN MM ZZ PL H GR GQ Bore (mm) 20 168 1/8 1/8 1/8 1/4 20 24 20 15 22 5 37 28 181 4 8 M20 x 1.5 38 4 6 5 127 41 M8 x 1.25 19.5 25 182 25 30 24 15 27 5.5 41 33.5 195 7 8 M26 x 1.5 41 7 9 6 137 45 M10 x 1.25 24 32 184 32 34.5 24 15 27 5.5 41 37.5 197 7 8 M26 x 1.5 41 7 9 6

CA2

34 38.5 46.5 55 63 Hs 30 34 41 48.5 56 Ht 30.5 35 42.5 51 59 Hs 30 34 41 48.5 56 40 50 63 80 100 30 34 41 49.5 58.5 B 32 A Operating Range Bore size Auto switch model 40 8 50 7 63 9 80 9.5 100 10.5 D-Z7/Z80 D-A3/A44/A3C/A44C D-A5/A6 D-B5/B64 9 10 11 11 11 D-A59W D-B59W D-Y59/Y69/Y7P/Y7V/Y7W/Y7WV D-Y7BAL D-F5/J5/F5W/J59W/F5BAL/F5NTL D-F59F D-G5/K59/G5W/K59W/G5BAL/G5NTL/G59F D-G39/K39/G39C

5

41 44 41 41.5 41 41 41 41 41 50 41 52 43 49 83.5 93.5 46.5 43 47 43 85.5 91 93.5 91 80 49.5 49 52.5 49 50 49 49.5 49 49.5 49 58 49 58.5 51.5 57.5 92 102 53.5 51 53.5 51 94 107 102 107 100 56.5 56 61 56 58.5 56 56.5 55.5 57.5 55.5 66 56 66 58.5 68 102.5 112.5 61.5 57.5 61 57.5 104 121 112 121 Operating Range (mm) Auto switch model Bore size 40 50 63 80 100 Auto switch model Bore size 40 50

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

3 12 53 2-6.5 Mounting hole 35 2-6.5 Mounting hole 35 53 Manual override 18 31.5 37 41 50 98 PE X PE X P R1 R2 R2 R1 P 27.5 27.5 41 41 1/8 Port PE Rc1/8 External pilot port 27.5 27.5 41 41 1/8 Port PE 1/8 External pilot port 5-1/2 Ports P, A, B, R1, R2 5-1/2 Ports P, A, B, R1, R2 Numbers inside ( ) are for metal seal 3 position type 7 Series VQ5000 Base Mounted Type How to Order Manifolds

VQ5000

3 12 53 2-6.5 Mounting hole 35 2-6.5 Mounting hole 35 53 Manual override 18 31.5 37 41 50 98 PE X PE X P R1 R2 R2 R1 P 27.5 27.5 41 41 1/8 Port PE Rc1/8 External pilot port 27.5 27.5 41 41 1/8 Port PE 1/8 External pilot port 5-1/2 Ports P, A, B, R1, R2 5-1/2 Ports P, A, B, R1, R2 Numbers inside ( ) are for metal seal 3 position type 7 Series VQ5000 Base Mounted Type How to Order Manifolds

High Vacuum Angle Valve, XL Series

O After a few seconds at 10-6Torr 41

XL

XLAV 5 Series XLA, XLAV High Vacuum Angle Valve Specifications Model XLA(V)-50 XLA(V)-63 XLA(V)-80 XLA(V)-16 XLA(V)-25 XLA(V)-40 Valve type Normally closed (pressurize to open, spring seal) Non-corrosive gas for aluminum alloy (A6063) and SUS304/316 Fluid 5 to 60C (41 to 140F) [high temperature type: 5 to 150C (41 to 302F)] XLA Operating temperature C 5 to 50C ( 41 to 122F) XLAV Atmospheric

42

port 1/8" External pilot port 27.5 27.5 41 41 41 41 1/2" 1(P), 4(A), 2(B), 5(R1), 3(R2) port 1/2" 1(P), 4(A), 2(B), 5(R1), 3(R2) port Numbers inside ( ) are for metal seal 3-position type. 495 Base Mounted Plug-in Unit VQ5000 Series [Option] Note) CE-compliant: For DC only.