3 Port Solenoid Valve

M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 Plug connector Large flow capacity Standard V14:13(27) V14A:16(30) V14:12(26) V14A:15(29) Large flow capacity V124A Note 1) 12 Flow characteristics 23 Valve model C[dm3/(s bar)] 0.037 0.076 0.054 0.099 C[dm3/(s bar)] 0.054 0.099 0.037 0.076 b 0.11 0.07 0.35 0.23 b 0.35 0.23 0.11 0.07 Cv 0.008 0.016 0.015 0.024 Cv 0.015

Series MHR2 11- 2 Finger Rotary Actuated Air Gripper 22- Size: 10, 15, 20, 30

thread) 76 73 120 80 120 A 54 Finger opening port M5 x 0.8 14 Finger closing port M5 x 0.8 M5 x 0.8 M5 x 0.8 25 25 Finger closing port Finger opening port 4 x M5 x 0.8 thread depth 10 M5 x 0.8 thread depth 5 Vacuum suction port (A, B common view) +0.02 0 2 x 5 depth 10 52 Auto switch mounting groove 16h9-0.043 0 (A, B common view) 22 35.8 2 70 (76) 10 2-3 3.8 4.7 47 25.5 11.5 2 x 4.2 2 4

VKF300

Proper tightening torque Nm {kgfcm} Tightening torque for piping Connection threads M5 Rc(PT) 1/8 1.5 to 2 {15 to 20} 7 to 9 {71 to 92} Reference: Tightening into the M5 fitting threads After tightening by hand, tighten about 1/6 of a turn further using a tightening tool.

CRB1/Size: 10, 15, 20, 30

0 0.043 43 8 50 16 40 13 22 5 2 8 12 1.0 M5 1.1-10

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

36.5 13.5 15 32 25 23 M5 24 59 46 57 60 54.5 48.5 101 57 68 1/2 22 45 89 41 11 17 36 22.5 23 M5 26 64.5 48 62.5 62 60 50.5 103 62.5 70 1/4, 3/8 VCW41 30 50 93.5 41 13.5 17 36 25 23 M5 26 66.5 48 64.5 62 62 50.5 103 64.5 70 1/2 35 60 101 41 17.5 17 36 30 28.2 M5 26 70 48 68 62 65.5 50.5 103 68 70 3/4 4 Direct Operated 2Port for Water Series VCW Dimensions (N.O.)

Rotary One-touch Fittings Series KS/KX

D1 D2 L A M M5, M6 Nylon Urethane M5 0.8 M6 1.0 KXH04-M5 KXH04-M6 KXH04-01S KXH06-M5 KXH06-M6 KXH06-01S KXH06-02S KXH08-01S KXH08-02S KXH08-03S KXH10-02S KXH10-03S KXH10-04S KXH12-03S KXH12-04S 38.5 11 13 39 35 8 10.4 2.5 4.0 4.0 16 4 1 8 M5 0.8 M6 1.0 40 39.5 40 42 45 46 49 50 58 59 62 60 63 16 36 12 2.5 3 4.0 4.0 5.6 5.6 15 8 36 6 12.8 15 17 1 8 1 4 1 8 38 39 42 43 44 20 26 28 34 42 68

IZx-OMT0049

A IZT4-16 2 160 4 13 IZT4-22 3 220 6 13 Metric IZT4-34 5 340 8 15 IZT4-40 6 400 10 22 IZT4-46 7 460 3/16" 15 1/4" 14 IZT4-58 9 580 Inch 5/16" 15 IZT4-64 10 640 3/8" 23 IZT4-82 13 820 Elbow (mm) IZT4-112 18 1120 Applicable tube O.D.

KC

(mm) <M5> <M5> Weight (g) Applicable tubing KCH04-M5 KCH04-01S KCH06-M5 KCH06-01S KCH06-02S KCH08-01S KCH08-02S KCH08-03S KCH10-02S KCH10-03S KCH12-03S KCH12-04S 2.1 2.6 2.4 M5 x 0.8 9.8 30.8 26.1 32.4 37.4 28.9 42.4 45.7 34 50.5 51.5 54.2 41.6 27.3 22.1 28.9 33.4 22.9 38.4 39.7 27.5 44.5 45 47.7 33.6 18 2.1 2.6 2.4 4 8 1 8 10 11.8 12 14 M5 x 0.8 10 16 14 20 27 25 34 43 48 41 Reference dimensions

VK300

: M5 x 0.8 [01: 1/8] [14] M5: M5 x 0.8 [01: 1/8] (Mounting hole for manifold) Manual override (Non-locking) 300 2 x M2.5 x 0.45 (Mounting screw) (Mounting screw) Applicable cable O.D: 3.5 to 7 Pg7 (Mounting hole) 3 4 2 x 3.5 63.4 57.9 (Mounting hole) (Bleed hole) 50.4 (P, A, R port) 2 x M5 x 0.8 24 21 3R 1P 62.8 2.3 Refer to grommet type for other dimensions. [ ]: For port size 01 Dimensions

A_HEC-OM-K001

fluid Pressure loss (HED005/007) 9.5 Performance Chart 9-17 A_HEC-OM-K001-1.7 Chapter 9 Appendix 9.5.5 Facility water Pressure Loss Fluid: Water HED003 60 50 Pressure loss kPa HED003-HW13 HED003-HW19 40 30 20 10 0 0 1 2 3 4 5 6 7 8 9 10 Flow rate L/min Fig.9-15 Facility water Pressure Loss (HED003) HED005, HED007 60 HED005-HW13 HED005-HW19 HED007-HW13 HED007-HW19 50 Pressure loss kPa 40

CU

) Port size Bore size (mm) GA H J JA A B A' C CA CB D E GB 20 25 32 29 32.5 35 19 23 27 16 20 24 12 15 19 26 32 40 42 50 62 20 25 31 22 25 31 9 10 11 27 22.5 25 14 18 22 12 15.5 19.5 8 10 12 M5 x 0.8 M5 x 0.8 Rc 1/8 Bore size (mm) NN T S Z K KA L MM P Q R Standard strokes 20 25 32 M5 x 0.8 with depth 8 M5 x 0.8 with depth 8 M6 x 1.0 with depth 9 9.3 with depth 8 9.3 with depth 9 11 with depth

VHK

(mm) 2(A) Port size R(PT) 2(A) Port size R(PT) 1(P) 1(P) 1(P) 4 6 8 10 12 M5 1 8 1 4 3 8 1 2 1 8 1 4 3 8 1 2 4 6 8 10 12 1(P) M5 M5 4 M5 4 Tube O.D. (mm) Tube O.D.

2 Finger, 3 Finger, 4 Finger Air Gripper Parallel Type Series MHS

EC 10 12 14 EO 14 16 20 NB 5h9 6h9 6h9 DC 30 36 42 NA 8 10 12 DO 34 40 48 K 4 5 6 B 30 36 42 Q 6 7 8 J 10 12 14 AA 35 38 40 AB 32 35 37 O 2 2.5 3 P M3 x 0.5 M5 x 0.8 M5 x 0.8 0 -0.030 0 -0.030 0 -0.030 Model MHS2-16D MHS2-20D MHS2-25D VA 2H9 2H9 3H9 TB 5 6 6 SC 8 9.5 10 RB 16 18 22 RA 18 24 26 WA VB 2 2 3 XA 2H9 2H9 3H9 XB 2 2 3 +0.025 0 +0.025 0 +0.025 0 +0.043 0 +0.052 0 +0.052 0 +0.025

Silencers/Exhaust Cleaner Series AN
/Series AMC 1

cock Oil bowl B' C C Drain cock Drain guide (A) (B) Rc , NPT, G Mounting bracket Port size Model C B A Drain piping F G H J K L B' D E 6 6 1/4 female thread M3 x 0.5 1 4 2.3 15 12 20 50 73 AMC220 40 56 88 100 22 Depth 8 Body size A B C M3 x 0.5 71 88 101 101 121 55 63 83 96 96 116 1 4 3 8 , 56 75 102 118 135 153 AMC320 75 120.5 140.5 2.3 15 20 30 50 123.5 24 55 2 3 5 6 8 9 Depth 8 M4 x

End Lock Cylinder Series CBJ2

10 105 60 60 15 10 105 65 65 15 10 115 75 65 25 15 35 10 5 45 10 5 40 15 10 45 5 5 30 5 5 55 15 10 40 15 10 60 15 15 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 D-C7 D-C80 D-A7H D-A80H D-H7 D-H7W D-H7BAL D-H7NF Band mounting D-A79W Rail mounting D-F7 D-J79 D-C73C D-C80C D-H7C (16) D-F7V D-J79C (16) D-F7W D-J79W D-F7BAL D-F79F D-H7LF D-F7WV D-F7BAVL D-F7LF In addition to the models in

Pneumatic Transfer System Series MF

bore, depth 5.5 From back 2 x 2-M6 x 1.0, thread depth 12 4 2-M8 x 1.0 Adjustment bolt 36 60 6 15 66 15 66 32 69 68 52 1 0 10 6 (absorber stroke) 36 2-RB0806 shock absorber M8 x 1.0 0.5 (difference in level) 93 Note) Rc(PT) 1/8 Cylinder port 174 + Stroke 6 6 2-7 through 52 82 15 28.5 M5 x 0.8 Hexagon socket head plug 25 36 8 48.5 48 59 60 52 44 40 SMC 11 (width across flats) 11.5 Body (Support

Parallel Style Air Gripper: Wide Type Series MHL2

10, 16, 20, 25: 40 mm, Bore size 32, 40: 80 mm.

Metering Valve with Silencer Series ASN2

Refer to pages 15-18-3 to 15-18-4 for Safety Instructions and Common Precautions on the products mentioned in this catalog, and refer to pages 15-8-6 to 15-8-8 for Precautions on every series. 15-11-2 Flow Control Equipment Precautions Be sure to read before handling.

Body ported, base mounted manifolds old style See replacement series SS5YJ5 New Style , Manifold style: single base/B mount , Thread type: North American , Valve stations: 2 to 20 , One-touch fittings available, MFLD, 13-STA, NVZ3*40 *LQA, VALVE, VV4Z/VV5Z MANIFOLD VZ 4/5 PORT, MJ, VV4/5Z* BASE MT Weight: tab 9

Body ported, base mounted manifolds old style See replacement series SS5YJ5 New Style , Manifold style: single base/B mount , Thread type: North American , Valve stations: 2 to 20 , One-touch fittings available, MFLD, 4-STA, NVZ3*40 *LQA, VALVE, VV4Z/VV5Z MANIFOLD VZ 4/5 PORT, MJ, VV4/5Z* BASE MT Weight: tab 9