Compact Manifold Regulator

250 300 0.00 0 50 100 150 200 Flow rate L/min (ANR) Flow rate L/min (ANR) Pressure Characteristics (Representative Values) ARM10F-06 ARM10-06 ARM10F-06-1 ARM10-06-1 Conditions: Inlet pressure 0.7 MPa Outlet pressure 0.2 MPa Flow rate 20 L/min (ANR) Conditions: Inlet pressure 0.5 MPa Outlet pressure 0.2 MPa Flow rate 20 L/min (ANR) 0.25 0.30 Outlet pressure (MPa) Outlet pressure (MPa) 0.25

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

Recommended flow rate Note) (l/min (ANR)) IN side, OUT side 2 3.2 4 4 6 6 8 1/8" 5/32" 5/32" 1/4" 1/4" 5/16" Internal capacity (cm3) 1.7 Mass (g) ZA Model ZFC050-02 ZFC050-23 ZFC050-04 ZFC100-04 ZFC100-06 ZFC200-06 ZFC200-08 ZFC051-01 ZFC051-03 ZFC101-03 ZFC101-07 ZFC201-07 ZFC201-09 2 7 10 10 20 30 50 7 10 10 20 30 50 4.9 ZX IN/OUT straight piping 4.3 1.7 ZR Metric size Easy installation

ARM10/11

ARM10-06 ARM10F-06-1 ARM10-06-1 Conditions: Inlet pressure 0.5MPa Outlet pressure 0.2MPa Flow rate 20/min (ANR) Conditions: Inlet pressure 0.7MPa Outlet pressure 0.2MPa Flow rate 20/min (ANR) 0.25 0.30 0.25 Outlet pressure MPa Outlet pressure MPa 0.20 0.20 Set point 0.15 Set point 0.15 0.10 0.10 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 Inlet pressure MPa Inlet

ARM10/11

ARM10-06 ARM10F-06-1 ARM10-06-1 Conditions: Inlet pressure 0.5MPa Outlet pressure 0.2MPa Flow rate 20/min (ANR) Conditions: Inlet pressure 0.7MPa Outlet pressure 0.2MPa Flow rate 20/min (ANR) 0.25 0.30 0.25 Outlet pressure MPa Outlet pressure MPa 0.20 0.20 Set point 0.15 Set point 0.15 0.10 0.10 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 Inlet pressure MPa Inlet

reduces flow setting time

, 07, 08, 09, 10 06, 07, 08, 09, 10 01, 23, 03, 04, 06, 07 01, 23, 03, 04, 06, 07 08, 09, 10, 11 08, 09, 10, 11 03, 04 400 200 06, 07 TMH 02 01, 23 300 50 03, 04 ASD 200 100 01, 23 AS 100 AS-FE 0 0 0 5 0 10 5 0 10 5 0 10 KE Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

Modular Type Regulators Series AR

Example) AR30-03BG-NR-X425 Symbol Body size Description 25 30 40 50 60 Body size Description Symbol Nil N F Thread type Rc NPT G 20 25 30 40 50 60 Nil N F Thread type Rc NPT G + 02 03 04 06 10 1/4 3/8 1/2 3/4 1 + 01 02 03 04 06 10 Port size 1/8 1/4 3/8 1/2 3/4 1 + Port size Nil B Note 2) Without mounting option With bracket With set nut (for panel fitting) H Mounting a + Note 1) Semi-standard

Sine Cylinder Series REC

-01-06-X214 AS2001F-06-X214 AS2301F-01-06-X214 DREC32 AS2201F-01-06-X214 AS3001F-08-X214 AS2301F-01-06-X214 REC40 AS3201F-02-08-X214 AS3001F-08-X214 AS3301F-02-08-X214 -X Use the recommended speed controllers.

Sine Cylinder Series REC

-01-06-X214 AS2001F-06-X214 AS2301F-01-06-X214 DREC32 AS2201F-01-06-X214 AS3001F-08-X214 AS2301F-01-06-X214 REC40 AS3201F-02-08-X214 AS3001F-08-X214 AS3301F-02-08-X214 -X Use the recommended speed controllers.

Sine Cylinder Series REC

-01-06-X214 AS2001F-06-X214 AS2301F-01-06-X214 DREC32 AS2201F-01-06-X214 AS3001F-08-X214 AS2301F-01-06-X214 REC40 AS3201F-02-08-X214 AS3001F-08-X214 AS3301F-02-08-X214 -X Use the recommended speed controllers.

V

www.stevenengineering.com I 6.11 VACUUM VACUUM PADS SERIES ZP H O W T O O R D E R ZPT P A D V E R T I C A L T Y P E W I T H O U T B U F F E R ZPT V A C U U M E N T R Y ( A L S O M O U N T I N G T H R E A D D I A) P A D D I A M E T E R S Y M B O L T H R E A D D I A M E T E R 2~ 8 10~ 16 20~ 32 40 50 02 2 04 4 06 6 08 8 10 10 13 13 16 16 20 20 25 25 32 32 40 40 50 50 P A D M AT E R I A L Male

5 Port Solenoid Valve Series SV1000/2000/3000/4000

, 25, 32, 40 Applicable related components Total stroke time (s) Solenoid valve Silencer Tubing Speed controller 0.0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 200 CM2 20 10% 30% 50% 70% 150 Stroke (mm) Stroke (mm) Stroke (mm) Stroke (mm) AS2201F -01-06 AS2200-01 70% 100 50 10% 30% 50% 0 CM2 25 200 150 AS2201F -01-06 AS2200-01 100 50 0 SV100 ANA1 -C08 T0604 CM2 32 200 150 AS2201F -01-06 AS2200

HRX-OM-S004

-W-20/40/46. 8-11 8.4 Cooling capacity . 8-12 HRS Series HRX-OM-S004 Contents 8.4.1 HRS100-A-20/40/46. 8-12 8.4.2 HRS150-A-20/40/46. 8-12 8.4.3 HRS100-W-20/40/46. 8-13 8.4.4 HRS150-W-20/40/46. 8-13 8.5 Pump capacity . 8-14 8.5.1 HRS100/150-A/W-20/40/46. 8-14 8.6 Types of Hazard Labels (HRS--40/46-) . 8-15 8.6.1 Positions of danger warning label . 8-16 8.7 Standards . 8-17 8.8 Sample DoC.

Series VQ Metal Seal/Rubber Seal Body Ported

Kit (D-sub connector) 15 pin F Kit (Flat cable connector) 10 pin, 16 pin, 20 pin P How to Order Manifold How to Order Manifold 06 FSA D VV5Q14 06 P SC VV5Q14 D Ex.) Ex.)

High Purity Chemical Valve

Symbol A R P 4 Metric sizes 03 04 06 3 4 6 Valve type N.C. 0 N.C.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

M1 AS1001FG-23 AS1001FG-04 AS1001FG-06 AS2001FG-04 AS2001FG-06 AS2051FG-06 AS2051FG-08 AS3001FG-06 AS3001FG-08 AS3001FG-10 AS3001FG-12 AS4001FG-10 AS4001FG-12 AS1001FG-01 AS1001FG-03 AS1001FG-05 AS1001FG-07 AS2001FG-03 AS2001FG-05 AS2001FG-07 AS2051FG-05 AS2051FG-07 AS2051FG-09 AS3001FG-07 AS3001FG-09 AS3001FG-11 AS4001FG-11 AS4001FG-13 20.7 21.4 20.7 21.4 22.4 27.6 28.7 30.2 27.6 33.3 34.1

AS-FG/ASD-FG

AS121FG-M5 AS231FG-01 R(PT) 1/8 20, 25, 32 AS221FG-01 AS231FG-02 R(PT) 1/4 20, 25, 32, 40 AS221FG-02 AS331FG-02 R(PT) 1/4 40, 50, 63 AS321FG-02 AS331FG-03 R(PT) 3/8 40, 50, 63 AS321FG-03 AS431FG-04 R(PT) 1/2 63, 80, 100 AS421FG-04 AS131FG-U10/32 10-32UNF 6, 10, 16, 20 AS121FG-U10/32 AS231FG-N01 NPT1/8 20, 25, 32 AS221FG-N01 Elbow type AS231FG-N02 NPT1/4 20, 25, 32, 40 AS221FG-N02 AS331FG-N02

0.4

COM. 1 2 3 4 5 6 7 8 9 10 11 12 13 23 24 14 15 16 17 18 19 20 21 22 23 24 25 21 22 19 20 19 20 19 20 17 18 17 18 17 18 15 16 15 16 15 16 13 14 13 14 13 14 11 12 11 12 11 12 9 10 9 10 9 10 7 8 7 8 7 8 5 6 5 6 5 6 3 4 3 4 3 4 COM. 1 2 1 2 1 2 COM. COM.

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

Model Elbow type Straight type In-line type 12-REA25 10-AS2001F-06-X214 10-AS2201F-01-06-X214 10-AS2301F-01-06-X214 12-REA32 10-AS2001F-06-X214 10-AS2301F-02-06-X214 10-AS2201F-02-06-X214 6. Do not use the cylinder with its body fixed. Be sure to secure both head covers (or end covers in case of CY1R) before using the cylinder.

HRX-OM-T002

. 9-1 9.1.2 HRS090-A-40. 9-2 9.1.3 HRS090-A-46. 9-3 9.1.4 HRS090-W-20. 9-4 9.1.5 HRS090-W-40. 9-5 9.1.6 HRS090-W-46. 9-6 9.1.7 Refrigerant with GWP reference . 9-7 9.1.8 Communication specification . 9-7 9.2 Outline dimensions . 9-8 9.2.1 HRS090-A-20/40/46-. 9-8 9.2.2 HRS090-W-20/40/46-. 9-9 9.3 Flow diagram . 9-10 9.3.1 HRS090-A-20/40/46-. 9-10 9.3.2 HRS090-W-20/40/46 . 9-10 9.4 Cooling

Pilot Operated

For Air (Orifice size: 10 mm, 15 mm, 20 mm, 25 mm) How to read the graph The sonic range pressure to generate a flow rate of 6000 l/min (ANR) is P1 0.57 MPa for a 15 orifice (VXD214 -03) and P1 0.22 MPa for a 20 orifice (VXD215 -06).