SMC Corporation of America
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BH BI (UU) 2-M3 x 0.5 (opposite side, same location) (For front port, use hexagon socket head set screw) Q H 2-J through JA depth of counter bore JB (opposite side, same location) 1.5 S BE CA CB BF DD D BD BG A 2.2 (0.4) Note 1) SD 16 BA 2-M3 x 0.5 depth 4 BB W 2-M3 x 0.5 (For side port, use hexagon socket head set screw) N BC Note 2) For the 180 specification, the slated line area do not

(6) 1 2-M4 x 0.7 thread length 8 P.C.D.38 2 1 2 4 45 3 41 32 2-M3 x 0.5 thread length 8 P.C.D.29 3 Low torque Metal seal type Rotary jointSeries MQR * symbol indicates flange dimensions Dimensions/Standard Type, Flange Type MQR8-M5 MQR12-M5 0.03 7 M6 x thread length 10 4-M3 x 0.5 thread length 6 P.C.D.43 4-M3 x 0.5 thread length 6 P.C.D.48 M6 x 1 thread length 10 0.03 8 4.1 0.05depth 10

1 Compact Manifold Regulator Series ARM10/11 F.R.L.

Dimensions 28 58 (Max. 60) 37 IN OUT 20 15 5 22 34 14 31 SMC IN OUT 62 4 x 1.5 W O-ring size Holding screw M3 x 0.5 x 20 SMC P K U C S O H L 9 746 ARM10/11 Series Blocks/Specific Product Precautions 1 Be sure to read this before handling the products. Refer to back page 50 for Safety Instructions and pages 387 to 391 for Precautions on every series.

1 Compact Manifold Regulator Series ARM10/11 F.R.L.

(Nm) ML2B/M1 (Pitch moment) ML2B/M2 (Roll moment) ML2B/M3 (Yaw moment) Pitch moment M1/M1e 10 20 40 Roll moment M2 1.2 2.4 4.8 Yaw moment M3/M3e 3.0 6.0 12 MI W S 40 Model 20 30 YES 20 5 4 3 10 ML2B25 ML2B32 ML2B40 CEP1 If speed or load changes, stopping time may vary and positioning accuracy may be compromised.

Do not turn bottom screw Piston rod Model Bolt Max. tightening torque Nm Max. screw-in depth l (mm) MXY6 MXY8 MXY12 1.14 2.7 5.4 3 4 5 M3 x 0.5 M4 x 0.7 M5 x 0.8 Do not damage Side mounting type Service Life and Replacement Period of Shock Absorber Caution 1.

Drain outlet One-touch fitting ([Thread symbol: N] 1/2 inch [Thread symbol: Nil] 12 mm) Earth leakage breaker (Inside of front panel) Power cable outlet ( Electric wire diameter: IDFB60/70: 0.35 to 0.43 in (9 to 11) ) IDFB80/90: 0.71 to 0.91 in (18 to 23) IDFB60-11: Power cable with plug [Length: 110 inch (2.8 m)] 8 B IDFB Series Specific Product Precautions 1 Be sure to read this before

(Nm) ML2B/M1 (Pitch moment) ML2B/M2 (Roll moment) ML2B/M3 (Yaw moment) Pitch moment M1/M1e 10 20 40 Roll moment M2 1.2 2.4 4.8 Yaw moment M3/M3e 3.0 6.0 12 MI W S 40 Model 20 30 YES 20 5 4 3 10 ML2B25 ML2B32 ML2B40 CEP1 If speed or load changes, stopping time may vary and positioning accuracy may be compromised.

U PF3W 5 1 Remote sensor unit PF3W 7 11 25 A M Integrated display U Made to Order Type Seal material EPDM X109 5 7 Remote sensor unit Integrated display (Refer to page 17.) Bracket (Option) Nil None Bracket Rated flow range (Flow range) Symbol Rated flow range 11 21 10 to 100 L/min 30 to 250 L/min Note) With bracket is R not available for 250 L/min type.

Mounting with brackets Mount a bracket to the using two M3 x 5L mounting screws and install on piping. The switch can be installed horizontally depending on the installation location. Mounting screw M3 x 5L Mounting screw M3 x 5L The tightening torque for bracket mounting screw should be 0.5 to 0.7 Nm.

Y U8 0x00 Refer to Figure Line name communication data (7 seg). 0x0974 (2420) 0x0975 (2421) 0x0976 (2422) 0x0977 (2423) (0) 6 R/W Line name 6th letter (11 SEG) Y U8 0x00 Refer to Figure Line name communication data (11 seg). (0) 7 R/W Line name 7th letter (11 SEG) Y U8 0x00 Refer to Figure Line name communication data (11 seg). (0) 8 R/W Line name 8th letter Y U8 0x00 Refer to Figure Line

B 23 () (+) Grey Red 11 () (+) White Red SOL. A Station 11 SOL. B 24 () (+) Black White 12 () (+) Yellow Red SOL. A Station 12 SOL. B 25 () (+) White None COM. 13 (+) () Orange Red Note) Negative COM. spec. Positive COM. spec. Note) When using the negative COM. specification for VQC1000/2000, use valves for negative COM.

No. of sta. occupied, 2 stations M3 screw Item Specifications 24 VDC +10%, 5% External power supply For details on specifications and handling, refer to the separate technical instruction manual.

YB-03 32, 40 12 7 25 9 34 11.5 depth 7.5 Joint YB-05 50, 63 12 9 32 11 42 14.5 depth 8.5 K ( across flats) Mass (g) Bore size (mm) T1 RS T2 V W Part No. H (With locking) YB-03 32, 40 80 9 6.5 10 18 50 d2 d1 YB-05 50, 63 120 11 6.5 12 22 60 L UT C UA Material: Chromium molybdenum steel (mm) Part No.

Series 10-, 11-CQSX Series 10-, 11-CQ2X How to Order How to Order Clean Series 10 11 Clean Series 10 11 Relief type Vacuum type Relief type Vacuum type C(D)QSX B 20 10 30 F9BW C(D)Q2XB 40 10 30 J79W D D Built-in magnet Built-in magnet Low speed cylinder Mounting style Low speed cylinder Bore size 32 40 50 63 2 pcs. 1 pc. n pcs.

Series 10-, 11-CQSX Series 10-, 11-CQ2X How to Order How to Order Clean Series 10 11 Clean Series 10 11 Relief type Vacuum type Relief type Vacuum type C(D)QSX B 20 10 30 F9BW C(D)Q2XB 40 10 30 J79W D D Built-in magnet Built-in magnet Low speed cylinder Mounting style Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside

Round head screw (M3 x 8), 4 pcs. EX600-ZMV2 (Specified for SY series) Enclosed parts: Round head screw (M4 x 6), 2 pcs. Roun1d head screw (M3 x 8), 4 pcs. (2) End plate bracket EX600-ZMA2 Enclosed parts: Round head screw (M4 x 20), 1 pc. P tithe screw (4 x 14), 2 pcs. EX600-ZMA3 (Specified for SY series) Enclosed parts: Round head screw (M4 x 20) with washer, 1 pc.

x 0.5 M5 x 0.8 8 M4 x 0.7 M6 x 1.0 10 M5 x 0.8 M8 x 1.25 Female threads Rod end threads Male threads Rod end thread tolerance Stroke tolerance Port size Vacuum port, relief port JIS class 2 +1.0 0 mm M5 x 0.8 (10-32 nominal) M5 x 0.8 (10-32 nominal) 11 Clean Room Series Microspeed Cylinder Series 10-, 11-CM2X Series 10-, 11CM2X How to Order Clean room series 10 11 Mounting Relieving type