Environment

123 173 150 200 61 101 to 500 LZ [mm] Body Bottom Tapped Size Stroke range [mm] MA MB MC MD MH ML MO MR XA XB LC3F2 15 to 39 24 32 50 M5 x 0.8 6.5 4 5 40 to 100 42 41 101 to 124 75 125 to 200 59 49.5 201 to 400 76 58 25 20 46 29 20 to 39 22 36 50 M6 x 1 8.5 5 6 40 to 100 36 43 101 to 124 80 125 to 200 53 51.5 201 to 500 70 60 32 25 55 30 Note 1) Range within which the rod can move when it

HRX-OM-T004

(Request):010307F5 [CR][LF] (Response):01030E00D40D02010A [CR][LF] Request message Response message Code Contents Code Contents 01 Slave Address 01 Slave Address 03 Function 03 Function 0 Head address of specified register 0E Quantity of bytes to read 0007 Quantity of register to read 00D4 Information of 0h (circulating fluid discharge temperature) F5 LRC 0 Information of 0001h (Reserved)

HRX-OM-R028

(Request):010307F5 [CR][LF] (Response):01030E00D40D02010A [CR][LF] Request message Response message Code Contents Code Contents 01 Slave Address 01 Slave Address 03 Function 03 Function 0 Head address of specified register 0E Quantity of bytes to read 0007 Quantity of register to read 00D4 Information of 0h (circulating fluid discharge temperature) F5 LRC 0 Information of 0001h (Reserved)

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

(Example) For M3: L1 = 6 mm Applicable shaft types: S, Y L2 + (3 x P) L1 + (3 x P) Y axis S axis Q1 = M (mm) (mm) Q1 Q2 L1 = Shaft type Shaft type M3, M4, M5 S Y S Y Size Size L2 + (3 x P) L2 = 50 50 M3, M4, M5, M6 M3, M4, M5 L2 = 63 63 M4, M5, M6 M4, M5, M6 M4, M5, M6 Q2 = M 80 80 M4, M5, M6 M4, M5, M6, M8 M4, M5, M6 Q2 = M 100 100 M5, M6, M8 M5, M6, M8, M10 M5, M6, M8 Symbol: A33 Machine

Table of Contents

(Example) For M3: L1 = 6 mm Applicable shaft types: S, Y L2 + (3 x P) L1 + (3 x P) Y axis S axis Q1 = M (mm) (mm) Q1 Q2 L1 = Shaft type Shaft type M3, M4, M5 S Y S Y Size Size L2 + (3 x P) L2 = 50 50 M3, M4, M5, M6 M3, M4, M5 L2 = 63 63 M4, M5, M6 M4, M5, M6 M4, M5, M6 Q2 = M 80 80 M4, M5, M6 M4, M5, M6, M8 M4, M5, M6 Q2 = M 100 100 M5, M6, M8 M5, M6, M8, M10 M5, M6, M8 Symbol: A33 Machine

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

(Example) For M3: L1 = 6 mm Applicable shaft types: S, Y L2 + (3 x P) L1 + (3 x P) Y axis S axis Q1 = M (mm) (mm) Q1 Q2 L1 = Shaft type Shaft type M3, M4, M5 S Y S Y Size Size L2 + (3 x P) L2 = 50 50 M3, M4, M5, M6 M3, M4, M5 L2 = 63 63 M4, M5, M6 M4, M5, M6 M4, M5, M6 Q2 = M 80 80 M4, M5, M6 M4, M5, M6, M8 M4, M5, M6 Q2 = M 100 100 M5, M6, M8 M5, M6, M8, M10 M5, M6, M8 Symbol: A33 Machine

ZX

Individual air supply port PV Individual air supply port PV Adapter D Adapter D M5 (or M6) Pitch = 21 Individual air supply port (PV port) M5 (or M6) Individual air supply port (PV port) Pitch = 21 M5 x 0.8 (or M6) Vacuum pad connection port (V port) (or M6) Vacuum pad connection port (V port) M5 x 0.8 M5 x 0.8 (or M6) Adsorption nozzle piping port 13-2-35 35 Series ZX Vacuum pad connection

JXCx-OMT0061CN

(P.32) (1) [IO] PLC PLC Rx Ry 00 OUT0 00 IN0 01 OUT1 01 IN1 02 OUT2 02 IN2 03 OUT3 03 IN3 04 OUT4 04 IN4 05 OUT5 05 IN5 06 06 07 07 08 BUSY 08 HOLD 09 SVRE 09 SVON 0A SETON 0A DRIVE 0B INP 0B RESET 0C AREA 0C SETUP 0D WAREA 0D JOG(-) 0E ESTOP 0E JOG(+) 0F ALARM 0F FLGTH 101A CC-Link 101F CC-Link 1B READY 1C1F CC-Link (1) [] PLC RWr PLC RWw RWr bit RWw bit 0 (L) 0 1 (H) 1 (

ZP3

M5 x 0.8 Use the connection thread. M5 x 0.8 Use the connection thread. Use the connection thread.

MHZ

mounting groove (Both sides) (10 only) M5 x 0.8 Piping port Refer to the dimension table.

MHZ

mounting groove (Both sides) (10 only) M5 x 0.8 Piping port Refer to the dimension table.

Possible to transfer a workpiece at low-speed.

(Example) For M3: L1 = 6 Applicable shaft types: J, K, T Q1 = M K axis T, X shaft Q1 = M L1 = L2 + (3 x P) L2 + (3 x P) L1 + (3 x P) L1 + (3 x P) L2 = L2 = L1 = Q2 = M Q2 = M (mm) (mm) Q2 M3 M3, M4 M3, M4, M5, M6 M4, M5, M6, M8 M4, M5, M6, M8, M10 Q1 M3 M3, M4 M3, M4, M5, M6 M4, M5, M6, M8 M4, M5, M6, M8, M10 Size 10 15 20 30 40 Size 10 15 20 30 40 (mm) Q1 M3, M4 M3, M4, M5, M6 M4, M5, M6

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

x 0.8 thread depth 5.5 11 3 Vacuum suction port M5 x 0.8 Operating port 2 x M5 x 0.8 J 10 Maximum 13.5 (With stroke adjuster at retraction end) I 5.5 12 6 12 12 9.5 10 5.5 10 5.5 21 K 5.5 KA 21 NA x M5 x 0.8 thread depth 5.5 Stroke adjuster at extension end Stroke adjuster at retraction end 37.5 (With stroke adjuster at extension end) 12 6 N x M5 x 0.8 thread depth 6 (Insert) 6 4 x M5 x

MXW

MXW20 M5 x 0.8 M4 x 0.7 MXW8 2.1 8 0 0 8H9 + 0.036 depth 9 5H9 + 0.030 depth 4.5 18.5 7.4 MXW25 M6 x 1 M5 x 0.8 MXW12 4.4 10 0 0 6H9 + 0.030 depth 5.5 M6 x 1 6.

Series 10-/11-/12, 21-/22- CXS Dual Rod Cylinder

4.5 Note) 30 4 x M4 x 0.7 thread depth 5 (Opposite side: Same) (Opposite side: Same) 4 x M5 x 0.8 thread depth 4.5 (Piping port) (Opposite side: Same) 5 10 10 8 46 2 x M4 x 0.7 thread depth 6 (30) (Z) 2 x M5 x 0.8 thread depth 8 5 450.2 8 Note) 11-, 22-: Vacuum suction port Vacuum air from 2 ports on both sides. 10-/12-, 21-: Relief port Exhaust air from a port on one side.

High Vacuum Angle Valve

Rc1/8 XLAV M5: Port 1(P), 3(R) Rc1/8: Port 1(P), M5: Port 3(R) Weight [kg] XLA 0.28 0.47 1.1 1.7 3.1 5.1 XLAV 0.33 0.52 1.2 1.8 3.2 5.2 *1 Conductance is the value for the elbow with the same dimensions.

MXW Series Long Stroke Slide Table

100, 125, 150 Operating port 2-M5 x 0.8 Width across hexagon socket hole 2.5 (mm) J 12 Scale: 30% 6.5 5H9 +0.03 depth 4.5 0 Width across flats 8 6-M4 x 0.7 thread depth 6 (Helisert) 6 27 58 46 Y 29 26 103 26 Y L 5H9 +0.03depth 4.5 0 10 15 15 K A 35 20 26.5 A Z Bottom through hole 4.2 N-M5 x 0.8 thread depth 10 (N-1) x H G M5 x 0.8 thread depth 10 GG H 6 depth 4.5 5H9 +0.03 Bottom through

Sine Rodless Cylinder Series REBR Direct Mount Type

33.5 33.5 45 17 42 19 M5 x 0.8 106 44 71.5 M5 x 0.8 8 125 29 24 63 46 46 61.5 25 58.5 28 M6 x 1.0 138 56 86 M6 x 1.0 10 Model N S TW Z ZZ NL NT P PA PB PP W XB REBH15 REBH25 161 65 194 17.5 15 8 M5 x 0.8 50 62 21 88.5 16.5 209 75 250 23.5 20.5 18 9 Rc 1/8 65 75 27 103 9.5 79 Series REBH Dimensions/25, 32 Dual axis type/REBHT LL 138 4-M thread depth MM PA XB PB 2-Rc 1/8 LW S + Stroke EB

S Couplers

Port size IDK Thread size R, Rc 1/8 R, Rc 1/4 R, Rc 3/8 R, Rc 1/2 R, Rc 3/4 R, Rc 1 R, Rc 1 1/4 R, Rc 1 1/2 Symbol 01 02 03 04 06 10 12 14 Connection type Type Male thread (with sealant) Female thread Symbol M F Plug Yes No No Yes Socket Yes Yes No No Availability Built-in check valve Note) A plug with check valve should be used in combination with a socket with check valve.

AC Servo Motor Driver (SSCNET Type)

(Default) Spare (SW2-2) Rotary axis setting switch (SW1) Description Display 0 Axis No.1 01 1 Axis No.2 02 2 Axis No.3 03 3 Axis No.4 04 4 Axis No.5 05 5 Axis No.6 06 6 Axis No.7 07 Down 7 Axis No.8 08 (Be sure to set to the 8 Axis No.9 09 "Down" position.) 9 Axis No.10 10 A Axis No.11 11 B Axis No.12 12 C Axis No.13 13 D Axis No.14 14 E Axis No.15 15 F Axis No.16 16 -12- 5.