Soft Start-up Valve

3/41 3/4 128 132.5 59 53 37 37 64 53 Width across flats 36 70.9 112.3 Optional specifications Model With bracket With built-in silence K L M N P Q R S T U V W X Y AVL2000-02-1 to 6D/Y(Z)--A 30 50 51.5 44 5.5 10 66 2.3 33.5 54 M4 x 0.7 Depth 6 3 Width across flats 14 AVL3000-03-1 to 6D/Y(Z)--A 41 50 53.5 46 5.5 15 70 2.3 33.5 54 M4 x 0.7 Depth 6 3 Width across flats 19 AVL4000-04-1 to 6D

Step Motor Controller

) Connector C 1 2 Actuator side (Terminal no.) (14) (18) 5.5 A1 B1 5 6 1 2 6.3 A6 B6 Connector A Connector D 15 16 (14.7) (30.7) L (11) (10) Connector A terminal no.

RQ

7 34 5.5 20 to 100 51 44 13 16 52 20 M8 x 1.25 69 5 14 7 40 5.5 30 to 100 57.5 49.5 15 20 64 28.5 M10 x 1.5 86 7 17 8 50 6.6 OB P Q RB S U Z Bore size (mm) 32 40 50 9 Rc 1/8 23 7 58.5 31.5 14 9 Rc 1/8 28 7 66 35 14 11 Rc 1/4 31.5 8 80 41 19 Refer to page 7-7-14 for details on rod end nut and accessories.

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

L 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 260.5 285.5 21 273 No.

PA300/500/700

Series VPA700 2.9/3.1 3.5/3.3 3.5/3.5 3.8/4.0 0.18/0.23 0.19/0.18 0.27/0.27 0.26/0.28 14/14 15/16 12/12 15/14 VPA744 (Base mounted) 0.71 Note 1) In the case of body ported type, the valve is without bracket.

High Power Cylinder Series RHC

14.5 9 20.5 29.5 30 27 25 25 15 17.5 12 18 12.5 16 10.5 19.5 14 14.5 9 20.5 33 33.5 30.5 32 32 15 19.5 12 20 12.5 18 10.5 21.5 14 16.5 9 22.5 37.5 38 35 40 40 20 24.5 17 25 17.5 23 15.5 26.5 19 21.5 14 27.5 43 43.5 40.5 50 50 18 28.5 15 25.5 15.5 23.5 13.5 27 17 22 12 28 50.5 50.5 47.5 63 63 18 28.5 15 25.5 15.5 23.5 13.5 27 17 22 12 28 59 80 80 30.5 16.5 29 15 27.5 13.5 69.5 100

PFxx-OMA1007

For all unused M12 connectors. 14 Seal cap (1 pc.)

Silencer Series AN

Construction/Parts/Dimensions AN500 to 900 End plate (Carbon steel) Tension bolt (Carbon steel) (mm) Dimensions Sound absorbing material (Resin sintered body) Model Port size R, NPT AN500-06 AN600-10 AN700-12 AN800-14 AN900-20 A B D A Cover (Carbon steel) 3/4 107 46 36 Body (Aluminum alloy) 1 127 50 41 1 1/4 186 74 50 Hexagonal flats D 1 1/2 217 74 55 2 256 86 65 Port size B 4 Series AN Specific

Series VS

(A) + 14 (A) + PIN 1 PIN 1 X53 X53 PIN 2 PIN 2 12 (B) + 12 (B) + NOT USED NOT USED PIN 2 PIN 2 14 (A) + 14 (A) + PIN 2 PIN 2 12 (B) + 12 (B) + PIN 2 PIN 2 PIN 3 PIN 3 COMMON COMMON PIN 3 PIN 3 PIN 3 PIN 3 COMMON COMMON COMMON COMMON COMMON COMMON PIN 3 PIN 3 PIN 4 PIN 4 14 (A) + 14 (A) + 12 (B) + 12 (B) + PIN 4 PIN 4 12 (B) + 12 (B) + PIN 4 PIN 4 14 (A) + 14 (A) + PIN 4 PIN 4 NOT USED NOT

Compact Cylinder with Air Cushion

7 34 5.5 20 to 100 51 44 13 16 52 20 M8 x 1.25 69 5 14 7 40 5.5 30 to 100 57.5 49.5 15 20 64 28.5 M10 x 1.5 86 7 17 8 50 6.6 mm OB P Q RB S U Z Bore size (mm) 32 40 50 9 Rc 1/8 23 7 58.5 31.5 14 9 Rc 1/8 28 7 66 35 14 11 Rc 1/4 31.5 8 80 41 19 Refer to page 11 for details on rod end nut and accessories.

Industrial Filters

21 29 14 21 29 11.5 18.5 26 Note 1) Cannot be used with gases.

48

Weight [g] D-M9N(V) D-M9P(V) D-M9B(V) Auto switch model Precautions Caution 0.5 8 8 7 1 14 14 13 Lead wire length (m) 3 41 41 38 Fix the auto switch with the existing screw installed on the auto switch body.The auto switch may be damaged if a screw other than the one supplied is used. 5 68 68 63 How to Order D-M9 N Auto Switch Internal Circuit D-M9N(V) Series Lead wire length Nil M L Z 0.5

Rotary Table/

NA NB NC ND P Q S SD SE SF UU WA WB WC WD WE WF YA YB YC Size 10 20 30 50 6.8 11 6.5 M8 x 1.25 12 M8 x 1 10 5.5 12.5 4 M5 x 0.8 34 92 9 13 45 47 15 3H9 3.5 M5 x 0.8 8 32 19 3H9 3.5 8.6 14 8.5 M10 x 1.5 15 M10 x 1 14 8 16.5 4 M5 x 0.8 37 117 10 12 60 54 20.5 4H9 4.5 M6 x 1 10 43 24 4H9 4.5 8.6 14 8.5 M10 x 1.5 15 M10 x 1 14 8 16.5 4 Rc1/8 40 127 11.5 14 65 57 23 4H9 4.5 M6 x 1 10 48 28 4H9

Compact Cylinder with Air Cushion Series RQ

A A1 E1 L1 MM U1 NZ L 0.2 0.4 0.2 0.4 +0.058 0 +0.058 0 +0.4 +0.2 +0.058 0 20 I-G02 Y-G02 20 8 8 IY-G02 34 8.5 16 25 M8 x 1.25 10.3 11.5 8.5 16 25 M8 x 1.25 10.3 11.5 16 21 8 8 34 +0.058 0 +0.4 +0.2 25 I-G03 Y-G03 25 10 10 IY-G03 41 10.5 20 30 M10 x 1.25 12.8 14 10.5 20 30 M10 x 1.25 12.8 14 20 25.6 10 10 41 +0.5 +0.3 0.3 0.5 0.3 0.5 0.3 0.5 +0.058 0 +0.070 0 +0.070 0 +0.058 0 32, 40 I-G04

VP300/500/700

7.4 9.0 7.5/7.7 8.8/9.3 12 14 14/14 15/16 Cv 0.86 0.88 0.80/0.86 1.0/1.0 2.0 2.4 1.9/2.1 2.3/2.4 3.1 3.8 3.5/3.5 3.8/4.0 C [dm3/(sbar)] 2.9 3.2 2.9/3.0 2.7/3.6 6.9 8.8 7.9/7.4 9.2/8.8 12 15 14/13 15/15 Cv 0.83 0.92 0.83/0.83 0.86/0.88 1.7 2.2 1.9/1.8 2.1/2.0 3.1 3.7 3.2/3.2 3.6/3.7 C [dm3/(sbar)] 3.5 4.4 3.5/3.5 4.1/3.9 7.5 9.3 7.4/7.3 9.2/9.1 13 16 14/14 15/15 Cv 0.93 1.1 0.89/0.89 1.0/

Series SYJ700 Rubber seal 3 Port Pilot Solenoid Valve

Type 40/Type 41 How to Order SS3YJ7-40 -05 --01 Applicable solenoid valve SYJ714SYJ714MSYJ724SYJ724MApplicable blanking plate assembly SYJ700-10-2A R port 1/4 R port 1/8 P, R port thread type Manifold type Stations 40 41 Type 40 Type 41 Nil Rc G NPT NPTF 2 stations : 20 stations 02 : 20 F N T A A A A 01 1/8 A port size P port 1/8 P port 1/4 A port 1/8 Note) If there are more than 6 stations

7.4

fitting assembly 2n x C4 C4: 4 One-touch fitting assembly L1 L2 L3 4.5 67 1.7 3 Mounting hole for M3 67 1.7 4.5 P=11 15.5 Mounting hole for M2.5 (3.5) (30) 5.5 46.5 8 38 (14) 33 32.2 Residual pressure release manual override 11 Residual pressure release manual override 29.5 (17.5) 38 (22.5) 0.5 (43) 2.5 U side D side Stations 1 2 3 n DIN rail clamping screw 2n x C3, C4, M5 C3: 3.2 One-touch

3 Port Air Operated Valve

566 550 607 591 648 632 689 673 730 714 771 755 812 796 853 837 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 stations Station n L1 L2 VPA VPA VPA3 Type 42/Individual exhaust: VV3PA7-423-04 Stations (Pitch) P = 41 1/2 3(R) port 37 34 3R 3R 12 2 x 8.5 (For mounting) 127 N.C.

Table of Contents

Nesting exceeded 33 Sub-routine nesting (calling a sub-routine from another sub-routine) exceeds 14 levels. No return destination 34 No return destination found for the RET command operation. Executing FOR 35 A forbidden command is found between FOR and NEXT. No FOR 36 NEXT command was executed without executing FOR command.

OMU0023

Step Request data Response data Operation details 01 10 0600 000A Alarm history command to clear alarm 14 0 0 0 0 1 01 10 0600 000A history sent. (0 to 10 entries) 0 0 0 0 0 0 01 10 060A 000A Alarm history command to clear alarm 14 0 0 0 2 01 10 060A 000A history sent. (11 to 20 entries) 0 0 0 0 0 0 0 67 - Caution Ensure the alarm history is cleared only after taking corrective action in