2–4

mounting nut Hexagon socket head cap bolt (M3 x 0.5 x 14 spring wasdher 2 pcs.)

Series VQ Metal Seal/Rubber Seal Body Ported

L 11 12 13 14 15 16 17 18 19 20 148 160.5 173 185.5 198 210.5 223 235.5 248 260.5 No. L 21 22 23 24 25 26 27 28 29 30 273 285.5 298 310.5 323 335.5 348 360.5 373 385.5 No. L 31 32 33 34 35 36 37 38 39 40 398 410.5 423 435.5 448 460.5 473 485.5 498 510.5 No.

VCW

(mm) Electrical entry P Port size A B C D E F H K L M Model Grommet: G Conduit: C DIN connector: D Conduit terminal: T Q R Q R Q R S Q R S 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 22 45 44 43 58 40.5 46.5 99 43 66 1/8 VCW21 18 36 67 31 8.5 12.5 28 18 12.8 M4 22 46 44 44 58 41.5 46.5 99 44 66 1/4 22 40 80.5 36.5 11 15 32 20 19 M5 24 56.5 46 54.5 60 52 48.5 101 54.5 68 1/4, 3/8 VCW31 30 50 85.5

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

B Counterbore depth C T Y 0 -0.1 L Cylinder tube outer circumference: TC WP Hard chrome plated + special treatment X F GW 4 x LD GP D QW PW 2 x P (Piping port) 4 x 3.2 2 x 4 x MM Thread depth M W K Z + Stroke Q + Stroke WP G G 4 x 6.5 12-CY3R6 (mm) A 7 9 10.5 9 8.5 10.5 10 14 15 F 5.5 6.5 8 9 8.5 10.5 13 17 18 HC 18 25 31 38 43 54 66 84 96 HP 10.5 14 17 24 23.5 29 36 45 51 K 7 9 14 11 15

Modular F.R.L. Units

Note 2) When the compressor oil mist discharge concentration is 30 mg/m3 (ANR).

Fieldbus system (SI unit compatible CompoNet TM )

No.EX-OMM0008-D PRODUCT NAME Fieldbus system (SI unit compatible CompoNetTM) MODEL / Series / Product Number EX12#-SCM# Table of Contents Safety Instructions 2 Product Summary 7 Model Identification and How to Order 7 Summary of Product parts 8 Mounting and Installation 13 Wiring 13 Setting 18 Mounting of Objects 20 Maintenance 27 Troubleshooting 28 Specifications 31 Specifications 31 Dimensions

Power Valve Precision Regulator

Without thread: Internal pilot VVEXB-1 With M5 thread: Common external pilot VVEXB-2 (79) 61.5 P1 A A R 31 26 19 P 10 9 8 P=31 35 Port 1(P): 1 8 25.5 n x port 2(A): 1 8 For 6 manifold stations or more, exhaust from the both sides. 37 29 L Dimension L1 = 31n + 25, L2 = 31n + 12 n: Station 2 87 74 L1 L2 3 118 105 4 149 136 5 180 167 6 211 198 7 242 229 8 273 260 9 304 291 10 335 322 Symbol

EX500

M12 connector (for socket), 10 pcs. 4 3 Socket connector pin arrangement 11 14 Terminal no.

IDX-OM-W089

Specification for Option_T 14 1 Safety instructions . 14 1 14 2 Specifications . 14 1 14 3 Remote operation . 14 2 14 4 How to connect the power supply and signal cable . 14 2 14 5 Electric circuit . 14 3 Chapter 15 Specification for Option_V 15 1 Safety instructions . 15 1 15 2 Specifications . 15 2 15 3 How to perform maintenance . 15 2 Chapter 16 Service Record 16 1 Service Record

IDX-OM-W023

V 14-1 . 14-1 14-2 . 14-1 14-3 . 14-2 14-4 . 14-2 15 15-1 . 15-1 3 IDX-OM-W023 i i i-1 () 3 i 1 1 3 IDU Series i-1 i-1 IDX-OM-W023 i i-2 5 i 2 1 IDU Series i-2 i-2 IDX-OM-W023 i i 2 2 i 2 3 50 i 2 4 i 2 5 0 IDU Series i-2 i-3 IDX-OM-W023 i i 2 6 WARNING !

SI unit for EtherNet/IP TM

13 12 11 10 9 8 7 6 5 4 3 2 1 0 1 31 30 29 28 27 26 25 24 23 22 21 20 19 18 17 16 For EX260-SEN3/-SEN4 Output data Offset MSB LSB MSB LSB (Word) 15 8 7 0 0 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 -38No.EX-OMP0013-E Dimensions If a fieldwireable connector is used for the power supply connection, and the SI unit is installed directly to a valve manifold, the cable connectors outer diameter should

Transfer

Yaw moment M3 = W4 x L2 YES L2 Is there any influence of noise? (Refer to Caution on Handling on pages 706 and 707.) Install a noise filter. NO M3 There is no particular problem in using the system.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

Refer to p.3.4-14. Auto Switch Mounting Bracket Part No.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

up to 600 11 52 20 13 40 12 17 17 58 27 47.3 61 M8 M18 X 1.5 159 35 32 70 7 11 19 30 17 90 0 25 18 up to 600 11 64 20 15.5 40 10 17 17 58 27 54.8 68.5 M10 X 1.25 M18 X 1.5 170 32 85 35 7 14 19 31 17 98 0 25 18 up to 750 102 13 78 25 18.5 52 14 21 21 71 32 65.8 80.5 M12 X 1.75 M22 X 1.5 116 204 40 37 11 17 23 37 21 0 40 22 up to 750 92 30 52 14 21 21 72 116 16 20 41 72.8 87.5 M12 X 1.75 M26

VQ4000

12 5 3 1 A B 30 45 14 3 5 1 12 25.6 Mounting hole Manual override 25.6 Mounting hole 30 45 Manual override 14.5 27 30.5 32 41.5 91.5 129 79 PE X PE X 32 41.5 30.5 27 R1 R2 P R2 R1 14.5 P 19.5 19.5 (21) (21) Rc1/8 External pilot port Rc1/8 PE port 19.5 (21) 19.5 (21) 5-Rc (PT)1/4, 3/8 P, A, B, R1, R2 port 5-Rc (PT)1/4, 3/8 P, A, B, R1, R2 port Rc1/8 PE port 31 31 31 31 : 3 position ( ): Rc3

Process Pump

PAF3000/5000 Series Description PAF3000 series PAF5000 series PAF3413 PAF3410 PAF5410 PAF5413 Diaphragm kit KT-PAF3-31 KT-PAF5-31 Check valve kit KT-PAF3-36 KT-PAF5-36 The maintenance procedure is to be distributed individually. Please contact your SMC sales representative for details. Note) One of Nil, F or N is entered as thread symbol.

Brake mechanism added

15 14 9 9 10 10 11 D-B59W 14 14 17 16 18 D-A9 and D-A9V cannot be mounted on 50.

IDX-OM-W014

V 14-1 . 14-1 14-2 . 14-1 14-3 . 14-2 14-4 . 14-2 15 15-1 . 15-1 3 IDX-OM-W014 i i i-1 () 3 i 1 1 3 IDU Series i-1 i-1 IDX-OM-W014 i i-2 5 i 2 1 IDU Series i-2 i-2 IDX-OM-W014 i i 2 2 i 2 3 50 i 2 4 i 2 5 0 IDU Series i-2 i-3 IDX-OM-W014 i i 2 6 WARNING !

Intrinsically Safe Valve

Model Thread size Tightening torque 0.6 lbfft [0.8 Nm] 1.0 lbfft [1.4 Nm] 0.6 lbfft [0.8 Nm] 53-SY5000 53-SY7000 53-SY9000 M3 M4 M3 39 Series 53-SY5000/7000/9000 Specific Product Precautions 3 Be sure to read before handling. Refer to back cover for Safety Precautions and Handling Precautions for SMC Products (M-E03-3) for 3/4/5 Port Solenoid Valves Precautions.

Free Mount Cylinder for Vacuum Series ZCUK

43 27 24 48 34 29 53 43 34 23 14 38 28 14 38 35 20 41 22 12 33 12 33 12. 5 18. 5 AEP 33. 5 39. 5 DQ HQ HP ZC(D)UKD25 ZC(D)UKR25 ZP 14. 5 23. 5 HEP 38. 5 47. 5 DQ HQ HP Related ZC(D)UKD32 ZC(D)UKR32 ZP Equipment 18. 5 50 19. 5 51 60. 5 65. 5 69. 5 Note) ZPU-X11: Flat type only.