ARM10/11

Dimensions 28 IN OUT 58(Max.60) 37 20 22 15 5 34 14 SMC 31 IN OUT 62 O-ring size 4 x 1.5W Holding screw M3 x 0.5 x 20 SMC P K U C S O H L 9 14-4-46 29 Compact Manifold Regulator/Series ARM10/11 Specific Product Precautions 1 Be sure to read before handling. Design & Selection Piping Warning Caution 1. Confirm the specifications.

ARM10/11

Dimensions 28 IN OUT 58(Max.60) 37 20 22 15 5 34 14 SMC 31 IN OUT 62 O-ring size 4 x 1.5W Holding screw M3 x 0.5 x 20 SMC P K U C S O H L 9 14-4-46 29 Compact Manifold Regulator/Series ARM10/11 Specific Product Precautions 1 Be sure to read before handling. Design & Selection Piping Warning Caution 1. Confirm the specifications.

CJ2

(mm) Material: Iron A 15 15 CX 3.2 6.5 BA 12 18 GB 18 23 BB 12 18 H 20 20 CD(cd) 3.3 5 CA 14 20 KA 4.2 5.2 CB 14 20 MM M4 X 0.7 M5 X 0.8 NA 5.5 5.5 NB 22.5 27.5 R 5 8 U 8 10 Part No.

Table of Contents

Note 6) The flow switch is comformed to CE mark. 16-11-17 14 Series PF2W How to Order Remote type Sensor unit PF2W5 20 03 Flow rate range 0.5 to 4 l/min 2 to 16 l/min 5 to 40 l/min 10 to 100 l/min Nil 1 2 04 20 40 11 Output specifications Output for display unit (sensor output) only Output for display unit + Analog output (1 to 5V) Output for display unit + Analog output (4 to 20 mA) Thread

NCA1

, 16, 18, 20 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20, 24 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20, 24, 28 Smooth movements even at 0.4 to 2 inch/sec Auto switch mounting available.

NCA1

, 16, 18, 20 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20, 24 1, 2, 3, 4, 5, 6, 8, 10, 12, 14, 16, 18, 20, 24, 28 Smooth movements even at 0.4 to 2 inch/sec Auto switch mounting available.

C85

(32) 7(32) 15.5 13.5 15 57 57 15.5 13.5 15 82 82 15.5 13.5 15 D-J79C 17 Hs D-A73 D-A80 15 30.5 45.5 16 1 D-F7V D-F7WV D-F7BAVL 7 23 A B 20 25 8 10 12 7.5(32.5) 7.5(32.5) 16 14 15.5 57.5 57.5 16 14 15.5 82.5 82.5 16 14 15.5 15 D-A7H/A80H D-A73C/A80C D-F7/J79 D-F7W/J79W D-F7V D-F7WV D-J79C/A72 D-F7BAL D-F79F Hs 15.5 31 46.5 16 20 25 8 10 12 8(33) 8(33) 14 12 13.5 58 58 14 12 13.5 83 83 14 12

HRX-OM-W002

9.5.1 HRR012-A/W-10-,HRR018-A/W-10-. 9-13 9.5.2 HRR012-A/W-20,HRR018-A/W-20 . 9-13 9.5.3 HRR024-A/W-20,HRR030-A/W-20 . 9-13 9.6 Pump capacity. 9-14 9.6.1 HRR012/018/024/030-A/W. 9-14 9.6.2 HRR012/018-A/W-10-T/MT . 9-14 9.6.3 HRR012/018/024/030-A/W-20-T . 9-15 9.6.4 HRR012/018/024/030-A/W-20-MT . 9-15 9.6.5 HRR012/018/024/030-A/W-20-T1 . 9-16 9.7 Required facility water flow (for water-cooled

A

PT) AL800-14 (1 12 PT) AL900-20 (2 PT) Courtesy of Steven Engineering, Inc. !

CY1

CY1L15, 20, 25, 32, 40 (mm) A B d C D FA FB G H HG HI J JK L EA EB GP HA HB HO HP HS HT LD Model CY1L15 CY1L20 CY1L25 CY1L32 CY1L40 7.5 9.5 12 5 16.6 3 6 6.5 40 16 14 M6 x 1.0 9.5 75 6 13 65 6.5 4 38 39 25 16 5.6 9.5 9.5 16 5.2 21.6 8.5 46 18 16 M6 x 1.0 10 86 80 9 10 44 45 31 20 5.6 9.5 11 16 6.5 26.4 4 7 8.5 54 23 21 M8 x 1.25 10 86 8 14 90 9 18 52 53 39 20 7 10.5 14 20 8 33.6 5 7 9.5

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Applicable shaft type: Y Y = X = X = Long shaft side (mm) (mm) Long shaft side Long shaft side Y Y X X Size Size Body (B) Body (B) 10 10 1 to 14 1 to 14 1 to 14 1 to 14 Body (B) Body (A) Body (A) X = X = 15 15 1.5 to 18 1.5 to 18 1.5 to 18 1.5 to 18 Body (A) Y = Y = 20 20 1.5 to 20 1.5 to 20 1.5 to 20 1.5 to 20 Short shaft side Short shaft side 30 30 2 to 22 2 to 22 2 to 22 2 to 22 Short

CG5-S

14 41 10.5 20 25.6 30 20 12.8 14 IY-G03SUS +0.5 +0.3 +0.058 0 +0.070 0 10 10 18 18 I-G04SUS Y-G04SUS 40 40 M14 x 1.5 42 14 22 30 M14 x 1.5 12 14 42 16 22 41.6 30 36 12 14 IY-G04SUS +0.5 +0.3 +0.5 +0.3 14 14 22 22 I-G05SUS Y-G05SUS 50, 63 50,63 M18 x 1.5 56 18 28 40 M18 x 1.5 16 20 56 20 25 50.6 40 44 16 20 IY-G05SUS +0.070 0 18 18 28 28 I-G08SUS Y-G08SUS 80 80 M22 x 1.5 71 21 38 50 M22 x

Free Mount Cylinder

(mm) DQ HQ HP 4 6 8 10 13 16 20 25 32 40 50 10 16 25 40 6 8 10 13 16 20 25 32 40 50 2.6 4.8 31 12 7 26 10 7 31 12 9 26 10 9 10 10 26 26 2.6 4.8 32 13 7 32 13 9 DQ HQ HP ZP ZC(D)UKD16 ZC(D)UKR16 12 12 31 31 15 12 33 18 16 37 28 20 44 DQ HQ HP 12 18 12 15 36 15 18 20 41 12 16 37 ZC(D)UKD20 ZC(D)UKR20 ZP 12 33 12.5 18.5 33.5 23 14 38 39.5 28 14 38 34 29 53 35 22 27 24 48 DQ HQ HP ZC(D)UKD25

CG5-S

20 25.6 30 M10 x 1.25 20 12.8 14 IY-G03SUS +0.5 +0.3 +0.058 0 +0.070 0 I-G04SUS Y-G04SUS 40 40 10 10 18 18 M14 x 1.5 42 14 22 30 M14 x 1.5 12 14 42 16 22 41.6 30 36 12 14 IY-G04SUS +0.5 +0.3 +0.5 +0.3 I-G05SUS Y-G05SUS 50, 63 50,63 14 14 22 22 M18 x 1.5 56 18 28 40 M18 x 1.5 16 20 56 20 25 50.6 40 44 16 20 IY-G05SUS +0.070 0 I-G08SUS Y-G08SUS 80 80 18 18 28 28 M22 x 1.5 71 21 38 50 M22 x

CQS

(mm) B 22 22 29.5 32.5 B 17 17 19.5 22.5 CL 39.5 40.5 52 57.5 CL 34.5 35.5 42 47.5 CD hole H10 Rod d9 12 16 20 25 5, 10 Bore size (mm) L + Stroke B + Stroke CL + 2 (Stroke) RR CB CD CT CU CW CX CZ L L1 A + 2 (Stroke) 12 16 20 25 14 15.5 18.5 22.5 6 6 9 10 12 14 20 24 5 5 8 10 4 4 5 5 7 10 12 14 14 15 18 20 5 6.5 8 10 10 12 16 20 3.5 3.5 4.5 5 Rod end male thread Double clevis bracket material

ZP

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet y Connection T thread 10 20 30 40 50 04 8 4 10 13 16 A10 27.7 2.5 N S U F GN GS Vacuum inlet: Built-in One-touch fitting Pad diameter: 20 to 50 (Buffer stroke: 20 to 50 st) 06 10 6 J K ZP T F 10 06 31.8 10 6 4.5 08 35.9 14 8 6 20 30 50 20 25 32 40 50 A14 Applicable tubing O.D.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

bytes Output 36 bytes Input 36 bytes Output 36 bytes Input 36 bytes Output 36 bytes Input 4, 10, 20 bytes Output 4, 12, 20, 36 bytes Input 14 bytes Output 22 bytes Terminating resistor Not included Memory EEPROM LED indicator PWR, RUN, ALM, ERR PWR, ALM, MS, NS PWR, ALM, SF, BF PWR, ALM, MS, NS PWR, ALM, COM Cable length [m] Actuator cable: 20 or less Cooling system Natural air cooling Operating

Vacuum System Peripherals:

Check valve: Series AK 13-14-15 Manifold Specification Sheet 1. For ejector system: Series ZX 13-14-18 2. For vacuum pump servies: Series ZX 13-14-19 3. Series ZM 13-14-20 4.

VS 8-2/VS 8-4

Insulation resistance M/km, 20C 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 21 22 23 24 25 5 or more Note) The minimum bending radius of the D-sub connector cables is 20 mm.

JIS Standard Hydraulic Cylinder Series CH2E/CH2F/CH2G/CH2H

17 18 115 35 18 108 60 55 15 15 25 to 1400 63 M12 x 1.5 90 165 63 10 27 19 14 43 35 1/2 52 148 18 50 19 20 132 41 19 106 71 65 15 20 25 to 1500 1/4 stroke 80 M16 x 1.5 110 190 80 11 22 22 16 44 44 3/4 65 166 18 60 24 24 155 45 20 124 74 80 17 20 25 to 1800 The maximum stroke is 1500mm for series CH2G only. 100 M18 x 1.5 135 230 102 11 22 22 18 44 44 3/4 75 172 22 71 27 28 190 53 22 122