ZX

R Right side (PV port on the right side) L Left side (PV port on the left side) 02 2 B Both sides (PV port on both sides) Nil All stations 1 Station 1 only 08 8 1 Viewed from the front side of valve unit, confirm the port location on the right and/or left side. 2 EXH ports are released to atmospheric pressure in both sides.

Pressure Gauge Guide

molybdenum coated Aluminum die-casted Black disulfide molybdenum coated 0 to 0.2 0 to 0.4 0 to 0.7 0 to 1.0 0 to 1.5 8 1 R Back side thread Cover ring assembly G46 4 1 R Page 14-11-6 Polycarbonate MPa 42.5 3 Rolled steel Black melamine painted Brass Vertical side thread 8 1 R GA46 4 1 R 0 to 0.2 0 to 0.3 0 to 0.4 0 to 0.6 0 to 0.7 0 to 1.0 Back side thread G33 30 8 1 R Page 14-11-8 Vertical

SI unit ( device)

ID N EX260-SIL1 0x0014 (20) 0 R Product Text N SI unit 0x0015 (21) 0 R Serial Number N "x" 4 0x0016 (22) 0 R Hardware Revision N HW-Vx.y 5 0x0017 (23) 0 R Software Revision N FW-Vx.y 5 (24) 0 R/W Application Specific Tag Y "* *" 6 0x0018 Refer to page 17 "Device State parameter" for details 0x0024 (36) 0 R Device State N Refer to page 17 "Detailed Device State parameter" for details 0x0025

Vacuum Module Series ZX

ZZX102-R ZX1101-K15LZ-EC-X121 934

SYJ300-OMU0003

SY100-61-2-01 D DIN Assy V115-D V115-Y AC200V 200V SY100-61-2-02 AC110V 110V SY100-61-2-03 V111(G,H,L,M,W)V115-Y(DIN) AC220V 220V SY100-61-2-04 Y DIN SY100-82-1 DC24V 24VN SY100-82-3-05 DC12V 12VN SY100-82-3-06 AC100V 100VN SY100-82-2-01 () AC200V 200VN SY100-82-2-02 AC110V(AC115V) 110VN SY100-82-2-03 AC220V(AC230V) 220VN SY100-82-2-04 AC DC LED R NL R: 12 No.SYJ300-OMU0003

Air Cylinder

7 @0 @1 q o u r t e w y Long stroke 80, 100 r y u u e i Long stroke 1001 to 1500 With air cushion o w !5 !1 !3 !6 !2 !4 !0 !9 @0 !8 !7 @1 @1 @2 q r t e Long stroke Component Parts No. Description Material Note 1 Rod cover Aluminum alloy Hard anodized 2 Tube cover Aluminum alloy Hard anodized 3 Piston Aluminum alloy No.

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

P. 2-3-44 P. 2-3-46 P. 2-3-47 P. 2-3-48 C6 L6 P R D side SMC AN200 U side Individual EXH spacer SSQ1000-R-3Special wiring specifications (-K) Back pressure check valve (-B) SSQ1000-BP Built-in silencer (-S) P. 2-3-49 P. 2-3-45 P. 2-3-46 P. 2-3-47 C6 L6 D-sub connector Terminal no.

CC-Link-E

S. ) Bi t dat a area O u tp u t b i t d ata Bi t dat a area In p u t b i t d ata R Y00 to R Y0B Set val ue of hol di ng pressure f or error N ot e R X00 to R X0F U nused R X10 to R X19 I nval i d ( area of syst em ) RY0C, RY0D U nused RX1A Fl ag f or error RY0E Banned f or use RX1B Rem ot e READ Y R X1C to R X1F I nval i d ( area of syst em ) RY0F 0: RY00 t o RY0B i nval i d dat a 1: RY00

3 Port Solenoid Valve

Leakage voltage When using a resistor in parallel with the switching element or using a C-R element (surge voltage suppressor) for protection of the switching element, note that leakage voltage will increase due to leakage current flowing through the resistor or C-R element.

Vacuum Unit Ejector / Vacuum Pump System

Light/surge voltage suppressor circuit is equipped for the valve type J, K and R.

NCM

(see Note) Note) R mount available on 3/4", 1-1/16", and 1-1/2" only.

HRX-OM-X037

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-14 Connection of RS-232C 3.3.10 Ethernet Modbus/TCP Communication wiring This product can operate the following by Ethernet Modbus/TCP communication.

Digital Flow Switch (Remote type sensor unit)

If using straight entry piping, the material and tubing need to be taken into consideration when deciding panel cut-out spacing. 2 If a bend (R) is used, limit it to R3 or less. 3: Suitable for panel thickness of 1 to 3.2 mm.

AS

Port size With One-touch fitting 01 M5 M5 R 1/8 R 1/4 R 3/8 R 1/2 02 03 04 Needle Valve/Flow Rate Characteristics Note) The flow rate characteristics are representative values.

D

TMH M5 Port size ASD M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 Applicable tubing O.D. Note) Type 01 02 03 04 Inch size Metric size Elbow Universal 2 3 1/8" AS 23 01 3.2 03 05 07 09 11 13 04 06 08 10 12 4 5/32" 6 3/16" Control AS-FE U10/32 N01 N02 N03 N04 8 1/4" Meter-out Meter-in 0 1 10 5/16" Made to Order Refer to the below for details.

ZQ-OM01401

R 3. L 4.

Pressure Switch Pressure Switch with T-Spacer Pressure Switch with L-Piping Adapter Pressure Switch with Piping Adapter

d Mounting position R Left Note 1) A semi-standard product can be selected alphabetically (a to d).

Exhaust Cleaner Series AMC

O R T S I Z E 2 1/4 3 3/8 5 3/4 6 1 8 1 1/2 9 2 02 1/4 03 3/8 04 1/2 06 3/4 10 1 14 1 1/2 20 2 T H R E A D T H R E A D 1 Male 2 Female (Only NAMC220, 320, 520 Special Order Only) R(PT)* Remove (N) when ordering N NPT FOR FURTHER TECHNICAL DETAILS ON THIS PRODUCT, REQUEST CATALOG REFERENCE E5G

PA3000/5000/PAX1000

Option Body material Nil N Body only With silencer 1 2 ADC12 (aluminum) SCS14 (stainless steel) For AIR EXH: AN200-02 Connection port size 1/4 (8A) 3/8 (10A) Diaphragm material 02 03 1 PTFE (fluororesin) Symbol Type of operation Thread type FLUID OUT AIR SUP Nil T F N Rc NPTF G NPT Automatically operated type with built-in pulsation attenuator 2 AIR EXH FLUID IN Built-in pulsation attenuator

Silencer Compact Resin Type/Male Thread Series AN05 to 40

Silencer Compact Resin Type/Male Thread Series AN05 to 40 RoHS How to Order 02 AN 20 Body size Thread connection port size Symbol Port size Symbol Applicable model AN05 AN10 AN15/20 AN30 AN40 Thread type M5 01 02 03 04 05 10 15 20 30 40 M5 x 0.8 M thread 1/8 Nil R 1/4 N NPT 3/8 1/2 Specifications Fluid Compressed air Max. operating pressure Note 1) 145psi (1.0 MPa) 30 dB(A) Note 2) Noise