Air Cylinder NCA1 Series

41 : 1 1/2-12 74 : M14 x 1.75 thread codes and are not all 14 : 1/4-28 42 : 12-24 75 : M14 x 2.0 15 : 5/16-18 43 : 3/8-20 76 : M16 x 1.5 applicable to NCA1 due to rod 16 : 5/16-24 44 : 2 1/2-12 77 : M16 x 2.0 size limitations.

NCA1

41 : 1 1/2-12 74 : M14 x 1.75 thread codes and are not all 14 : 1/4-28 42 : 12-24 75 : M14 x 2.0 15 : 5/16-18 43 : 3/8-20 76 : M16 x 1.5 applicable to NCA1 due to rod 16 : 5/16-24 44 : 2 1/2-12 77 : M16 x 2.0 size limitations.

Table of Contents

Auto switches are shipped together but not assembled. 6 10 16 20 25 32 6 mm 10 mm 16 mm 20 mm 25 mm 32 mm Action D Double acting Port thread type Type M5 x 0.8 Rc1/8 NPT1/8 G1/8 Bore size 6, 10, 16, 20, 25 32 32 32 Symbol Standard stroke (mm) 6, 10, 16 20, 25, 32 5, 10, 15, 20, 25, 30, 40, 50, 60 5, 10, 15, 20, 25, 30, 40, 50, 60, 70, 80, 90, 100 Nil TN TF Applicable Auto Switches/Refer

Digital Flow Switches

220 55 114 89 75 56 M6 x 1 9 50 msec 50 msec PF2A7H-(-M) 68 69 Analog output 1 to 5 VDC 4 to 20 mADC 20 5 Analog output [V] Analog output [V] 1 4 Min. measured flow rate value Max. measured flow rate value Real-time flow rate [l/min] Max. measured flow rate value Real-time flow rate [l/min] Min. measured flow rate value Min. measured flow rate value [l/min] Max. measured flow rate value

48

PE PW Q R S T U VA WA X YY YL Z Nil TN TF Nil TN TF 20 (16 x 2) 4.3 8 3.5 M5 x 0.8 7.5 19 21 10 36 18 66 54 75 15.9 29 M5 x 0.8 7.5 4.5 25 (20 x 2) 4.3 8 4 M5 x 0.8 9.5 22 22 12 38 22 75 60 84 12.7 31 M5 x 0.8 7.5 4.5 32 (25 x 2) 5.4 9.5 5 M5 x 0.8 12.5 23 23 16 44 28 89 70 98 12.7 33 M6 x 1 9 6 40 (32 x 2) 6.7 11 6 Rc1/8 NPT1/8 G1/8 13 16.5 26 27.5 20 43 33 97 71 107 15.3 29

2/3 Port Valve

20 18 21 20 20 22.5 27.5 42.5 47.5 71 80 81 90 21 27 1 4 3 8 4.1-71 Direct Air Operated 3 Port Valve/Manifold Series VVXA31/32 For Air, Gas, Vacuum and Oil Compatible with a wide variety of fluids.

1

20 20 mm 25 25 mm 32 32 mm 40 40 mm For applicable auto switches, refer to the table below.

Large Size Vacuum Module: Series ZR

ZR1-SR2-82-A(a set of four threads) For nozzle size 18, 20 ZR1-SR2-86-A(a set of four threads) For nozzle size 10, 13, 15 For nozzle size 18, 20 Standard (without options) With individual spacer For nozzle size 10, 13, 15 For nozzle size 18, 20 For nozzle size 10, 13, 15 + with function plate For nozzle size 18, 20 + with function plate For nozzle size 10, 13, 15 For nozzle size 18, 20 For

Series VQ Base Mounted Metal Seal/Rubber Seal

64 Single Rubber seal VQ1 5.4 (0.3) 15 or less 20 or less Metal seal VQ1210 3.6 (0.2) 10 or less 13 or less Double Rubber seal VQ1211 5.4 (0.3) 15 or less 20 or less Metal seal VQ1310 3.6 (0.2) 20 or less 26 or less Closed center VQ1000 Rubber seal VQ1311 5.4 (0.3) 25 or less 33 or less 78 Metal seal VQ1410 3.6 (0.2) 20 or less 26 or less Exhaust center Rubber seal VQ1411 5.4 (0.3) 25 or

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

20 20 stations 20 stations PG: Flat ribbon cable connector (20 pins) PH: Flat ribbon cable connector (10 pins) Connector entry direction Note Symbol Note Symbol Stations Stations 1: Perpendicular connector 2: Lateral connector 02 02 2 stations 2 stations Double wiring Double wiring LOCK FREE FREE 08 04 8 stations 4 stations LOCK 02 02 2 stations 2 stations Specified layout (Up to 16 solenoids

Compact Guide Cylinder

TN TF Nil TN TF 20 (16 x 2) 4.3 8 3.5 M5 x 0.8 7.5 19 21 10 36 18 66 54 75 15.9 29 M5 x 0.8 7.5 4.5 25 (20 x 2) 4.3 8 4 M5 x 0.8 9.5 22 22 12 38 22 75 60 84 12.7 31 M5 x 0.8 7.5 4.5 32 (25 x 2) 5.4 9.5 5 M5 x 0.8 12.5 23 23 16 44 28 89 70 98 12.7 33 M6 x 1 9 6 40 (32 x 2) 6.7 11 6 Rc1/8 NPT1/8 G1/8 13 16.5 26 27.5 20 43 33 97 71 107 15.3 29 M8 x 1.25 10 7.1 7 Compact Guide Cylinder

Fieldbus system EtherCAT compatible SI Unit

(AXB cannot select the following ranges. -10..10 V/ -5..5 V/ -20..20 mA) -5..5 V -10..10 V -20..20 mA (AXA) Sets the analogue input device range. 0..10 V 2 Analogue input range Channel 0..5 V 1..5 V (AXB) 1..5 V 0..20 mA 4..20 mA Offset binary Offset binary. Sign & Magnitude Signed binary.

Fluoropolymer Tubing Variations

How to Order Burst pressure drop curve 1.0 TL0604 Metric sizes 20 Burst pressure drop coefficient 0.8 TIL01 20 Inch sizes 0.6 Length Applicable to both metric and inch size Tubing Model 0.4 Symbol 10 20 50 100 Type Length 10 m 20 m 50 m 100 m 0.2 Roll 0 20 40 60 80 100 120 140 160 180 200 220 240 260 Temperature (C) Straight 2 m 2S Length Applicable to inch size only Eluting fluorine ion

EXxx-OMQ0016

4 to 20 Scale upper limit -32766 to 32767 10 5 5 20 20 Scale lower limit -32767 to 32766 0 1 0 0 4 If the data format is scaled data format, set the Fault Value as follows, regardless of the range setting.

PF2A/PF2W

220 55 114 89 75 56 M6 x 1 9 50 msec Analog output 1 to 5 VDC PF2A7H--68 69(-M) 4 to 20 mADC 5 20 Analog output [mA] Analog output [V] 1 4 Min. measured flow rate value Min. measured flow rate value Max. measured flow rate value Real-time flow rate [l/min] Max. measured flow rate value Real-time flow rate [l/min] Minimum measured flow rate value [l/min] Maximum measured flow rate value [

Air Preparation Equipment Degrees of quality Max. particle diameter ( µ m) Min. pressure dew point ( ° C) Max. oil density (mg/m 3 ) International Standard ISO 8573-1: 1991 Degrees of Quality Japanese Industrial Standard JIS B 8392-1: 2000 Degrees of Qual

AT37C-14 AFF37B-14 IDF37C1-3 AM650-14 AMD650-14 55 7.5 HAW75-20 AT55C-20 IDF55C-3 AM850-20 AM850-20 AMD850-20 75 10.0 HAW110-30 AT75C-20 IDF75C-3 AMD850-20 110 15.0 AT125C-30 AFF125A-30 IDF120D-3 AMD910-30 150 20.0 AT150C-40 AFF125A-30 IDF120D-3 AMD910-30 220 30.0 AT220C-40 AFF220A-40 IDF150D-3 50 Hz area 60 Hz area IDF1D-1 IDF2D-1 IDF3DIDF4DIDF6DIDF8DIDF11CIDF15CIDF22C1-3 IDF22C1

SZ3000

Symbol 02 Stations Symbol 02 Stations 2 stations 2 stations Connector mounting position Double wiring specifications (1) Double wiring specifications 10 02 11 02 10 stations 11 stations Mounting position Symbol D 2 stations 2 stations Specified layout (2) (Up to 21 solenoids possible) D side Specified layout (Up to 22 solenoids possible) 20 20 20 stations 20 stations PG: Flat ribbon cable

SZ3000

Symbol 02 Stations Symbol 02 Stations 2 stations 2 stations Connector mounting position Double wiring specifications (1) Double wiring specifications 10 02 11 02 10 stations 11 stations Mounting position Symbol D 2 stations 2 stations Specified layout (2) (Up to 21 solenoids possible) D side Specified layout (Up to 22 solenoids possible) 20 20 20 stations 20 stations PG: Flat ribbon cable

VZ5000

One-touch fitting for 8 SUP/EXH block mounting position C8 Stations M 02 20 2 stations For 20 stations Mixed 20 stations Nil For 2 to 10 stations : One side (Same as direction of connector mount) For 11 to 20 stations: Both sides In the case of mixed specifications (M), indicate separately on the manifold specification sheet. 20 For 2 to 10 stations: Both sides Special specifications

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

50 20 7 15 7.