HRX-OM-I051

4.5 System Startup and Shutdown . 4-5 4.5.1 System startup . 4-5 4.5.2 System shutdown . 4-5 Chapter 5 System Operation . 5-1 5.1 Operation Display Panel . 5-1 5.2 Flow Chart of Operation Screen. 5-2 5.3 Operation Screen . 5-3 5.3.1 Model Indication screen . 5-3 5.3.2 Status screen 1 . 5-3 5.3.3 Status screen 2 . 5-4 5.3.4 Status screen 3 . 5-4 5.3.5 Status screen 4 . 5-5 5.3.6 Menu screen

CE

9t@5 @6 #0@1q!1w#1#0@2@9#1@1 40 to 63 @4@0@8oiu@3!1#1#2@8@4!2@7!3#3r!4@6!6e #7 #6 !5 !9t@5 @6 y#0@1w#0#5!7#4q@9@2!8#1#2!7#5#4@1 Parts list Parts list Description Material Note No. No.

CV/MVGQ

5 !6 !7 !8 !

0.55

Applicable manifold base model VP300-25-1A VV3P3 Blanking plate assembly (With a gasket and two mounting bolts) VP500-25-1A VV3P5 VP700-25-1A VV3P7 VV3P3-41-051-02 VV3P5-42-053-03 How to Order Manifold Assembly (Example) Ordering example (VV3P3-41) VP344-5GZ1-B VP344-5GZ1-A VP300-25-1A Stations 3 2 1 D side U side VV3P3-41-051-02 1 set (Type 41, 5-station manifold base part no.)

ML1C

5 5 5 7 28 26 14 44 20 16 12.5 120 42 8 D1/ 8 6 5 6 5 8 36 28 18 54 36 18 12.5 140 48 8 1/ 4 30.5 6 5 6 5 8 47 17 62 30 22 16.5 170 51 10 -X 1113 ML1C Series Stroke Adjustment Unit EA EB EC ED EF EY S T EH EI TT h i Part no.

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

10 15 0 5 10 15 20 25 0 5 10 15 20 Vertical L7 Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 800 800 800 600 600 600 Z 400 400 400 200 200 200 Mep m 0 0 0 0 5 10 15 0 5 10 15 20 25 0 5 10 15 20 L8 Work load [kg] Work load [kg] Work load [kg] Calculation of Guide Load Factor Mounting orientation 1.

Air Slide Table Series MXW

moment) Moment MXW25 120 70 (Static moment/Dynamic moment) Allowable Moment MXW25 70 100 50 Maximum moment (Nm) Maximum moment (Nm) 30 40 (Nm) 50 MXW20 25 30 40 Pitch moment Yaw moment Roll moment MXW20 20 Model Mp/Mep My/Mey Mr 15 MXW16 20 MXW16 12 10 15 5 5 3 MXW8 7 10 MXW12 MXW12 10 10 6 MXW12 4 5 7 5 4 3 20 20 12 MXW16 MXW8 MXW8 3 2.5 40 40 25 MXW20 2 2 1.5 50 100 200 300 500 110 110

Compact Guide Cylinder Series MGQ

17 19 21 25 E DB A 50 st or less 53 54 60 61 84 89 Bore size (mm) Bore size (mm) 32 40 50 63 80 100 MGT A DB E M8 x 1.25 Over 50 st 90 90 102 102 143 153 50 st or less 5.5 0 4 0 9.5 5 Over 50 st 42.5 36 46 41 68.5 69 M10 x 1.5 32 40 50 63 80 100 20 20 25 25 28 36 24 17.5 25 20 18.5 21 71.5 71.5 81 81 93 105 16 16 20 20 25 30 M10 x 1.5 M12 x 1.75 M14 x 2 Note) For intermediate strokes other

Pilot Operated

COM. 2 to 10 10 to 25 1.5 to 4 N.C./N.O. 1/8 to 1/2 N.C.

3

Operating Range (mm) Auto switch model Bore size 12 16 20 25 32 40 50 63 D-M9/M9V D-M9W/M9WV D-M9A/M9AV D-A9/A9V 6.5 5 5 5 5.5 5 4 3 11 9.5 9.5 9 9 10 7.5 6 D-F7/J79 D-F7V/J79C D-F7W/F7WV D-J79W D-F79F/F7BA D-F7BAV/F7NT 7.5 6.5 6.5 6 6 6 Since this is a guideline including hysteresis, not meant to be guaranteed (assuming approximately 30% dispersion).

JA/JAH/JB/JS

32, 40 50, 63 80 100 125, 140 160 12 16 20 25 40 63 80 100 140 160 3-050 4-070 5-080 6-100 8-125 10-150 16-200 20-250 22-250 24-300 Precautions 2.

JA/JAH/JB/JS

size (mm) Nominal thread size Applicable cylinder nominal thread size M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1 M8 x 1.25 M10 x 1.5 M16 x 2 M20 x 2.5 M22 x 2.5 M24 x 3 12 16 20 25 32, 40 50, 63 80 100 125, 140 160 12 16 20 25 40 63 80 100 140 160 3-050 4-070 5-080 6-100 8-125 10-150 16-200 20-250 22-250 24-300 Precautions 2.

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

(A port) 2 5 2.5 21 2 10 5 46.9 (GZ, GS: 47.6) [48.6] 10.7 10 5 P R P R 25 26 A A A A A 2-3.5 (Lead wire length) 4-M5 X 0.8 (Mounting holes) (P/R port) G: 300 H: 600 L2 3.5 L1 Manual override Depress and turn to operate and lock override.

CXT

20 15 10 2 pcs. 10 10 25 to 5 20 15 5 1 pc. 10 10 25 CXTl25 5 15 10 10 2 pcs. 10 15 20 CXTl 32 40 5 15 10 5 1 pc. 10 10 20 (mm) D-F7lW D-J79W D-F9BAL D-F7NT D-F79F Auto switch model D-A7l D-A8l D-A73C D-A80C D-A7lH D-A80H D-F7l D-J79 D-F7lV D-J79C Applicable model D-F7lWV D-A79W D-F7LF Number of mountings 2 pcs. 5 10 15 15 20 20 25 CXTl 32 40 1 pc. 5 5 10 15 15 20 25 3.8-10 Platform Cylinder

Vacuum Unit

ZK2 (Ejector System) 100 90 80 70 60 50 40 30 20 10 0 0 5 10 15 20 25 30 Suction flow [L/min (ANR)] 0.5 40 Release flow [L/min (ANR)] Vacuum pressure [kPa] Supply pressure [MPa] 0.4 0.35 0.3 30 20 0.2 10 0 0 1 2 3 4 5 6 7 8 9 10 Needle opening [Number of rotations] The actual suction flow at the point of suction varies depending on the piping conditions to the vacuum port.

Rotary Cylinder Series MRQ

5 !6 !7 !8 !

MGC

CGIA20-PS CGIA25-PS CGIA32-PS CGIA40-PS CGIA50-PS Contents @4 @5 Flat nickel plated Metallic gold Rolled steel Cast iron Note 1) Common with cushion ring A: Except standard 20 and 25 Note 2) Common with cushion packing A: Except standard 20 and 25 Note 3) In the case of the one without rear plate, @5 and #9 will not be required.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

center/pressure center 5 (EA) 1 (P) 3 (EB) 5 (EA) 1 (P) 3 (EB) 3 position pressure center (A) 4 (B) 2 4 (A) 5 (EA) 1 (P) 3 (EB) 2 (B) 5 (EA) 1 (P) 3 (EB) Parts list 2 position single with back pressure check valve Material Note Description No.

Thermo-chiller/Rack Mount Type

15 20 25 0 0 10 5 15 20 25 Circulating fluid flow rate [L/min] Circulating fluid flow rate [L/min] 34 HRR Series Options have to be selected when ordering the thermo-chiller.

Compact Cylinder with Air Cushion Series RQ

10 mm DBore size (mm) CW CX CZ L L1 RR -X 20 RR CW CU 5 B + Stroke L 18 16 4.5 18.5 9 8 +0.4 +0.2 CX CZ 25 20 20 5 22.5 10 10 Individual -X 0.1 0.3 CL + Stroke A + Stroke Double clevis pins and retaining rings are included in the package.