Thermo-con/Rack Mount Type

Overcurrent protector 10 A 14 A Current consumption 5 A (100 V) to 2.5 A (240 V) 9 A (100 V) to 4 A (240 V) 10 A (100 V) to 4 A (240 V) 8 A (200 V) Power consumption 440 W*1 850 W*1 900 W*2 1500 W*2 Alarm Refer to Alarm.

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

(mm) Stroke (mm) Vacuum entry direction Vertical Male thread M18 x 1.5 M18 x 1.5 M22 x 1.5 (Rc, NPT, NPTF) 100, 125 25, 50, 75, 100 40 to 80 25, 50, 75 Mounting Connection ZX 40, 50 63, 80 100, 125 0 stroke 6.9 N 11.8 N Full stroke 0 stroke 10 N 15 N Full stroke Thread dia.

Compact Cylinder with Solenoid Valve/

of the rated voltage DC Power consumption 0.35 (With light: 0.4) W Bore size Standard stroke 5, 10, 15, 20, 25, 30, 35 40, 45, 50, 75, 100 5, 10, 15, 20, 25, 30, 35 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35 40, 45, 50, 75, 100 10, 15, 20, 25, 30, 35 40, 45, 50, 75, 100 Surge voltage suppressor Diode (Non-polar: Varistor) 32 1 Indicator light LED Note) The S and Z types of surge voltage

MK

Operating range RB Model C 8 8 8 8 D 50 60 50 60 75 85 75 85 85 95 75 85 95 130 100 130 Mounting bolt M3 x 50l M3 x 60l M3 x 50l M3 x 60l M5 x 75l M5 x 85l M5 x 75l M5 x 85l M5 x 85l M5 x 95l M5 x 75l M5 x 85l M6 x 95l M6 x 130l M8 x 100l M8 x 130l MKB12-10 MKB12-20 MKB16-10 MKB16-20 MKB20-10 MKB20-20 MKB25-10 MKB25-20 MKB32-10 MKB32-20 MKB40-10 MKB40-20 MKB50-20 MKB50-50 MKB63-20 MKB63-50

IIIIIIIIII

FLOW CAPACITY . 10-32 port 1/8" NPT port 2.0 CFM (56 LPM) with supply 10 PSI above set-point 2.3 CFM (65 LPM) with supply 10 PSI above set-point Operating characteristics are influenced by flow and outlet restriction Part Number Description S-5200-10S-5200-30S-5200-60S-5200-1000-10 PSI, 10-32 ports 0-30 PSI, 10-32 ports 0-60 PSI, 10-32 ports 0-100 PSI, 10-32 ports XX XX XX XX 0-10 PSI, 1/

Valve Mounted Guide Cylinder Series MVGQ ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 Valve, Speed Controller, and Cylinder are formed into one unit. Easy piping wiring work for Valve, Speed Controller and Cylinder can be formed into one unit, furthe

Minimum Stroke for Auto Switch Mounting (mm) 12 16 20 25 32 40 50 63 80 100 Auto switch model No. of auto switches mounted 1 pc. 10 5 D-A9 2 pcs. 15 10 D-A9V D-M9V 1 pc. 5 2 pcs. 10 1 pc. 15 10 5 D-M9 2 pcs. 15 10 1 pc. 15 10 D-M9W 2 pcs. 15 10 1 pc. 10 D-M9WV 2 pcs. 10 D-Z7 D-Z80 1 pc. 10 5 2 pcs. 15 10 D-Y59 D-Y7P 1 pc. 5 10 2 pcs. 15 10 D-Y69 D-Y7PV 1 pc. 5 2 pcs. 5 D-Y7W D-Y7WV 1 pc.

33

Cooling Capacity HRSE012-A-10-(T) [50 Hz] [60 Hz] 1600 1400 1600 Ambient temperature Ambient temperature 0 200 400 600 800 1000 1200 1400 25C Cooling capacity [W] Cooling capacity [W] 25C 600 800 1000 1200 HRS HRS 090 35C 35C 0 200 400 HRS 100/150 0 10 20 30 40 0 10 20 30 40 HRSH 090 Circulating fluid temperature [C] Circulating fluid temperature [C] HRSH HRSE018-A-10-(T) [50 Hz] [60 Hz]

2–4

-30 -35 -40 -45 -50 -75 -100 CDQMB50-10 -15 -20 -25 -30 -35 -40 -45 -50 -75 -100 CDQMB12-5 -10 -15 -20 -25 -30 CDQMB16-5 -10 -15 -20 -25 -30 CDQMB20-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 CDQMB25-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 CDQMB32-5 -10 -15 -20 -25 -30 -35 -40 -45 -50 -75 -100 30 35 40 45 50 55 30 35 40 45 50 55 35 40 45 50 55 60 65 70 75 80 40 45 50 55 60 65 70 75 80 85 40 45 50

SL5200

0.03 10 0.07 5 0.00 0 0.00 0 0 20 40 60 80 100 120 Flow rate (slpm, N2) 0 1 2 3 4 5 6 7 8 9 10 Flow rate (slpm, N2) Hastelloy is a registered trademark of Haynes International.

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

MTS12-100 st 100 st 75 st 75 st 0.1 50 st 25 st 50 st 25 st 0 50 100 5 10 Lateral load (N) Lateral load (N) 40 16 0.3 0.3 MTS40-200 st 175 st 150 st 0.2 0.2 125 st 100 st 75 st 75 st MTS16-100 st 50 st 0.1 0.1 50 st 25 st 25 st 0 50 100 150 10 Lateral load (N) Lateral load (N) 20 0.5 Caution on Design MTS20-200 st 175 st 150 st Caution 1.

Booster Regulator/Air Tank

V 10 T = t x = 7.7 x = 77 (s). V 10 T = t x = 2.4 x = 24 (s). V 10 10 10 100 10 100 10 1012 Booster Regulator VBA Series VBA43A VBA11A Pulsation/Pulsation is decreased with a tank. If the outlet capacity is undersized, pulsation may occur.

Electric Actuator / Low profile slider type

Condition 1) 30mm position Step no.0 Step no.0 (Move Method: Relative) Condition 2) 30mm position Step no.1 Step no.1 (Move Method: Relative) mm/s mm mm/s2 mm/s2 % % mm/s % mm mm mm 0 Relative 100 10.00 3000 3000 0 0 0 100 10.00 20.00 1.00 1 100 3000 3000 0 0 0 100 Relative -10.00 10.00 20.00 1.00 Position 10(INC) c Attainment point: 50[mm] 0 10 20 30 40 50 Stroke [mm] Position -10(INC

Compact Cylinder Series CQS

Attachable on 4 sides (20, 25) Attachable on 3 sides (12, 16) Auto switch CUJ CU CQS Bore size (mm) Stroke (mm) Page CQ2 Standard stroke Long stroke 12 16 5, 10, 15, 20 25, 30 5, 10, 15, 20 25, 30 5, 10, 15, 20, 25 30, 35, 40, 45, 50 Standard 20 25 5, 10, 15, 20, 25 30, 35, 40, 45, 50 RQ Single rod CQS Double acting Double acting 551 35, 40, 45, 50, 75, 100 125, 150, 175, 200 75, 100, 125

HRL

-Am-20 (CH1) HRL100-Am-20 (CH1) 0.6 0.6 60 60 0.5 0.5 50 50 Circulating fluid outlet Circulating fluid outlet 0.4 0.4 40 40 Usable flow rate range Usable flow rate range 0.3 0.3 30 30 0.2 0.2 20 20 Circulating fluid return port 0.1 0.1 10 10 Circulating fluid return port 0 0 0 0 0 10 20 30 40 50 60 70 80 90 100 110 120 0 10 20 30 40 50 60 70 80 90 100 110 120 130 Pump Circulating fluid Pump

Process Valve Series VNA

(mm) 1 8 1 4 1 8 1 4 1 8 1 4 3.1 80 5.6 100 8.2 115 2 60 3.1 80 5.6 100 8.2 115 2 60 3.1 80 5.6 100 8.2 115 2 60 Equivalent size Note 1) No freezing Note 2) This product cannot be used for water applications.

CE2

NBR NBR NBR NBR NBR NBR NBR NBR $7 $8 $9 %0 %1 %2 %3 %4 10-12-52 10 Stroke Reading Cylinder with Brake CE2 Accessory Dimensions: Rod End Nut RE A B Material: Rolled steel REC Applicable bore size (mm) 40 50, 63 80 100 D C B H d Part no.

Electric Rotary Table

1000 10 0 100 200 300 400 500 Angular acceleration/deceleration: (/s2) Angular speed: (/s) LER30 LER30 0.030 1.4 LER30K High torque 1.2 0.025 LER30K High torque Moment of inertia: (kgm2) Effective torque: T (Nm) 1.0 0.020 0.8 LER30J Basic 0.015 LER30J Basic 0.6 0.010 0.4 0.005 0.2 0.000 0.0 100 1000 10 0 100 200 300 400 500 Angular acceleration/deceleration: (/s2) Angular speed: (

Slider Type/Ball Bushing Bearing

CY1H25 (Nm) 64 56 50 40 30 50 40 M1 1.5 10 13 M2 2.5 16 16 M3 1.5 10 13 M1 28 56 64 M2 26 85 96 M3 28 56 64 Model CY1H25 CY1HT25 CY1HT32 Model CY1H10 CY1H15 CY1H20 30 28 26 20 20 CY1H20 CY1H15 16 13 Moment Nm Moment Nm 10 10 2 2.5 3 4 5 3 4 5 CY1H10 M3 2 CY1H10 1.5 1 1 0.5 0.5 70 100 300 500 100 300 500 1000 1000 70 M1 M2 Piston speed mm/s Piston speed mm/s Graph (3) Graph (2) Moment generated

Modular Design with Uniform Body Style

70 0.01 2 40 6000 100 40 0.1 3 90 1000 20 1 4 10 +3 5 5 10 +7 6 0 < Cp 5 +10 7 5 < Cp 10 Cw 0.5 8 0.5 < Cw 5 9 5 < Cw 10 x Cp > 10 Cw > 10 > 5 [How to Perform a Test to Check the Performance] ISO 12500, which sets out the test method to be used in order to check the filter performance for each of the three kinds of contaminants, is indicated below.

CE2

For Safety Instructions and Actuator Precautions, refer to page 10-24-3 to 10-24-6. Allowable Kinetic Energy Diagram Refer to the diagram and select again. Caution Beginning Sensor 200 100 200 NO Is the cylinder's kinetic energy within the allowable range?