Vacuum System Peripherals:

Voltage type 0 to 5 VDC Voltage type 0 to 10 VDC Preset input 20 Output pressure (kPa) Nil B Without bracket Flat bracket L-bracket 30 40 C Option 50 Monitor output Thread type Port size Option 60 2 1/4 0 Without (In the case of preset input) Analog output 1 to 5 VDC Switch output/NPN output Switch output/PNP output Analog output 4 to 20 mA DC 70 Nil Rc NPT NPTF G 1 80 N 2 T 90 3 50 100 150

For Dry Air, Pilot Operated Series VQ20/30 2 Port Solenoid Valve

0.5 MPa Max. oparating pressure 7.2mm2 (Cv0.4/3) C6 C10 14.4mm2(Cv0.8/4.3) Effective area (Cv/Effective orifice) 9mm2 (Cv0.5/3.4) C8 C12 17.5 mm2(Cv1/4.8) 13.8 6 Body orifice Valve Solenoid Response time (1) 20ms or less 5ms or less 30cps 100cps Max.oparating frequency (2) 10 to 50 C Ambient and fluid temperature VQ20 Not required Lubrication Locking style (Slotted) (3) Manual override 150

Series VCS

Seal material PTFE (FKM) Ambient temperature 20 to 100C (-4 to 212F) 184C (363F) or less (PTFE), 120C (248F) or less (FKM) Note 1) Fluid temperature Enclosure Dust proof, Splash proof (equivalent to IP65) Environment Location without corrosive or explosive gases Valve leakage cm/ min 300 (PTFE), 0.1 (FKM) with air Mounting orientation Unrestricted Vibration/Impact resistance m/s Note 2) 30/150

Shuttle Valve/AND Valve with One-Touch Fittings

Flow Rate and Effective Area VR1211F Model 6 4 3.2 Metric size Applicable tubing O.D. 1/4" 5/32" 1/8" Inch size 170 (6.0) 150 (5.3) 120 (4.2) 100 (3.5) Flow rate l/min ANR (SCFM) INOUT 2.6 (0.14) 2.3 (0.13) 1.8 (0.1) 1.5 (0.08) Effective area mm (Cv) Note 1) Flow rate values are at a pressure of 0.5MPa (72 psi) and temperature of 20C (68F).

VXA21/22

0.16 2.8 0.19 3.4 2.2 230 0.24 0.6 0.33 6 VXA3235-00 150 4.3 3 0.3 4 0.5 9 VXA3245-00 230 Note 1) OAdd the V type (VXA31) 80g, (VXA32)130g.

ZPT/ZPX

30 to 200 0 to 60 0 to 250 20 to 150 X X X X The above table covers only general characteristics of subject rubber materials.

NVEPA|VEFseies

Prassuro 1s0 PSIG (9.9 Kgflcm ) Prool Pr333ure 225 PSIG (15 Kgr cm ) Amblnl Temp. 40 120"F (5 50"C) Responsg Tlme 30 ms Max. 50 ms Max. 30 ms Max. 50 ms Max, Hysteresls 3% F.S. Repeatablllty 3/. Sensitivity o.5/.

Speed Controller: Standard Type Large Flow In-line Type AS Series

L3 (1) Model Port size Max. 1 4 1 2 120 150 AS800 AS900 74 93 204 262 192 250 80 94 1 1 , 2 Note 1) L3: Reference dimensions Note 1) L3: Reference dimensions 655

Vacuum Pad

SMC vacuum pad Search http://www.smcworld.com Catalogs ZP2 ES100-76 ZP3 ES100-100 Best Pneumatics Pad diameter Symbol 16 18 20 25 30 32 40 46 50 63 80 100 125 150 250 300 340 U C C C C C C MU EU AU C C C C C C C UM UT C ( ( CT C C B C C C C C Note) Note) J ( ( ( MB ( ZJ ( ( D C C C AN Note) Note) Note) MT ( ( ( W U H C C C C C C ( ( ( HT ( ( HB C C C C ( C C ( 30 x 50 ( HW U ( ( ( (

Pulse Valve

Dimensions [mm] Model Port size P A (B) (C) (E) (F) (G) H J K L M JSXFAE-06 3/4 74 76 113 54 83 54 25.4 41.3 25.4 18.8 JSXFAE-10 1 94 90 137 82 120 65 33.3 44.4 38.1 31.6 JSXFAE-14 1 1/2 126 117 178 92 170 139 80 51.3 50.7 45 33 7 Pulse Valve Valve for Dust Collector JSXFA Series Dimensions: JSXFAF/Direct Piping Type Port size: Sizes 06, 10 A A A A Pilot port 1/8, 1/4 (Rc, NPT, G) Pilot

Series AP3100

Wetted Parts Material S 316L SS secondary remelt Electropolish + Passivation 316L SS PCTFE (Option: Vespel) Wetted Parts Body Surface finish Diaphragm Seat Vespel is a registered trademark of DuPont. 120 Diaphragm Valve for Ultra High Purity Manually operated type (For high flow) Series AP3800 & 3900 AZ AK KT BP Diaphragm Valves Check Valves Vacuum Generators Flow Switches Technical Data/

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

L3 (1) Model Port size Max. 1 4 1 2 120 150 AS800 AS900 74 93 204 262 192 250 80 94 1 1 , 2 Note 1) L3: Reference dimensions Note 1) L3: Reference dimensions 531 Speed Controller: Standard Type In-line Push Locking Type Series AS RoHS Model/Specifications Lock speed setting, with the touch of a button It can be locked only by pushing the handle after adjustment.

60 C)7-120 (0.05~0.83)AC2A-FADCAC2A-FAC2A-F9.92 (4.5)?

60 C)7-120 (0.05~0.83)AC2A-FADCAC2A-FAC2A-F9.92 (4.5)?

10 to 50C35 to 85%RH (with no condensation)1500 VAC for 1 min. between external terminals and FG10 M or more (500 VDC) between external terminals and FG10 to 150 Hz with a 0.35 mm amplitude or 49 m/s2 in each X, Y, Z direction for 2 hrs (De-energized)98 m/s2 in each X, Y, Z direction, 3 times (De-energized)CE marking, UL (CSA)120 g

10 to 50C35 to 85%RH (with no condensation)1500 VAC for 1 min. between external terminals and FG10 M or more (500 VDC) between external terminals and FG10 to 150 Hz with a 0.35 mm amplitude or 49 m/s2 in each X, Y, Z direction for 2 hrs (De-energized)98 m/s2 in each X, Y, Z direction, 3 times (De-energized)CE marking, UL (CSA)120 g

1 1/2220 (1.5)150 (1.0)23~140 F (-5 ~ 60 C)7-120 (0.05~0.83)AC2A-FADCAC2A-FAC2A-F5.51 (2.5)?K50A-MP1.0-N02M (0~160 psig) Std. NAR O 25K50A-MP2.0-N02M (0~30 psig) Std. NAR O 35

10 to 50C35 to 85%RH (with no condensation)1500 VAC for 1 min. between external terminals and FG10 M or more (500 VDC) between external terminals and FG10 to 150 Hz with a 0.35 mm amplitude or 49 m/s2 in each X, Y, Z direction for 2 hrs (De-energized)98 m/s2 in each X, Y, Z direction, 3 times (De-energized)CE marking, UL (CSA)120 g

EX600-SEN7_8eng

Safety cannot be assured in the case of unexpected malfunction. : This switch can be enabled and disabled by parameter. 10 to 57 Hz constant amplitude 0.75 mm p-p 57 to 150 Hz constant acceleration 49 m/s2 for 2 hours each in direction X, Y and Z respectively (De-energized) Vibration resistance Diagnostic mode setting switch: Allocates the diagnostic data to the input data.

EX600-SPN3_4.eng

Electrical 9 Unit connector (Plug) Connector for signals and power supplies to adjacent units. 24 VDC Class 2, 2 A Power supply for Output 10 Connector (PORT1) Connector for the fieldbus communication cable. 120 mA or less Internal current consumption (Power supply for Control/Input) Seal cap Fitted to unused connector.