Rotary Actuator/Vane Style Series CRB2

Refer to pages 69, 70 and 79 for details.

LEH_C

100% 10 , 16 20 , 25 540 40% 100% 2150 80% 100% 1120 60% 100% 10L , 16L 510 50% 100% 3150 70% 100% 20L , 25L 520 40% 100% 2130 50% 100% [mm/sec] () 2130 50% 100% 520 40% 100% [mm/sec] () 4150 50% 100% 540 40% 100% 3150 80% 100% 1130 60% 100% 510 40% 100% 22 - 150% LEHZJ 1) (SVON ) 2)CN1 EMG() a)SVRE SETONON SVRE OFF SETON ON b) SVREON SVREON c) SVREON

Air Slide Table Series MXW

moment) Moment MXW25 120 70 (Static moment/Dynamic moment) Allowable Moment MXW25 70 100 50 Maximum moment (Nm) Maximum moment (Nm) 30 40 (Nm) 50 MXW20 25 30 40 Pitch moment Yaw moment Roll moment MXW20 20 Model Mp/Mep My/Mey Mr 15 MXW16 20 MXW16 12 10 15 5 5 3 MXW8 7 10 MXW12 MXW12 10 10 6 MXW12 4 5 7 5 4 3 20 20 12 MXW16 MXW8 MXW8 3 2.5 40 40 25 MXW20 2 2 1.5 50 100 200 300 500 110 110

New

For Air 1.0 Downstream pressure of valve (P2) [MPa] Upstream pressure of valve P1z1.0 MPa 0.8 Subsonic 0.9 0.6 Critical pressure 0.8 0.7 Sonic 0.4 0.6 0.5 0.4 0.2 0.3 0.2 0.1 0 3/64 (1.2) 50 100 150 3/32 (2.4) 100 200 300 400 1/8 (3.2) 300 200 100 400 500 600 700 5/32 (4) 200 1, 000 800 400 600 7/32 (5.6) Series VXN2 250 500 7/32 (5.6) Series VXN3 500 1, 000 1, 500 2, 000 Flow rate Q [L/min

MXW

(Roll moment) Moment MXW25 120 70 (Static moment/Dynamic moment) Allowable Moment MXW25 70 100 50 (Nm) 30 40 Maximum moment (Nm) Maximum moment (Nm) 50 MXW20 25 30 40 Roll moment Pitch moment Yaw moment MXW20 20 Model Mr Mp/Mep My/Mey 15 MXW16 20 MXW16 12 10 15 3 5 5 MXW8 7 10 MXW12 MXW12 2 10 10 MXW12 4 5 7 5 4 3 12 20 20 MXW16 MXW8 MXW8 3 2.5 25 40 40 MXW20 2 2 1.5 50 100 200 300 500 65

CE

MVGQ CC RB Cylinder Stroke J Standard stroke (mm) Manufacturable stroke range 25 DModel 100 75 50 -X CEP1B12 0 to 150 CEP1B20 0 to 300 20But, as for stroke over 100 mm, its accuracy will be 0.05 mm.

CE

MVGQ CC RB Cylinder Stroke J Standard stroke (mm) Manufacturable stroke range 25 DModel 100 75 50 -X CEP1B12 0 to 150 CEP1B20 0 to 300 20But, as for stroke over 100 mm, its accuracy will be 0.05 mm.

Refrigerated Air Dryer

Applicable dryer Capacity Model Inlet voltage Outlet voltage A B C D E F Weight (kg) 200, 220 230, 240 VAC (50 Hz) 200 to 260 VAC (60 Hz) 100 VAC (50 Hz) 100 to 110 VAC (60 Hz) Single phase Single turn IDF-TR500-2 IDF1E-10 to 8E-10 IDU3E-10, 4E-10 500 VA 118 140 150 70 112 142 6 IDF-TR500-3, 4 C VOLUTAGE SELECTOR FUSE B OUT PUT IN PUT E D 4-F A Input cord 2 m Transformer part no.

Stopper Cylinder Series RSQ Series RSG (Fixed mounting (Adjustable height) mounting height)

RS1H63 200 200 0.9 Operating pressure P [MPa] 0.8 100 100 0.7 0 0 10 20 30 40 10 20 30 40 0.6 Transfer speed [m/min] = 0 Transfer speed [m/min] = 0.1 0.5 0.4 Graph e Graph r Bore size 20, 32/ = 0 Bore size 20, 32/ = 0.1 0.3 0.2 0.1 80 80 5000 0 1000 2000 3000 4000 32 Lateral load F [N] 70 70 60 60 Load mass m [kg] Load mass m [kg] 50 50 32 40 40 30 30 20 20 20 20 10 10 10 20 30 40 10

Stroke Reading Cylinder and Counter

SET MODE SD SG RD RS-232C COM S.STOP OUT1OUT2OUT3OUT4OUT5 100 to 240 VAC 1 t 1 10 x 106 100 kHz Counting speed f = = = 10 Hz 7 10 4 x 4.5 33.5 104 BCD output connector 2) UP/DOWN input Input wave form conditions: At a maximum of 100 kHz, the UP/DOWN wave form should be as shown below. 125 +12 V 10% UP pulse +12 V 10% DOWN pulse 64 59 3) 15 mA when BCD is output (Refer to page 676.) 668

CE

MVGQ CC RB Cylinder Stroke J Standard stroke (mm) Manufacturable stroke range 25 DModel 100 75 50 -X CEP1B12 0 to 150 CEP1B20 0 to 300 20But, as for stroke over 100 mm, its accuracy will be 0.05 mm.

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

Operating Pressure and Operating Temperature Specifications ZFC5 Model ZFC7 Max. operating pressure [MPa] 1.0 Metric size Inch size 12 10 3/8" 8 5/16" 6 1/4" 6 1/4" 4 5/32" Port size (Applicable tubing O.D.) 0.8 Fluid Operating pressure Air, Nitrogen 100 kPa to 1.0 MPa 0.6 Flow rate (Positive pressure) L/min Note) 350 100 300 80 250 70 120 30 100 20 45 10 0.4 Flow rate (Vacuum pressure)

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

MX MTS 0 10 20 30 40 50 60 70 80 90 100 110 120 130 140 150 160 170 180 190 MY With stroke adjuster for auto switches Stroke adjuster CY 10 Three types (rubber stopper, metal stopper, shock absorber) are available.

Step Motor Controller (Servo/24 VDC) Incremental / Battery-Less Absolute Encoder compatible

Move Speed Position Accel Decel PushingF TriggerLV PushingSp Moving F Area1 Area2 In posn mm/s mm mm/s2 mm/s2 mm/s mm mm mm 0 ABS 100 20.00 1000 1000 0 0 0 100 18.00 22.50 0.5 1 ABS 50 10.00 1000 1000 70 60 5 100 6.0 12.0 1.5 63 ABS 20 5.00 500 500 0 0 0 100 3.0 8.0 1.2 Caution Writing of the step data should be performed while the electric actuator is stopped. 39 - Details of step data

High performance type Step Motor Controller (Servo/24 VDC)

Move Speed Position Accel Decel PushingF TriggerLV PushingSp Moving F Area1 Area2 In posn mm/s mm mm/s2 mm/s2 mm/s mm mm mm 0 ABS 100 20.00 1000 1000 0 0 0 100 18.00 22.50 0.5 1 ABS 50 10.00 1000 1000 70 60 5 100 6.0 12.0 1.5 63 ABS 20 5.00 500 500 0 0 0 100 3.0 8.0 1.2 Caution Writing of the step data should be performed while the electric actuator is stopped. 37 No.JXC-OMY0002-A Details

Pneumatic Purification

Note: AMG does not remove water vapour & air leaving AMG is 100% saturated. Where dehumified air (ie. RH<100%) is required an SMC dryer is recommended. Heavy Duty Auto Drain Model ADH 4000-N04 Minimum operating pressure 8psi. Maximum operating pressure 145psi. Maximum discharge 400cc/operation.

VCL

VC (1) Fluid temperature (C) 10 to 60 (No freezing) 10 to 100 Dusttight, Low jetproof (equivalent to IP65) Enclosure VDW Environment Location without corrosive or explosive gases VQ Valve leakage (cm3/min) 0 (with oil pressure) Mounting orientation Unrestricted VX2 (3) 30/150 or less Vibration/Impact resistance (m/s2) 24, 12 VDC, 100, 110, 200, 220, 230 VAC (50/60 Hz) 100, 200, 220, 230

Valve Single Unit

Nil Rc Blanking plate assembly G F N NPT NPTF T B 26 53.8 70 C 51 80.8 97 A Effective area 14 mm2 Series SX3000 (8) Model AN203-KM8 AN200-KM10 AN300-KM10 16 26 mm2 22 SX5000 (10) 30 mm2 25 Series Assembly part no. SX3000-75-1A SX5000-76-5A SX3000 SX5000 Plug These are inserted in cylinder ports or SUP/EXH ports which are not being used.

Mini Free Mount Cylinder

Volume is reduced by up to approx. 70%.

Magnetic Separator FHM Series

dimensions 055 55 x t20 100 200 100 x t30 200 x 140 x t40 Magnetic separator Magnetic separator Fluid Iron Content Elimination Performance by Iron Particle Concentration FHMN-055 FHM-100 FHM-200 Fluid: Hydraulic fluid Fluid: Hydraulic fluid Fluid: Hydraulic fluid 100 90 80 70 60 50 40 30 20 10 0 1 5 10 50 100 100 90 80 100 90 80 70 60 50 40 30 20 10 0 100 200 300 400 500 100 200 300 400 500