Sine Rodless Cylinder Series REBR Direct Mount Type

Model determination 61 Series REBR Model Selection 2 Design Parameters 1 Selection Method REBR25 REBR32 REBR15 500 400 300 200 300 200 Allowable driving force Fn (N) Load weight W (kg) Allowable driving force Fn (N) Allowable driving force Fn (N) 50 100 100 40 30 40 50 20 30 40 50 30 20 20 Usable range 10 10 10 Usable

ISO/VDMA Cylinder: Standard Type Double Acting, Single/Double Rod Series C95 ø32, ø40, ø50, ø63, ø80, ø100

Standard Stroke Standard stroke (mm) Bore size (mm) Max. stroke 32 700 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 40 800 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 50 1200 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 Made to Order Specifications (For details, refer to page 6-17-19.) 63 1200 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 80 1400 25, 50,

Modular F.R.L. Units

50 100 150 200 Flow rate L/min (ANR) Flow rate L/min (ANR) AFM30-A AFD30-A P1=0.5MPa 0.04 0.04 P1=0.7MPa P1=0.3MPa P1=0.5MPa P1=0.3MPa 0.03 Pressure drop MPa Pressure drop MPa 0.03 P1=0.7MPa 0.02 0.02 P1=0.5MPa P1=0.3MPa P1=0.5MPa P1=0.3MPa 0.01 0.01 P1=0.7MPa P1=0.7MPa 0 0 0 0 50 100 150 200 100 200 300 500 400 600 Flow rate L/min (ANR) Flow rate L/min (ANR) AFM40-A AFD40-A P1=0.5MPa P1

Information

VAC (50/60 Hz), 115 VAC (60 Hz) Single-phase 200 to 230 VAC (50/60 Hz) CE/UL HRS018 1700/1900 (50/60 Hz) HRS024 Single-phase 200 to 230 VAC (50/60 Hz) 2100/2400 (50/60 Hz) Air-cooled refrigeration HRS050 New Scheduled for 2011 4700/5100 (50/60 Hz) Single-phase 200 to 230 VAC (50/60 Hz) UL standards: Applicable to 60 Hz only 1 Thermo-chiller Series HRS Compact Type (Except HRS050) RoHS

HRX-OM-X010

Table 7-1 Water Quality Standards for Fresh Water (Tap Water) Substance Facility water Circulating water spec. spec. pH (25 deg C) 6.5 to 8.2 6.0 to 8.0 Electrical conductivity (25 deg C) (s/cm) *Circulating fluid 1 to 500 100 to 800 0.5 to 300 Chloride ion (mgCl-/L) Max. 200 Max.50 Sulfate ion (mgSO42-/L) Max.200 Max.50 Acid consumption (pH4.8) (mgCaCO3/L) Max.100 Max.50 Total hardness (

High Vacuum L Type Valve

H 4 S y m b o l Initial power / Power 100 VAC 200/40 200/50 400/100 200 VAC 800/40 800/50 800/100 consumption (W) Heater assembly number XLA25-60S-1 XLA25-60S-2 XLA25-60S-2 XLA25-60S-3 No. of heater assemblies 1 pc. 1 pc. 1 pc. 1 pc.

CG5-S

stroke for mounting auto switches 25 301 to 400 32 301 to 450 Number of auto switches Model 40 301 to 800 25, 50, 75, 100, 125, 150, 200, 250, 300 D-G5BAL 2 pcs. 1 pc. 50, 63 301 to 1200 15mm 10mm 80 301 to 1400 Refer to page 15 for details. 100 301 to 1500 Note 1) All non-standard strokes are produced upon receipt of order.

Power Valve: Economy Valve Series VEX5

Cylinder Speed Chart Bore size Series CS1/CS2 Pressure 0.5 MPa, Load factor 50% Cylinder stroke 300 mm Average velocity (mm/s) System 125 140 160 180 200 250 300 1000 Vertically upward movement Horizontal movement 900 800 700 600 500 400 300 200 100 0 A 800 900 1000 700 600 500 400 300 200 100 0 B 900 1000 800 700 600 500 400 300 200 100 0 C 800 900 1000 700 600 500 400 300 200 100 0 D 800

REC

*Calculation example: REC32-200 Basic weight 0.90 (Foot style 32) Additional Weight 0.09/50 stroke Cylinder stroke 200 stroke 0.90+0.09 X 200/50=1.26kg Auto Switch Mounting Bracket (including band and screw) Applicable auto switch Bore size (mm) 20 25 40 32 D-C73, D-C76, D-C80 D-C73C, D-C80C Reed BMA2-020 BMA2-032 BMA2-025 BMA2-040 D-H7B, D-H7C, D-H7A1, D-H7A2 D-H7NW, D-H7PW, D-H7BW D-H7LF

How to Order MB Series ø 32, ø 40, ø 50, ø 63, ø 80, ø 100, ø 125 Air Cylinder: Standard Type Double Acting, Single Rod

V A93 V V V V Reed auto switch No 100 V or less A90 V V IC circuit Grommet Relay, PLC Yes 100 V, 200 V A54 V V V No 200 V or less A64 V V 2-wire 24 V 12 V A33 Terminal conduit Yes 100 V, 200 V A34 PLC DIN terminal A44 Relay, PLC Diagnostic indication (2-color indicator) Grommet A59W V *1 Water resistant type auto switches can be mounted on the above models, but in

ISO Cylinder: Standard Double Acting, Single/Double Rod Series C96 ø32, ø40, ø50, ø63, ø80, ø100, ø125

, 125, 160, 200, 250, 320, 400, 500 40 1900 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500 50 1900 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 63 1900 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600 80 1900 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 100 1900 25, 50, 80, 100, 125, 160, 200, 250, 320, 400, 500, 600, 700, 800 2000 125 Intermediate

3 Port Solenoid Valve

kPa to 0.6 100 kPa to 0.6 100 kPa to 0 100 kPa to 0 100 kPa to 0 100 kPa to 0 100 kPa to 0.6 100 kPa to 0.6 N.C.

Ejector Valve Unit, Series ZYY/ZYX

Exhaust Characteristics/Flow Rate Characteristics Y3 X3 ZY -07L Max. vacuum pressure: 53KPa {400mmHg} Y3 X3 ZY -07S Max. vacuum pressure: 84KPa{630mmHg} Exhaust characteristics Flow rate characteristics Exhaust characteristics Flow rate characteristics 50 50 -100 -100 -100 -100 Vacuum pressure Suction flow rate l/min(ANR) Air consumption flow rate l/min(ANR) Suction flow rate l/min(ANR)

CG5-S

stroke for mounting auto switches 25 301 to 400 32 301 to 450 Number of auto switches Model 40 301 to 800 25, 50, 75, 100, 125, 150, 200, 250, 300 D-G5BAL 2 pcs. 1 pc. 50, 63 301 to 1200 15mm 10mm 80 301 to 1400 Refer to page 15 for details. 100 301 to 1500 Note 1) All non-standard strokes are produced upon receipt of order.

Rotary Actuator/Vane Type

Operating range and hysteresis How to change the auto switch detecting position Auto switch mounting Auto switch adjustment D53 CRB2 Series Volume [cm3] Vane type Single vane Double vane Size 10 15 20 30 40 10 15 20 30 40 Rotating angle 90 180 270 90 180 270 90 180 270 90 180 270 90 180 270 90 100 90 100 90 100 90 100 90 100 Volume 1 (0.6) 1.2 1.5 1.5 (1.0) 2.9 3.7 4.8 (3.6) 6.1 7.9 11.3

CG1

JIS symbol Double acting Minimum Strokes for Auto Switch Mounting Stroke Long stroke (2) (mm) Max stroke (mm) Number of switches Bore size (mm) Standard stroke (1) (mm) Auto switch model 2 1 D-C7/C8 D-B5/B6 D-H7 D-G5/K5 25, 50, 75, 100, 125, 150, 200 201 to 350 20 15mm 10mm 301 to 400 25 301 to 450 32 25, 50, 75, 100, 125, 150, 200, 250, 300 20mm 15mm 1500 301 to 800 40 D-B59W 301 to 1200

HRX-OM-X084

Table 8-1 Quality criteria for clean water (tap water) Item Unit Criterion Circulating fluid Facility water pH (at 25 oC) 6.0 to 8.0 6.5 to 8.2 Electric conductance (at 25 oC) [S/cm] 100 to 300 100 to 800 Chloride ion [mg/L] 50 or less 200 or less Standard Sulfuric acid ion [mg/L] 50 or less 200 or less item Acid consumption (at pH 4.8) [mg/L] 50 or less 100 or less Total hardness [mg/L]

XLA- ∗ -F7NJ ∗ - ∗ Series

H 4 S y m b o l Initial power / Power consumption (W) 100 VAC 200/40 200/50 400/100 200 VAC 800/40 800/50 800/100 Heater assembly number XLA25-60S-1 XLA25-60S-2 XLA25-60S-2 XLA25-60S-3 No. of heater assemblies 1 pc. 1 pc. 1 pc. 1 pc.

OMR0031

Controller USB cable Communication 120.3 120.3 mm mm 200 200 mm/s mm/s (type A to mini-B) cable 100 500 100 500 1 1 200 1000 200 1000 2 2 50 200 50 200 3 3 CN3 PC (PC is prepared by the user.) 20 - 4.4 CN4: Counter connector (option) Connect the controller to the Multi-counter (CEU5) using the counter cable (LATH3-). Refer to section 6.2 Counter plug wiring (P.24).

Vacuum Ejector Series ZM

Output1: Red, Output 2: Green) 3 rotations 200 degrees 17 mA or less (When 24 VDC is ON) 17 mA or less (When 24 VDC is ON) 3 rotations 3 rotations 200 degrees 200 degrees 25 mA or less (When 24 VDC is ON) 10 mA or less(24 VDC) 24 V or less:50 mA Max. current 48 V:40 mA, 100 V:20 mA Max. operating pressure 0.2 MPa 0.5 MPa When using ejector system, instantaneous pressure up to 0.5 MPa will