V

P Q R S 4 4 20.6 15.6 10.4 6 6 21.6 16.6 12.8 F L AT T Y P E F L AT W I T H R I B Y Model A B C D E F G H I Flat Flat with Rib ZPR20 20 23 14 29 39.8 57.6 68.6 91.5 102.6 4 1.7 ZPR25 25 28 14 29 39.8 57.6 68.6 91.5 102.6 4 1.8 ZPR32 32 35 14.5 29.5 40.3 58.1 69.1 92 103.1 4.5 23 D E E P T Y P E Model A B C D E F G H I Y ZPR25D 25 28 20 35 45.8 63.6 74.6 97.6 108.6 10 A P P L I C A B L E T

VQ7-6/7-8

How to Find the Flow Rate (at air temperature of 20C) Subsonic flow when P1 + 0.1013 < 1.89 (P2 + 0.1013) Q = 226S P(P2 + 0.1013) Sonic flow when P1 + 0.1013 1.89 (P2 + 0.1013) Q = 113S (P1 + 0.1013) Q: Air flow rate [l/min (ANR)] S: Effective area (mm) P: Differential pressure (P1-P2) [MPa] P1: Upstream pressure [MPa] P2: Downstream pressure [MPa] Correction for different air temperatures

VQZ100/200/300

Note 3) Weight without sub-plate 2.10-6 VQZ100/200/300 Body Ported Construction VQZ100 Poppet e w q Component Parts SY Material No. q Description Notes N.C. Resin Body SYJ (A) 2 Aluminum/NBR Spool valve w Pilot valve VK e 1 (P) 3 (R) VQZ100-12A Resin/Aluminum P, R plate r r VZ VT VQZ200/300 VT Metal seal Rubber seal VP r e w q r e w q VG VP VQ VQZ N.C. N.C.

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

VZ (A) 2 (A) 2 VS 3 (R) 1 (P) 3 (R) 1 (P) r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts Material Description Notes No.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

Note 3) Weight without sub-plate 1.12-7 VQZ1000/2000/3000 Body Ported Construction: VQZ1000/2000/3000 Metal seal Rubber seal e w q r e w q r 2 position single 2 position single (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) e w q r e w q r 2 position double 2 position double (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) e w q e w q 4 r 3 position pressure

XL

XLGV/With solenoid valve Q Port R (exhaust port) N N With double solenoid P K M L (mm) L 6.5 6.5 6.5 11 11 11 K 9 9 9 11 11 11 N 14 Model K L M N P Q M 17 15 2 6 Q 16.5 16.5 17.5 28 29 29 P Model XLGV-16 XLGV-25 XLGV-40 XLGV-50 XLGV-63 XLGV-80 3 3 3 6.5 6.5 6.5 16 With single solenoid Port P (pressure port) 29 26 32 45 Other dimensions are the same as XLG. 19 Series XLD, XLDV Smooth Exhaust

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

0 o q o !0 q t t r r u u i i y w y Meter-in type Meter-out type !1 w Meter-in type Meter-out type Seal method: Face seal For G thread e !0 o q t r u i y w !2 Meter-in type Meter-out type Component Parts No.

reduces flow setting time

2 q !5 q t t r u u i i r y y w !6 w Meter-in type Meter-out type Meter-out type Meter-in type Seal method: Face seal For G thread e o !3 !1 !0 !4 !2 !5 q t u i r y !7 w Meter-in type Meter-out type Component Parts No.

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

2 q !5 q t t r u u i i r y y w !6 w Meter-in type Meter-out type Meter-out type Meter-in type Seal method: Face seal For G thread e o !3 !1 !0 !4 !2 !5 q t u i r y !7 w Meter-in type Meter-out type Component Parts No.

Speed Controller with One-touch Fitting

0 q r !2 ASD q t AS y !3 r t AS-FE u w i KE i o AS-FG y !0 u AS-FP w e AS-FM Meter-in type Meter-out type !4 !1 Meter-in type Meter-out type AS-D Seal method: Sealant For R, NPT thread Seal method: Sealant For R, NPT thread AS-T e !1 ASP !0 o q r ASN !2 t AQ q w ASV r y AK u t VCHC i i ASR ASQ !

CJP

B C E G H K MM NN 5 st 10 st F 15 st R 5 st 10 st S 15 st W Q 5 st 10 st Z Bore size (mm) 6 10 15 A 15 st M3 x 0.5 3.5 3 8.5 9 41.5 26.5 34.5 19.5 27.5 12.5 3 6 32.5 13.9 25.5 12 18.5 7 M10 x 1.0 9 M4 x 0.7 3.5 5 12 46 28 39 21 32.5 14.5 4 6 34 22 27 19 20.5 10 M15 x 1.5 13 12 M5 x 0.8 4.2 6 14 50 29 43.5 22.5 37.5 16.5 5 7 36 31 29.5 27 23.5 12 M22 x 1.5 20 19 6-2-16

MY1

(A) Black zinc chromated MY-16B-stroke (B) Nickel plated MY-16BW-stroke 4 Series MY1W Dimensions: 16, 20 L (LL) 4-MM with depth M 4-B counterbore with depth C LD through hole bottom side J with depth K PA YW PB QW LW 2 x 2-M5 x 0.8 (Hexagon socket head plug) PG Q + Stroke M5 x 0.8 (Hexagon socket head plug) M5 x 0.8 (Port) W CH LH RR SS NE RR SS H QQ NH NC This port is not available for

Compact Cylinder with Air Cushion

Standard type (through hole, double end tapped common)/RQB, RDQB 2-M5 x 0.8 (port size) 2-cushion needle 2 x 4-9 depth of counter bore 7 H thread effective depth C E1 E2 Q F 4-5.4 through D M E 1 Flat washer 4 pcs.

Air Cylinder Series CS1 ø125, ø140, ø160, ø180, ø200, ø250, ø300 1

For details, refer to page 6-16-39. 6-9-30 31 Air Cylinder: Low Friction Type Double Acting, Single Rod Series CS1Q Non-lube: 125, 140, 160 How to Order CJ1 Without auto switch L Q 160 300 JR CJP CS1 CJ2 L Q 160 300 JR Y7BW CDS1 With auto switch CM2 Number of auto switches CG1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200

CJP

B C E G H K MM NN 5 st 10 st F 15 st R 5 st 10 st S 15 st W Q 5 st 10 st Z Bore size (mm) 6 10 15 A 15 st M3 x 0.5 3.5 3 8.5 9 41.5 26.5 34.5 19.5 27.5 12.5 3 6 32.5 13.9 25.5 12 18.5 7 M10 x 1.0 9 M4 x 0.7 3.5 5 12 46 28 39 21 32.5 14.5 4 6 34 22 27 19 20.5 10 M15 x 1.5 13 12 M5 x 0.8 4.2 6 14 50 29 43.5 22.5 37.5 16.5 5 7 36 31 29.5 27 23.5 12 M22 x 1.5 20 19 6-2-16

Lock-Up Valve IL201/211/220 Series

9 q q !7 !7 IN OUT IN1 OUT1 !0 !6 !3 o !3 q !8 !6 IN2 OUT2 !8 !7 !6 o IL220 !3 r e !2 w u y i !9 !5 @1 OUT IN1 !1 q @2 @0 IN2 !4 q Component Parts Replacement Parts No. Description Material Note 1 Body Aluminum alloy Silver baking finish Model Order no. Contents IL201 KT-IL201 Set of left nos. u, i, o, !2, !3, !6, !7, !8, !9 IL211 KT-IL211 Set of left nos. u, i, o, !0, !2, !3, !6, !7, !

90

w e OUT side passage IN side passage y u t OUT IN i o Basic type (Knob): IR30l0-A e e r q r w e OUT side passage IN side passage t u OUT IN o i Basic type (Knob): IR30l1 2-A e e r q r w e OUT side passage IN side passage t u OUT IN o i 800 Precision Regulator IR1000-A/2000-A/3000-A Series Dimensions Basic type (Knob): IR10l0-01l-A 10.5 42 ARJ 1.6 Bracket AR425 to 935 Mounting hole for hexagon

3-Screen Display High-Precision Digital Pressure Switch Air 1.0 MPa/1.6 MPa ISE70 ISE71

When used as a switch output device Setting of NPN open collector 2 outputs Setting of PNP open collector 2 outputs Brown DC(+) q Brown DC(+) q Load Black OUT1 r Black OUT1 r Load Main circuit Main circuit + + 12 to 24 VDC 12 to 24 VDC White OUT2 w White OUT2 w Load Load Blue DC() e Blue DC() e When used as an IO-Link device Brown L+ q L+ Black C/Q r Main circuit C/Q IO-Link master White

Residual Pressure Release Valve

with a push button guard: KEB Release time S Release time of pressure in the cylinder Body (Red) Residual pressure release push button (Red) VCHC D With One-touch fitting without a push button guard Release button (Blue) Release button (Blue) ASR ASQ D L1 Q B A D 8 4.2 Applicable tubing W (mm) M M L2 L2 Applicable tubing Weight (g) Model Applicable tubing O.D. 6 8 10 12 D L1 L2 Q W M KEB06

44

Construction e q r q q Principal Parts Material No.