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Minimum Stroke for Auto Switch Mounting (mm) No. of auto switches mounted 2 Different sides Auto switch model Same side n Different sides 1 Same side D-C7 D-C80 15 50 50 + 45 (n 2) 10 n 2 2 15 + 45 ( ) (n = 2, 4, 6) D-H7 D-H7W D-H7BAL D-H7NF 15 60 60 + 45 (n 2) 10 D-C73C D-C80C D-H7C n 2 2 15 + 50 ( ) (n = 2, 4, 6) 65 + 50 (n 2) 15 65 10 n 2 2 D-B5 D-B64 15 + 50 ( ) (n = 2, 4, 6) 15

Minimum Stroke for Auto Switch Mounting (mm) No. of auto switches mounted 2 Different sides Auto switch model Same side n Different sides 1 Same side D-C7 D-C80 15 50 + 45 (n 2) 50 10 n 2 2 15 + 45 ( ) (n = 2, 4, 6) D-H7 D-H7W D-H7BAL D-H7NF 15 60 + 45 (n 2) 60 10 D-C73C D-C80C D-H7C n 2 2 15 + 50 ( ) (n = 2, 4, 6) 65 + 50 (n 2) 15 65 10 n 2 2 D-B5 D-B64 15 + 50 ( ) (n = 2, 4, 6) 15

LU0 (N) LD1 (N) LU1 (N) LD2 (N) LU2 (N) SDF SDH SDJ1 SDJ2 SDQ SDR1 SDR2 SDV L kit Lead wire kit with 0.6 m cable Note 3) Lead wire kit with 1.5 m cable 1 to 12 stations Lead wire kit with 3.0 m cable Lead wire kit NKE Corp.: Fieldbus System NKE Corp.: Fieldbus H System S kit 1 to 8 stations 16 Panasonic Industrial Devices SUNX Co., Ltd.: S-LINK (16 output points) Panasonic Industrial

X Port size) Speed controller System figure System Solenoid valve SYJ7l40-01 Rc(PT)1/8 (S = 12.6mm2) AN110-01 (S = 35mm2) 4 X 1/8 AS2301F-01-04 A 02 03 AS3301F-06 6 X 1/4 B q 02 03 AS3301F-08 SYJ7l40-02 Rc(PT)1/4 (S = 12.6mm2) 8 X 1/4 C AN200-02 (S = 35mm2) 02 03 AS3301F-10 10 X 1/4 D 12 X 1/4 12 X 1/2 AS4001F-12 w E 1.2-53 Series SYJ7000 How to Order Light and surge voltage suppressor

Port size N M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 Needle Valve/Flow Characteristics AS121FG AS131FG AS221FG-01 AS231FG-01 AS221FG-02 AS231FG-02 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 07, 08, 09, 10, 11 05, 06, 07, 08, 09, 10 Flow rate (/min (ANR)) Flow rate (/min (ANR)) Flow rate (/min (ANR)) Effective area (mm2) Effective area (mm2) Effective

W a r n i n g Only people who have sufficient knowledge and experience are allowed to replace seals. The person who disassembles and reassembles the cylinder is responsible for the safety of the product. C a u t i o n When replacing seals, carefully handle parts to prevent injury to your hands or fingers on the corners of parts. 13 3-2-1.

S I O N S P I S T O N R O D C L E V I S D I M E N S I O N S M O U N T I N G N U T B C D Part No Bore Size A 0.65 0.13 3/8-24UNF NSNP-P006 6 (1/4) 0.56 0.79 0.16 1/2-20UNF NSNP-P010 10 (3/8) 0.69 0.86 0.19 9/16-18UNF NSNP-P015 15 (5/8) 0.75 B C D Part No Bore Size A 0.11 0.36 5-40UNC JM-005 6 (1/4) 0.31 0.43 0.13 10-32UNF JM-02 10 (3/8) 0.38 0.43 0.13 10-32UNF JM-02 15 (5/8) 0.38 F ND E B

For the specifications of D-M9, please refer to SMC Information '02-E500. Rail mounting Lead wire (m) Load voltage Direct mounting Indicator Applicable load Special function Type Electrical entry Wiring (Output) Pre-wired connector AC 12 to 100 32 to 100 DC 3 (L) 5 (Z) None (N) 0.5 (Nil) Perp. In-line Perp. In-line 3-wire (Equiv.

N L1 L2 L3 L4 L5 L6 P Q1 Q2 M KRM12-06-02-10 KRM12-06-02-6 99 10 6 6 89 47 1 4 17 19.5 33.5 23.5 33 13.5 8.5 13 19 10 125 6 108 10 55 73 106 104 KRM12-08-03-10 KRM12-08-03-6 3 8 8 19 139 11.5 22.5 37.5 26 36.5 10 15.5 20.5 14.7 86 126 119

D 3B (90) ORIENTATION N N OUT IN 250 DRAIN Rc3/8 Standard Models (mm) Maximum operating pressure Element length (L) Internal volume (L) IN/OUT Flange standard Weight (kg) N (Port size) A B C D Model 15 (1/2B) 185 380 447 467 15 20 (3/4B) 250 2 185 380 450 470 15 25 (1B) 185 385 467 487 15 JIS 10KFF 1 MPa FGC1 15 (1/2B) 185 645 712 732 19 20 (3/4B) 500 3 185 645 715 735 19 25 (1B) 185 650

Switch for Vacuum Specifications) B C D J K P L W (without supply/release valve, without switch, pressure sensor) KJR KJRN L to L3 C to L3 06 P 560 56 P to J N 00 i Optional Specifications/Functions/Applications Note 19) Q 08 Type Function/Application Symbol Nil L to N A 07 ZK2 07 Without option B 10 09 Bracket P to N C to N With one bracket for mounting a single unit (Mounting screw is

Type Applicable model HEC001-W5l-N HEC003-W5l-N HEC006-W2l-N HEC012-W2l-N Watercooled Option symbol L With Level Switch L HEC With level switch This switch is used to detect a LOW level of tank fluid. When the fluid level becomes below the LOW level, ERR20 is displayed and the Thermo-con stops. This switch is installed in the circulating fluid tank and built into the Thermo-con.

Number of auto switches [mm] Number of auto switches 1 2 n Auto switch model Different surfaces Same surface Different surfaces Same surface D-M9m 25 25 40 20 + 35 (n 2) 2 (n = 2, 4, 6)*1 55 + 35 (n 2) (n = 2, 3, 4, 5) D-M9mW 25 25 40 20 + 35 (n 2) 2 (n = 2, 4, 6)*1 55 + 35 (n 2) (n = 2, 3, 4, 5) D-M9mA 25 25 40 25 + 35 (n 2) 2 (n = 2, 4, 6)*1 60 + 35 (n 2) (n = 2, 3, 4, 5) D-M9mV

Bore size [mm] (Pressure receiving diameter) 4 6 10 16 20 Operating pressure range [MPa] Mass of moving parts [g] 4 8 24 62 103 Thrust control standard [N] 0.01 to 8 0.03 to 19 0.08 to 50 0.20 to 140 0.30 to 200 Stroke [mm] 0.001 to 0.7 10 (Excluding the mass of moving parts) 1170 (Metal Seal Type/Single Acting) /4, 6, 10, 16, 20 control range of 0.01 N to 200 N Application Examples: For

(12) 0 R/W Device Access Locks N Refer to page 17 "Device Access Locks" for details 0x000C 0x0010 (16) 0 R Vendor Name N SMC Corporation 0x0011 (17) 0 R Vendor Text N www.smcworld.com EX430-SIL1_in/out_ 0/4 byte_COM3 (It depends on switch setting 3) 0x0012 (18) 0 R Product Name N 0x0013 (19) 0 R Product ID N EX430-SIL1 0x0014 (20) 0 R Product Text N SI unit 0x0015 (21) 0 R Serial Number N

(12) 0 R/W Device Access Locks N Refer to page 17 "Device Access Locks" for details 0x000C 0x0010 (16) 0 R Vendor Name N SMC Corporation 0x0011 (17) 0 R Vendor Text N www.smcworld.com EX260-SIL1_in/out_ 0/4 byte_COM3 (It depends on switch setting 3) 0x0012 (18) 0 R Product Name N 0x0013 (19) 0 R Product ID N EX260-SIL1 0x0014 (20) 0 R Product Text N SI unit 0x0015 (21) 0 R Serial Number N

AS2201FE-01, AS2211FE-01 AS2301FE-01, AS2311FE-01 AS2201FE-02, AS2211FE-02 AS2301FE-02, AS2311FE-02 AS3201FE, AS3211FE AS3301FE, AS3311FE Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa AS-F Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) Flow rate (L/min (ANR)) TMH ASD AS AS-FE AS-FE Number of needle rotations Number of needle rotations Number of needle rotations

Hysteresis mode GPM gal (US) OFF n-1 n-2 GPM = gal (US)/min High flow rate Note 1) For the type with unit switching function [The type without the unit switching function will have a fixed SI unit (l/min or l).] "n" H (fixed hysteresis) = 3 digits H H ON Window comparator mode NO OFF n-1 n-2 High flow rate 5 Series PFA Flow Rate Setting Flow rate setting mode (manual) 1.